CN209027489U - It is a kind of for measuring the tool of installation site between unit under test and test cell - Google Patents
It is a kind of for measuring the tool of installation site between unit under test and test cell Download PDFInfo
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- CN209027489U CN209027489U CN201821922402.7U CN201821922402U CN209027489U CN 209027489 U CN209027489 U CN 209027489U CN 201821922402 U CN201821922402 U CN 201821922402U CN 209027489 U CN209027489 U CN 209027489U
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Abstract
The utility model discloses a kind of for measuring the tool of installation site between unit under test and test cell, is related to measuring tool technical field.The utility model includes Y location measurement end and Z location measurement end, the Y location measurement end is used for the longitudinal pitch tested between unit under test and the installation folder of test cell, and the Z location measurement end is used for the level height tested between unit under test and the mounting rack of test cell；The utility model may insure the accuracy of installation site between unit under test and test cell, to effectively improve the accuracy of testing efficiency and test result.
Description
Technical field
The utility model relates to measuring tool technical fields, single more specifically to a kind of measurement unit under test and test
The tool of installation site between member is installed on fore-and-aft distance and level height on test cell more particularly, to measurement test board
Tool.
Background technique
It needs to test various boards in semiconductor production process, usually passes through mechanical arm loading/unloading
Test board is put into test cell by test board, and test cell tests test board, and in test, to test board
Placement location requirement is more stringent, when only placing in correct position, just can ensure that the accuracy of test result.By test board
When being put into the installation folder of test cell, the fore-and-aft distance and level height of test board and installation folder are by equipment and technology people
Member's visual detection determines position, has biggish error.It is larger that the mode of this visual detection may cause test result error,
Even test result is invalid.It is vertical between test board and test cell installation folder that this just needs equipment and technology personnel to continuously adjust
To distance and level height, to influence testing efficiency, it is difficult to guarantee the accuracy of this mode test result.
Utility model content
In order to overcome above-mentioned defect existing in the prior art and deficiency, it is tested single for measuring that this application provides one kind
The tool of installation site, the application more particularly, to measure the installation of unit under test and test cell between member and test cell
The tool of fore-and-aft distance and level height between folder, measuring tool provided by the present application, can quickly position unit under test with
Fore-and-aft distance and level height between the installation folder of test cell, it is ensured that the standard of installation site between unit under test and test cell
True property, to effectively improve the accuracy of testing efficiency and test result.
In order to solve above-mentioned problems of the prior art, according to one kind of the application for measuring unit under test and surveying
Try the tool of installation site between unit, it is characterised in that: including Y location measurement end and Z location measurement end, the Y location is surveyed
The longitudinal pitch that amount end is used to test between unit under test and the installation folder of test cell, the Z location measurement end is for testing
Level height between unit under test and the mounting rack of test cell；The maximum gauge of the Y location measurement end be 3.5mm, Y
The minimum thickness for setting the top of measurement end is 2mm, to passing through between maximum gauge at the minimum thickness of the Y location measurement end
Sloped transition, the tilt angle on the slope are 15 °；The maximum gauge of the Z location measurement end is 3mm, Z location measurement end
The minimum thickness on top is 1.2mm, to passing through slope mistake between maximum gauge at the minimum thickness of the Z location measurement end
It crosses, the tilt angle on the slope is 15 °.
Test board is loaded by manipulator, test board is placed in the installation folder of test cell, uses this tool respectively
Y location measurement end measurement test board and test cell installation folder longitudinal pitch, use this tool Z location measurement end measurement
The difference in level of test board and test cell installation folder inner bottom wall；When being tested using this tool, make measuring tool
Burnishing surface is affixed on the outer wall of test board, tool slope abut with mounting rack inner wall edge, determine that the installation site can satisfy machine
Tool arm normally loads and unloads, and otherwise needs again to move mechanical arm, until being tested again after being moved to accurate location.Using
Tool documented by the application can determine position by visual detection with alternate device technical staff, improve the accurate of positioning calibration
Property, the adjustment number of manipulator's arm is reduced, testing efficiency is improved, improves test result accuracy.
The axis of the Y location measurement end of the tool and the axis of Z location measurement end are mutually perpendicular to, and the tool is integrally in
" L " type.In the application, Y location measurement end and Z location measurement end are separately positioned on the both ends of tool, and L-shaped distribution is convenient
Technical staff uses, and can easily realize the switching between Y location measurement and Z location measurement, and L-shaped distribution, by Y
Position measurement end and Z location measurement end are arranged to that one is long and the other is short, also technical staff are facilitated to recognize, avoided using mistake.
The Y location measurement end axis of the tool is overlapped with the axis of Z location measurement end, and the tool is integrally in " one " word
Type.In the application, Y location measurement end and Z location measurement end are separately positioned on the both ends of tool, are distributed in line-styled, convenient
Technical staff uses, and can easily realize the switching between Y location measurement and Z location measurement.
The width direction of the Y location measurement end of the tool is parallel with the width direction of Z location measurement end, and Y location is surveyed
Amount end and the slope of Z location measurement end are all set on the inside of tool.This setup is easy to process, and slope is all set in tool
Outside when preventing L-shaped, interferes convenient for measurement between two measurement ends.
The width direction of the Y location measurement end of the tool is vertical with the width direction of Z location measurement end.Such setting
Mode can interfere to avoid two measurement ends when measuring respectively.
The width of the Y location measurement end is of same size with Z location measurement end, is 10mm.
According to the measurement method of the application, test board is loaded by manipulator, test board is placed in the peace of test cell
In clamping, respectively using the longitudinal pitch of Y location measurement end the measurement test board and test cell installation folder of this tool, this is used
The difference in level of Z location measurement end the measurement test board and test cell installation folder inner bottom wall of tool；Using this tool into
When capable test, the burnishing surface of measuring tool is made to be affixed on the outer wall of test board, tool slope abuts and mounting rack inner wall edge, determination
The installation site can satisfy mechanical arm and normally load and unload, and otherwise need again to move mechanical arm, until being moved to accurate position
It is tested again after setting.Using tool documented by the application, position can be determined by visual detection with alternate device technical staff
It sets, improves the accuracy of positioning calibration, reduce the adjustment number of manipulator's arm, improve testing efficiency, improve test result
Accuracy.
In the application, Y location measurement end and Z location measurement end are separately positioned on the both ends of tool, L-shaped distribution, side
Just technical staff uses, and can easily realize the switching between Y location measurement and Z location measurement, and L-shaped distribution,
Y location measurement end and Z location measurement end be arranged to one is long and the other is short, also technical staff is facilitated to recognize, avoided using mistake.
In the application, Y location measurement end and Z location measurement end are separately positioned on the both ends of tool, are distributed in line-styled,
Facilitate technical staff to use, can easily realize the switching between Y location measurement and Z location measurement.
The width direction of the Y location measurement end of the tool is parallel with the width direction of Z location measurement end, and Y location is surveyed
Amount end and the slope of Z location measurement end are all set on the inside of tool.This setup is easy to process, and slope is all set in tool
Outside when preventing L-shaped, interferes convenient for measurement between two measurement ends.
The width direction of the Y location measurement end of the tool is vertical with the width direction of Z location measurement end.Such setting
Mode can interfere to avoid two measurement ends when measuring respectively.
Detailed description of the invention
Fig. 1 is the utility model schematic view of the front view；
Fig. 2 is the structural schematic diagram that the utility model tool is in line-styled；
Fig. 3 is the structural schematic diagram that the utility model tool is L-shaped and the width direction of two measurement ends is vertical；
Fig. 4 is the utility model tool structural schematic diagram vertical in the width direction of line-styled and two measurement ends；
Fig. 5 is the using state structure diagram of the utility model tool；
Appended drawing reference: 1, Y location measurement end, 2, Z location measurement end, 3, unit under test, 4, installation folder.
Specific embodiment
Embodiment 1
As one preferred embodiment of the application, referring to Figure of description 1-5, present embodiment discloses:
Referring to Figure of description 1, present embodiment discloses one kind to install between unit under test and test cell for measuring
The tool of position, including Y location measurement end 1 and Z location measurement end 2, the Y location measurement end 1 for test unit under test 3 with
Longitudinal pitch between the installation folder 4 of test cell, the Z location measurement end 2 are used to test unit under test 3 and test cell
Level height between mounting rack；The maximum gauge of the Y location measurement end 1 is 3.5mm, and the top of Y location measurement end 1 is most
It is small with a thickness of 2mm, to passing through sloped transition, the slope between maximum gauge at the minimum thickness of the Y location measurement end 1
Tilt angle be 15 °；The maximum gauge of the Z location measurement end 2 is 3mm, the minimum thickness on the top of Z location measurement end 2
For 1.2mm, to by sloped transition, the slope is inclined between maximum gauge at the minimum thickness of the Z location measurement end 2
Rake angle is 15 °.
Referring to Figure of description 5, the application method according to the measuring tool of the present embodiment is to be loaded and tested by manipulator
Test board is placed in the installation folder 4 of test cell by plate, respectively using this tool Y location measurement end 1 measure test board with
The longitudinal pitch of test cell installation folder 4 measures test board and test cell installation folder 4 using the Z location measurement end 2 of this tool
The difference in level of inner bottom wall；When being tested using this tool, the burnishing surface of measuring tool is made to be affixed on the outer wall of test board,
Tool slope abut with mounting rack inner wall edge, determine that the installation site can satisfy mechanical arm and normally load and unload, otherwise need
Mechanical arm is moved again, until being tested again after being moved to accurate location.It, can be with using tool documented by the application
Alternate device technical staff determines position by visual detection, improves the accuracy of positioning calibration, reduces the tune of manipulator's arm
Whole number improves testing efficiency, improves test result accuracy.
Embodiment 2
As the application another embodiment, referring to Figure of description 1-5, present embodiment discloses:
Present embodiment discloses a kind of for measuring the tool of installation site between unit under test and test cell, including Y
Position measurement end 1 and Z location measurement end 2, the Y location measurement end 1 are used to test the installation folder of unit under test 3 Yu test cell
Longitudinal pitch between 4, the Z location measurement end 2 are used for the level tested between unit under test 3 and the mounting rack of test cell
Highly；The maximum gauge of the Y location measurement end 1 is 3.5mm, and the minimum thickness on the top of Y location measurement end 1 is 2mm, described
To by sloped transition, the tilt angle on the slope is 15 ° between maximum gauge at the minimum thickness of Y location measurement end 1；
The maximum gauge of the Z location measurement end 2 is 3mm, and the minimum thickness on the top of Z location measurement end 2 is 1.2mm, the Z location
To by sloped transition, the tilt angle on the slope is 15 ° between maximum gauge at the minimum thickness of measurement end 2.
Referring to Figure of description 1, the axis of the Y location measurement end 1 of the tool and the axis of Z location measurement end 2 are mutual
Vertically, the tool is integrally L-shaped.The width direction of the Y location measurement end 1 of the tool and the width of Z location measurement end 2
Direction is parallel, and the slope of Y location measurement end 1 and Z location measurement end 2 is all set on the inside of tool.
Alternatively, referring to Figure of description 2,1 axis of Y location measurement end of the tool and the axis weight of Z location measurement end 2
It closes, the tool is integrally in line-styled.The width direction of the Y location measurement end 1 of the tool and the width of Z location measurement end 2
It is parallel to spend direction.At this moment, Y location measurement end 1 and the slope position of Z location measurement end 2 are not especially limited.
Embodiment 3
As the application another embodiment, referring to Figure of description 1-5, present embodiment discloses: in the present embodiment
In, referring to Figure of description 3, the axis of the Y location measurement end 1 of the tool and the axis of Z location measurement end 2 are mutually perpendicular to,
The tool is integrally L-shaped.The width direction of the Y location measurement end 1 of the tool and the width direction of Z location measurement end 2
Vertically.The width of the Y location measurement end 1 is of same size with Z location measurement end 2, is 10mm.
Alternatively, referring to Figure of description 4,1 axis of Y location measurement end of the tool and the axis weight of Z location measurement end 2
It closes, the tool is integrally in line-styled.The width direction of the Y location measurement end 1 of the tool and the width of Z location measurement end 2
It is vertical to spend direction.The width of the Y location measurement end 1 is of same size with Z location measurement end 2, is 10mm.
Claims (6)
1. the tool for measuring installation site between unit under test and test cell, it is characterised in that: including Y location measurement end
(1) and Z location measurement end (2), the Y location measurement end (1) are used to test the installation folder of unit under test (3) and test cell
(4) longitudinal pitch between, the Z location measurement end (2) is for testing between unit under test (3) and the mounting rack of test cell
Level height；The maximum gauge of the Y location measurement end (1) is 3.5mm, the minimum thickness on the top of Y location measurement end (1)
For 2mm, to by sloped transition, the slope is inclined between maximum gauge at the minimum thickness of the Y location measurement end (1)
Rake angle is 15 °；The maximum gauge of the Z location measurement end (2) is 3mm, the minimum thickness on the top of Z location measurement end (2)
For 1.2mm, at the minimum thickness of the Z location measurement end (2) between maximum gauge by sloped transition, the slope
Tilt angle is 15 °.
2. as described in claim 1 for measuring the tool of installation site between unit under test and test cell, feature exists
In: the axis of the Y location measurement end (1) of the tool and the axis of Z location measurement end (2) are mutually perpendicular to, and the tool is whole
It is L-shaped.
3. as described in claim 1 for measuring the tool of installation site between unit under test and test cell, feature exists
In: Y location measurement end (1) axis of the tool is overlapped with the axis of Z location measurement end (2), and the tool is integrally in " one "
Font.
4. as claimed in claim 2 or claim 3 for measuring the tool of installation site between unit under test and test cell, feature
Be: the width direction of the Y location measurement end (1) of the tool is parallel with the width direction of Z location measurement end (2), and Y location
The slope of measurement end (1) and Z location measurement end (2) is all set on the inside of tool.
5. as claimed in claim 2 or claim 3 for measuring the tool of installation site between unit under test and test cell, feature
Be: the width direction of the Y location measurement end (1) of the tool is vertical with the width direction of Z location measurement end (2).
6. as claimed in any one of claims 1-3 for measuring the work of installation site between unit under test and test cell
Tool, it is characterised in that: the width of the Y location measurement end (1) is of same size with Z location measurement end (2), is 10mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821922402.7U CN209027489U (en) | 2018-11-21 | 2018-11-21 | It is a kind of for measuring the tool of installation site between unit under test and test cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821922402.7U CN209027489U (en) | 2018-11-21 | 2018-11-21 | It is a kind of for measuring the tool of installation site between unit under test and test cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209027489U true CN209027489U (en) | 2019-06-25 |
Family
ID=66909969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821922402.7U Active CN209027489U (en) | 2018-11-21 | 2018-11-21 | It is a kind of for measuring the tool of installation site between unit under test and test cell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209027489U (en) |
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2018
- 2018-11-21 CN CN201821922402.7U patent/CN209027489U/en active Active
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