CN209098809U - A kind of the ferrule structure and Quartz stove tube of Quartz stove tube - Google Patents
A kind of the ferrule structure and Quartz stove tube of Quartz stove tube Download PDFInfo
- Publication number
- CN209098809U CN209098809U CN201821922665.8U CN201821922665U CN209098809U CN 209098809 U CN209098809 U CN 209098809U CN 201821922665 U CN201821922665 U CN 201821922665U CN 209098809 U CN209098809 U CN 209098809U
- Authority
- CN
- China
- Prior art keywords
- cooling
- ring
- water
- ferrule structure
- sealing ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 238000001816 cooling Methods 0.000 claims abstract description 81
- 238000007789 sealing Methods 0.000 claims abstract description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 60
- 239000000498 cooling water Substances 0.000 claims description 19
- 210000002421 cell wall Anatomy 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 210000000746 body region Anatomy 0.000 abstract description 4
- 239000002826 coolant Substances 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
- 210000004027 cell Anatomy 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 241000233855 Orchidaceae Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Gasket Seals (AREA)
Abstract
The utility model belongs to solar battery sheet manufacturing technology field, disclose the ferrule structure and Quartz stove tube of a kind of Quartz stove tube, the ferrule structure of Quartz stove tube includes fire door flange, cooling ring and sealing ring, wherein, fire door flanged joint offers cooling cavities in nozzle periphery, the inside of cooling ring；Sealing ring is sheathed on the periphery of cooling ring, can offset with fire door flange.The utility model is by connecting cooling ring in the nozzle periphery of boiler tube ontology, and the sealing ring that can be offseted with fire door flange is arranged in the periphery of cooling ring, it will effectively can be sealed between boiler tube ontology and fire door flange, and the side of the close boiler tube ontology of the direct coolant seal circle of cooling ring, sealing ring be can be effectively reduced close to the temperature of boiler tube body regions, improve the sealing ring service life.
Description
Technical field
The utility model relates to solar battery sheet manufacturing technology field more particularly to a kind of ferrules of Quartz stove tube
Structure and Quartz stove tube.
Background technique
Plasma enhanced chemical vapor deposition method (Plasma Enhanced Chemical Vapor Deposition,
It PECVD) is important link in cell piece back passivation production process, principle is to make to form containing film by microwave or radio frequency etc.
The gas ionization of atom is being partially formed plasma, and plasma chemistry activity is very strong, it is easy to react, in base
On piece deposits desired film.
In cell piece manufacture, tubular type PECVD use Quartz stove tube as reaction cavity, and Quartz stove tube and fire door, method
Air-tightness between orchid becomes particularly critical.Current equipment uses rubber seal snare on Quartz stove tube more, outside peace
Metal flange is filled to seal Quartz stove tube and metal fire door.And because the intracorporal temperature of quartz cavity is far beyond traditional rubber sealing ring
Tolerable temperature, therefore equipment is cooled down frequently with the flange with water cooling with the working position to sealing ring, improves its sealing ring longevity
Life.When using water-cooled metal flange arrangement, because can not direct coolant seal circle contact surface, therefore be difficult to sealing ring contact surface
Temperature is reduced to ideal temperature.As technological temperature is continuously improved, the service life of rubber seal is shorter and shorter, keeps technique hair in check
Exhibition.
Utility model content
One of the utility model is designed to provide a kind of ferrule structure of Quartz stove tube, can be effectively reduced close
Seal improves the sealing ring service life close to the temperature of boiler tube body regions.
For this purpose, the utility model uses following technical scheme:
A kind of ferrule structure of Quartz stove tube, the fire door flange at the nozzle including being set to boiler tube ontology are described
Ferrule structure further include:
Cooling ring, is connected to the periphery of the nozzle, and the inside of the cooling ring offers cooling cavities；And
Sealing ring is sheathed on the periphery of the cooling ring, can offset with the fire door flange.
Preferably, the periphery of the cooling ring is provided with annular groove, the sealing ring is in the annular groove.
Preferably, the cell wall of the annular groove is adapted with the shape of the sealing ring.
Preferably, the cooling ring is welded in periphery or the cooling ring and the boiler tube ontology one of the nozzle
It is body formed.
Preferably, be provided with inlet and outlet on the side far from the nozzle of the cooling ring, it is described into
The mouth of a river and the water outlet are connected to the cooling cavities.
Preferably, the cooling cavities is internally provided with block, the block is located at the water inlet and the water outlet
Between mouthful.
Preferably, the water inlet and the water outlet are provided with transfer tube, the transfer tube is along far from described
The direction of the central axis of cooling ring is bent.
Preferably, the cooling ring further include the cooling water supply unit being connect with the water inlet and with the water outlet
The hot-water collection device of mouth connection.
Preferably, being provided between the hot-water collection device and the cooling water supply unit for by the hot water
The cooling device of hot water cooling in collection device, the cooling device are separately connected the hot-water collection device and the cooling
Water supply.
Another of the utility model is designed to provide a kind of Quartz stove tube, can be effectively reduced sealing ring close to boiler tube
The temperature of body regions improves the sealing ring service life.
For this purpose, the utility model uses following technical scheme:
A kind of Quartz stove tube, including above-mentioned ferrule structure.
The utility model has the beneficial effects that
The utility model provides the ferrule structure and Quartz stove tube of a kind of Quartz stove tube, by boiler tube ontology
Nozzle periphery connects cooling ring, and the sealing ring that can be offseted with fire door flange is arranged in the periphery of cooling ring, can be effectively
It will be sealed between boiler tube ontology and fire door flange, and the side of the close boiler tube ontology of the direct coolant seal circle of cooling ring, it can
Sealing ring is effectively reduced close to the temperature of boiler tube body regions, improves the sealing ring service life.
Detailed description of the invention
Fig. 1 is that the structure when ferrule structure of Quartz stove tube provided by the utility model does not show fire door flange is shown
It is intended to；
Fig. 2 is that the part when ferrule structure of Quartz stove tube provided by the utility model does not show fire door flange is tied
Structure schematic diagram；
Fig. 3 is that the section when ferrule structure of Quartz stove tube provided by the utility model does not show sealing ring is illustrated
Figure；
Fig. 4 is the schematic cross-section of cooling ring provided by the utility model and sealing ring along gyratory directions；
Fig. 5 is that the structural schematic diagram after sealing ring is removed in Fig. 4.
In figure:
1, boiler tube ontology；11, nozzle；2, cooling ring；21, cooling cavities；22, water inlet；23, water outlet；24, block；
25, transfer tube；26, annular groove；3, sealing ring.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
Tubular type PECVD is in cell piece back passivation production process, which to carry out in Quartz stove tube.The utility model
Provide a kind of Quartz stove tube, Quartz stove tube includes the fire door at boiler tube ontology and the nozzle for being set to boiler tube ontology, due to
When carrying out tubular type PECVD, boiler tube ontology domestic demand is passed through process gas, it is therefore desirable to guarantee that the air-tightness of Quartz stove tube is good.
For this purpose, the utility model additionally provides a kind of ferrule structure of Quartz stove tube, as shown in Figure 1-Figure 3, nozzle
Sealing structure includes fire door flange (not shown), cooling ring 2 and the sealing ring 3 being set at the nozzle 11 of boiler tube ontology 1,
Cooling ring 2 is connected to 11 periphery of nozzle of boiler tube ontology 1, and the inside of cooling ring 2 offers cooling cavities 21, for being passed through cooling
Water；Sealing ring 3 is sheathed on the periphery of cooling ring 2, can offset with fire door flange, effectively by boiler tube ontology 1 and fire door flange
Between seal.Sealing ring 3 is made of rubber.The side of the close boiler tube ontology 1 of the direct coolant seal circle 3 of cooling ring 2, Neng Gouyou
Effect reduces sealing ring 3 close to the temperature in 1 region of boiler tube ontology, improves 3 service life of sealing ring.
Specifically, water inlet 22 and water outlet 23,22 He of water inlet are provided on the side of the separate nozzle 11 of cooling ring 2
Water outlet 23 is connected to cooling cavities 21.Cooling ring 2 further include the cooling water supply unit being connect with water inlet 22 and with go out
The hot-water collection device that the mouth of a river 23 connects.Water inlet 22 connects cooling water supply unit, for cooling water to be passed through cooling cavities
21, cooling water flows out after flowing in cooling cavities 21 from water outlet 23, and water outlet 23 connects hot-water collection device, to will make
Recovery of the hot water after.Hot-water collection device is connect with cooling water supply unit, and cooling water confession can be reentered after hot water is cooling
It answers in device and is recycled.
In order to promote the hot water in hot-water collection device cooling, it is arranged between hot-water collection device and cooling water supply unit
There is cooling device, cooling device is separately connected hot-water collection device and cooling water supply unit.Cooling device can receive hot water
Hot water in acquisition means is quickly cooled down, so that water is recycled rapidly next time.Hot water can be saved by the way that cooling device is arranged
Reduce the usage amount of water cooling time.
Transfer tube 25 is provided at water inlet 22 and water outlet 23, transfer tube 25 is along the central axis far from cooling ring 2
Direction bending.Transfer tube 25 is connect with hot-water collection device or cooling water supply unit.Transfer tube bending setting can be avoided
Interfere or touch with boiler tube ontology 1, so that Inlet and outlet water is convenient.
In the present embodiment, water inlet 22 is closer with water outlet 23, to make stream of the cooling water in cooling cavities 21
Dynamic have a directionality, and in the present embodiment, cooling cavities 21 is internally provided with block 24 (referring to shown in Fig. 3), block 24 be located at into
Between the mouth of a river 22 and water outlet 23.By the way that block 24 is arranged, after capable of guaranteeing cooling water from water inlet 22 into cooling cavities 21,
It is flowed along the direction away from block 24, is flowed out after effectively flowing through entire cooling cavities 21 from water outlet 23, improve cooling water
Utilization efficiency.
It is firm to guarantee to connect between the two since cooling ring 2 and boiler tube ontology 1 are directly connected in the present embodiment, it is cold
But ring 2 is welded in the periphery of nozzle 11.By welding, the connective stability of cooling ring 2 Yu boiler tube ontology 1 is strengthened.Meanwhile being
Guarantee the air-tightness between cooling ring 2 and boiler tube ontology 1, seamless welding can be used.In addition, cooling ring 2 and boiler tube ontology 1 can also
To be to be integrally formed.
Cooling ring 2 is made of quartz.Quartz have physico-chemical property it is stable, not with work used in cell piece passivating process
The characteristics of skill gas reaction, can reduce the damage of cooling ring 2 using cooling ring 2 made of quartz, improve the longevity of cooling ring 2
Life reduces production cost.
As shown in Figure 4 and Figure 5, since sealing ring 3 is sheathed on the outer wall of cooling ring 2, to avoid sealing ring 3 in cooling ring 2
Upper stress passage, the outer wall of cooling ring 2 are provided with annular groove 26, and sealing ring 3 is in annular groove 26.To improve cooling ring
The cell wall of the cooling effect of 2 pairs of sealing rings 3, annular groove 26 is adapted with the shape of sealing ring 3.For example, the section of sealing ring 3
Shape is circle, then the cross sectional shape of annular groove 26 is the semicircle cooperated with sealing ring 3.Pass through close patch between the two
Close, cooling ring 2 can the heat effectively to sealing ring 3 conduct, quickly sealing ring 3 is cooled down.
Obviously, the above embodiments of the present invention is used for the purpose of clearly illustrating examples for clearly illustrating the present invention, and
It is not limitations of the embodiments of the present invention.For those of ordinary skill in the art, in above description
On the basis of can also make other variations or changes in different ways.There is no need and unable to give all embodiments
Exhaustion.Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention etc., should be included in
Within the protection scope of the utility model claims.
Claims (10)
1. a kind of ferrule structure of Quartz stove tube, including the fire door flange being set at the nozzle (11) of boiler tube ontology (1),
It is characterized in that, the ferrule structure further include:
Cooling ring (2), is connected to the periphery of the nozzle (11), and the inside of the cooling ring (2) offers cooling cavities (21)；
And
Sealing ring (3), is sheathed on the periphery of the cooling ring (2), can offset with the fire door flange.
2. ferrule structure according to claim 1, which is characterized in that the periphery of the cooling ring (2) is provided with ring
Connected in star (26), the sealing ring (3) is in the annular groove (26).
3. ferrule structure according to claim 2, which is characterized in that the cell wall of the annular groove (26) with it is described
The shape of sealing ring (3) is adapted.
4. ferrule structure according to claim 1, which is characterized in that the cooling ring (2) is welded in the nozzle
(11) periphery or the cooling ring (2) and the boiler tube ontology (1) is integrally formed.
5. ferrule structure according to claim 1, which is characterized in that the separate nozzle of the cooling ring (2)
(11) water inlet (22) and water outlet (23) are provided on side, the water inlet (22) is connected to the water outlet (23)
In the cooling cavities (21).
6. ferrule structure according to claim 5, which is characterized in that the cooling cavities (21) is internally provided with gear
Block (24), the block (24) is between the water inlet (22) and the water outlet (23).
7. ferrule structure according to claim 5, which is characterized in that the water inlet (22) and the water outlet
(23) it is provided at transfer tube (25), the transfer tube (25) is curved along the direction of the central axis far from the cooling ring (2)
Folding.
8. ferrule structure according to claim 5, which is characterized in that the cooling ring (2) further include with it is described into
The cooling water supply unit of the mouth of a river (22) connection and the hot-water collection device being connect with the water outlet (23).
9. ferrule structure according to claim 8, which is characterized in that the hot-water collection device and the cooling water
It is provided between feeding mechanism for the cooling device that the hot water in the hot-water collection device is cooling, the cooling device point
The hot-water collection device and the cooling water supply unit are not connected.
10. a kind of Quartz stove tube including ferrule structure as claimed in any one of claims 1-9 wherein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821922665.8U CN209098809U (en) | 2018-11-21 | 2018-11-21 | A kind of the ferrule structure and Quartz stove tube of Quartz stove tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821922665.8U CN209098809U (en) | 2018-11-21 | 2018-11-21 | A kind of the ferrule structure and Quartz stove tube of Quartz stove tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209098809U true CN209098809U (en) | 2019-07-12 |
Family
ID=67160881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821922665.8U Expired - Fee Related CN209098809U (en) | 2018-11-21 | 2018-11-21 | A kind of the ferrule structure and Quartz stove tube of Quartz stove tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209098809U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112391610A (en) * | 2021-01-21 | 2021-02-23 | 北京凯德石英股份有限公司 | Quartz cooling tube and production equipment thereof |
-
2018
- 2018-11-21 CN CN201821922665.8U patent/CN209098809U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112391610A (en) * | 2021-01-21 | 2021-02-23 | 北京凯德石英股份有限公司 | Quartz cooling tube and production equipment thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190712 Termination date: 20211121 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |