CN209027957U - Dual wavelength multi-angle transmission-type air particles measuring device - Google Patents
Dual wavelength multi-angle transmission-type air particles measuring device Download PDFInfo
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- CN209027957U CN209027957U CN201821715626.0U CN201821715626U CN209027957U CN 209027957 U CN209027957 U CN 209027957U CN 201821715626 U CN201821715626 U CN 201821715626U CN 209027957 U CN209027957 U CN 209027957U
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Abstract
Dual wavelength multi-angle transmission-type air particles measuring device, belongs to field of optical detection, and that there are errors in order to solve the problems, such as existing light scattering measurement device is big, slow-footed for the utility model.Dual wavelength multi-angle is designed, fixed multiple angles is separated using transmission grating and scatters light, obtain scattering situation of the determinand under multiple angles, measurement process is simple, measurement accuracy is high.Measuring device includes: green laser light source (1-1), red laser light source (1-2), the first attenuator (2-1), the second attenuator (2-2), the first reflecting mirror (3-1), the second reflecting mirror (3-2), the first lens (4-1), the second lens (4-2), diaphragm (5), Amici prism (6), the first convergent lens (7-1), the second convergent lens (7-2), sample (8), polarizing film (9), grating (10), cmos image sensor (11.1 ~ 11.5).The utility model has many advantages, such as that untouchable, measurement is simple, precision is high, error is small, for measuring granule density.
Description
Technical field
The utility model relates to dual wavelength multi-angle transmission-type air particles measuring devices, belong to field of optical detection.
Background technique
Optical-section method method is a kind of based on Mie scattering theory, approximatively realizes to the method for determinand precise measurement, has
The advantage that measurement range is big, data processing is simple.In existing optical-section method method, since the distribution of determinand irregularly causes to dissipate
It penetrates light direction to be not fixed, there is a problem of receiving complexity.The most scattering method light for only receiving a direction of these methods are counted
It calculates and reconstruct, therefore will have that determinand scattered information is not comprehensive, the big problem of measurement error.Grating beam splitting is compared to prism point
Light has the advantages that spectral line separation angle is fixed, separation degree is big, high resolution, energy dispersive are big, while passing through transmission grating
Obtained angular is fixed, multidimensional information that is easy to operate in the measurements and obtaining scattering light.
Light scattering measurement technology can be interacted with it when encountering determinand using light wave, to change incidence
Optical information, the information by receiving scattering light obtain a kind of measuring method of determinand information.Light scattering method is because of its tool
Have that non-contact, measurement range wide (from tens microns to several nanometers), measuring speed is fast, accuracy is high, it is reproducible, can be online
The advantages that measurement and the measurement of concetration for being widely used in the Surface testing of object, particulate matter are more such as semiconductor wafer surface
The measurement etc. of concentration of suspension in parameter measurement, air.Existing light scattering measurements are according to light source type, the letter used
Road, reception device difference and emerge one after another.
Summary of the invention
Above-mentioned detection method is the data processing method of the optical-section method method based on Single wavelength, the data processing with Single wavelength
Similar, dual wavelength light total scattering is to be measured using the two-beam of different wave length to same particle swarm.
The utility model aim be solve at present to granule density measurement there are measurement errors big, received scattered information not
Comprehensive problem provides dual wavelength multi-angle transmission-type air particles measuring device.
Dual wavelength multi-angle transmission-type air particles measuring device, the measuring device include: green laser light source (1-1),
Red laser light source (1-2), the first attenuator (2-1), the second attenuator (2-2), the first reflecting mirror (3-1), the second reflecting mirror
(3-2), the first lens (4-1), the second lens (4-2), diaphragm (5), Amici prism (6), the first convergent lens (7-1), second
Convergent lens (7-2), sample (8), polarizing film (9), grating (10), cmos image sensor (11.1 ~ 11.5).
The laser light source, the present apparatus use the semiconductor laser of 532nm and the He-Ne laser of 632.8nm, this
Two kinds of light sources are all common and are widely used in laser detection；
The attenuator, the light intensity issued by laser is too greatly so that it cannot the size of resolved scatter light intensity, it is necessary to
It can be only achieved measurement request by attenuator.
The reflecting mirror, it is main to change the path that light is issued by red laser, make it and enters light path.
First lens and the second lens, above-mentioned two lens collectively constitute collimator and extender part.
The Amici prism needs Amici prism by laser since the present apparatus will measure incident intensity and transmitted light intensity
The light beam of light source is divided into two-beam.
The polarizing film, filters out stray light.
The diaphragm, the hot spot after expanding is too big, and high-order mode is unstable, is generally studied only with basic mode.
The grating plays spectrophotometric result, to realize multiangular measurement；The present apparatus using 50 lines pair transmission-type grating into
Row light splitting.
The CMOS acquires intensity image.Compared to power meter, the image of CMOS acquisition is by handling available company
Continuous light intensity value.
The method that the present apparatus uses dual wavelength incidence, incident with the light of different wave length respectively, measurement no specimen has sample
Multi-angle dispersion image.The light that laser issues enters collimating and beam expanding system after attenuator, filters high-order mode, light beam through diaphragm
Reach Amici prism be divided into two-beam, respectively measure incident intensity and by sample and by the multi-angle of grating beam splitting transmit
Light intensity.
The advantages of the utility model: the utility model there are errors in order to solve existing light scattering measurement device big, speed
Slow problem.Dual wavelength multi-angle is designed, fixed multiple angles is separated using transmission grating and scatters light, obtain determinand more
Scattering situation under a angle.Establish particle in the air that one kind is untouchable, fast and convenient, measurement accuracy is high, error is small
The measuring device of concentration improves speed when actual measurement, reduces measurement error, reduces and one-shot measurement result mistake occurs
The measurement air middle particle concentration device of possibility accidentally, this functionization has sizable market advantage, and can be one
Determine the deficiency that domestic existing granule density measuring system is compensated in degree.
Detailed description of the invention
Fig. 1 is dual wavelength multi-angle transmission-type air particles measuring device structural schematic diagram described in the utility model.
In figure: 1-1. green laser light source, 1-2. red laser light source, the first attenuator of 2-1., the second attenuator of 2-2.,
The first reflecting mirror of 3-1., the second reflecting mirror of 3-2., the first lens of 4-1., the second lens of 4-2., 5. diaphragms, 6. Amici prisms, 7-
1. the first convergent lens, the second convergent lens of 7-2., 8. samples, 9. polarizing films, 10. gratings, 11.1 ~ 11.5 cmos images pass
Sensor.
Specific embodiment
Illustrate present embodiment below with reference to Fig. 1, dual wavelength multi-angle transmission-type air particles described in present embodiment are surveyed
Measure device.
When selecting green laser light source (1-1) to take data, the laser light incident being emitted from green laser light source (1-1) is extremely
Strong light decay is reduced to experiment light intensity by the first attenuator (2-1) by the first attenuator (2-1), is expanded into the first lens (4-1)
Beam, the light expanded are incident to the second lens (4-2), and the light after being collimated by the second lens (4-2) is incident to diaphragm (5), through light
After door screen chooses light, Amici prism (6) are incident on, horizon light and vertical light are divided by Amici prism (6).
It is incident to sample (8) by the horizon light that Amici prism (6) are divided, the light of sample (8) outgoing is incident to polarizing film
(9) become linearly polarized photon, scatter light by polarizing film (9) and be incident to grating (10), by the light of grating (10) with multiple angles
Degree is incident to the second cmos image sensor (11-2), third cmos image sensor (11-3), the 4th cmos image respectively and passes
Sensor (11-4)；The rear incident light generated simultaneously by grating (10) is strong, is incident to the first CMOS by the second convergent lens (7-2)
Imaging sensor (11-1).
The normal light incidence being divided by Amici prism (6) is incident to the 5th cmos image to the first convergent lens (7-1)
Sensor (11-5).
When selecting red laser light source (1-2) to take data, the laser light incident being emitted from red laser light source (1-2) is extremely
Strong light decay is reduced to experiment light intensity by the second attenuator (2-2) by the second attenuator (2-2), via the second reflecting mirror (3-2) and
First reflecting mirror (3-1) reflexes to its light on detection main optical path, expands into the first lens (4-1), the light expanded is incident to
Second lens (4-2), the light after being collimated by the second lens (4-2) are incident to diaphragm (5), after diaphragm chooses light, enter
Amici prism (6) are mapped to, horizon light and vertical light are divided by Amici prism (6).
It is incident to sample (8) by the horizon light that Amici prism (6) are divided, the light of sample (8) outgoing is incident to polarizing film
(9) become linearly polarized photon, scatter light by polarizing film (9) and be incident to grating (10), by the light of grating (10) with multiple angles
Degree is incident to the second cmos image sensor (11-2), third cmos image sensor (11-3), the 4th cmos image respectively and passes
Sensor (11-4)；The rear incident light generated simultaneously by grating (10) is strong, is incident to the first CMOS by the second convergent lens (7-2)
Imaging sensor (11-1).
The normal light incidence being divided by Amici prism (6) is incident to the 5th cmos image to the first convergent lens (7-1)
Sensor (11-5).
The structure that the green laser light source (1-1), red laser light source (1-2) light path are passed through is identical,
When so that being detected twice using the laser light source of different wave length, without changing optical path, measurement number can be tested by directly using light source instead
According to.It reduces measurement error, improve measurement accuracy.
The above, the only specific embodiment in the utility model, but the protection scope of the utility model not office
It is limited to this, partial modification or replacement of any people for being familiar with the technology in the technical scope disclosed by the utility model are all answered
Cover in the scope of the utility model.
Claims (1)
1. dual wavelength multi-angle transmission-type air particles measuring device, characterized in that it comprises: green laser light source (1-1),
Red laser light source (1-2), the first attenuator (2-1), the second attenuator (2-2), the first reflecting mirror (3-1), the second reflecting mirror
(3-2), the first lens (4-1), the second lens (4-2), diaphragm (5), Amici prism (6), the first convergent lens (7-1), second
Convergent lens (7-2), sample (8), polarizing film (9), grating (10), cmos image sensor (11.1 ~ 11.5)；Above-mentioned apparatus is green
The light path that ray laser light source (1-1) or red laser light source (1-2) light path are passed through is identical, and passes through experiment measurement
Region is identical, and when so that being detected twice using the laser light source of different wave length, without changing optical path, directly using light source instead can be real
Test measurement data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821715626.0U CN209027957U (en) | 2018-10-23 | 2018-10-23 | Dual wavelength multi-angle transmission-type air particles measuring device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821715626.0U CN209027957U (en) | 2018-10-23 | 2018-10-23 | Dual wavelength multi-angle transmission-type air particles measuring device |
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| Publication Number | Publication Date |
|---|---|
| CN209027957U true CN209027957U (en) | 2019-06-25 |
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| CN201821715626.0U Expired - Fee Related CN209027957U (en) | 2018-10-23 | 2018-10-23 | Dual wavelength multi-angle transmission-type air particles measuring device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112284986A (en) * | 2019-07-24 | 2021-01-29 | 三星电子株式会社 | Apparatus and method for measuring particulate matter |
| CN112903547A (en) * | 2019-11-19 | 2021-06-04 | 南京理工大学 | High-concentration cloud and mist particle concentration measuring device based on double light sources |
| CN113125437A (en) * | 2021-04-22 | 2021-07-16 | 华中科技大学 | Detection system and method based on optical interference scattering microscopy |
-
2018
- 2018-10-23 CN CN201821715626.0U patent/CN209027957U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112284986A (en) * | 2019-07-24 | 2021-01-29 | 三星电子株式会社 | Apparatus and method for measuring particulate matter |
| CN112903547A (en) * | 2019-11-19 | 2021-06-04 | 南京理工大学 | High-concentration cloud and mist particle concentration measuring device based on double light sources |
| CN112903547B (en) * | 2019-11-19 | 2023-01-03 | 南京理工大学 | High-concentration cloud and mist particle concentration measuring device based on double light sources |
| CN113125437A (en) * | 2021-04-22 | 2021-07-16 | 华中科技大学 | Detection system and method based on optical interference scattering microscopy |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190625 Termination date: 20191023 |