CN209076639U - A kind of metallo-organic compound container - Google Patents
A kind of metallo-organic compound container Download PDFInfo
- Publication number
- CN209076639U CN209076639U CN201821835577.4U CN201821835577U CN209076639U CN 209076639 U CN209076639 U CN 209076639U CN 201821835577 U CN201821835577 U CN 201821835577U CN 209076639 U CN209076639 U CN 209076639U
- Authority
- CN
- China
- Prior art keywords
- organic compound
- metallo
- partition
- output channel
- tank body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012159 carrier gas Substances 0.000 claims abstract description 28
- 238000005192 partition Methods 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 4
- 150000002902 organometallic compounds Chemical class 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 230000007547 defect Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 4
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003570 air Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- OQOGEOLRYAOSKO-UHFFFAOYSA-N 1,1-dichloro-1-nitroethane Chemical compound CC(Cl)(Cl)[N+]([O-])=O OQOGEOLRYAOSKO-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- ILXWFJOFKUNZJA-UHFFFAOYSA-N ethyltellanylethane Chemical group CC[Te]CC ILXWFJOFKUNZJA-UHFFFAOYSA-N 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- PORFVJURJXKREL-UHFFFAOYSA-N trimethylstibine Chemical compound C[Sb](C)C PORFVJURJXKREL-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The utility model relates to metal organic chemical compound vapor deposition technologies, specially metallo-organic compound container, including tank body, it is characterized in that the container further includes intake valve and delivery valve, wherein: top of the tank, which runs through, intake valve, delivery valve, delivery valve is connected output channel, and output channel extends to above tank base, tank base corresponding position arc groove；The horizontal partition of setting in tank body, output channel runs through partition, the guide ring with sealing ring is arranged in partition and output channel contact position and partition periphery, make partition along inner tank wall vertical sliding motion by guide ring, and tank interior is divided into the carrier gas chamber on top and the metallo-organic compound chamber of lower part, intake valve and carrier gas chamber, delivery valve pass through output channel and metallo-organic compound chamber.The defects of the device avoids the impure bring pollution sources of carrier gas, while the ratio for also avoiding metallo-organic compound output is non-constant.
Description
Technical field
The present invention relates to metal organic chemical compound vapor deposition technologies, more particularly to realize Metallo-Organic Chemical Vapor deposition
The vapour pressure stabilization and packaging container of technical process, belong to photoelectron new material technology field.
Background technique
Metallo-organic compound is the important source material that photoelectron material is grown in semicon industry, and most metals organise
Closing object is all inflammable and explosive chemicals, room temperature can spontaneous combustion, vigorous reaction easily occurs with air and water etc..To processing technology and control
System requires high.Especially oled manufacturing field, in process, it is ensured that into the metallo-organic compound of reaction chamber
Flow it is whether stable, and cannot containing etc. exogenous impurity ingredient influential on product quality.
And now most of metallo-organic compound imports reaction chamber and carries out product manufacturing, side as presoma
Method is mainly entered by carrier gas, and carrier gas enters reaction chamber after mixing with metallo-organic compound.This method structure is simple, at
This is low, easy to accomplish, but there are problems that following three: 1) most enterprises carrier gas generally passes through pipeline, is used for a long time
The impurity for remaining or generating in pipeline can be carried and enter precursor storage tank, block gas circuit, impurity, which enters reaction chamber, to be made
At the mass defect of product；2) degree of purity of pipeline carrier gas is of less demanding, will lead to containing other compositions gas and sends out with presoma
Raw reaction reduces forerunner's weight, to cause product quality defect, or leads to dangerous generation；3) carrier gas enters presoma and deposits
After storage tank, the discharge that not can guarantee presoma is constant, with the entrance of carrier gas, since the partial pressure of each ingredient is inconsistent, forerunner
There is non-constant or even decline in the discharge of body, leads to finished product rate decline and quality problems.
In addition, existing metallo-organic compound container its filling metallo-organic compound process is very complicated cuts danger,
It needs to remove original metallo-organic compound, is filling new dress metallo-organic compound.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of metallo-organic compound container.
Metallo-organic compound container of the invention, including tank body, it is characterised in that the container further includes intake valve and defeated
Valve out, in which:
Top of the tank is through having intake valve, delivery valve, and delivery valve is connected output channel, and output channel extends to tank base
Top, tank base corresponding position arc groove；The horizontal partition of setting in tank body, output channel run through partition, partition and output
The guide ring with sealing ring is arranged in tube contacts position and partition periphery, slides partition vertically along inner tank wall by guide ring
It is dynamic, and tank interior is divided into the carrier gas chamber on top and the metallo-organic compound chamber of lower part, intake valve and carrier gas
Chamber, delivery valve pass through output channel and metallo-organic compound chamber.
Further, carrier gas cavity indoor top is additionally provided with range sensor, and range sensor is arranged vertically downward, can be with
Metal-organic surplus is calculated by the position of partition.
Further, if dry temperature sensor is arranged in metallo-organic compound chamber inner wall, to measure interior metal
The temperature of organic compound.
When work, carrier gas enters carrier gas chamber from intake valve, and partition is pushed away down so that metallo-organic compound from
Output channel output, added metal organic compound then reverse operating；Carrier gas cavity can be calculated according to range sensor
Indoor carrier gas volume subtracts carrier gas volume by total volume and metal-organic surplus is calculated.
Specifically, the metallo-organic compound of metallo-organic compound chamber housing includes but is not limited to trimethyl aluminium, three
Aluminium ethide, trimethyl indium, trimethyl gallium, triethyl-gallium, trimethylantimony, antimony triethyl, di-t-butyl tellurium, tellurium diethyl and two cyclopentadienyls
Magnesium；The carrier gas being passed through in carrier gas cavity room includes but is not limited to air, nitrogen, hydrogen, argon gas and helium.
Structure design is simple, and easy to process, the effective volume of container can be made full use of, especially carrier gas not with gold
Belong to organic compound to be mixed, avoids the impure bring pollution sources of carrier gas, while also avoiding original carrier gas and metal to have
The defects of ratio that bring metallo-organic compound exports after the mixing of machine compound is non-constant.
Detailed description of the invention
Fig. 1 is a kind of metallo-organic compound container of the invention and its schematic diagram of application structure.
In figure, tank body 1, arc groove 2, partition 3, guide ring 4, range sensor 5, intake valve 6, delivery valve 7, efferent duct
Road 8.
Specific embodiment
Embodiment 1: attached drawing, metallo-organic compound container, including tank body 1 are referred to, it is characterised in that the container further includes
Intake valve 6 and delivery valve 7, in which: through having intake valve 6, delivery valve 7 at the top of tank body 1, delivery valve 7 is connected output channel 8, defeated
Pipeline 8 extends to above 1 bottom of tank body out, 1 bottom corresponding position arc groove 2 of tank body；The horizontal partition 3 of setting, defeated in tank body 1
Pipeline 8 runs through partition 3, partition 3 and 8 contact position of output channel and 3 guide ring 4 of the periphery setting with sealing ring of partition out,
Partition 3 is slided by guide ring 4, and the carrier gas chamber on top and the Organometallic of lower part will be divided into inside tank body 1
Object chamber, intake valve 6 and carrier gas chamber are closed, carrier gas cavity indoor top is additionally provided with range sensor 5；Delivery valve 7 passes through
Output channel 8 and metallo-organic compound chamber, metallo-organic compound chamber inner wall are additionally provided with several temperature sensing
Device.
Claims (3)
1. metallo-organic compound container, including tank body (1), it is characterised in that the container further includes intake valve (6) and delivery valve
(7), in which: through having intake valve (6), delivery valve (7) at the top of tank body (1), delivery valve (7) is connected output channel (8), efferent duct
Road (8) extends to above tank body (1) bottom, tank body (1) bottom corresponding position arc groove (2)；In tank body (1) setting it is horizontal every
Plate (3), output channel (8) run through partition (3), and partition (3) and output channel (8) contact position and partition (3) periphery are arranged
Guide ring (4) with sealing ring makes partition (3) along tank body (1) inner wall vertical sliding motion by guide ring (4), and will be in tank body (1)
Part is divided into the carrier gas chamber on top and the metallo-organic compound chamber of lower part, intake valve (6) and carrier gas chamber, defeated
Valve (7) passes through output channel (8) and metallo-organic compound chamber out.
2. metallo-organic compound container as described in claim 1, it is characterised in that carrier gas cavity indoor top be additionally provided with away from
From sensor (5), range sensor (5) is arranged vertically downward.
3. metallo-organic compound container as described in claim 1, it is characterised in that metallo-organic compound chamber inner wall is set
If setting dry temperature sensor (), to measure the temperature of interior metal organic compound.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821835577.4U CN209076639U (en) | 2018-11-08 | 2018-11-08 | A kind of metallo-organic compound container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821835577.4U CN209076639U (en) | 2018-11-08 | 2018-11-08 | A kind of metallo-organic compound container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209076639U true CN209076639U (en) | 2019-07-09 |
Family
ID=67123135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821835577.4U Expired - Fee Related CN209076639U (en) | 2018-11-08 | 2018-11-08 | A kind of metallo-organic compound container |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209076639U (en) |
-
2018
- 2018-11-08 CN CN201821835577.4U patent/CN209076639U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190709 |