CN209140595U - A kind of silicon wafer repair machine being convenient for changing grinding wheel - Google Patents

Abstract

The utility model discloses a kind of silicon wafer repair machine for being convenient for changing grinding wheel, including cabinet body, the top of the cabinet body is fixedly connected with fixed plate at rear side, the antetheca of the fixed plate is equipped with control panel at left side, the top of the cabinet body is fixedly connected with box body at right side, and the rear wall of the box body is fixedly connected with the antetheca of fixed plate, the top of the box body is fixedly connected with top plate by hinge, dodge gate has been connected through hinge activity on the right side of the box body, it is fixedly connected with support column respectively at the bottom four corners of the cabinet body, being horizontally disposed in the box body has movable plate, slide opening is offered respectively at front side and rear side at left and right sides of the movable plate, and the first slide bar is arranged in slide opening, the left and right ends of first slide bar are each passed through slide opening, and it extends to outside slide opening and is fixedly connected with the inner wall of box body.The utility model makes the present apparatus have the characteristics that replacement is convenient and repairs thorough by a series of structure.

Description

A kind of silicon wafer repair machine being convenient for changing grinding wheel

Technical field

The utility model relates to silicon wafer repair machine more particularly to a kind of silicon wafer repair machine for being convenient for changing grinding wheel.

Background technique

It is flat to be widely used in silicon chip grinding, silicon wafer polishing, kirsite grinding and polishing, light stick head, stainless steel for silicon wafer repair machine Face polishing, LED Sapphire Substrate, optical glass chip, quartz wafer, all, mold, a variety of materials such as light guide plate single side grind It mill, polishing and repairs, repair machine is precise finiss polissoir, and amendment wheel belt is started building part rotation, and the mode of gravity pressurization is to work Part pressure, silicon wafer and grinding wheel make opposite operating and rub, to reach grinding, polishing and repair purpose.

Currently, the disadvantages of silicon wafer repair machine is not thorough in the presence of replacement inconvenience and reparation when in use with grinding wheel in the market, Working efficiency greatly reduces, it has not been convenient to use.

Utility model content

For overcome the deficiencies in the prior art, one of the purpose of this utility model is to provide a kind of grinding wheel that is convenient for changing Silicon wafer repair machine.

One of the purpose of this utility model adopts the following technical scheme that realization:

A kind of silicon wafer repair machine being convenient for changing grinding wheel, including cabinet body, the top of the cabinet body is fixed at rear side to be connected It is connected to fixed plate, the antetheca of the fixed plate is equipped with control panel at left side, and the top of the cabinet body is at right side It is fixedly connected with box body, and the rear wall of the box body is fixedly connected with the antetheca of fixed plate, passes through hinge at the top of the box body It is fixedly connected with top plate, dodge gate, the bottom four corners punishment of the cabinet body have been connected through hinge activity on the right side of the box body It is not fixedly connected with support column, being horizontally disposed in the box body has movable plate, at left and right sides of the movable plate close to front side with after Slide opening is offered at side respectively, and is arranged with the first slide bar in slide opening, the left and right ends of first slide bar are each passed through slide opening, And extend to outside slide opening and be fixedly connected with the inner wall of box body, the top of the movable plate is placed puts with U-shaped placement plate, the U-shaped It sets and is provided with cover board in plate, the top of the movable plate is fixedly connected with cylinder respectively at two sides, installs on the cylinder There is telescopic rod, the top of the telescopic rod is fixedly connected with the crushing block to match with cover board, fixed company in the U-shaped placement plate It is connected to gag lever post, and offers the through-hole to match with gag lever post on the cover board, it is fixed on the right side inner wall of the box body to connect It is connected to the first electric telescopic rod, the left end of first electric telescopic rod is fixedly connected with the left side side wall of movable plate, the U-shaped Grinding wheel is provided on rear side of placement plate, the rear side inner wall of the box body is fixedly connected with riser, two institutes respectively at two sides It states and is provided with movable block between riser, the movable block offers slide opening, and is arranged with the second slide bar in slide opening, and described second is sliding The left and right ends of bar are each passed through slide opening and are fixedly connected with the side wall of two risers, and the antetheca of the grinding wheel and movable block is fixed to be connected It connects.

Further, the front side of the movable block is respectively arranged with connecting plate at the left and right sides, the movable block Antetheca is fixedly connected with the second electric telescopic rod respectively at two sides, the front end of two second electric telescopic rods respectively with The rear wall of two connecting plates is fixedly connected, and the rear wall of the connecting plate is mutually fixedly connected with far from place perpendicular with the second electric telescopic rod Bar is provided with mounting plate on front side of the movable block, and the rear end of the vertical bar is fixedly connected with the rear wall of mounting plate, the grinding wheel Rear wall on be fixedly connected with rotation axis, first motor is installed, on the rear end of the rotation axis on the antetheca of the mounting plate The mounting groove to match with first motor output shaft is offered, the rear wall of the connecting plate is close to the side of the second electric telescopic rod Place is fixedly connected with L shaped plate, is fixedly connected with extension airbag on the L shaped plate side wall opposite with vertical bar, before the L shaped plate Air pump is installed on wall, L shaped inflatable pipe, the front end of the L shaped inflatable pipe and flexible gas are socketed on the gas outlet of the air pump The rear wall of capsule is fixedly connected, and the extension airbag side mutually separate with L shaped plate is fixedly connected with movable plate, the movable plate with Be fixedly connected on the mutually separate side wall of extension airbag there are two inserted link, offered respectively on the side wall of the vertical bar and rotation axis with The through-hole that inserted link matches, and inserted link passes through through-hole and extends in mounting groove, opens on the side wall of the first motor output shaft Equipped with the slot to match with inserted link.

Further, it is arranged with slip ring respectively at two sides on first slide bar, the slip ring and riser are mutually separate Side wall be fixedly connected with fixed link respectively at front side and rear side, two fixed links and mutually separate one end of slip ring point It is not fixedly connected with the side wall of movable block and the second electric telescopic rod, is punished between the slip ring and riser close to front side and rear side It is not fixedly connected with compressed spring, is provided with pressing plate on the right side of the riser on right side, the slip ring positioned at right side Right wall be fixedly connected with motion bar respectively at front side and rear side, offered on the riser on right side and motion bar The perforation to match, the motion bar pass through with the mutually separate one end of slip ring and perforate and be fixedly connected with the side wall of pressing plate, institute It states and is provided with the cam to match with pressing plate in box body at the right side, the cam is interior by shaft and bearing and box body Bottom of chamber portion is flexibly connected, and is equipped with the second motor on the rear side inner wall of the box body, is socketed on the output shaft of second motor There is transmission belt, the front end of the transmission belt passes function with the shaft on cam top and connect.

Further, it is separately installed at front side and rear side in the right wall of the riser on right side and pressing plate The coil component spring to match, two coil component springs are symmetrical in front and back by symmetry axis of the central axis of riser.

Further, sheave, the biography are respectively sleeved in the output shaft of second motor and the shaft at the top of cam The both ends of dynamic band pass through sheave respectively and connect with the rotating shaft transmission at the top of the output shaft of the second motor and cam.

Compared with prior art, the utility model has the beneficial effects that:

1, the utility model by L shaped plate, air pump, mounting plate, vertical bar, inserted link, extension airbag, movable plate and connecting plate it Between mutual cooperation, it can be achieved that convenient installation and removal to grinding wheel, achieve the purpose that grinding wheel convenient changing；

2, by the mutual cooperation between the second electric telescopic rod and connecting plate, it can be achieved that grinding wheel and U-shaped placement plate it Between distance adjust, so that the polishing and reparation to silicon wafer can be realized, pass through cam, pressing plate, motion bar, riser, second sliding Mutual cooperation between bar, movable block, compressed spring and coil component spring is, it can be achieved that drive grinding wheel to do left and right circulation fortune in box body It is dynamic, so that the uniform and complete polishing and reparation to silicon wafer can be realized, polishing and remediation efficiency can be effectively improved, is easy to use.

The above description is merely an outline of the technical solution of the present invention, in order to better understand the skill of the utility model Art means, and being implemented in accordance with the contents of the specification, and in order to allow the above and other purpose, feature of the utility model It can be more clearly understood with advantage, it is special below to lift preferred embodiment, and cooperate attached drawing, detailed description are as follows.

Detailed description of the invention

Fig. 1 is the perspective view of the present embodiment；

Fig. 2 is the front view of Fig. 1；

Fig. 3 is the top view of Fig. 1；

Fig. 4 is the structural schematic diagram of the present embodiment

Fig. 5 is enlarged drawing at the A of Fig. 1；

Fig. 6 is enlarged drawing at the B of Fig. 2；

Fig. 7 is enlarged drawing at the C of Fig. 4；

Fig. 8 is enlarged drawing at the D of Fig. 4.

In figure: 1, cabinet body；2, control panel；3, fixed plate；4, top plate；5, box body；6, dodge gate；7, support column；8, One electric telescopic rod；9, the first slide bar；10, movable plate；11, cover board；12, transmission belt；13, slip ring；14, grinding wheel；15, bullet is compressed Spring；16, riser；17, the second slide bar；18, movable block；19, crushing block；20, telescopic rod；21, cylinder；22, U-shaped placement plate；23, Rotation axis；24, movable plate；25, extension airbag；26, connecting plate；27, the second electric telescopic rod；28, fixed link；29, L shaped inflatable Pipe；30, L shaped plate；31, air pump；32, mounting plate；33, first motor；34, vertical bar；35, inserted link；36, coil component spring；37, second Motor；38, cam；39, pressing plate；40, motion bar.

Specific embodiment

In the following, being described further in conjunction with attached drawing and specific embodiment to the utility model, it should be noted that Under the premise of not colliding, it can be formed in any combination between various embodiments described below or between each technical characteristic new Embodiment.

It should be noted that it can be directly on another component when component is referred to as " being fixed on " another component Or there may also be components placed in the middle.When a component is considered as " connection " another component, it, which can be, is directly connected to To another component or it may be simultaneously present component placed in the middle.When a component is considered as " being set to " another component, it It can be and be set up directly on another component or may be simultaneously present component placed in the middle.Term as used herein is " vertical ", " horizontal ", "left", "right" and similar statement for illustrative purposes only.

Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term " and or " used herein includes Any and all combinations of one or more related listed items.

It is close to please refer to Fig. 1 to Fig. 8, a kind of silicon wafer repair machine being convenient for changing grinding wheel, including cabinet body 1, the top of cabinet body 1 Fixed plate 3 is fixedly connected at rear side, the antetheca of fixed plate 3 is equipped with control panel 2 at left side, and the top of cabinet body 1 is leaned on It is fixedly connected with box body 5 at nearly right side, and the rear wall of box body 5 is fixedly connected with the antetheca of fixed plate 3, the top of box body 5 passes through Hinge is fixedly connected with top plate 4, and the right side of box body 5 has been connected through hinge activity dodge gate 6, the bottom four corners punishment of cabinet body 1 It is not fixedly connected with support column 7, being horizontally disposed in box body 5 has movable plate 10, and 10 left and right sides of movable plate is close to front side and rear side Place offers slide opening respectively, and the first slide bar 9 is arranged in slide opening, and the left and right ends of the first slide bar 9 are each passed through slide opening, and prolong It reaches and is fixedly connected outside slide opening with the inner wall of box body 5, the top of movable plate 10 is placed and U-shaped placement plate 22, in U-shaped placement plate 22 It is provided with cover board 11, the top of movable plate 10 is fixedly connected with cylinder 21 respectively at two sides, is equipped on cylinder 21 flexible Bar 20, the top of telescopic rod 20 are fixedly connected with the crushing block 19 to match with cover board 11, are fixedly connected in U-shaped placement plate 22 Gag lever post, and the through-hole to match with gag lever post is offered on cover board 11, the first electricity is fixedly connected on the right side inner wall of box body 5 Dynamic telescopic rod 8, the left end of the first electric telescopic rod 8 are fixedly connected with the left side side wall of movable plate 10, the rear side of U-shaped placement plate 22 It is provided with grinding wheel 14, the rear side inner wall of box body 5 is fixedly connected with riser 16 respectively at two sides, is arranged between two risers 16 There is movable block 18, movable block 18 offers slide opening, and the second slide bar 17 is arranged in slide opening, the left and right ends point of the second slide bar 17 Not Chuan Guo slide opening be fixedly connected with the side wall of two risers 16, grinding wheel 14 is fixedly connected with the antetheca of movable block 18, movable block 18 Front side connecting plate 26 is respectively arranged at the left and right sides, the antetheca of movable block 18 is fixedly connected with respectively at two sides The front end of second electric telescopic rod 27, two the second electric telescopic rods 27 is fixedly connected with the rear wall of two connecting plates 26 respectively, The rear wall of connecting plate 26 is fixedly connected with vertical bar 34 far from place with 27 phase of the second electric telescopic rod, and the front side of movable block 18 is provided with The rear end of mounting plate 32, vertical bar 34 is fixedly connected with the rear wall of mounting plate 32, is fixedly connected with rotation axis on the rear wall of grinding wheel 14 23, first motor 33 is installed on the antetheca of mounting plate 32, is offered on the rear end of rotation axis 23 and 33 output shaft of first motor The rear wall of the mounting groove to match, connecting plate 26 is fixedly connected with L shaped plate 30, L at the side of the second electric telescopic rod 27 It is fixedly connected with extension airbag 25 on the side wall opposite with vertical bar 34 of shape plate 30, air pump 31, gas are installed on the antetheca of L shaped plate 30 It is socketed with L shaped inflatable pipe 29 on the gas outlet of pump 31, the front end of L shaped inflatable pipe 29 is fixedly connected with the rear wall of extension airbag 25, The side mutually separate with L shaped plate 30 of extension airbag 25 is fixedly connected with movable plate 24, and movable plate 24 and extension airbag 25 are mutually separate Side wall on be fixedly connected there are two inserted link 35, offer on the side wall of vertical bar 34 and rotation axis 23 and match with inserted link 35 respectively Through-hole, and inserted link 35 is passed through and through-hole and is extended in mounting groove, is offered on the side wall of 33 output shaft of first motor and inserted link 35 slots to match pass through L shaped plate 30, air pump 31, mounting plate 32, vertical bar 34, inserted link 35, extension airbag 25, movable plate 24 Mutual cooperation between connecting plate 26 is, it can be achieved that convenient installation and removal to grinding wheel 14, reach to 14 convenient changing of grinding wheel Purpose；

It is arranged with slip ring 13 respectively at two sides on first slide bar 9, the side wall mutually separate with riser 16 of slip ring 13 is close Be fixedly connected with fixed link 28 at front side and rear side respectively, two fixed links 28 one end mutually separate with slip ring 13 respectively with activity Block 18 is fixedly connected with the side wall of the second electric telescopic rod 27, solid respectively at front side and rear side between slip ring 13 and riser 16 Surely it is connected with compressed spring 15, the right side of the riser 16 on right side is provided with pressing plate 39, positioned at the right side of the slip ring 13 on right side Wall is fixedly connected with motion bar 40 respectively at front side and rear side, offers on the riser 16 on right side and 40 phase of motion bar Matched perforation, motion bar 40 pass through with the mutually separate one end of slip ring 13 and perforate and be fixedly connected with the side wall of pressing plate 39, box It is provided with the cam 38 to match with pressing plate 39 in body 5 at the right side, cam 38 is interior by shaft and bearing and box body 5 Bottom of chamber portion is flexibly connected, and is equipped with the second motor 37 on the rear side inner wall of box body 5, is socketed with biography on the output shaft of the second motor 37 Dynamic band 12, the front end of transmission belt 12 pass function with the shaft on 38 top of cam and connect, and pass through the second electric telescopic rod 27 and connection Mutual cooperation between plate 26 is, it can be achieved that adjust the distance between grinding wheel 14 and U-shaped placement plate 22, to can realize to silicon wafer Polishing and reparation, pass through cam 38, pressing plate 39, motion bar 40, riser 16, the second slide bar 17, movable block 18, compressed spring Mutual cooperation between 15 and coil component spring 36 is, it can be achieved that drive grinding wheel 14 to do left and right shuttling movement in box body 5, so as to reality Now the uniform and complete of silicon wafer is polished and is repaired, can effectively improve polishing and remediation efficiency, the output shaft of the second motor 37 and It is respectively sleeved on sheave in the shaft at 38 top of cam, the both ends of transmission belt 12 pass through the output of sheave and the second motor 37 respectively Axis is connected with the rotating shaft transmission at 38 top of cam, and the setting of sheave can effectively prevent transmission belt 12 from the output of the second motor 37 It is detached from the shaft at 38 top of axis and cam, is separately installed at front side and rear side in the right wall of the riser 16 on right side The coil component spring 36 to match with pressing plate 39, two coil component springs 36 are right in front and back by symmetry axis of the central axis of riser 16 Claim, the setting of pressing plate 39 and coil component spring 36, buffering, the first electric telescopic rod 8, the 21, second electricity of cylinder can be played the role of Dynamic telescopic rod 27, air pump 31, first motor 33 and the second motor 37 are electrically connected with control switch by circumscripted power line respectively.

Working principle: when the utility model is used, being placed on silicon wafer is neat in U-shaped placement plate 22, and U-shaped is placed Plate 22 is placed on movable plate 10, and the through-hole on cover board 11 is corresponding with the gag lever post of U-shaped placement plate 22, and passes through gag lever post Through-hole starts cylinder 21 so that being in contact at the top of cover board 11 and silicon wafer, and cylinder 21 drives 20 retracted downward of telescopic rod, stretches Bar 20 drives crushing block 19 to move downward, so that crushing block 19 is pressed down against cover board 11, silicon wafer is compressed, and starting second is electronic to stretch Contracting bar 27, the second electric telescopic rod 27 drives grinding wheel 14 to move to front side, so that being in contact on rear side of grinding wheel 14 and silicon wafer, starts First motor 33, first motor 33 drive grinding wheel 14 to rotate by rotation axis 23, realize polishing and reparation to silicon wafer, starting the One electric telescopic rod 8, the first electric telescopic rod 8 drive movable plate 10 to horizontally slip on the first slide bar 9, start the second motor 37, the second motor 37 is rotated by transmission belt 12 with moving cam 38, when cam 38 is in contact with the right wall of pressing plate 39, pressing Plate 39 drives movable block 18 in 17 phase left slide of the second slide bar by motion bar 40, and the compressed spring 15 in left side is in compression shape State, the compressed spring 15 on right side are in tensional state, and pressing plate 39 squeezes coil component spring 36 to the left, and movable block 18 drives grinding wheel 14 move to the left in box body 5, when cam 38 and the mutually separate right wall of pressing plate 39, in compressed spring 15 and coil component spring 36 Elastic force effect under, movable block 18 drive grinding wheel 14 box body 5 move to the right, it can be achieved that the polishing of the uniform and complete of silicon wafer with It repairs, can effectively improve polishing and remediation efficiency, when needing to replace grinding wheel 14, the first electric telescopic rod 8 of closing, Cylinder 21, the second electric telescopic rod 27, first motor 33 and the second motor 37, booster air pump 31, air pump 31 pass through L shaped inflatable pipe 29 deflate to extension airbag 25, and extension airbag 25 drives inserted link 35 to be detached from out of slot in rotation axis 23 by movable plate 24, Grinding wheel 14 is removed, it can be achieved that convenient installation and removal to grinding wheel 14, achieve the purpose that 14 convenient changing of grinding wheel.

Above embodiment is only preferred embodiments of the present invention, cannot be protected with this to limit the utility model Range, the variation of any unsubstantiality that those skilled in the art is done on the basis of the utility model and replacement belong to In the utility model range claimed.

Claims (5)

1. a kind of silicon wafer repair machine for being convenient for changing grinding wheel, including cabinet body (1), the top of the cabinet body (1) is consolidated at rear side Surely it is connected with fixed plate (3), the antetheca of the fixed plate (3) is equipped with control panel (2) at left side, the cabinet body (1) Top be fixedly connected at right side box body (5), and the antetheca of the rear wall of the box body (5) and fixed plate (3) fixed connects It connects, the top of the box body (5) is fixedly connected with top plate (4) by hinge, and the right side of the box body (5) is connected by hinge activity It is connected to dodge gate (6), is fixedly connected with support column (7) respectively at the bottom four corners of the cabinet body (1), it is characterised in that: described Being horizontally disposed in box body (5) has movable plate (10), opens up respectively at front side and rear side at left and right sides of the movable plate (10) There is slide opening, and be arranged with the first slide bar (9) in slide opening, the left and right ends of first slide bar (9) are each passed through slide opening, and extend It is fixedly connected outside to slide opening with the inner wall of box body (5), the top of the movable plate (10) is placed and U-shaped placement plate (22), the U It is provided with cover board (11) in shape placement plate (22), the top of the movable plate (10) is fixedly connected with cylinder respectively at two sides (21), it is equipped with telescopic rod (20) on the cylinder (21), the top of the telescopic rod (20) is fixedly connected with and cover board (11) The crushing block (19) to match is fixedly connected with gag lever post on the U-shaped placement plate (22), and offers on the cover board (11) The through-hole to match with gag lever post is fixedly connected with the first electric telescopic rod (8) on the right side inner wall of the box body (5), described The left end of first electric telescopic rod (8) is fixedly connected with the left side side wall of movable plate (10), the rear side of the U-shaped placement plate (22) It is provided with grinding wheel (14), the rear side inner wall of the box body (5) is fixedly connected with riser (16) respectively at two sides, described in two It is provided between riser (16) movable block (18), the movable block (18) offers slide opening, and the second slide bar is arranged in slide opening (17), the left and right ends of second slide bar (17) are each passed through slide opening and are fixedly connected with the side wall of two risers (16), described Grinding wheel (14) is fixedly connected with the antetheca of movable block (18).

2. a kind of silicon wafer repair machine for being convenient for changing grinding wheel as described in claim 1, it is characterised in that: the movable block (18) Front side be respectively arranged at the left and right sides connecting plate (26), the antetheca of the movable block (18) is solid respectively at two sides Surely be connected with the second electric telescopic rod (27), the front end of two second electric telescopic rods (27) respectively with two connecting plates (26) rear wall is fixedly connected, and rear wall and the second electric telescopic rod (27) of the connecting plate (26) are mutually fixedly connected with far from place Vertical bar (34) is provided with mounting plate (32) on front side of the movable block (18), the rear end and mounting plate (32) of the vertical bar (34) Rear wall be fixedly connected, be fixedly connected with rotation axis (23) on the rear wall of the grinding wheel (14), the antetheca of the mounting plate (32) On be equipped with first motor (33), offer on the rear end of the rotation axis (23) and match with first motor (33) output shaft The rear wall of mounting groove, the connecting plate (26) is fixedly connected with L shaped plate (30) at the side of the second electric telescopic rod (27), It is fixedly connected with extension airbag (25) on the L shaped plate (30) and vertical bar (34) opposite side wall, the antetheca of the L shaped plate (30) On be equipped with air pump (31), L shaped inflatable pipe (29), the L shaped inflatable pipe (29) are socketed on the gas outlet of the air pump (31) Front end be fixedly connected with the rear wall of extension airbag (25), the extension airbag (25) and the mutually separate side of L shaped plate (30) are solid Surely be connected with movable plate (24), be fixedly connected on the movable plate (24) side wall mutually separate with extension airbag (25) there are two insert The through-hole to match with inserted link (35) is offered on the side wall of bar (35), the vertical bar (34) and rotation axis (23) respectively, and is inserted Bar (35) passes through through-hole and extends in mounting groove, offers on the side wall of first motor (33) output shaft and inserted link (35) The slot to match.

3. a kind of silicon wafer repair machine for being convenient for changing grinding wheel as described in claim 1, it is characterised in that: first slide bar (9) it is arranged with respectively slip ring (13) at two sides on, the slip ring (13) side wall mutually separate with riser (16) is close to front side Be fixedly connected with respectively at rear side fixed link (28), the mutually separate one end of two fixed links (28) and slip ring (13) is distinguished It is fixedly connected with the side wall of movable block (18) and the second electric telescopic rod (27), it is close between the slip ring (13) and riser (16) Compressed spring (15) are fixedly connected at front side and rear side respectively, are provided with pressing on the right side of the riser (16) on right side Plate (39), the right wall positioned at the slip ring (13) on right side are fixedly connected with motion bar (40) respectively at front side and rear side, The perforation to match with motion bar (40), the motion bar (40) and slip ring are offered on the riser (16) on right side (13) mutually separate one end, which passes through, perforates and is fixedly connected with the side wall of pressing plate (39), in the box body (5) at right side It is provided with the cam (38) to match with pressing plate (39), the cam (38) passes through the inner cavity of shaft and bearing and box body (5) Bottom is flexibly connected, and is equipped with the second motor (37) on the rear side inner wall of the box body (5), the output of second motor (37) It is socketed on axis transmission belt (12), the front end of the transmission belt (12) passes function with the shaft on cam (38) top and connect.

4. a kind of silicon wafer repair machine for being convenient for changing grinding wheel as claimed in claim 3, it is characterised in that: described in right side It is separately installed with the coil component spring (36) to match with pressing plate (39) in the right wall of riser (16) at front side and rear side, two A coil component spring (36) is symmetrical in front and back by symmetry axis of the central axis of riser (16).

5. a kind of silicon wafer repair machine for being convenient for changing grinding wheel as claimed in claim 3, it is characterised in that: second motor (37) it is respectively sleeved on sheave in the shaft at the top of output shaft and cam (38), the both ends of the transmission belt (12) pass through respectively Sheave is connect with the rotating shaft transmission at the top of the output shaft of the second motor (37) and cam (38).