CN209104116U - Electrode bar for lower electrode - Google Patents
Electrode bar for lower electrode Download PDFInfo
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- CN209104116U CN209104116U CN201822204532.3U CN201822204532U CN209104116U CN 209104116 U CN209104116 U CN 209104116U CN 201822204532 U CN201822204532 U CN 201822204532U CN 209104116 U CN209104116 U CN 209104116U
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- ceramic body
- dateline
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- electric conductor
- stud
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Abstract
The utility model discloses a kind of electrode bars for lower electrode, including ceramic body, stud and pedestal, stud includes electric conductor, and it is detachably arranged at the dateline that draws of electric conductor one end, wherein electric conductor is cylindrical, and pedestal is placed on the lower end of ceramic body admittedly, and it is located at the outer circumferential for drawing dateline, draw the lower surface that dateline runs through pedestal, the installation cavity for installing stud is equipped in ceramic body, the diameter of installation cavity is Φ A；Electric conductor has the power supply head being in the form of a column far from the one end for drawing dateline, and power supply head exposes installation cavity, and is close to the end face of ceramic body, and one end that power supply head is close to ceramic body has round shielding surface, and the diameter of the circle shielding surface is Φ B, and the Φ B is greater than Φ A.It by changing stud structure, prevents electric current from puncturing the destruction to insulating coating and aluminum mother plate, improves the bulk life time of lower electrode, it is ensured that electrode bar has good electrical efficiency, while improving the insulating properties of electrode bar privileged site coating, improves the production capacity of etching product.
Description
Technical field
The utility model belongs to LCD etching technique field, and in particular to a kind of electrode bar for lower electrode.
Background technique
Lower electrode is widely used in such as dry etch process of flat-panel display device, integrated circuit, etches work
Capital equipment in skill further includes reaction chamber and upper electrode, and lower electrode and upper electrode are respectively positioned in reaction chamber, etched
Cheng Zhong, substrate to be etched are placed on lower electrode, plasma gas are passed through in reaction chamber, and reaction chamber is closed, to top electricity
Pole and lower electrode apply voltage, form potential difference therebetween；Under electric field action, plasma obtains very high energy simultaneously
Substrate to be etched is bombarded with very high speed to realize etching.
During this, high voltage is introduced by electrode bar in lower electrode, existing electrode bar is mainly by stud and ceramic body
It constitutes, and because the two has machining tolerance, lead to the presence of assembly gap therebetween, it is discovered by experiment that the gap makes
It obtains high voltage and generates arc discharge in head position, to generate destruction to the insulating coating on base material, eventually lead to insulation mistake
Effect, ruptures base material, greatly shortens the service life of lower electrode, or even product etching effect is influenced in etching process, expands
Big defect rate.
Utility model content
In order to solve the above technical problems, the utility model provides a kind of electrode bar for lower electrode, avoids or subtracts
Weak high electric discharge generates destruction to insulating coating, extends the service life of lower electrode, improves etching product yield.
To achieve the above object, technical solutions of the utility model are as follows:
A kind of electrode bar for lower electrode, including ceramic body, stud and pedestal, key are: the stud packet
Electric conductor is included, and is detachably arranged at the dateline that draws of electric conductor one end, wherein electric conductor is cylindrical, and the pedestal is placed on admittedly
The lower end of ceramic body, and it is located at the outer circumferential for drawing dateline, it is described to draw lower surface of the dateline through pedestal, it is set in the ceramic body
There is the installation cavity for installing stud, the diameter of the installation cavity is Φ A；
The electric conductor has the power supply head being in the form of a column far from the one end for drawing dateline, and the power supply head exposes installation cavity, and
It is close to the end face of ceramic body, one end that power supply head is close to ceramic body has round shielding surface, and the diameter of the circle shielding surface is
Φ B, the Φ B are greater than Φ A.
Using above scheme, using split type stud structure, electric conductor be inserted into from top to bottom after with draw dateline and connect, and
Gap between stud and ceramic body is blocked by power supply head realization, is avoided in use process because stud is discharged, is caused pair
The damage of insulating coating at interstitial site, to be mentioned significantly the case where making insulating coating fail, damaged to aluminum mother plate
The high service life of lower electrode.
For the integrity degree for improving stud head position, assembly precision, the power supply head and conductive body by integral forming are reduced.
As preferred: in pyramidal, diameter gradually becomes smaller the power supply head along the direction far from ceramic body.More than
Structure advantageously ensures that the adhesive force of insulating coating, it is ensured that can have insulating coating covering around it.
As preferred: the minimum diameter of the power supply head is greater than the diameter of electric conductor.Using the above structure, it is ensured that it can be filled
Divide the gap blocked between ceramic body and base material, and can prevent electrode bar caused by gap from failing.
It is described to draw dateline and electric conductor threaded connection for the production and assembly efficiency for improving electrode bar.
As preferred: described to draw dateline T-shaped comprising and it is integrally formed to draw electric portion and fixed part, it is described to draw electricity
Portion and fixed part are cylindrical, and are coaxially disposed, and the diameter of the fixed part is Φ C, and the Φ C is greater than Φ A.More than
Structure can effectively ensure the airtightness of installation cavity convenient for being fixedly connected with pedestal, prevent from influencing titanium in impurity intrusion installation cavity
Stick electric conductivity.
As preferred: the diameter of the electric conductor is 3.02mm~3.04mm, and the Φ B is 5.02mm~5.04mm.It adopts
With the above structure, meeting under the premise for blocking gap, fully consider contact area, the chamfering parameter of power supply head and tungsten layer with
And the factors such as projecting height of opposite aluminum mother plate, it is ensured that the change of structure will not have a negative impact to the electrical efficiency of stud,
The other component of lower electrode there will not be necessary adaptive change, can continue to use original structure, reduce production development cost.
Compared with prior art, the utility model has the beneficial effects that
Using the electrode bar provided by the utility model for lower electrode, by changing stud structure, realize to its with
Gap is blocked between ceramic body, prevents the destruction to insulating coating and aluminum mother plate, so that the bulk life time of lower electrode is improved,
Various factors, Optimal Parameters are fully considered simultaneously, it is ensured that electrode bar has good conductive discharge efficiency, while improving electrode bar
The insulating properties of privileged site coating improves the production capacity of etching product.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is stud structural schematic diagram in embodiment illustrated in fig. 1；
Fig. 3 is ceramic body structural schematic diagram in embodiment illustrated in fig. 1；
Fig. 4 is stud assembling schematic diagram shown in Fig. 2；
Fig. 5 is lower electrode structural schematic diagram；
Fig. 6 is insulating coating structural schematic diagram after the electrode bar of the present embodiment is installed in lower electrode；
Fig. 7 is traditional electrode stick structural schematic diagram；
Fig. 8 is the structural schematic diagram of insulating coating after traditional electrode stick shown in Fig. 7 is installed in lower electrode.
Specific embodiment
The utility model is described in further detail with attached drawing with reference to embodiments.
The application scenarios and Question background of the application for ease of understanding, referring initially to Fig. 5, Fig. 7 to Fig. 8, traditional electrode stick
As shown in fig. 7, mainly include ceramic body 1 and traditional stud 3, have in ceramic body 1 with installation cavity 10, stud 3 is integral type knot
Structure, substantially cylindrical structure, the upper end end (i.e. with W layers of contact jaw) maximum gauge are less than traditional stud 3, traditional stud
Clearance fit between 3 and installation cavity 10, the upper end have C0.7+-0.02Chamfering, the diameter of installation cavity 10 is Φ A, is usually existed
Between 3.04mm~3.06mm, and the diameter of traditional stud 3 is in 3.02mm~3.04mm, and traditional stud 3 is from the lower section of ceramic body 1
It is inserted into installation cavity 10, the upper end end face of the prominent ceramic body 1 in head adds because existing between traditional stud 3 and installation cavity 10
Work tolerance, so that practical the two is clearance fit, there is gap G therebetween.
It mainly include aluminum mother plate L with reference to lower electrode structural schematic diagram shown in fig. 5, electrode bar is vertically arranged to aluminium
In base material L, wherein the end face of the prominent aluminum mother plate L in stud upper end, forms conducting end and W layers of contact jaw, sets above aluminum mother plate L
There is insulating coating T, has in insulating coating T and connect with aluminum mother plate L tungsten layer W disposed in parallel, conducting end and the tungsten layer on stud top
Touching powers to it.
With reference to Fig. 8, because insulating coating T is after electrode bar is installed, on the surface of ceramic body 1 and aluminum mother plate L
Carry out insulating coating T spraying layer by layer, if using the structure of traditional electrode stick because gap G there are if formed insulation apply
Layer finds that gap G is that electrode bar line is caused to split and stud and base material short circuit, the main original of Damage to insulation coating T according to experiment
Cause makes a concrete analysis of as follows, the coating structure compactness ratio because insulating coating easily forms recess at the G of gap, at the position
Other faces are low, and out-of-flatness, and in use process, stud is typically subjected to the up to high voltage of 3000V, and because of coating structure
Low compactness, electric current can puncture the insulating coating at the G of gap and short circuit occurs with base material, to form electric current on insulating coating
Puncture mark region, the final service life for shortening electrode bar.
Herein on basis, referring to figs. 1 to the electrode bar for lower electrode of the application shown in fig. 6, mainly wrap
Ceramic body 1 and stud 2 are included, the stud 2 of the present embodiment and the main distinction of traditional stud 3 are that stud 2 is split type structure,
It mainly includes drawing dateline 20 and electric conductor 21, the substantially cylindrical structure of electric conductor 21, draws the structure and tradition titanium of dateline 20
The electricity-leading end of stick 3 is similar, but the dateline 20 that draws in the present embodiment has the fit structure that can be detachably connected with electric conductor 21.
The diameter of electric conductor 21 is 3.02mm~3.04mm, has installation cavity 10 in ceramic body 1 as traditional stud 3,
The diameter of installation cavity 10 is Φ A, usually between 3.04mm~3.06mm, the following table of the prominent ceramic body 1 in the lower end of electric conductor 21
After face with draw dateline 20 and be detachably connected, the upper surface of the prominent ceramic body 1 in the upper end, and end end is equipped with power supply on it
First 22, the structure of power supply head 22 is similar to traditional contact jaw of stud 3, but bigger than traditional, can shelter from and lead completely
Gap G between electric body 21 and installation cavity 10.
As shown in figure 4, electric conductor 21 is threadedly coupled with the use of dateline 20 is drawn in the present embodiment, the lower end tool of electric conductor 21
There is external screw thread, and draw the counterbore for being equipped in dateline 20 and being adapted with electric conductor 21, should have in being matched with external screw thread
Screw thread, and power supply head 22 and electric conductor 21 are integrally formed, power supply head 22 is in circular cone shape structure, and diameter is along far from ceramic body 1
Direction gradually become smaller, at the top of diameter it is minimum, but this minimum diameter is greater than or equal to the diameter of electric conductor 21, bottom
Diameter it is maximum, and form round shielding surface 220, the diameter of round shielding surface 220 is Φ B, and Φ B is greater than Φ A, to can realize
Gap G is blocked, at the same time, round shielding surface 220 is also close to the end face of ceramic body 1.
In the application after realizing the blocking of gap G, preferably Φ B is 5.02mm~5.04mm, fully considers electrode
The conductive condition of stick ensures that contact jaw 22 and tungsten layer W contact plane increase than traditional 3 contact jaw of stud and tungsten layer W contact surface,
The contact area of the traditional structure compared with W layers of contact area of power supply head 22 increases 2 times, and 22 chamfering of power supply head and traditional stud 3 supply
The chamfering at dateline end is identical, while the pottery opposite with traditional 3 power supply head of stud with respect to 1 end face rising height of ceramic body of power supply head 22
The rising height of porcelain body 1 is identical, can avoid being effectively ensured 3 under ceramic body 1, tungsten layer the W i.e. change of aluminum mother plate L in this way
The thickness and lower electrode finished product thickness of spray coating (2 insulating layers and 1 tungsten layer) reduce research and development or production cost, while
It is more advantageous to and better judgement is made to the improvement of electrode bar.
It mainly include integrally formed draw in addition, drawing the substantially " T " shape cylinder table structure of dateline 20 in the present embodiment
Electric portion 200 and fixed part 201, draw electric portion 200 and fixed part 201 is cylindrical, and the two is coaxially coaxially disposed with electric conductor 21,
Internal thread counterbore of wherein having is located in fixed part 201, and the diameter of fixed part 201 is greater than the diameter for drawing electric portion 200, wherein
The diameter of fixed part 201 is Φ C, and Φ C is also simultaneously greater than Φ A, to realize that fixed stud is outstanding compared to 1 lower surface of ceramic body
Highly.
The lower end of electrode bar is additionally provided with pedestal 4, as shown, pedestal 4 is substantially cylindrical, and coaxially sets with ceramic body 1
It sets, pedestal 4 is set in the outer circumferential of ceramic body 1, is usually bonded by glue, and electrode bar mainly passes through pedestal 4 and consolidates when installation
In aluminum mother plate L, and draw dateline 20 then through the lower surface for going out pedestal 4, is connected with external power supply.
Referring to figs. 1 to Fig. 6, during installation, first electric conductor 21 is inserted into ceramic body 1 from top to bottom and then passes through screw thread
It is fixedly connected with dateline 20 is drawn, and ensures that gap G is blocked in the round completion of shielding surface 220, then glued pedestal 4 using glue special
The lower end for being fixed on ceramic body 1 is connect, is refilled in aluminum mother plate L in special hole after waiting glue to harden, is also bonded using glue special.
Then the coating that insulating coating T is carried out in the upper surface of aluminum mother plate L, forms insulating coating T2 as shown in FIG. 6, because
Be blocked for gap G, insulating coating T2 can only confess the side wall horizontal coating outward of dateline 22, and level is uniform, integrality compared with
It is good, there is good insulation effect, avoid damage of the breakdown of the gap end G to insulating coating T2, and then effectively improve down
The service life of portion's electrode.
Finally, it should be noted that foregoing description is only the preferred embodiment of the utility model, the common skill of this field
Art personnel are under the enlightenment of the utility model, under the premise of without prejudice to the utility model aims and claim, can make
Multiple similar expressions, such transformation are each fallen within the protection scope of the utility model.
Claims (7)
1. a kind of electrode bar for lower electrode, including ceramic body (1), stud (2) and pedestal (4), it is characterised in that: described
Stud (2) includes electric conductor (21), and be detachably arranged at electric conductor (21) one end draw dateline (20), wherein electric conductor
(21) cylindrical, the pedestal (4) is placed on the lower end of ceramic body (1) admittedly, and is located at the outer circumferential for drawing dateline (20), described
Draw the lower surface that dateline (20) run through pedestal (4), the installation cavity (10) for installing stud (2) be equipped in the ceramic body (1),
The diameter of the installation cavity (10) is Φ A；
The electric conductor (21) has the power supply head (22) being in the form of a column, power supply head (22) dew far from the one end for drawing dateline (20)
Installation cavity (10) out, and be close to the end face of ceramic body (1), one end that power supply head (22) is close to ceramic body (1) has round hide
Block face (220), the diameter of the circle shielding surface (220) are Φ B, and the Φ B is greater than Φ A.
2. the electrode bar according to claim 1 for lower electrode, it is characterised in that: the power supply head (22) and conduction
Body (21) is integrally formed.
3. the electrode bar according to claim 1 or 2 for lower electrode, it is characterised in that: the power supply head (22) is in
Pyramidal, diameter gradually becomes smaller along the direction far from ceramic body (1).
4. the electrode bar according to claim 3 for lower electrode, it is characterised in that: the minimum of the power supply head (22)
Diameter is greater than the diameter of electric conductor (21).
5. the electrode bar according to claim 1 for lower electrode, it is characterised in that: described to draw dateline (20) and conduction
Body (21) is threadedly coupled.
6. being used for the electrode bar of lower electrode according to claim 1 or 5, it is characterised in that: the dateline (20) that draws is in
" T " font comprising it is integrally formed to draw electric portion (200) and fixed part (201), it is described to draw electric portion (200) and fixed part (201)
It is cylindrical, and be coaxially disposed, the diameter of the fixed part (201) is Φ C, and the Φ C is greater than Φ A.
7. the electrode bar according to claim 3 for lower electrode, it is characterised in that: the diameter of the electric conductor (21)
It is 5.02mm~5.04mm for 3.02mm~3.04mm, the Φ B.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822204532.3U CN209104116U (en) | 2018-12-26 | 2018-12-26 | Electrode bar for lower electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822204532.3U CN209104116U (en) | 2018-12-26 | 2018-12-26 | Electrode bar for lower electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209104116U true CN209104116U (en) | 2019-07-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822204532.3U Active CN209104116U (en) | 2018-12-26 | 2018-12-26 | Electrode bar for lower electrode |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109742008A (en) * | 2018-12-26 | 2019-05-10 | 重庆臻宝实业有限公司 | High life electrode bar |
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2018
- 2018-12-26 CN CN201822204532.3U patent/CN209104116U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109742008A (en) * | 2018-12-26 | 2019-05-10 | 重庆臻宝实业有限公司 | High life electrode bar |
| CN109742008B (en) * | 2018-12-26 | 2024-03-05 | 重庆臻宝科技股份有限公司 | Long-life electrode rod |
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Address after: 401326 no.66-72, sendi Avenue, Xipeng Town, Jiulongpo District, Chongqing Patentee after: Chongqing Zhenbao Technology Co.,Ltd. Address before: 401326 no.66-72, sendi Avenue, Xipeng Town, Jiulongpo District, Chongqing Patentee before: CHONGQING ZHENBAO INDUSTRIAL Co.,Ltd. |