CN209060912U - A kind of new-type fluorine gas and inert gas mixing arrangement - Google Patents

A kind of new-type fluorine gas and inert gas mixing arrangement Download PDF

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Publication number
CN209060912U
CN209060912U CN201821198948.2U CN201821198948U CN209060912U CN 209060912 U CN209060912 U CN 209060912U CN 201821198948 U CN201821198948 U CN 201821198948U CN 209060912 U CN209060912 U CN 209060912U
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gas
tank body
air inlet
fluorine gas
new
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CN201821198948.2U
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林百志
张奎
刘彬
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Fujian Deer Technology Corp
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Fujian Deer Technology Corp
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Abstract

The utility model discloses a kind of new-type fluorine gas and inert gas mixing arrangement, including tank body, tank body top is equipped with safety valve, being equipped in the middle part of tank body and draws sample mouth at air inlet one, draw the opposite side that sample mouth is located at air inlet one, the lower part of tank body is equipped with gas outlet and air inlet two, and tank base is equipped with bracket.The utility model can reduce the compressed possibility of fluorine gas by the easily controllable flow of negative pressure inlet, and then improve the safety of operation, and gas can quickly be spread, and be conducive to mixing more evenly.

Description

A kind of new-type fluorine gas and inert gas mixing arrangement
Technical field
The utility model relates to gas mixing technology fields, it particularly relates to a kind of mixed for fluorine gas and inert gas The device of conjunction.
Background technique
For fluorine gas because of its special physicochemical properties, application is more and more extensive, can be used as oxidant, fluorization agent, refrigerant, Plasma etching.But the chemical property of fluorine gas is very active, have very strong oxidisability, in addition to perfluorochemical, can with it is several All organic matters and inorganic matter reaction.When practical application, elder generation is needed to mix with other inert gases, reduces the concentration of fluorine gas, The safety for guaranteeing transport and using.
In a conventional method all there is certain deficiency in mixed gas, brings difficulty for the mixing of fluorine gas, especially pacifies Full problem.Existing way is substantially filled with object gas into mixing duct or blending tank using sequence, according to different component Partial pressure controls the ratio of configuration.It is such there is no corrosion or combustibility if the gas property of each component is stablized Mode is feasible.But if being used for special gas, such as inflammable and explosive, high toxicity or strong oxidizing property gas are just extremely dangerous.It presses According to related regulation, fluorine gas is unable to pure simple substance and fills, transports and use, it is necessary to be mixed into other inert gases to reduce ability after risk Use, if directly mixed with pipeline, need to fluorine gas pressurize, misoperation or have leakage will cause fluorine gas burning or occur quick-fried It is fried;It being mixed with blending tank, volume is excessive, if mixing other inert gases after also pressurizeing to fluorine gas using usual method, by In the special nature of fluorine gas, other gases are filled in the fluorine gas of elevated pressures, it is possible to which compressed fluorine causes it to divide Rise, is easy layering, brings great security risk.
Utility model content
For above-mentioned technical problem in the related technology, the utility model proposes a kind of new-type fluorine gas and inert gas are mixed It attaches together and sets, the above-mentioned deficiency of the prior art can be overcome.
To realize the above-mentioned technical purpose, the technical solution of the utility model is achieved in that
A kind of new-type fluorine gas and inert gas mixing arrangement, including tank body, tank body top are equipped with safety valve, in the middle part of tank body Be equipped with and air inlet one and draw sample mouth, draw the opposite side that sample mouth is located at air inlet one, the lower part of tank body is equipped with gas outlet and air inlet Two, tank base is equipped with bracket.
Preferably, the tank interior is equipped with nozzle, and air inlet one is connect by pipeline with nozzle.
Preferably, the lower part of tank body is equipped with temperature-measuring port.
Tank body is for containing mixed gas;Air inlet one is inert gas air inlet;Safety valve is safety device, can be prevented Charge pressure is out of control to cause danger;Nozzle can make inert gas with injecting type air inlet, be conducive to be uniformly mixed;Gas outlet is for connecing pumping Empty set system, and as gaseous mixture gas outlet;Temperature-measuring port installs temperature transmitter, for detecting tank body temperature;Draw sample mouth to be used for Connect pressure gauge and analytical sampling pipeline;Air inlet two is fluorine gas air inlet, and bracket is used to support tank body.
The utility model uses negative pressure hybrid mode, will first vacuumize in tank body, then be passed through the pure fluorine gas purified, remembers Record increased fluorine gas partial pressure in tank body, partial pressure of the increased numerical value of pressure as fluorine gas in tank body, it is desirable that be filled with tank body after fluorine gas Interior pressure keeps negative pressure state in tank body still less than atmospheric pressure;It is then passed through rapidly using mode of jet and needs mixed inertia Gas, controls the growth of pressure in tank body, and partial pressure of the value added of pressure as inert gas utilizes the change of mixing pressure inside the tank Change converses the amount that mixed phase answers gas, and mixed ratio of the dividing ratios as two kinds of gas reaches pressure needed for configuration proportion Mixing is completed afterwards;It reuses isolation film vane compressor gaseous mixture is filled in pressure vessel.
The utility model has the beneficial effects that the compressed possibility of fluorine gas can be reduced by the easily controllable flow of negative pressure inlet Property, and then the safety of operation is improved, and gas can quickly be spread, be conducive to mixing more evenly;Gas access uses in tank body Nozzle arrangements, the sprayable formula outflow of air-flow, can accelerate gas mixing;The mountable temperature transmitter of temperature-measuring port detects temperature in tank body Degree, improves the safety of operation.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model Some embodiments for those of ordinary skill in the art without creative efforts, can also be according to this A little attached drawings obtain other attached drawings.
Fig. 1 is the structure of the new-type fluorine gas and inert gas mixing arrangement of one kind according to the utility model embodiment Schematic diagram;
In figure: 1, tank body, 2, air inlet one, 3, safety valve, 4, nozzle, 5, gas outlet, 6, temperature-measuring port, 7, draw sample mouth, 8, Air inlet two, 9, bracket.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art's every other embodiment obtained, all belongs to In the range of the utility model protection.
As shown in Figure 1, fluorine gas and inert gas mixing arrangement that one kind according to the utility model embodiment is new-type, Including tank body 1,1 top of tank body is equipped with safety valve 3, and being equipped with air inlet 1 and drawing sample mouth 7 for 1 middle part of tank body is drawn sample mouth 7 and be located at The opposite side of air inlet 1, air inlet 1 are connect by pipeline with the nozzle 4 inside tank body 1, and the lower part of tank body 1 is equipped with gas outlet 5, temperature-measuring port 6 and air inlet 28,1 bottom of tank body are equipped with bracket 9.
In order to facilitate the above-mentioned technical proposal for understanding the utility model, below by way of practical new to this in specifically used mode The above-mentioned technical proposal of type is described in detail.
The use of this gas mixer is related to the operating procedures such as displacement, evacuation, distribution, can be fast safely by flow operations Being filled with, mixing for the completion gas of speed, can be used for general mass industrial production, concrete operations are as follows:
1) prepare before mixing: will be taken out in blending tank using vacuum system device external on the gases exit line of blending tank Sky removes the foreign gases such as a large amount of air in tank;
2) it is filled with the inert gas to be mixed of certain pressure into tank, then is evacuated, so repeatedly repeatedly with displacement Blending tank reaches and further removes remaining foreign gas in tank, guarantees that the quality of safety and gaseous mixture when being filled with fluorine gas is wanted It asks;
3) blending tank is evacuated to higher vacuum degree again, can mix more gases by blending tank after repeatedly replacing;
4) fluorine gas purified being slowly filled with into blending tank by fluorine gas admission line, pressure inside the tank starts to go up, Valve is closed when close to concora crush to be terminated to be filled with fluorine gas, and the numerical value that pressure inside the tank goes up is as the amount and partial pressure for being filled with fluorine gas, negative pressure It is filled with fluorine gas under state, the safety of operation can be improved;
5) inert gas is filled with into blending tank by air inlet pipe, is required according to the dividing ratios of gaseous mixture, controlled in tank The numerical value that pressure goes up, completes the mixing of gas, when being filled with inert gas, keeps being in bleed pressure and flow, blending tank Low-pressure state, not needing higher pressure can be filled with, and the nozzle arrangements in tank can allow the air inlet of inert gas injecting type, to fluorine The mixing of gas and inert gas is played the role of " stirring ", can quickly spread and mix with fluorine gas, not will lead to the layering of gas.
In conclusion, by the easily controllable flow of negative pressure inlet, can be subtracted by means of the above-mentioned technical proposal of the utility model The small compressed possibility of fluorine gas, and then the safety of operation is improved, and gas can quickly be spread, be conducive to mixing more evenly.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model Protection scope within.

Claims (3)

1. a kind of new-type fluorine gas and inert gas mixing arrangement, including tank body (1), which is characterized in that tank body (1) top is equipped with Safety valve (3), being equipped with air inlet one (2) and draw sample mouth (7) in the middle part of tank body (1), draws sample mouth (7) and is located at air inlet one (2) Opposite side, the lower part of tank body (1) are equipped with gas outlet (5) and air inlet two (8), and tank body (1) bottom is equipped with bracket (9).
2. new-type fluorine gas according to claim 1 and inert gas mixing arrangement, which is characterized in that the tank body (1) Inside is equipped with nozzle (4), and air inlet one (2) is connect by pipeline with nozzle (4).
3. new-type fluorine gas according to claim 1 and inert gas mixing arrangement, which is characterized in that under tank body (1) Portion is equipped with temperature-measuring port (6).
CN201821198948.2U 2018-07-27 2018-07-27 A kind of new-type fluorine gas and inert gas mixing arrangement Active CN209060912U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821198948.2U CN209060912U (en) 2018-07-27 2018-07-27 A kind of new-type fluorine gas and inert gas mixing arrangement

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Application Number Priority Date Filing Date Title
CN201821198948.2U CN209060912U (en) 2018-07-27 2018-07-27 A kind of new-type fluorine gas and inert gas mixing arrangement

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Publication Number Publication Date
CN209060912U true CN209060912U (en) 2019-07-05

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115646238A (en) * 2022-11-01 2023-01-31 福建德尔科技股份有限公司 Fluorine gas static mixing device and gas distribution method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115646238A (en) * 2022-11-01 2023-01-31 福建德尔科技股份有限公司 Fluorine gas static mixing device and gas distribution method thereof

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Address after: No. 6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364204

Patentee after: Fujian del Technology Co.,Ltd.

Address before: No.6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364200

Patentee before: FUJIAN DEER TECHNOLOGY CO.,LTD.

CP03 Change of name, title or address