CN209052803U - Equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal - Google Patents
Equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal Download PDFInfo
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- CN209052803U CN209052803U CN201821879283.1U CN201821879283U CN209052803U CN 209052803 U CN209052803 U CN 209052803U CN 201821879283 U CN201821879283 U CN 201821879283U CN 209052803 U CN209052803 U CN 209052803U
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- quartz ampoule
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Abstract
Applied to the equipment of horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal, it is related to the purification of high-purity semiconductor alloy material.The utility model includes that quartz boat, quartz ampoule, high-frequency induction heating coil, bracket, screw rod and Qu Rong trolley, quartz boat are placed in quartz ampoule, and quartz ampoule is fixed on above bracket；The setting of high-frequency induction heating coil is melted on trolley in area, and area's fuse snare is outside quartz ampoule；Lead screw is fixed on frame bottom, and parallel with quartz ampoule；Area melts trolley and is arranged on lead screw, and slides along lead screw；Silicon coating is coated on quartz boat inner wall.In the utility model, the device of the horizontal zone-melting technique growth germanium single crystal can be reduced the pollution section of germanium material, keep it more significant to high-purity refining effect.And the system and device processing technology is simple, and it is scientific and reasonable for structure, it is safe and reliable, certain manpower and material resources can be saved, the development of propulsion energy-saving environmental protection is beneficial to.
Description
Technical field
The utility model relates to the purification of high-purity semiconductor alloy material and the growths of high-purity monocrystal material.
Background technique
" summary that zone refining prepares high pure metal " illustrates theory and the side that high pure metal is prepared using zone refining
Method.Zone-melting process is to generate a melting zone, then welding single crystal seed in one end of semiconductor bar using thermal energy, and adjusting temperature allows molten
Area is slowly mobile to the other end of bar, by whole bar, grows into a monocrystalline, crystal orientation is identical as seed crystal.Use this
When method prepares monocrystalline, equipment is simple, carries out can be obtained that purity is very high and Impurity Distribution is visibly homogeneous again simultaneously with purification process
Germanium crystal.But because contacting with boat, inevitably there is the contamination of boat ingredient, and is not easy that the high major diameter germanium single crystal of integrality is made.Growth
Monocrystal it is critical that by rod-like polycrystal ingot melt a narrow area, rest part keep solid-state, head place a fritter monocrystalline
That is seed crystal, and melting zone is established in seed crystal and raw material crystal ingot connected regions, it moves this melting zone along the length direction of ingot, makes
The rest part of entire crystal ingot crystallizes again after successively melt, moves crystal ingot or heater makes melting zone towards ingot length direction not offset
It is dynamic, so that the crystal of high-purity be made.
Summary of the invention
Based on above-mentioned analysis, to be solved in the utility model is exactly utility model on the basis of existing area's melting apparatus
Production is conducive to area's fused quartz boat device of crystal growth, and can place the positional structure of seed crystal in the quartz boat front-end configuration,
The quartz boat device has the molten performance structure formed with crystal growth in area.
The equipment for being applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal of the utility model, it is characterised in that the equipment packet
Quartz boat, quartz ampoule, high-frequency induction heating coil, bracket, screw rod and Qu Rong trolley, quartz boat is included to be placed in quartz ampoule,
Quartz ampoule is fixed on above bracket；The setting of high-frequency induction heating coil is melted on trolley in area, and area's fuse snare is mounted in quartz ampoule
Outside；Lead screw is fixed on frame bottom, and parallel with quartz ampoule；Area melts trolley and is arranged on lead screw, and slides along lead screw；Quartz boat
Silicon coating is coated on inner wall.
By applying one layer of silicon coating on quartz boat inner wall, the substance of quartz boat is effectively avoided to be mixed into germanium during area is molten
Monocrystalline；Meanwhile area's fuse circle being arranged and is melted on trolley in area, trolley can be melted by turnover zone and drives fuse circle in area's mobile, together
The area Shi Jiang melts trolley and is mounted on lead screw, and when needing turnover zone to melt trolley, rotational lead screw can drive area to melt trolley mobile.
The area melts trolley bottom and is provided with telescopic rod, and telescopic rod bottom is provided with nut, the screw thread and lead screw of nut
Screw thread matching, rotary screw rod can drive area to melt trolley mobile by screw thread, when needing, can by adjusting length of telescopic bar,
Adjust the height that trolley is melted in area.
The quartz ampoule both ends are respectively arranged with air inlet and exhaust outlet, for passing in and out high-purity gas.
The bottom of described bracket one end is additionally provided with lifting device, and lifting device includes fixed block and contraction pole, fixes
Block is placed on table top, is connect at the top of contraction pole with lead screw one end, and bottom is fixed on fixed block, adjusts branch by lifting device
The tilt angle of frame adjusts suitable crystal growth angle.
In the utility model, the device of the horizontal zone-melting technique growth germanium single crystal can be reduced the pollution section of germanium material, make
It is more significant to high-purity refining effect.And the system and device processing technology is simple, it is scientific and reasonable for structure, using it is safe can
It leans on, certain manpower and material resources can be saved, be beneficial to the development of propulsion energy-saving environmental protection.
Detailed description of the invention
Fig. 1 is the system structure diagram of the utility model.
Wherein, trolley 6 is melted in quartz boat 1, quartz ampoule 2, high-frequency induction heating coil 3, bracket 4, screw rod 5, area, telescopic rod 7,
Air inlet 8, exhaust outlet 9, lifting device 10.
Specific embodiment
Embodiment 1: a kind of equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal, including quartz boat 1, quartz ampoule
2, high-frequency induction heating coil 3, bracket 4, screw rod 5 and Qu Rong trolley 6, quartz boat 1 are placed in quartz ampoule 2, and quartz ampoule 2 is solid
It is scheduled on 4 top of bracket；The setting of high-frequency induction heating coil 3 is melted on trolley 6 in area, and area's fuse snare is outside quartz ampoule 2；Silk
Thick stick is fixed on 4 bottom of bracket, and parallel with quartz ampoule 2；Area melts trolley 6 and is arranged on lead screw, and slides along lead screw；Quartz boat 1
Silicon coating is coated on inner wall.
By applying one layer of silicon coating on 1 inner wall of quartz boat, the substance of quartz boat 1 is effectively avoided to be mixed into during area is molten
Germanium single crystal；Meanwhile area's fuse circle being arranged and is melted on trolley 6 in area, trolley 6 can be melted by turnover zone, and fuse circle in area's is driven to move
It is dynamic, while trolley 6 is melted into area and is mounted on lead screw, when needing turnover zone to melt trolley 6, rotational lead screw can drive Qu Rong little
Vehicle 6 is mobile.
Area melts 6 bottom of trolley and is provided with telescopic rod 7, and 7 bottom of telescopic rod is provided with nut, the screw thread and threads of lead screw of nut
Matching, rotary screw rod 5 can drive area to melt trolley 6 mobile by screw thread, when needing, can by adjusting 7 length of telescopic rod,
Adjust the height that trolley 6 is melted in area.2 both ends of quartz ampoule are respectively arranged with air inlet 8 and exhaust outlet 9, for passing in and out high-purity gas.Branch
The bottom of 4 one end of frame is additionally provided with lifting device 10, and lifting device 10 includes fixed block and contraction pole, and fixed block is placed on table top
On, it is connect at the top of contraction pole with lead screw one end, bottom is fixed on fixed block, and the inclination of bracket 4 is adjusted by lifting device 10
Angle adjusts suitable crystal growth angle.
Claims (4)
1. a kind of equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal, it is characterised in that the equipment includes quartz boat
(1), trolley (6) are melted in quartz ampoule (2), high-frequency induction heating coil (3), bracket (4), screw rod (5) and area, and quartz boat (1) is put
It sets in quartz ampoule (2), quartz ampoule (2) is fixed on above bracket (4)；High-frequency induction heating coil (3), which is arranged, melts trolley in area
(6) on, and area's fuse snare is mounted in quartz ampoule (2) outside；Lead screw is fixed on bracket (4) bottom, and parallel with quartz ampoule (2)；Area
Molten trolley (6) are arranged on lead screw, and slide along lead screw；Silicon coating is coated on quartz boat (1) inner wall.
2. the equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal as described in claim 1, it is characterised in that described
Area melt trolley (6) bottom be provided with telescopic rod (7), telescopic rod (7) bottom is provided with nut, the screw thread and threads of lead screw of nut
Matching.
3. the equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal as described in claim 1, it is characterised in that described
Quartz ampoule (2) both ends be respectively arranged with air inlet (8) and exhaust outlet (9).
4. the equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal as described in claim 1, it is characterised in that described
The bottom of bracket (4) one end be additionally provided with lifting device (10), lifting device (10) includes fixed block and contraction pole, fixed block
It is placed on table top, is connect at the top of contraction pole with lead screw one end, bottom is fixed on fixed block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821879283.1U CN209052803U (en) | 2018-11-15 | 2018-11-15 | Equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821879283.1U CN209052803U (en) | 2018-11-15 | 2018-11-15 | Equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal |
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| Publication Number | Publication Date |
|---|---|
| CN209052803U true CN209052803U (en) | 2019-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821879283.1U Active CN209052803U (en) | 2018-11-15 | 2018-11-15 | Equipment applied to horizontal zone-melting technique growth ultrahigh-purity germanium mono-crystal |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113699591A (en) * | 2021-08-31 | 2021-11-26 | 安徽光智科技有限公司 | Method for preparing ultra-high purity germanium single crystal |
-
2018
- 2018-11-15 CN CN201821879283.1U patent/CN209052803U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113699591A (en) * | 2021-08-31 | 2021-11-26 | 安徽光智科技有限公司 | Method for preparing ultra-high purity germanium single crystal |
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