CN209052806U - A kind of single crystal growing furnace argon recovery systems - Google Patents
A kind of single crystal growing furnace argon recovery systems Download PDFInfo
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- CN209052806U CN209052806U CN201821942697.4U CN201821942697U CN209052806U CN 209052806 U CN209052806 U CN 209052806U CN 201821942697 U CN201821942697 U CN 201821942697U CN 209052806 U CN209052806 U CN 209052806U
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Abstract
The utility model relates to a kind of single crystal growing furnace argon recovery systems, it is characterized by: the air outlet of useless argon storage tank connects the air inlet port of heater by pipeline, the air outlet of heater connects the air inlet port of catalytic reactor by pipeline, the air outlet of catalytic reactor connects the air inlet port of cooler by pipeline, the air outlet of cooler connects the air inlet port of absorber by pipeline, and the air outlet of absorber connects the air inlet port of high-purity argon storage tank by pipeline；It is filled with carbon monoxide Removal of catalyst in the catalytic reactor, loads zeolite molecular sieve in absorber.The utility model no longer needs to remove the impurity such as air, oxygen and the hydrogen additionally introduced using hypothermia distillation device, simplifies system flow, reduces argon gas cost recovery.
Description
Technical field
The utility model belongs to gas recovery unit field, is related to a kind of single crystal growing furnace argon recovery systems.
Background technique
When using single crystal growing furnace manufacture monocrystalline silicon, using the exhaust gas in vacuum pump extraction single crystal growing furnace, through argon recovery systems
Remove energy conservation of the foreign gas contained in the exhaust gas to obtain the recovery system of high purity argon, for monocrystalline silicon production process
Consumption reduction has great economic benefit.
Existing argon recovery systems generally require air, oxygen, hydrogen of excessive addition etc. during recycling and are used for
The removal of impurity, it is subsequent to remove the impurity such as oxygen, hydrogen, air by the way of low-temperature purifying method again.Argon recovery systems process
Complexity, and cost recovery is higher.
Utility model content
Purpose of utility model
In order to simplify argon recovery systems, does not use hypothermia distillation device and remove air, oxygen and the hydrogen additionally introduced
The impurity such as gas reduce cost, propose a kind of simple, efficient single crystal growing furnace argon recovery systems.
Technical solution
A kind of single crystal growing furnace argon recovery systems, it is characterised in that: the air outlet of useless argon storage tank is added by pipeline connection
The air inlet port of hot device, the air outlet of heater connect the air inlet port of catalytic reactor by pipeline, catalytic reactor
Air outlet connects the air inlet port of cooler by pipeline, and the air outlet of cooler connects the air inlet of absorber by pipeline
Port, the air outlet of absorber connect the air inlet port of high-purity argon storage tank by pipeline；It is filled in the catalytic reactor
Carbon monoxide Removal of catalyst, absorber is interior to load zeolite molecular sieve.
Carbon monoxide Removal of catalyst state unordered in a manner of gradation is closely knit to pile up in catalytic reactor.
The carbon monoxide Removal of catalyst gradation mode is 1mm-2mm catalyst 45%-50%, 3mm-4mm catalyst
40%-43%, 5mm-6mm catalyst 10%-12%.
Zeolite molecular sieve state unordered in a manner of gradation is closely knit to pile up in absorber.
The zeolite molecular sieve gradation mode is 1mm-3mm molecular sieve 40%-50%, 4mm-5mm molecular sieve 30%-35%,
6mm-7mm molecular sieve 20%-25%.
The cooler border is surrounded with cooling pipe.
The lower part of the cooling pipe is into coolant liquid mouth, and top is coolant liquid mouth, and top is located at coolant liquid mouth
Nearby it is connected with a pipe-line, the other end of pipe-line is provided with aerosol spray head, and aerosol spray head is towards cooling pipe
Main body sprays aerosol, and valve is set on pipe-line.
Advantage and effect
Using being catalyzed in the equipment of reaction removal carbon monoxide and hydrogen, the catalyst containing solid-oxide has been used
Instead of air or oxygen is added, it is miscellaneous to no longer need to air, oxygen and hydrogen for additionally introducing using hypothermia distillation device removal etc.
Matter simplifies system flow, reduces argon gas cost recovery.
Detailed description of the invention
Fig. 1 is the schematic diagram of Tthe utility model system；
Fig. 2 is cooler construction schematic diagram；
Fig. 3 is structural schematic diagram at aerosol spray head.
Description of symbols:
1- gives up argon storage tank, 2- heater, 3- catalytic reactor, 4- cooler, 5- absorber, 6- high-purity argon storage tank, 7-
Go out coolant liquid mouth, 9- aerosol spray head, 10- pipe-line, 11- cooling pipe, 12- valve into coolant liquid mouth, 8-.
Specific embodiment
The utility model is described further with reference to the accompanying drawing:
As shown in Figure 1, Figure 2 and Figure 3, the air outlet of a kind of single crystal growing furnace argon recovery systems, useless argon storage tank 1 passes through pipe
Road connects the air inlet port of heater 2, and the air outlet of heater 2 is connected the air inlet port of catalytic reactor 3 by pipeline, urged
The air outlet for changing reactor 3 connects the air inlet port of cooler 4 by pipeline, and the air outlet of cooler 4 is connected by pipeline
The air inlet port of absorber 5 is connect, loads zeolite molecular sieve in absorber 5, the air outlet of absorber 5 connects high-purity by pipeline
The air inlet port of argon storage tank 6；It is filled with carbon monoxide Removal of catalyst in the catalytic reactor 3, the catalyst is with grade formula
The unordered state of formula is closely knit to pile up in catalytic reactor 3；Carbon monoxide Removal of catalyst gradation mode is 1mm-2mm catalyst
45%-50%, 3mm-4mm catalyst 40%-43%, 5mm-6mm catalyst 10%-12%.It is filled with zeolite molecular sieve in absorber 5,
Molecular sieve state unordered in a manner of gradation is closely knit to pile up in absorber 5；Zeolite molecular sieve gradation mode is 1mm-3mm
Molecular sieve 40%-50%, 4mm-5mm molecular sieve 30%-35%, 6mm-7mm molecular sieve 20%-25%.
4 border of cooler is surrounded with cooling pipe 11, and the lower part of cooling pipe 11 is into coolant liquid mouth 7, and top is cold out
But liquid mouth 8, top, which is located at, is connected with a pipe-line 10 near coolant liquid mouth 8, the other end setting of pipe-line 10
There is aerosol spray head 9, the main body of aerosol spray head 9 towards cooling pipe 11 sprays aerosol, and valve 12 is set on pipe-line 10, is used for
The opening and closing for controlling aerosol spray head 9, by controlling the main body injection aerosol towards cooling pipe 11, evaporation endothermic, which reaches, to be added
The purpose of quickly cooling but.
Application Example
Useless argon storage tank 1 is entered through dedusting, compressed argon gas from single crystal growing furnace, the useless heated device 2 of argon gas is heated to
100 ~ 600 DEG C, preferably 150 DEG C enter catalytic reactor 3, load carbon monoxide Removal of catalyst in catalytic reactor 3, this is urged
Agent state unordered in a manner of gradation is closely knit to pile up in catalytic reactor 3.Preferably, using 2mm catalyst 50%, 3mm is urged
Agent 40%, 5mm catalyst 10%.3 bottom of catalytic reactor is equipped with net.The present embodiment is de- using the COR type of Liaoning Haitai company
CO catalyst (or upper Hisoon triumphant carbon monoxide Removal of catalyst), in catalytic reactor 3, carbon monoxide and hydrogen
It is oxidized to carbon dioxide and water is removed, carbon monoxide content is reduced to 0.5ppm hereinafter, hydrogen content is reduced to
0.5ppm is hereinafter, the argon gas with carbon dioxide and water enters absorber 5 after cooler 4 is cooled to 20-60 DEG C or less, suction
Zeolite molecular sieve is loaded in adnexa 5.Preferably, using 3mm molecular sieve 50%, 4mm molecular sieve 30%, 6mm molecular sieve 20%.Absorption
5 bottom of device is equipped with net.The present embodiment using Uop Inc. 13X type zeolite molecular sieve (or the 13X type zeolite of Daliam Adsorbent Plant
Molecular sieve), in absorber 5, by zeolite molecular sieve Adsorption, carbon dioxide content is reduced to 0.5ppm for carbon dioxide and water
Hereinafter, moisture content depoint depression is down to -70 DEG C or less.Finally, original carbon monoxide and hydrogen are removed in useless argon gas, containing an oxidation
Carbon < 0.5ppm, carbon dioxide < 0.5ppm, the high-purity argon gas of hydrogen < 0.5ppm, water < 0.5ppm are transported to high-purity argon storage
In tank 6, entire argon gas recovery process is accomplished.
Claims (7)
1. a kind of single crystal growing furnace argon recovery systems, it is characterised in that: the air outlet of useless argon storage tank (1) is added by pipeline connection
The air inlet port of hot device (2), air inlet port of the air outlet of heater (2) by pipeline connection catalytic reactor (3), catalysis
The air outlet of reactor (3) connects the air inlet port of cooler (4) by pipeline, and the air outlet of cooler (4) passes through pipe
Road connects the air inlet port of absorber (5), the air inlet that the air outlet of absorber (5) passes through pipeline connection high-purity argon storage tank (6)
Port；It is filled with carbon monoxide Removal of catalyst in the catalytic reactor (3), loads zeolite molecular sieve in absorber (5).
2. single crystal growing furnace argon recovery systems according to claim 1, it is characterised in that: the carbon monoxide Removal of catalyst
Unordered state is closely knit in a manner of gradation piles up in catalytic reactor (3).
3. single crystal growing furnace argon recovery systems according to claim 2, it is characterised in that: the carbon monoxide Removal of catalyst
Gradation mode is 1mm-2mm catalyst 45%-50%, 3mm-4mm catalyst 40%-43%, 5mm-6mm catalyst 10%-12%.
4. single crystal growing furnace argon recovery systems according to claim 1, it is characterised in that: the zeolite molecular sieve is with grade formula
The unordered state of formula is closely knit to pile up in absorber (5).
5. single crystal growing furnace argon recovery systems according to claim 4, it is characterised in that: the zeolite molecular sieve gradation mode
For 1mm-3mm molecular sieve 40%-50%, 4mm-5mm molecular sieve 30%-35%, 6mm-7mm molecular sieve 20%-25%.
6. single crystal growing furnace argon recovery systems according to claim 1, it is characterised in that: cooler (4) border is surround
There are cooling pipe (11).
7. single crystal growing furnace argon recovery systems according to claim 6, it is characterised in that: the lower part of the cooling pipe (11)
For into coolant liquid mouth (7), top is coolant liquid mouth (8), top, which is located near coolant liquid mouth (8), is connected with a spray head
Pipeline (10), the other end of pipe-line (10) are provided with aerosol spray head (9), and aerosol spray head (9) is towards cooling pipe (11)
Main body sprays aerosol, and valve (12) is set on pipe-line (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201821942697.4U CN209052806U (en) | 2018-11-23 | 2018-11-23 | A kind of single crystal growing furnace argon recovery systems |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821942697.4U CN209052806U (en) | 2018-11-23 | 2018-11-23 | A kind of single crystal growing furnace argon recovery systems |
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| CN209052806U true CN209052806U (en) | 2019-07-02 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111115593A (en) * | 2020-01-31 | 2020-05-08 | 朱刚 | Continuous online recovery device and method for tail gas of single crystal furnace |
-
2018
- 2018-11-23 CN CN201821942697.4U patent/CN209052806U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111115593A (en) * | 2020-01-31 | 2020-05-08 | 朱刚 | Continuous online recovery device and method for tail gas of single crystal furnace |
| CN111115593B (en) * | 2020-01-31 | 2024-03-26 | 朱刚 | Continuous online recovery device and method for tail gas of single crystal furnace |
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