CN209158002U - A furnace barrel polishing mechanism - Google Patents
A furnace barrel polishing mechanism Download PDFInfo
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- CN209158002U CN209158002U CN201821604015.9U CN201821604015U CN209158002U CN 209158002 U CN209158002 U CN 209158002U CN 201821604015 U CN201821604015 U CN 201821604015U CN 209158002 U CN209158002 U CN 209158002U
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Abstract
本实用新型公开了一种炉筒抛光机构,其包括升降平台、固定打磨抛光机头和摆动打磨抛光机头,所述固定打磨抛光机头和所述摆动打磨抛光机头安装在所述升降平台的左右两侧;其中,所述固定打磨抛光机头水平固定安装在所述升降平台的一侧;所述摆动打磨抛光机头通过摆动臂安装在所述升降平台的另一侧,并通过支撑驱动装置驱使至少可在水平位置和竖立位置范围内摆动。本实用新型的炉筒抛光机构的结构和运行稳定可靠,适用于筒类反应炉的加工,可避免打磨死角,一次吊装就能够实现打磨、机械抛光和电化学抛光三种工序。
The utility model discloses a furnace barrel polishing mechanism, which comprises a lifting platform, a fixed grinding and polishing head and a swinging grinding and polishing head, wherein the fixed grinding and polishing head and the swinging grinding and polishing head are mounted on the lifting platform The left and right sides of the machine; wherein, the fixed grinding and polishing head is horizontally and fixedly installed on one side of the lifting platform; the swinging grinding and polishing head is installed on the other side of the lifting platform through a swing arm, and is supported by a support The drive device drives at least a horizontal position and an upright position to oscillate. The furnace barrel polishing mechanism of the utility model is stable and reliable in structure and operation, is suitable for the processing of barrel type reaction furnaces, can avoid grinding dead corners, and can realize three processes of grinding, mechanical polishing and electrochemical polishing in one hoisting operation.
Description
技术领域technical field
本实用新型属于抛光设备技术领域,具体涉及一种炉筒抛光机构。The utility model belongs to the technical field of polishing equipment, in particular to a furnace barrel polishing mechanism.
背景技术Background technique
目前,多晶硅的生产采用还原技术,该过程是在还原炉内完成的,三氯氢硅被氢气还原生成硅和氯化氢。在还原反应过程中,会产生多种杂质,特别是炭黑,炭黑附在还原炉内壁上,一方面会使原本具有热反射功能的镜面炉内壁污染,使热量无法实现反射,降低了热能利用率;另一方面,炭黑等杂质还会腐蚀内壁。由于生产过程中产生的多种问题,为了提高生产效率,并且降低电能损耗,在生产一段时间后,就需要对还原炉的内腔进行打磨抛光作业,使还原炉内腔恢复光洁。At present, the production of polysilicon adopts reduction technology, which is completed in a reduction furnace. Trichlorosilane is reduced by hydrogen to form silicon and hydrogen chloride. In the process of reduction reaction, various impurities will be produced, especially carbon black, which is attached to the inner wall of the reduction furnace. Utilization; on the other hand, impurities such as carbon black will corrode the inner wall. Due to various problems in the production process, in order to improve production efficiency and reduce power consumption, after a period of production, it is necessary to grind and polish the inner cavity of the reduction furnace to restore the inner cavity of the reduction furnace to a smooth finish.
常规来说,打磨、抛光炉内壁通常是由人工来完成的,劳动强度较大,且费时费力。申请号为CN201110096759.0(公开号为CN102180468A)的中国专利公开了“多晶硅还原炉及多晶硅还原炉内壁安装镜面的操作方法”,但该方案同样存在更换安装麻烦等问题。随着光伏行业的发展,也有人开始尝试研制自动化设备来对还原炉内腔进行打磨、抛光处理,如申请号为CN201420588977.5(公开号为CN204194401U)的中国专利“一种用于清洗多晶硅还原炉的内表面的装置”,其提出了一种比较概念化的集成装置,其提出了一种比较概念化的集成装置,试图替代人工进行检修处理,但是该设备中,打磨头和抛光刷只能上下调整,而不能翻转,使用该设备可以顺利对规则炉筒侧壁进行打磨抛光,但是对弧形的炉筒底部,打磨头和抛光刷难以触及,容易产生打磨死角,还需人工进行补充打磨抛光,打磨抛光效率还有待提高。Conventionally, grinding and polishing the inner wall of the furnace is usually done manually, which is labor-intensive and time-consuming. The Chinese patent with the application number CN201110096759.0 (publication number CN102180468A) discloses "a polysilicon reduction furnace and an operation method for installing a mirror on the inner wall of the polysilicon reduction furnace", but this solution also has problems such as troublesome replacement and installation. With the development of the photovoltaic industry, some people have begun to try to develop automated equipment to grind and polish the inner cavity of the reduction furnace. The device for the inner surface of the furnace”, which proposes a more conceptual integrated device, which proposes a more conceptual integrated device, trying to replace manual maintenance processing, but in this device, the grinding head and polishing brush can only be moved up and down It can be used for grinding and polishing the side wall of the regular furnace tube, but the bottom of the arc furnace tube is difficult to reach, and the grinding head and polishing brush are difficult to reach, and it is easy to produce grinding dead angles, and manual supplementary grinding and polishing is required. , the grinding and polishing efficiency still needs to be improved.
鉴于此,急需提供一种能够对炉筒包括侧壁和底部都能够进行全自动打磨、抛光处理的设备,以解决多晶硅生产企业关于还原炉的使用问题。In view of this, there is an urgent need to provide a device capable of fully automatic grinding and polishing of the furnace barrel, including the sidewall and the bottom, so as to solve the problem of using reduction furnaces in polysilicon production enterprises.
实用新型内容Utility model content
因此,针对现有技术中炉筒抛光设备自动化程度不高且容易产生打磨死角、打磨抛光效率不高的技术问题,本实用新型的目的在于提供一种炉筒抛光机构,以实现炉筒包括侧壁和弧形底部都能够进行全自动的打磨和抛光处理,提高打磨抛光的效率。Therefore, in view of the low degree of automation of the furnace barrel polishing equipment in the prior art, and the technical problems of easy to produce grinding dead angles and low grinding and polishing efficiency, the purpose of this utility model is to provide a furnace barrel polishing mechanism, so as to realize that the furnace barrel includes a side surface. Both the wall and the curved bottom can be fully automatic grinding and polishing to improve the efficiency of grinding and polishing.
本实用新型的炉筒抛光机构包括升降平台、固定打磨抛光机头和摆动打磨抛光机头,所述固定打磨抛光机头和所述摆动打磨抛光机头安装在所述升降平台的左右两侧;其中,所述固定打磨抛光机头水平固定安装在所述升降平台的一侧;所述摆动打磨抛光机头通过摆动臂安装在所述升降平台的另一侧,并通过支撑驱动装置驱使至少可在水平位置和竖立位置范围内摆动,且所述摆动打磨抛光机头摆动的弧形轨迹与所述固定打磨抛光机头处于同一竖直面内。The furnace barrel polishing mechanism of the utility model comprises a lifting platform, a fixed grinding and polishing head and a swinging grinding and polishing head, and the fixed grinding and polishing head and the swinging grinding and polishing head are installed on the left and right sides of the lifting platform; Wherein, the fixed grinding and polishing head is horizontally and fixedly installed on one side of the lifting platform; the swinging grinding and polishing head is installed on the other side of the lifting platform through a swing arm, and is driven at least by a support driving device It oscillates within the range of a horizontal position and an upright position, and the swinging arc trajectory of the oscillating grinding and polishing head and the fixed grinding and polishing head are in the same vertical plane.
使用本实用新型的炉筒抛光机构加工炉筒时,可将炉筒抛光机构安装在升降机构上,而待加工的炉筒可倒扣在回转工作台上。工作时,所述炉筒抛光机构在升降机构的驱动下行至待加工炉筒内部,回转工作台可带动炉筒转动,而所述固定打磨抛光机头和所述摆动打磨抛光机头与炉筒内壁接触对其进行打磨抛光。其中,所述摆动打磨抛光机头在所述支撑驱动装置的驱使下,可在水平位置和竖立位置范围内摆动并固定,可对弧形的炉筒底部进行打磨抛光,避免打磨死角。When using the furnace tube polishing mechanism of the utility model to process the furnace tube, the furnace tube polishing mechanism can be installed on the lifting mechanism, and the furnace tube to be processed can be buckled upside down on the rotary table. When working, the furnace barrel polishing mechanism is driven by the lifting mechanism to go down to the inside of the furnace barrel to be processed, and the rotary table can drive the furnace barrel to rotate, while the fixed grinding and polishing head and the swing grinding and polishing head are connected to the furnace barrel. The inner wall is in contact with it for grinding and polishing. Wherein, the swing grinding and polishing head can swing and be fixed in the range of horizontal position and vertical position under the driving of the support driving device, and can grind and polish the bottom of the arc-shaped furnace barrel to avoid grinding dead corners.
优选的,所述固定打磨抛光机头和所述摆动打磨抛光机头结构基本相同,各自包括安装板、砂轮装置和辅助装置,所述辅助装置为用于向炉筒内壁喷淋工作介质(比如电化学抛光液)的喷淋装置或用于机械抛光时向炉筒内壁加蜡的加蜡装置,所述砂轮装置和所述辅助装置安装在所述安装板上。当所述回转工作台带动待加工的炉筒进行旋转时,所述固定打磨抛光机头与所述摆动打磨抛光机头的工作头均可以接触到炉筒的内壁,且施力方向相互抵消,不会对待加工多晶硅还原炉产生额外的推力。Preferably, the structure of the fixed grinding and polishing head and the swinging grinding and polishing head are basically the same, and each includes a mounting plate, a grinding wheel device and an auxiliary device, and the auxiliary device is used for spraying a working medium (such as a working medium) to the inner wall of the furnace drum Electrochemical polishing liquid) spray device or a waxing device for adding wax to the inner wall of the furnace drum during mechanical polishing, the grinding wheel device and the auxiliary device are installed on the mounting plate. When the rotary table drives the furnace barrel to be processed to rotate, the working heads of the fixed grinding and polishing head and the swing grinding and polishing head can both contact the inner wall of the furnace barrel, and the force directions cancel each other. No additional thrust is generated in the processing polysilicon reduction furnace.
对于所述辅助装置,所述固定打磨抛光机头和所述摆动打磨抛光机头可以均安装喷淋装置,也可以均安装加蜡装置,也可以是其中一个安装喷淋装置,另一个安装加蜡装置。For the auxiliary device, both the fixed grinding and polishing head and the swing grinding and polishing head can be equipped with a spray device, or both can be equipped with a waxing device, or one of them can be equipped with a spray device, and the other can be equipped with a waxing device. Wax device.
本实用新型的一些较佳实施例中,所述固定打磨抛光机头中安装喷淋装置,同时所述摆动打磨抛光机头中安装加蜡装置。在所述摆动打磨抛光机头上设置加蜡装置可用来机械抛光加蜡,使机械抛光的效果更好,其在机械抛光时协同所述砂轮装置进行工作;而在所述固定打磨抛光机头设置的所述喷淋装置可用来喷射电化学抛光液,在机械打磨、抛光作业完毕后,所述摆动打磨抛光机头可上摆停止打磨抛光工作,而所述固定打磨抛光机头对内壁喷淋电化学抛光液,可进一步进行电化学抛光。In some preferred embodiments of the present invention, a spray device is installed in the fixed grinding and polishing head, and a waxing device is installed in the swinging grinding and polishing head. A waxing device is provided on the swing grinding and polishing machine head for mechanical polishing and waxing, so that the effect of mechanical polishing is better, and it cooperates with the grinding wheel device to work during mechanical polishing; while the fixed grinding and polishing machine head The installed spray device can be used to spray electrochemical polishing liquid. After the mechanical grinding and polishing operations are completed, the swinging grinding and polishing head can swing up to stop the grinding and polishing work, and the fixed grinding and polishing head can spray the inner wall. Draining electrochemical polishing solution, further electrochemical polishing can be carried out.
优选的,所述砂轮装置和所述辅助装置通过伸缩油缸和导向装置安装在所述安装板上;所述导向装置包括导杆导向件和滑动件;所述伸缩油缸和所述导向件均垂直固定在所述安装板上,所述滑动件滑配在所述导向件上,所述砂轮装置和所述辅助装置分别连接在所述滑动件的两侧,所述伸缩油缸的输出端与所述砂轮装置连接。所述伸缩油缸可驱使滑动件连带着所述砂轮装置和所述辅助装置沿着所述导向件滑动,进而可以确保所述砂轮装置在工作中尽可能的贴紧炉筒内壁,同时所述辅助装置也可随之移动至理想位置方便添加工作介质。该设计可有效提高打磨抛光的效果和效率。Preferably, the grinding wheel device and the auxiliary device are mounted on the mounting plate through a telescopic oil cylinder and a guide device; the guide device includes a guide rod guide and a sliding member; the telescopic oil cylinder and the guide are both vertical It is fixed on the mounting plate, the sliding member is slidably fitted on the guide member, the grinding wheel device and the auxiliary device are respectively connected on both sides of the sliding member, and the output end of the telescopic oil cylinder is connected to the The grinding wheel device is connected. The telescopic oil cylinder can drive the sliding member to slide along the guide member together with the grinding wheel device and the auxiliary device, so as to ensure that the grinding wheel device is as close to the inner wall of the furnace barrel as possible during operation, and the auxiliary device can The device can also be moved to the ideal position for adding working medium. This design can effectively improve the effect and efficiency of grinding and polishing.
关于导向装置,其中所述导向件和所述滑动件可以设计成导轨和滑块的组合,或者其他类似的导向结构。本实用新型的一些较佳实施例中,所述导向件为导杆,所述滑动件为滑配在所述导杆上的滑套。Regarding the guide device, the guide member and the sliding member can be designed as a combination of a guide rail and a sliding block, or other similar guide structures. In some preferred embodiments of the present invention, the guide member is a guide rod, and the sliding member is a sliding sleeve slidably fitted on the guide rod.
优选的,所述砂轮装置包括砂轮安装板、砂轮盘、旋转固定座和砂轮驱动电机,所述砂轮安装板竖立设置且一侧与所述伸缩油缸的输出端和所述滑动件连接,所述旋转固定座安装在所述砂轮安装板另一侧,所述砂轮盘通过砂轮转轴安装在所述旋转固定座上,所述砂轮驱动电机安装在所述砂轮安装板上并通过皮带与所述砂轮转轴驱动连接。在实际工作中,可根据生产需要,换上不同规格的砂轮盘,先对还原炉内壁进行打磨,再更换砂轮盘对还原炉内壁进行机械抛光。Preferably, the grinding wheel device includes a grinding wheel mounting plate, a grinding wheel disc, a rotating fixing seat and a grinding wheel driving motor, the grinding wheel mounting plate is erected and one side is connected with the output end of the telescopic oil cylinder and the sliding member, the The rotating fixed seat is installed on the other side of the grinding wheel mounting plate, the grinding wheel disk is installed on the rotating fixed seat through the grinding wheel rotating shaft, the grinding wheel driving motor is installed on the grinding wheel mounting plate and is connected with the grinding wheel through the belt Spindle drive connection. In actual work, according to the production needs, you can replace the grinding wheel with different specifications, first grind the inner wall of the reduction furnace, and then replace the grinding wheel to mechanically polish the inner wall of the reduction furnace.
优选的,所述砂轮驱动电机上设有盖板,所述砂轮盘内侧(即靠近所述安装板一侧)设有弧形的吸尘罩。所述盖板和所述吸尘罩可避免打磨、抛光过程中的产生粉尘掉在所述砂轮驱动电机上而影响其工作。进一步的,所述吸尘罩可与外部吸尘器通过管子相连,将打磨,抛光过程中的产生粉尘排出。Preferably, a cover plate is provided on the grinding wheel drive motor, and an arc-shaped dust hood is provided on the inner side of the grinding wheel disc (ie, on the side close to the mounting plate). The cover plate and the dust hood can prevent dust generated during grinding and polishing from falling on the grinding wheel drive motor and affecting its work. Further, the dust hood can be connected with an external vacuum cleaner through a pipe, so as to discharge the dust generated in the grinding and polishing process.
优选的,所述喷淋装置包括喷头安装板和喷头,所述喷头安装板与所述滑套连接并与所述滑套形成夹角,所述喷头安装在所述喷头安装板上面。所述喷头的结构可根据工作介质进行调整或更换。Preferably, the sprinkler device includes a sprinkler head mounting plate and a sprinkler head, the sprinkler head mounting plate is connected to the sliding sleeve and forms an angle with the sliding sleeve, and the sprinkler head is mounted on the sprinkler head mounting plate. The structure of the nozzle can be adjusted or replaced according to the working medium.
优选的,所述加蜡装置包括加蜡安装板和推蜡组件,所述加蜡安装板与所述滑套连接,所述推蜡组件固定在所述加蜡安装板上面。所述推蜡组件为气缸或者其他直线驱动装置,其与所述砂轮盘位于同一平面上;在所述推蜡组件内设有固体蜡棒,所述推蜡组件用于将所述固体蜡棒推动与砂轮盘直接接触。Preferably, the waxing device includes a waxing installation plate and a wax pushing assembly, the waxing installation plate is connected to the sliding sleeve, and the wax pushing assembly is fixed on the waxing installation plate. The wax pushing assembly is an air cylinder or other linear drive device, which is located on the same plane as the grinding wheel disc; a solid wax rod is arranged in the wax pushing assembly, and the wax pushing assembly is used to push the solid wax rod. Push in direct contact with the grinding wheel disc.
进一步的,所述固体蜡棒一般为圆柱形,当使用消耗完后可更换新的蜡棒;当所述砂轮盘后侧设有吸尘罩时,吸尘罩对应位置开设有注蜡孔,所述固体蜡棒在所述推蜡组件的驱动下,可通过注蜡孔,与砂轮盘直接接触;这样一方面摆动打磨抛光机头本身所用砂轮盘直接就会粘到蜡,同时砂轮盘的旋转运动,还会将多余的蜡甩到还原炉内壁上,使另一个打磨抛光机头同样可以通过粘到还原炉内壁上的蜡进行抛光作业。Further, the solid wax stick is generally cylindrical, and can be replaced with a new wax stick after being used up; when a vacuum hood is provided on the rear side of the grinding wheel disc, a wax injection hole is opened at the corresponding position of the vacuum hood, Driven by the wax pushing component, the solid wax stick can directly contact the grinding wheel through the wax injection hole; on the one hand, the grinding wheel used by the swing grinding and polishing head itself will directly stick to the wax, and at the same time, the grinding wheel The rotating motion will also throw the excess wax onto the inner wall of the reduction furnace, so that another grinding and polishing machine head can also perform polishing operations through the wax that sticks to the inner wall of the reduction furnace.
优选的,所述摆动臂呈U形,所述摆动臂的开口两端通过转轴连接在所述升降平台的前后侧的中部,所述摆动臂的回折的摆动侧与所述摆动打磨抛光机头的所述安装板连接。进一步的,所述升降平台的前后侧可设置台阶,以此方便所述摆动臂的安装。Preferably, the swing arm is U-shaped, the open ends of the swing arm are connected to the middle of the front and rear sides of the lifting platform through a rotating shaft, and the swinging side of the swing arm is folded back to the swing grinding and polishing head. of the mounting plate connection. Further, steps can be provided on the front and rear sides of the lifting platform, so as to facilitate the installation of the swing arm.
关于支撑驱动装置,可以选择液压驱动设备,也可选择凸轮机构、连杆机构等等,通过合理的适应性地设计均可以实现对所述摆动打磨抛光机头的支撑和驱使功能。Regarding the support drive device, hydraulic drive equipment, cam mechanism, link mechanism, etc. can be selected, and the support and drive functions of the swing grinding and polishing head can be realized through reasonable and adaptive design.
优选的,所述支撑驱动装置包括支撑臂和摆动油缸,所述支撑臂上端连接在所述升降平台底部并向所述摆动打磨抛光机头一侧斜向下延伸,所述摆动油缸的固定端铰接在支撑臂下端上面,所述摆动油缸上部的输出端与所述摆动臂的摆动侧铰接。Preferably, the support driving device includes a support arm and a swinging oil cylinder, the upper end of the support arm is connected to the bottom of the lifting platform and extends obliquely downward to the side of the swinging grinding and polishing machine head, and the fixed end of the swinging oil cylinder is It is hinged on the lower end of the support arm, and the output end of the upper part of the swing oil cylinder is hinged with the swing side of the swing arm.
本实用新型的有益效果在于:The beneficial effects of the present utility model are:
1、本实用新型的炉筒抛光机构中,所述固定打磨抛光机头和所述摆动打磨抛光机头可自动对待加工的转动的炉筒进行打磨抛光,且其中的所述摆动打磨抛光机头在所述支撑驱动装置的驱使下,可在水平位置和竖立位置范围内摆动并固定,可对弧形的炉筒底部进行打磨抛光,有效避免打磨死角。1. In the furnace barrel polishing mechanism of the present invention, the fixed grinding and polishing machine head and the swinging grinding and polishing machine head can automatically grind and polish the rotating furnace barrel to be processed, and the swing grinding and polishing machine head therein. Driven by the support driving device, it can be swung and fixed within the range of the horizontal position and the vertical position, and the bottom of the arc-shaped furnace can be ground and polished, so as to effectively avoid the dead angle of grinding.
2、本实用新型的炉筒抛光机构工作时,所述固定打磨抛光机头与所述摆动打磨抛光机头的工作头(即砂轮盘)均可以接触到炉筒的内壁,且施力方向相互抵消,不会对待加工多晶硅还原炉产生额外的推力。2. When the furnace barrel polishing mechanism of the present invention works, both the fixed grinding and polishing head and the working head (ie the grinding wheel disc) of the swing grinding and polishing head can contact the inner wall of the furnace barrel, and the directions of force are mutually offset, no additional thrust will be generated in the processing polysilicon reduction furnace.
3、所述固定打磨抛光机头与所述摆动打磨抛光机头均设有砂轮装置和辅助装置,所述砂轮装置用于机械打磨炉筒内壁,所述辅助装置可根据需要用于向炉筒内壁添加电化学抛光液或液体蜡等工作介质。实际工作时,所述固定打磨抛光机头与所述摆动打磨抛光机头可相互配合工作,它们上面可分别安装喷淋装置和加蜡装置等用于辅助添加工作介质,以此可依次向待加工的炉筒内壁添加固体蜡、电化学抛光液等,进而可依次完成打磨、机械抛光、电化学抛光三种工序。3. Both the fixed grinding and polishing head and the swinging grinding and polishing head are provided with a grinding wheel device and an auxiliary device. The grinding wheel device is used for mechanically grinding the inner wall of the furnace barrel. Add working medium such as electrochemical polishing liquid or liquid wax to the inner wall. In actual work, the fixed grinding and polishing head and the oscillating grinding and polishing head can cooperate with each other, and a spray device and a waxing device can be installed on them to assist in adding the working medium, so that the working medium can be added to the machine in turn. Solid wax, electrochemical polishing liquid, etc. are added to the inner wall of the processed furnace barrel, and then three processes of grinding, mechanical polishing and electrochemical polishing can be completed in turn.
总之,本实用新型的炉筒抛光机构采用稳定可靠的结构设计,可平稳运行且维护简单。使用本实用新型的炉筒抛光机构加工炉筒时,不仅运行平稳可靠,可以有效避免打磨死角,而且可实现一次吊装就能够完成打磨、机械抛光、电化学抛光三种工序,效率高;另外检修过程,人工只需要及时检查、更换磨头,设备的自动化程度高,工人劳动强度大大降低。In a word, the furnace barrel polishing mechanism of the present invention adopts a stable and reliable structural design, can run smoothly and is easy to maintain. When the furnace tube polishing mechanism of the utility model is used to process the furnace tube, not only the operation is stable and reliable, the dead angle of grinding can be effectively avoided, but also three processes of grinding, mechanical polishing and electrochemical polishing can be completed in one hoisting operation, and the efficiency is high; In the process, the labor only needs to check and replace the grinding head in time, the automation degree of the equipment is high, and the labor intensity of the workers is greatly reduced.
附图说明Description of drawings
图1为炉筒全自动抛光机的整体结构示意图;Fig. 1 is the overall structure schematic diagram of furnace barrel automatic polishing machine;
图2为炉筒全自动抛光机的工作机台的立体示意图;Fig. 2 is the three-dimensional schematic diagram of the working table of the furnace barrel automatic polishing machine;
图3为炉筒全自动抛光机的工作机台的局部放大剖视图;Fig. 3 is the partial enlarged cross-sectional view of the working table of the furnace drum automatic polishing machine;
图4为本实用新型炉筒抛光机构的示意图;4 is a schematic diagram of the furnace barrel polishing mechanism of the present invention;
图5为本实用新型的固定打磨抛光机头的立体示意图;5 is a perspective view of a fixed grinding and polishing head of the present invention;
图6和图7为固定打磨抛光机头的砂轮装置的安装示意图;6 and 7 are schematic diagrams of the installation of the grinding wheel device for fixing the grinding and polishing head;
图8为本实用新型的摆动打磨抛光机头的立体示意图;Fig. 8 is the three-dimensional schematic diagram of the oscillating grinding and polishing head of the present invention;
图9为炉筒全自动抛光机的工作示意图。Fig. 9 is the working schematic diagram of the automatic furnace polishing machine.
附图标记reference number
工作机台1,包括底座11,支柱12,回转工作台13,下支撑环131、轴承内钢圈132、回转齿轮133、回转钢珠134、上支撑环135,回转驱动装置14,驱动电动机141、主动齿轮142,升降底座15,直线导轨16,升降油缸17,炉筒抛光机构18,升降平台180、固定打磨抛光机头181、摆动打磨抛光机头182、摆动臂183、支撑臂184、摆动油缸185、喷头安装板18-01、伸缩油缸18-04、导向装置18-05、吸尘罩18-06、吸尘开口18-06-01、吸尘管18-06-02、旋转固定座18-07、砂轮驱动电机18-08、砂轮安装板18-09、加蜡安装板18-10、推蜡组件18-11、固体蜡棒18-12、注蜡孔18-13,控制固定板19;The working table 1 includes a base 11, a support column 12, a rotary table 13, a lower support ring 131, a bearing inner steel ring 132, a rotary gear 133, a rotary steel ball 134, an upper support ring 135, a rotary drive device 14, a drive motor 141, Drive gear 142, lift base 15, linear guide 16, lift cylinder 17, furnace barrel polishing mechanism 18, lift platform 180, fixed grinding and polishing head 181, swing grinding and polishing head 182, swing arm 183, support arm 184, swing oil cylinder 185. Nozzle mounting plate 18-01, telescopic cylinder 18-04, guide device 18-05, dust hood 18-06, dust suction opening 18-06-01, dust suction pipe 18-06-02, rotary fixing seat 18 -07, grinding wheel drive motor 18-08, grinding wheel mounting plate 18-09, waxing mounting plate 18-10, wax push component 18-11, solid wax stick 18-12, wax injection hole 18-13, control fixing plate 19 ;
附属设施2,控制台21,液压站22,电抛液站23。Auxiliary facilities 2, console 21, hydraulic station 22, electrospraying station 23.
具体实施方式Detailed ways
以下结合具体实施例,对本实用新型作进一步说明。应理解,以下实施例仅用于说明本实用新型而非用于限定本实用新型的范围。The present utility model will be further described below in conjunction with specific embodiments. It should be understood that the following examples are only used to illustrate the present invention and not to limit the scope of the present invention.
实施例1Example 1
图1所示为一种炉筒全自动抛光机,其包括工作机台1和附属设施2。FIG. 1 shows an automatic furnace polishing machine, which includes a working table 1 and ancillary facilities 2 .
如图1和2所示,工作机台1包括底座11、支柱12、回转工作台13、回转驱动装置14、升降导向机构(包括15~17、19)和本实用新型一较佳实施例的炉筒抛光机构18。As shown in Figures 1 and 2, the working machine 1 includes a base 11, a support column 12, a rotary table 13, a rotary drive device 14, a lifting guide mechanism (including 15-17, 19) and a preferred embodiment of the present utility model. Stove polishing mechanism 18.
其中,回转工作台13为圆环形,用于承放待加工的炉筒。如图3所示,回转工作台13包括下支撑环131、轴承内钢圈132、回转齿轮133(设有外齿)、回转钢珠134和上支撑环135,其中轴承内钢圈132、回转齿轮133和回转钢珠134组成回转支承(一种标准件)。下支撑环131通过支柱12支撑固定在底座11上,轴承内钢圈132固定在下支撑环131上,回转齿轮133通过回转钢珠134安装在轴承内钢圈外围,上支撑环135固定在回转齿轮133上面;优选的,上支撑环135上设有与炉筒的端面相匹配的支撑结构,以此便于炉筒的固定和定位。Among them, the rotary table 13 is annular, and is used for holding the furnace tube to be processed. As shown in FIG. 3, the rotary table 13 includes a lower support ring 131, a bearing inner steel ring 132, a rotary gear 133 (with external teeth), a rotary steel ball 134 and an upper support ring 135, wherein the bearing inner steel ring 132, the rotary gear 133 and slewing steel balls 134 form a slewing bearing (a standard part). The lower support ring 131 is supported and fixed on the base 11 by the struts 12 , the bearing inner steel ring 132 is fixed on the lower support ring 131 , the rotary gear 133 is installed on the periphery of the bearing inner steel ring through the rotary steel ball 134 , and the upper support ring 135 is fixed on the rotary gear 133 Above; preferably, the upper support ring 135 is provided with a support structure matching the end face of the furnace drum, so as to facilitate the fixing and positioning of the furnace drum.
回转驱动装置14用于驱使回转工作台13的上支撑环135水平转动,如图3所示,其由驱动电动机141及主动齿轮142组成。其中驱动电动机141固定安装在一根支柱12上;主动齿轮142同轴连接在驱动电动机141的输出轴上,并与回转齿轮133相啮合。驱动电动机141运转时通过主动齿轮142可驱使回转齿轮133和上支撑环135在水平面内转动。The rotary drive device 14 is used for driving the upper support ring 135 of the rotary table 13 to rotate horizontally. As shown in FIG. 3 , it is composed of a driving motor 141 and a driving gear 142 . The driving motor 141 is fixedly mounted on a support 12 ; the driving gear 142 is coaxially connected to the output shaft of the driving motor 141 and meshes with the rotary gear 133 . When the driving motor 141 is running, the rotary gear 133 and the upper support ring 135 can be driven to rotate in a horizontal plane through the driving gear 142 .
升降导向机构包括升降底座15、直线导轨16、升降油缸17和固定板19,如图1和2所示。升降底座15固定在底座11的中间位置,升降油缸17竖直安装在升降底座15的中间位置,直线导轨16竖立设于升降底座15上并穿过回转工作台13;直线导轨16的数量为四根并竖直分布在升降油缸17周围;固定板19将四根直线导轨的顶部连接固定,通过固定板19和升降底座15,将直线导轨16保持竖直且相互平行。The lift guide mechanism includes a lift base 15 , a linear guide 16 , a lift cylinder 17 and a fixing plate 19 , as shown in FIGS. 1 and 2 . The lifting base 15 is fixed at the middle position of the base 11, the lifting cylinder 17 is vertically installed at the middle position of the lifting base 15, and the linear guide rails 16 are erected on the lifting base 15 and pass through the rotary table 13; the number of the linear guide rails 16 is four The roots are vertically distributed around the lifting cylinder 17 ; the tops of the four linear guides are connected and fixed by the fixing plate 19 , and the linear guides 16 are kept vertical and parallel to each other through the fixing plate 19 and the lifting base 15 .
炉筒抛光机构18包括升降平台180、固定打磨抛光机头181和摆动打磨抛光机头182。如图4所示,升降平台180滑配在直线导轨16上且底部与升降油缸17的输出端连接,固定打磨抛光机头181和摆动打磨抛光机头182安装在升降平台180的左右两侧;其中,固定打磨抛光机头181水平固定安装在升降平台180的一侧;摆动打磨抛光机头182通过摆动臂183安装在升降平台180的另一侧,并通过支撑驱动装置(包括184和185)驱使至少可在水平位置和竖立位置范围内摆动,且摆动打磨抛光机头182摆动的弧形轨迹与固定打磨抛光机头181处于同一竖直面内。The furnace barrel polishing mechanism 18 includes a lifting platform 180 , a fixed grinding and polishing head 181 and an oscillating grinding and polishing head 182 . As shown in FIG. 4 , the lifting platform 180 is slidably fitted on the linear guide rail 16 and the bottom is connected to the output end of the lifting cylinder 17, and the fixed grinding and polishing head 181 and the swinging grinding and polishing head 182 are installed on the left and right sides of the lifting platform 180; The fixed grinding and polishing head 181 is horizontally and fixedly installed on one side of the lifting platform 180; the swinging grinding and polishing head 182 is installed on the other side of the lifting platform 180 through the swing arm 183, and is supported by the driving device (including 184 and 185) The drive can swing at least in the range of the horizontal position and the vertical position, and the swinging arc trajectory of the oscillating grinding and polishing head 182 and the fixed grinding and polishing head 181 are in the same vertical plane.
使用本实用新型的炉筒全自动抛光机加工炉筒时,将待加工的炉筒倒扣在回转工作台13上,回转工作台13可带动炉筒转动,而固定打磨抛光机头181和摆动打磨抛光机头182与炉筒3内壁接触对其进行打磨抛光。其中,摆动打磨抛光机头182在支撑驱动装置的驱使下,可在水平位置和竖立位置范围内摆动并固定,可对弧形的炉筒底部进行打磨抛光(参见图9),避免打磨死角。When using the furnace tube full-automatic polishing machine of the present utility model to process the furnace tube, the furnace tube to be processed is buckled upside down on the rotary table 13, and the rotary table 13 can drive the furnace tube to rotate, while the grinding and polishing head 181 and the swinging head are fixed. The grinding and polishing head 182 is in contact with the inner wall of the furnace drum 3 to perform grinding and polishing. The oscillating grinding and polishing head 182 can swing and be fixed in the range of horizontal position and vertical position under the drive of the support driving device, and can grind and polish the bottom of the arc-shaped furnace barrel (see FIG. 9 ) to avoid grinding dead ends.
以回转工作台13中轴线为基准,当摆动打磨抛光机头182处于水平位置时(如图4),摆动打磨抛光机头182与固定打磨抛光机头181左右对称。当回转工作台带动待加工的炉筒进行旋转时,固定打磨抛光机头与摆动打磨抛光机头的工作头均可以接触到炉筒的内壁,且施力方向相互抵消,不会对待加工多晶硅还原炉产生额外的推力。Taking the central axis of the rotary table 13 as a reference, when the swing grinding and polishing head 182 is in a horizontal position (as shown in FIG. 4 ), the swinging grinding and polishing head 182 is symmetrical with the fixed grinding and polishing head 181 . When the rotary table drives the furnace barrel to be processed to rotate, the working heads of the fixed grinding and polishing machine head and the swing grinding and polishing machine head can both contact the inner wall of the furnace barrel, and the directions of force are mutually offset, and the polysilicon to be processed will not be reduced. The furnace generates additional thrust.
固定打磨抛光机头181如图5~7所示,其包括安装板18-01、伸缩油缸18-04、导向装置18-05、砂轮装置和喷淋装置(即辅助装置)。其中,导向装置18-05包括导向件和滑动件,优选的,导向件为上下平行的两根导杆,导杆通过安装架垂直固定在安装板18-01上,滑动件为滑配在导杆上的滑套。伸缩油缸18-04安装在安装架中并与两根导杆平行(参见图6),砂轮装置和辅助装置则分别连接在滑套的两侧。The fixed grinding and polishing head 181 is shown in FIGS. 5-7 , and includes a mounting plate 18-01, a telescopic oil cylinder 18-04, a guide device 18-05, a grinding wheel device and a spray device (ie, an auxiliary device). Among them, the guide device 18-05 includes a guide member and a sliding member. Preferably, the guide member is two guide rods that are parallel up and down. Sliding sleeve on the rod. The telescopic oil cylinder 18-04 is installed in the mounting frame and is parallel to the two guide rods (see Figure 6), and the grinding wheel device and the auxiliary device are respectively connected on both sides of the sliding sleeve.
砂轮装置用于打磨炉筒内壁,如图7所示,其包括砂轮安装板18-09、砂轮盘18-02、旋转固定座18-07和砂轮驱动电机18-08。砂轮安装板18-09竖立设置且一侧同时与伸缩油缸18-05的输出端和滑套连接,旋转固定座18-07安装在砂轮安装板18-09另一侧,砂轮盘18-02通过砂轮转轴安装在旋转固定座18-07上,砂轮驱动电机18-08安装在砂轮安装板18-09上并通过皮带与砂轮转轴驱动连接。在实际工作中,可根据生产需要,换上不同规格的砂轮盘,先对还原炉内壁进行打磨,再更换砂轮盘对还原炉内壁进行机械抛光。优选的,砂轮驱动电机18-08上面设有盖板,砂轮盘18-02内侧(即靠近安装板18-01一侧)设有弧形的吸尘罩18-06。盖板和吸尘罩18-06可避免打磨、抛光过程中的产生粉尘掉在砂轮驱动电机18-08上而影响其工作。进一步的,吸尘罩18-06上设有吸尘开口18-06-01,其通过吸尘管18-06-02可与外部吸尘器通过相连(见图5),将打磨、抛光过程中的产生粉尘排出。The grinding wheel device is used for grinding the inner wall of the furnace barrel, as shown in FIG. 7 , it includes a grinding wheel mounting plate 18-09, a grinding wheel disc 18-02, a rotating fixing seat 18-07 and a grinding wheel driving motor 18-08. The grinding wheel mounting plate 18-09 is erected and one side is connected with the output end of the telescopic oil cylinder 18-05 and the sliding sleeve at the same time. The rotating fixed seat 18-07 is installed on the other side of the grinding wheel mounting plate 18-09, and the grinding wheel disc 18-02 passes through The grinding wheel rotating shaft is installed on the rotating fixed seat 18-07, and the grinding wheel driving motor 18-08 is installed on the grinding wheel mounting plate 18-09 and is drivingly connected with the grinding wheel rotating shaft through a belt. In actual work, according to the production needs, you can replace the grinding wheel with different specifications, first grind the inner wall of the reduction furnace, and then replace the grinding wheel to mechanically polish the inner wall of the reduction furnace. Preferably, the grinding wheel drive motor 18-08 is provided with a cover plate, and the inner side of the grinding wheel disc 18-02 (ie, the side close to the mounting plate 18-01) is provided with an arc-shaped dust cover 18-06. The cover plate and the dust hood 18-06 can prevent the dust generated in the grinding and polishing process from falling on the grinding wheel drive motor 18-08 and affecting its work. Further, the vacuum hood 18-06 is provided with a vacuum opening 18-06-01, which can be connected to an external vacuum cleaner through a vacuum pipe 18-06-02 (see FIG. Generates dust discharge.
喷淋装置包括喷头安装板18-10和喷头18-03(见图5),喷头安装板18-10与滑套连接并与滑套形成夹角,喷头18-03安装在喷头安装板18-10上面。喷淋装置主要用于向炉筒内壁喷淋电化学抛光液等工作介质,可进一步进行电化学抛光。The sprinkler device includes a sprinkler head mounting plate 18-10 and a sprinkler head 18-03 (see Figure 5), the sprinkler head mounting plate 18-10 is connected with the sliding sleeve and forms an included angle with the sliding sleeve, and the sprinkler head 18-03 is installed on the sprinkler head mounting plate 18- 10 above. The spray device is mainly used to spray the working medium such as electrochemical polishing liquid to the inner wall of the furnace barrel, which can further carry out electrochemical polishing.
摆动打磨抛光机头182和固定打磨抛光机头181的主要工作结构基本相同,区别在于所采用的辅助装置为加蜡装置,如图8所示,加蜡装置包括加蜡安装板18-10和推蜡组件18-11,加蜡安装板18-10与滑套连接,推蜡组件18-11固定在加蜡安装板18-10上面,推蜡组件18-11为气缸或者其他直线驱动装置,其与砂轮盘18-02位于同一平面上;在推蜡组件18-11内设有固体蜡棒18-12,一般为圆柱形,当使用消耗完后可更换新的蜡棒;在吸尘罩18-06上开设有注蜡孔18-13,固体蜡棒18-12在推蜡组件18-11的驱动下,可通过注蜡孔18-13,与砂轮盘18-02直接接触;这样一方面摆动打磨抛光机头182本身所用砂轮盘18-02直接就会粘到蜡,同时砂轮盘18-02的旋转运动,还会将多余的蜡甩到还原炉内壁上,使固定打磨抛光机头181同样可以通过粘到还原炉内壁上的蜡进行抛光作业。The main working structures of the oscillating grinding and polishing head 182 and the fixed grinding and polishing head 181 are basically the same. The difference is that the auxiliary device used is a waxing device. The wax pushing assembly 18-11, the wax adding mounting plate 18-10 is connected with the sliding sleeve, the wax pushing assembly 18-11 is fixed on the wax adding mounting plate 18-10, the wax pushing assembly 18-11 is a cylinder or other linear drive device, It is located on the same plane as the grinding wheel disc 18-02; a solid wax stick 18-12 is arranged in the wax push component 18-11, which is generally cylindrical, and can be replaced with a new wax stick when it is used up; 18-06 is provided with a wax injection hole 18-13, and the solid wax rod 18-12 can directly contact the grinding wheel disc 18-02 through the wax injection hole 18-13 under the drive of the wax push component 18-11; On the one hand, the grinding wheel disc 18-02 used by the swinging grinding and polishing head 182 itself will directly stick to the wax, and at the same time, the rotating motion of the grinding wheel disc 18-02 will also throw the excess wax onto the inner wall of the reduction furnace, so that the grinding and polishing head is fixed. The 181 can also be polished with wax that sticks to the inner wall of the reduction furnace.
伸缩油缸18-04的输出端伸缩时,可驱使砂轮安装板18-09移动,进而可驱使连带着的砂轮装置和喷淋装置或加蜡装置沿着导杆滑动,实际工作时可以确保砂轮装置的砂轮盘18-02在工作中尽可能的贴紧炉筒内壁,同时喷淋装置的喷头18-03也尽可能接近炉筒内壁,或者加蜡装置也随着移动,可有效提高打磨抛光的效果和效率。When the output end of the telescopic oil cylinder 18-04 is telescopic, it can drive the grinding wheel mounting plate 18-09 to move, and then it can drive the associated grinding wheel device and spray device or waxing device to slide along the guide rod, which can ensure the grinding wheel device during actual work. The grinding wheel disc 18-02 is as close as possible to the inner wall of the furnace barrel during work, and the nozzle 18-03 of the spray device is also as close to the inner wall of the furnace barrel as possible, or the waxing device also moves with it, which can effectively improve the grinding and polishing efficiency. effectiveness and efficiency.
关于摆动打磨抛光机头182的安装,摆动臂183呈U形,摆动臂183的开口两端通过转轴连接在升降平台180的前后侧的中部,摆动臂183的回折的摆动侧与摆动打磨抛光机头182的安装板18-01连接。升降平台180的前后侧可设置台阶,以此方便摆动臂183的安装。支撑驱动装置包括支撑臂184和摆动油缸185,如图4所示,支撑臂184上端连接在升降平台180底部并向摆动打磨抛光机头182一侧斜向下延伸,摆动油缸185的固定端铰接在支撑臂184下端上面,摆动油缸185上部的输出端与摆动臂183的摆动侧铰接。Regarding the installation of the swinging grinding and polishing machine head 182, the swinging arm 183 is U-shaped, and the open ends of the swinging arm 183 are connected to the middle of the front and rear sides of the lifting platform 180 through the rotating shaft. The mounting plate 18-01 of the head 182 is attached. Steps can be provided on the front and rear sides of the lifting platform 180 to facilitate the installation of the swing arm 183 . The support driving device includes a support arm 184 and a swing cylinder 185. As shown in FIG. 4, the upper end of the support arm 184 is connected to the bottom of the lifting platform 180 and extends obliquely downward to the side of the swing grinding and polishing head 182. The fixed end of the swing cylinder 185 is hinged Above the lower end of the support arm 184 , the output end of the upper part of the swing cylinder 185 is hinged with the swing side of the swing arm 183 .
附属设施2主要包括控制台21、液压站22及电抛液站23。控制台21对整个炉筒全自动抛光机的工作进行控制及监控;液压站用于对炉筒全自动抛光机的液压设备(各个油缸)提供液压动力;电抛液站23用于对喷淋装置提供及回收电抛液,并提供反应动力。The auxiliary facility 2 mainly includes a console 21 , a hydraulic station 22 and an electrospraying station 23 . The console 21 controls and monitors the work of the whole furnace barrel automatic polishing machine; the hydraulic station is used to provide hydraulic power to the hydraulic equipment (each oil cylinder) of the furnace barrel automatic polishing machine; the electro-spraying station 23 is used for spraying The device provides and recovers electrospray and provides reaction power.
图9所示为本实用新型炉筒全自动抛光机待加工的炉筒3(多晶硅还原炉)的内壁进行处理时的示意图,先需要对炉筒3吊装到回转工作台13上,然后回转工作台13启动,带动炉筒3进行旋转;随后升降油缸17启动,带动固定打磨抛光机头181及摆动打磨抛光机头182伸入到炉筒3的内腔,通过转动的砂轮盘18-02对炉筒3的内壁进行打磨抛光。实际工作时,固定打磨抛光机头181与摆动打磨抛光机头182相互配合工作,砂轮盘18-02先对炉筒3的内壁进行先打磨抛光,打磨一定程度后可控制摆动打磨抛光机头182上的加蜡装置进行加蜡,协同砂轮装置进行工作,使机械抛光的效果更好;而在固定打磨抛光机头181上设置的喷淋装置主要用来喷射电化学抛光液,在机械打磨抛光作业完毕后,摆动打磨抛光机头182可上摆停止打磨抛光工作,而固定打磨抛光机头181对内壁喷淋电化学抛光液,可进一步进行电化学抛光。9 is a schematic diagram showing the inner wall of the furnace drum 3 (polysilicon reduction furnace) to be processed by the furnace drum automatic polishing machine of the present invention. The table 13 is activated to drive the furnace drum 3 to rotate; then the lifting cylinder 17 is activated to drive the fixed grinding and polishing head 181 and the swinging grinding and polishing head 182 to extend into the inner cavity of the furnace drum 3, and the rotating grinding wheel discs 18-02 The inner wall of the furnace drum 3 is ground and polished. In actual work, the fixed grinding and polishing head 181 and the swinging grinding and polishing head 182 cooperate with each other. The grinding wheel 18-02 first grinds and polishes the inner wall of the furnace drum 3, and after grinding to a certain extent, the swing grinding and polishing head 182 can be controlled. The waxing device above is used to add wax and cooperate with the grinding wheel device to make the effect of mechanical polishing better; while the spray device set on the fixed grinding and polishing head 181 is mainly used to spray electrochemical polishing liquid, and it is used for mechanical polishing. After the operation is completed, the oscillating grinding and polishing head 182 can swing up to stop the grinding and polishing work, while the fixed grinding and polishing head 181 sprays the electrochemical polishing liquid on the inner wall, and further electrochemical polishing can be performed.
本实用新型的炉筒全自动抛光机加工炉筒采用稳定可靠的结构设计,设备运行可靠,维护简单。使用本实用新型的炉筒全自动抛光机加工炉筒时,一次吊装就能够实现打磨、机械抛光、电化学抛光三种工序,效率高;且处置过程,人工只需要及时检查、更换磨头,设备的自动化程度高,工人劳动强度大大降低。The furnace barrel of the utility model adopts a stable and reliable structural design for the fully automatic polishing machine processing furnace barrel, the equipment is reliable in operation, and the maintenance is simple. When using the furnace cylinder automatic polishing machine of the utility model to process the furnace cylinder, three processes of grinding, mechanical polishing and electrochemical polishing can be realized in one hoisting operation, and the efficiency is high; The automation degree of the equipment is high, and the labor intensity of workers is greatly reduced.
以上已对本实用新型创造的较佳实施例进行了具体说明,但本实用新型创造并不限于实施例,熟悉本领域的技术人员在不违背本实用新型创新的前提下还可作出种种的等同的变型或替换,这些等同的变型或替换均包含在本申请权利要求所限定的范围内。The preferred embodiments of the present invention have been specifically described above, but the present invention is not limited to the embodiments, and those skilled in the art can make various equivalents without departing from the invention of the present invention. Modifications or substitutions, these equivalent modifications or substitutions are all included within the scope defined by the claims of the present application.
Claims (10)
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112658952A (en) * | 2020-12-21 | 2021-04-16 | 绩溪县徽洋车桥有限责任公司 | Auxiliary machining device for automobile drive axle |
| CN112658951A (en) * | 2020-12-21 | 2021-04-16 | 绩溪县徽洋车桥有限责任公司 | Polishing method based on drive axle housing polishing device |
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2018
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112658952A (en) * | 2020-12-21 | 2021-04-16 | 绩溪县徽洋车桥有限责任公司 | Auxiliary machining device for automobile drive axle |
| CN112658951A (en) * | 2020-12-21 | 2021-04-16 | 绩溪县徽洋车桥有限责任公司 | Polishing method based on drive axle housing polishing device |
| CN112658951B (en) * | 2020-12-21 | 2024-04-02 | 绩溪县徽洋车桥有限责任公司 | Polishing method based on drive axle housing polishing device |
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