CN209044302U - Lithographic equipment is used in a kind of LED production - Google Patents
Lithographic equipment is used in a kind of LED production Download PDFInfo
- Publication number
- CN209044302U CN209044302U CN201821855107.4U CN201821855107U CN209044302U CN 209044302 U CN209044302 U CN 209044302U CN 201821855107 U CN201821855107 U CN 201821855107U CN 209044302 U CN209044302 U CN 209044302U
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- fixed frame
- reticle
- cover board
- lithographic equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of LED production lithographic equipments, including fixing seat, fixed frame, protect shell, the fixed frame is internally provided with silicon wafer, the silicon wafer two sides are provided with protection gasket, the neonychium on piece is provided with pressure sensor, the protection gasket is provided with fixed link far from the silicon wafer side, the fixed link is provided with electric pushrod far from the protection gasket side, the second reticle is provided with above the silicon wafer, the second cover board is provided with above second reticle, the first reticle is provided with below the silicon wafer, the first cover board is provided with below first reticle.Beneficial effect is: the utility model can not only carry out stable fixation work to silicon wafer, moreover it is possible to realize the overturning of silicon wafer, it is simple, convenient, and it is all processed convenient for two faces to silicon wafer, improves the efficiency of photoetching work.
Description
Technical field
The utility model relates to lithographic equipment fields, more particularly to a kind of LED production lithographic equipment.
Background technique
With the fast development of LED technology, the use of LED product is also more and more extensive, also exists to the demand of LED product
It is continuously improved, electronic component processing is the pith in LED production, is frequently necessary in production of electronic components process
Photoetching treatment is carried out to silicon wafer.
When needing two faces to silicon wafer all to process, general lithographic equipment is troublesome in poeration at the face of replacement, and ten
The inconvenience divided affects the efficiency of photoetching work.
Utility model content
It is excellent the purpose of the utility model is to provide a kind of LED production lithographic equipment in order to overcome the above problem
It is simple, convenient for putting, and improves the efficiency of photoetching work.
The utility model achieves the above object through the following technical schemes:
A kind of LED production lithographic equipment, including fixing seat, fixed frame, protection shell, the fixed frame are internally provided with
Silicon wafer, the silicon wafer two sides are provided with protection gasket, and the neonychium on piece is provided with pressure sensor, the pressure sensor
Model LZ-MH26, the protection gasket are provided with fixed link far from the silicon wafer side, and the fixed link is far from the protection
Gasket side is provided with electric pushrod, and the second reticle is provided with above the silicon wafer, is provided with above second reticle
Second cover board is provided with the first reticle below the silicon wafer, is provided with the first cover board below first reticle, and described the
Rubber fixing bolt is provided on one cover board and second cover board, first cover board side is provided with angular transducer, institute
Angular transducer model BWS4000 is stated, the fixing seat, the fixed frame side setting are provided with below first cover board
There is driving shaft, the fixed frame other side is provided with driven shaft, and the fixing seat side is provided with the protection shell, the guarantor
Shield enclosure interior is provided with motor, is provided with controller below the motor, the controller model ARMIC0016 is described
Protection shell front is provided with function button, is provided with indicator light, the function button, the instruction below the function button
Lamp, the motor, the electric pushrod, the angular transducer, the pressure sensor are electrically connected with the controller.
So set, fixing and loosen to the silicon wafer can be realized by the electric pushrod, the motor can be passed through
It drives the fixed frame to rotate, that is, realizes the overturning of the silicon wafer, using simple, flexible.
In above structure, the silicon wafer is placed between the protection gasket, is made by the function button described electronic
Push rod drives the fixed link mobile to the silicon wafer, when the pressure value that the pressure sensor detects and pressure set points phase
Meanwhile the electric pushrod stops working, the silicon wafer is stably fixed between the protection gasket at this time, by described second
Reticle is placed on the fixed frame, and second cover board is fixed on the fixed frame by the rubber fixing bolt,
So that the motor is worked by the function button, when the fixed frame that the angular transducer detects rotational angle with
When set angle is identical, the motor stops working, and the fixed frame completes overturning at this time, and first reticle is placed on institute
It states on fixed frame, first cover board is fixed on the fixed frame by the rubber fixing bolt, in litho machine to institute
When stating the silicon wafer progress photoetching treatment on fixed frame and the silicon wafer being needed to change face, the electricity is made by the function button
Machine work, drives the fixed frame to be rotated, that is, the silicon wafer is driven to be overturn, and that realizes the silicon wafer changes face,
It is simple, convenient.
As a kind of optimal technical scheme of the utility model, the electric pushrod is fixed with the fixed frame by screw
Connection, the electric pushrod are fixedly connected with the fixed link by screw.
So set, ensure that the connective stability of the fixed frame and the fixed link and the electric pushrod.
As a kind of optimal technical scheme of the utility model, the protection gasket is fixed with the fixed link by viscose glue
Connection.
So set, ensure that the connective stability of the protection gasket and the fixed link.
As a kind of optimal technical scheme of the utility model, the driving shaft and the fixed frame are bolted company
It connects, the driven shaft is bolted to connection with the fixed frame, the driving shaft and the driven shaft and the fixing seat
Roll connection.
So set, rotating together convenient for the fixed frame, the driving shaft and the driven shaft, it is easy to implement the silicon
The overturning of piece.
As a kind of optimal technical scheme of the utility model, the motor and the driving shaft connect by the way that shaft coupling is fixed
It connects.
So set, ensure that the connective stability of the motor Yu the driving shaft, convenient for the rotation of the driving shaft.
As a kind of optimal technical scheme of the utility model, first reticle and second reticle with it is described
Fixed frame is fixedly connected by card slot.
So set, ensure that the stable connection of first reticle and second reticle and the fixed frame
Property.
As a kind of optimal technical scheme of the utility model, first cover board and second cover board and the fixation
Frame is fixedly connected by the rubber fixing bolt.
So set, ensure that the connective stability of first cover board and second cover board and the fixed frame, just
In the installation and removal of first cover board and second cover board.
The utility model beneficial effect achieved is: the utility model can not only carry out stable regular worker to silicon wafer
Make, moreover it is possible to realize the overturning of silicon wafer, it is simple, convenient, it is all processed convenient for two faces to silicon wafer, improves photoetching work
The efficiency of work.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
Some embodiments of the utility model, for those of ordinary skill in the art, in the premise of not making the creative labor property
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of schematic diagram of internal structure of LED production lithographic equipment described in the utility model；
Fig. 2 is a kind of perspective view of LED production lithographic equipment described in the utility model；
Fig. 3 is a kind of main view of LED production lithographic equipment described in the utility model；
Fig. 4 is a kind of circuit structure flow diagram of LED production lithographic equipment described in the utility model.
The reference numerals are as follows:
1, fixing seat；2, angular transducer；3, controller；4, shell is protected；5, motor；6, driving shaft；7, electric pushrod；
8, fixed link；9, gasket is protected；10, pressure sensor；11, silicon wafer；12, the second reticle；13, the second cover board；14, it indicates
Lamp；15, rubber fixing bolt；16, driven shaft；17, fixed frame；18, the first reticle；19, the first cover board；20, function button.
Specific embodiment
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result,
Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another
It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition
State the concrete meaning of term in the present invention.
The utility model is described in further detail with reference to the accompanying drawing.
First embodiment:
As Figure 1-Figure 4, a kind of LED production lithographic equipment, including fixing seat 1, fixed frame 17, protection shell 4, Gu
To determine frame 17 and is internally provided with silicon wafer 11,11 two sides of silicon wafer are provided with protection gasket 9, and the effect of protection gasket 9 is protection silicon wafer 11,
It is provided with pressure sensor 10,10 model LZ-MH26 of pressure sensor on protection gasket 9, effect is detected to silicon wafer 11
Fixed dynamics, protection gasket 9 are provided with fixed link 8 far from 11 side of silicon wafer, and fixed link 8 is provided with far from protection 9 side of gasket
Electric pushrod 7, the effect of electric pushrod 7 are to drive fixed link 8 mobile, are provided with the second reticle 12 above silicon wafer 11, second
It is provided with the second cover board 13 above reticle 12, the first reticle 18 is provided with below silicon wafer 11, is set below the first reticle 18
It is equipped with the first cover board 19, rubber fixing bolt 15 is provided on the first cover board 19 and the second cover board 13,19 side of the first cover board is set
It is equipped with angular transducer 2,2 model BWS4000 of angular transducer, effect is the rotational angle for detecting fixed frame 17, the first lid
Fixing seat 1 is provided with below plate 19,17 side of fixed frame is provided with driving shaft 6, and 17 other side of fixed frame is provided with driven shaft 16,
1 side of fixing seat is provided with protection shell 4, and protection shell 4 is internally provided with motor 5, and the effect of motor 5 is easy for driving and fix
Frame 17 rotates, and controller 3,3 model ARMIC0016 of controller are provided with below motor 5, and effect is to control the work of equipment,
Protection 4 front of shell is provided with function button 20, and indicator light 14, function button 20, indicator light are provided with below function button 20
14, motor 5, electric pushrod 7, angular transducer 2, pressure sensor 10 are electrically connected with controller 3.
Second embodiment:
Second embodiment is with the difference of first embodiment: electric pushrod 7 is fixedly connected with fixed frame 17 by screw,
Electric pushrod 7 is fixedly connected with fixed link 8 by screw.
Specifically, electric pushrod 7 is fixedly connected with fixed frame 17 by screw, ensure that electric pushrod 7 and fixed frame 17
Connective stability, electric pushrod 7 is fixedly connected with fixed link 8 by screw, ensure that the company of electric pushrod 7 Yu fixed link 8
Stability is connect, convenient for driving fixed link 8 mobile.
3rd embodiment:
The difference of 3rd embodiment and first embodiment is: driving shaft 6 is bolted to connection with fixed frame 17, from
Moving axis 16 is bolted to connection with fixed frame 17, and driving shaft 6 and driven shaft 16 and fixing seat 1, which roll, to be connected.
Specifically, driving shaft 6 is bolted to connection with fixed frame 17, ensure that the company of driving shaft 6 Yu fixed frame 17
Stability is connect, driven shaft 16 is bolted to connection with fixed frame 17, ensure that driven shaft 16 and the connection of fixed frame 17 are steady
Qualitative, driving shaft 6 and driven shaft 16 and fixing seat 1, which roll, to be connected, convenient for the rotation of driving shaft 6 and driven shaft 16.
When the utility model is used, silicon wafer 11 is placed between protection gasket 9, electric pushrod is made by function button 20
7 drive fixed link 8 mobile to silicon wafer 11, electronic when the pressure value that pressure sensor 10 detects is identical as pressure set points
Push rod 7 stops working, and silicon wafer 11 is stably fixed between protection gasket 9 at this time, and the second reticle 12 is placed on fixed frame 17
On, second cover board 13 is fixed on fixed frame 17 by rubber fixing bolt 15, so that motor 5 is worked by function button 20,
When the rotational angle for the fixed frame 17 that angular transducer 2 detects is identical as set angle, motor 5 stops working, solid at this time
Determine frame 17 and complete overturning, the first reticle 18 is placed on fixed frame 17, is consolidated the first cover board 19 by rubber fixing bolt 15
It is scheduled on fixed frame 17, when litho machine carries out photoetching treatment and silicon wafer 11 is needed to change face to the silicon wafer 11 on fixed frame 17, leads to
Crossing function button 20 makes motor 5 work, and fixed frame 17 is driven to be rotated, that is, silicon wafer 11 is driven to be overturn, and realizes silicon
Piece 11 changes face, simple, convenient.
The basic principles and main features and advantage of the utility model have been shown and described above.The technical staff of the industry
It should be appreciated that the present utility model is not limited to the above embodiments, the above embodiments and description only describe this
The principle of utility model, on the premise of not departing from the spirit and scope of the utility model, the utility model also has various change
And improvement, these various changes and improvements fall within the scope of the claimed invention.
Claims (7)
1. a kind of LED production lithographic equipment, including fixing seat, fixed frame, protection shell, it is characterised in that: the fixed frame
It is internally provided with silicon wafer, the silicon wafer two sides are provided with protection gasket, and the neonychium on piece is provided with pressure sensor, described
Protect gasket that the silicon wafer side is provided with fixed link, the fixed link is provided with electronic far from the protection gasket side
Push rod is provided with the second reticle above the silicon wafer, is provided with the second cover board above second reticle, under the silicon wafer
Side is provided with the first reticle, and the first cover board, first cover board and second lid are provided with below first reticle
Rubber fixing bolt is provided on plate, first cover board side is provided with angular transducer, setting below first cover board
There is the fixing seat, the fixed frame side is provided with driving shaft, and the fixed frame other side is provided with driven shaft, the fixation
Seat side is provided with the protection shell, and the protection enclosure interior is provided with motor, is provided with controller below the motor,
The protection shell front is provided with function button, is provided with indicator light below the function button, the function button, described
Indicator light, the motor, the electric pushrod, the angular transducer, the pressure sensor are electrically connected with the controller.
2. a kind of LED production lithographic equipment according to claim 1, it is characterised in that: the electric pushrod with it is described
Fixed frame is fixedly connected by screw, and the electric pushrod is fixedly connected with the fixed link by screw.
3. a kind of LED production lithographic equipment according to claim 1, it is characterised in that: the protection gasket with it is described
Fixed link is fixedly connected by viscose glue.
4. a kind of LED production lithographic equipment according to claim 1, it is characterised in that: the driving shaft with it is described solid
Determine frame to be bolted to connection, the driven shaft is bolted to connection with the fixed frame, the driving shaft and described
Driven shaft and the fixing seat, which roll, to be connected.
5. a kind of LED production lithographic equipment according to claim 1, it is characterised in that: the motor and the active
Axis is fixedly connected by shaft coupling.
6. a kind of LED production lithographic equipment according to claim 1, it is characterised in that: first reticle and institute
It states the second reticle and is fixedly connected with the fixed frame by card slot.
7. a kind of LED production lithographic equipment according to claim 1, it is characterised in that: first cover board and described
Second cover board is fixedly connected with the fixed frame by the rubber fixing bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821855107.4U CN209044302U (en) | 2018-11-12 | 2018-11-12 | Lithographic equipment is used in a kind of LED production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821855107.4U CN209044302U (en) | 2018-11-12 | 2018-11-12 | Lithographic equipment is used in a kind of LED production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209044302U true CN209044302U (en) | 2019-06-28 |
Family
ID=67042073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821855107.4U Expired - Fee Related CN209044302U (en) | 2018-11-12 | 2018-11-12 | Lithographic equipment is used in a kind of LED production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209044302U (en) |
-
2018
- 2018-11-12 CN CN201821855107.4U patent/CN209044302U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209044302U (en) | Lithographic equipment is used in a kind of LED production | |
| CN204638951U (en) | The adjustable absorption head of a kind of polar coordinates all standing | |
| CN107181222B (en) | A kind of adjustable bus duct | |
| CN209587550U (en) | A kind of electric operator can change data visualization angle | |
| CN207318882U (en) | The detection camera angle regulator of liquid crystal panel AOI equipment | |
| CN208024572U (en) | A kind of cable production liquid adjuvants feeding pump | |
| CN108507538A (en) | It is used to support the support component of aerial survey of unmanned aerial vehicle camera | |
| CN209036248U (en) | A kind of photoelectric component processing semiconductor grinding device | |
| CN208086793U (en) | PCB board handling device | |
| CN208194231U (en) | A kind of non-woven cotton raw material cellucotton agitating device | |
| CN205911442U (en) | Electrically -controlled antenna and phase shift transmission device | |
| CN109059842A (en) | Wiper arm measuring device | |
| CN212330566U (en) | Iron core grinding clamp | |
| CN205341826U (en) | System shell machine of full angle type | |
| CN209503459U (en) | Dismount screw machine equipment | |
| CN208641164U (en) | A kind of electronic integral operation bed | |
| CN214093694U (en) | Environmental protection equipment alignment jig | |
| CN207495487U (en) | A kind of mechanical arm being easily installed | |
| CN207709890U (en) | Big torsion main axis device | |
| CN206704329U (en) | Flying wheel and bicycle machines people | |
| CN206703046U (en) | Robot multifunctional suction disc device | |
| CN209256353U (en) | A kind of novel auxiliary position fixing tooling | |
| CN209532474U (en) | A kind of wheel cover of automobile handgrip installing mechanism that stability is good | |
| CN202661416U (en) | Semiconductor corner slot orientation device | |
| CN204649154U (en) | Angle sensing apparatus and adopt the The Cloud Terrace of this angle sensing apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190628 Termination date: 20211112 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |