CN202661416U - Semiconductor corner slot orientation device - Google Patents
Semiconductor corner slot orientation device Download PDFInfo
- Publication number
- CN202661416U CN202661416U CN 201220322110 CN201220322110U CN202661416U CN 202661416 U CN202661416 U CN 202661416U CN 201220322110 CN201220322110 CN 201220322110 CN 201220322110 U CN201220322110 U CN 201220322110U CN 202661416 U CN202661416 U CN 202661416U
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- CN
- China
- Prior art keywords
- turbine
- worm
- equiped
- fixed
- corner slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model discloses a semiconductor corner slot orientation device which comprises a platform, wherein an X ray generator is fixed on the platform. A goniometer is fixed on the two sides of the X ray generator on the platform respectively; a turbine-worm pair is arranged in the goniometer; one end of a worm of the turbine-worm pair is connected with a hand wheel, and an encoder is arranged at the other end of the worm; a turbine is connected with a spindle; the upper part of the spindle passes out of a shell of the goniometer, and a support plate is fixed at the pass-out end; a positioning block is arranged on the support plate; the positioning block is superposed with a corner slot of the measured crystal by the hand wheel rotating a screw rod; a rotary tray and a side plate are mounted on the support plate; and a display panel is arranged on the rotary tray. The semiconductor corner slot orientation device disclosed by the utility model can detect whether the crystal orientation position of the corner slot meets the production requirements or not, and can detect other crystal orientation angles by taking the corner slot as a reference so as to improve the qualified rate of the product as well as the working efficiency.
Description
Technical field
The utility model relates to a kind of semiconductor detection, particularly relates to a kind of semiconductor chamfered groove direction finder.
Background technology
Single crystal silicon semiconductor, it is cylindrical existence in the production run, traditional handicraft is with cutting a limit after the direction finder orientation as the reference limit, thereby the right cylinder end face is carried out orientation and following process, but because the single crystal silicon semiconductor size is larger, also be very serious to the cutting orientation on a limit to the waste of single crystal silicon semiconductor closely, have the material of 3%-6% can not use with cut, the technique that adopts is at present carried out orientation for the trough with straight angle that cuts 90 ° of dark 3-5mm to the end face of crystal bar.Thereby saved material, the cutting output less than 1% of chamfered groove.This patent equipment is exactly that diagonal slot is carried out orientation, and single crystal silicon semiconductor is carried out directed novel checkout equipment by chamfered groove to other crystal orientation.
The utility model content
The purpose of this utility model is defective and the deficiency that exists for solving above-mentioned prior art, and provide a kind of chamfered groove to the semiconductor monocrystalline silicon crystal bar to carry out orientation and detection, and whether the position, crystal orientation that can detect chamfered groove meets the semiconductor chamfered groove direction finder of production requirement.
The technical scheme that adopts is:
A kind of semiconductor chamfered groove direction finder comprises board, is fixed with x ray generator on the board.The both sides that are positioned at x ray generator on the board are fixed with respectively angular instrument, be equiped with the turbine and worm pair in the angular instrument, worm screw one end of turbine and worm pair connects handwheel, the other end of worm screw is equiped with scrambler, turbine is connected with a main shaft, the top of main shaft passes outside the housing of angular instrument, its traversing through end is fixed a supporting plate, be equiped with locating piece on the supporting plate, locating piece shakes leading screw by handwheel makes locating piece overlap with the chamfered groove of tested crystal, and rotary-tray and slide plate are installed on the supporting plate, is provided with display panel on the rotary-tray, be equiped with the crystal bar clamping device on the slide plate, be equiped with hand leading screw on the crystal bar clamping device.
Whether the position, crystal orientation that the utility model can detect chamfered groove meets production requirement, and can detect the angle in other crystal orientation take chamfered groove as benchmark.Thereby raising product percent of pass, and work efficiency.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
A kind of semiconductor chamfered groove direction finder comprises board 1, is fixed with x ray generator 8 on the board 1.The both sides that are positioned at x ray generator 8 on the board 1 are fixed with respectively angular instrument 14, turbine and worm pair 2 is installed in the angular instrument 14, worm screw one end of turbine and worm pair 2 connects handwheel 3, the other end of worm screw is equipped with scrambler 15, turbine is connected with a main shaft, the top of main shaft passes outside the housing of angular instrument 14, its traversing through end is fixed a supporting plate 13, locating piece 5 is installed on the supporting plate 13, locating piece 5 shakes leading screw 4 by handwheel makes locating piece overlap with the chamfered groove of tested crystal 11, rotary-tray 6 and slide plate 7 are installed on the supporting plate 13, be provided with display panel 9 on the rotary-tray 6, be equiped with crystal bar clamping device 12 on the slide plate 7, hand leading screw 10 is installed on the crystal bar clamping device 12, the crystal bar clamping device can move forward and backward by hand leading screw 10, thereby take chamfered groove as benchmark single crystal silicon semiconductor is carried out orientation, demonstrates reading by display panel 9.
Claims (1)
1. semiconductor chamfered groove direction finder, comprise board, be fixed with x ray generator on the board, it is characterized in that the both sides that are positioned at x ray generator on the described board are fixed with respectively angular instrument, be equiped with the turbine and worm pair in the angular instrument, worm screw one end of turbine and worm pair connects handwheel, the other end of worm screw is equiped with scrambler, and turbine is connected with a main shaft, and the top of main shaft passes outside the housing of angular instrument, its traversing through end is fixed a supporting plate, be equiped with locating piece on the supporting plate, be equiped with rotary-tray and slide plate on the supporting plate, be provided with display panel on the rotary-tray, be equiped with the crystal bar clamping device on the slide plate, be equiped with hand leading screw on the crystal bar clamping device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220322110 CN202661416U (en) | 2012-07-05 | 2012-07-05 | Semiconductor corner slot orientation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220322110 CN202661416U (en) | 2012-07-05 | 2012-07-05 | Semiconductor corner slot orientation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202661416U true CN202661416U (en) | 2013-01-09 |
Family
ID=47456314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220322110 Expired - Fee Related CN202661416U (en) | 2012-07-05 | 2012-07-05 | Semiconductor corner slot orientation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202661416U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370679A (en) * | 2016-11-02 | 2017-02-01 | 中国电子科技集团公司第四十六研究所 | Semiconductor wafer notch groove crystal orientation measuring device and use method |
-
2012
- 2012-07-05 CN CN 201220322110 patent/CN202661416U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370679A (en) * | 2016-11-02 | 2017-02-01 | 中国电子科技集团公司第四十六研究所 | Semiconductor wafer notch groove crystal orientation measuring device and use method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130109 Termination date: 20150705 |
|
| EXPY | Termination of patent right or utility model |