CN209026360U - A kind of ultrahigh vacuum flange seal attachment device - Google Patents
A kind of ultrahigh vacuum flange seal attachment device Download PDFInfo
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- CN209026360U CN209026360U CN201821727682.6U CN201821727682U CN209026360U CN 209026360 U CN209026360 U CN 209026360U CN 201821727682 U CN201821727682 U CN 201821727682U CN 209026360 U CN209026360 U CN 209026360U
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Abstract
The utility model discloses a kind of ultrahigh vacuum flange seal attachment devices, including first flange, second flange, seal assembly, conduit assembly and vacuum pump, first flange and second flange are docked up and down, seal assembly is provided between first flange and second flange, seal assembly includes the first sealing ring set gradually from inside to outside, first annular chamber, second sealing ring, second annular chamber, third sealing ring, conduit assembly includes main pipeline, first son pipe, second son pipe, first valve and the second valve, vacuum pump is connect with first annular chamber and the second annular chamber respectively by conduit assembly, for vacuumizing, air pressure is p1 in ultra-high vacuum system, first annular intracavitary air pressure is p2, air pressure is p3 in second annular chamber, atmospheric pressure is p4, p1 < p2 < p3 < p4；The utility model is by by the pressure difference treatment by stages between atmospheric pressure and ultra-high vacuum system negative pressure of vacuum, to improve whole leakproofness.
Description
Technical field
The utility model belongs to flange seal technical field, is specifically related to a kind of ultrahigh vacuum flange seal connection dress
It sets.
Background technique
Important mechanical part and most commonly used sealing structure of the flange for ultra-high vacuum system, the sealing ring of flange
In sealing, outlet will affect the acquisition of ultrahigh vacuum with leakage；The pressure being subject on the inside of sealing ring is ultra-high vacuum system
Negative pressure of vacuum, the pressure being subject on the outside of sealing ring is external atmosphere pressure, and therefore, sealing ring two sides make there are biggish pressure difference
The leakage rate for obtaining sealing ring is larger, and leakproofness is lower.
Summary of the invention
In view of this, the purpose of this utility model is to provide a kind of ultrahigh vacuum flange seal attachment device, pass through by
Pressure difference treatment by stages between atmospheric pressure and ultra-high vacuum system negative pressure of vacuum, to further increase whole leakproofness.
In order to achieve the above object, a kind of ultrahigh vacuum flange seal attachment device of the utility model, including first flange,
Second flange, seal assembly, conduit assembly and vacuum pump, the first flange and second flange up and down dock, first flange and
It is provided with seal assembly between second flange, seal assembly includes the first sealing ring set gradually from inside to outside, first annular
Chamber, the second sealing ring, the second annular chamber, third sealing ring, conduit assembly include main pipeline, the first son pipe, the second son pipe, first
Valve and the second valve, main pipeline one end connect vacuum pump, and the main pipeline other end is managed respectively with the first son and the second sub- Guan Liantong,
First son pipe is connected to first annular chamber, and the second son pipe is connected to the second annular chamber, and the first valve is equipped on the first sub- pipe, the
Second valve is installed, air pressure is p1 in ultra-high vacuum system, and first annular intracavitary air pressure is p2, the second annular chamber on two sub- pipes
Interior air pressure is p3, atmospheric pressure p4, p1 < p2 < p3 < p4.
Further, the p2 < 1.33 × 10-2Pa, the first sealing ring are metal packing washer, the second sealing ring and third
Sealing ring is rubber washer.
Further, the first flange lower end surface is equipped with first annular groove and second annular groove, first annular groove
The first annular chamber is surrounded between second flange upper surface, and institute is surrounded between second annular groove and second flange upper surface
The second annular chamber is stated, second flange upper surface is equipped with the first annular mounting groove successively arranged from inside to outside, the second annular installation
Slot and third annular mounting groove, the first sealing ring lower end are embedded in first annular mounting groove, the second sealing ring lower end insertion second
In annular mounting groove, third sealing ring lower end is embedded in third annular mounting groove.
It further, further include helium mass spectrometer leak detector, conduit assembly further includes third pipe and third valve, the sub- pipe one of third
End is connected to main pipeline, and the sub- pipe other end of third is connect with helium mass spectrometer leak detector, is equipped with third valve on the sub- pipe of third.
Further, it is bolted between the first flange and second flange.
The utility model has the beneficial effects that:
1. a kind of ultrahigh vacuum flange seal attachment device of the utility model improves whole leakproofness；First sealing ring
The pressure difference that two sides are subject to is p2-p1, and the pressure difference that the second sealing ring two sides are subject to is p3-p2, the pressure that third sealing ring two sides are subject to
Difference is p4-p3, and therefore, the pressure difference that each sealing ring two sides are subject to is significantly less than p4-p1, to reduce the leakage of each sealing ring
Amount is conducive to improve whole leakproofness；In addition, the utility model only need a vacuum pump can be realized to first annular chamber and
The reasonable utilization of resource is realized in vacuum pumping inside second annular chamber.
2. a kind of ultrahigh vacuum flange seal attachment device of the utility model is suitable for hot environment；First sealing ring is gold
Belong to seal washer, can continue working at high temperature and keep good stability；Simultaneously as p2 < 1.33 × 10-2Pa, can be with
Convective heat transfer and the most residual gas for eliminating gas are thermally conductive, reach good insulation effect, so that first annular chamber has
There is vacuum heat-insulation, therefore, rubber washer can be used in the second sealing ring and third sealing ring, to reduce cost.
3. a kind of ultrahigh vacuum flange seal attachment device of the utility model has both leak detection function；Helium mass spectrum leak detection can be passed through
Instrument is hunted leak；In addition, helium mass spectrometer leak detector and vacuum pump are become one by conduit assembly.
Detailed description of the invention
In order to keep the purpose of this utility model, technical scheme and beneficial effects clearer, the utility model provides as follows
Attached drawing is illustrated:
Fig. 1 is a kind of structural schematic diagram of ultrahigh vacuum flange seal attachment device of the utility model；
Fig. 2 is the enlarged structure schematic diagram in Fig. 1 at A；
Fig. 3 is a kind of use state reference view of ultrahigh vacuum flange seal attachment device of the utility model.
Appended drawing reference: 1- first flange；2- second flange；3- seal assembly；4- conduit assembly；5- vacuum pump；6- helium matter
Compose leak detector；7- ultra-high vacuum system；The first sealing ring of 31-；The first annular chamber of 32-；The second sealing ring of 33-；The second annular of 34-
Chamber；35- third sealing ring；41- main pipeline；42- the first son pipe；43- the second son pipe；The first valve of 44-；The second valve of 45-；
46- third sub- pipe；47- third valve.
Specific embodiment
Below in conjunction with attached drawing, the preferred embodiment of the utility model is described in detail.
As shown in Figure 1 to Figure 3；A kind of ultrahigh vacuum flange seal attachment device of the utility model, including first flange 1,
Second flange 2, seal assembly 3, conduit assembly 4 and vacuum pump 5；First flange 1 and about 2 second flange are docked, specifically, the
It is bolted between one flange 1 and second flange 2；Seal assembly 3 is provided between first flange 1 and second flange 2；It is close
Sealing assembly 3 includes the first sealing ring 31 set gradually from inside to outside, first annular chamber 32, second the 33, second annular of sealing ring
Chamber 34, third sealing ring 35；Conduit assembly 4 includes main pipeline 41, the first sub- pipe 42, the second sub- pipe 43, the first valve 44 and the
Two valves 45,41 one end of main pipeline connect vacuum pump 5, and 41 other end of main pipeline connects with the first sub- pipe 42 and the second sub- pipe 43 respectively
Logical, the first sub- pipe 42 is connected to first annular chamber 32, and the second sub- pipe 43 is connected to the second annular chamber 34, is installed on the first sub- pipe 42
There is the first valve 44, second valve 45 is installed on the second sub- pipe 43；Air pressure is p1, first annular chamber 32 in ultra-high vacuum system
Interior air pressure is p2, and air pressure is p3, atmospheric pressure p4, p1 < p2 < p3 < p4 in the second annular chamber 34.
Present embodiment is applied on ultra-high vacuum system 7, by taking ultrahigh vacuum sintering furnace as an example comprising cylinder and lower cover
Body, cartridge openings are downward, connect at cartridge openings with first flange 1, and lower cover is connect with second flange 2；Third sealing ring 35
The pressure that outside is generated by atmospheric pressure, i.e. p4；First sealing ring, 31 inside is generated by 7 negative pressure of vacuum of ultra-high vacuum system
Pressure, i.e. p1；It closes the first valve 44, opens the second valve 45, start vacuum pump 5, to being taken out inside the second annular chamber 34
Vacuumizing；Then, close the second valve 45, open the first valve 44, start vacuum pump 5, to inside first annular chamber 32 into
Row vacuum pumping；At this point, the pressure difference that 31 two sides of the first sealing ring are subject to is p2-p1, the pressure that 33 two sides of the second sealing ring are subject to
Difference is p3-p2, and the pressure difference that 35 two sides of third sealing ring are subject to is p4-p3, and therefore, the pressure difference that each sealing ring two sides are subject to is obvious
Less than p4-p1, to reduce the leakage rate of each sealing ring, be conducive to improve whole leakproofness.
Preferably, p2 < 1.33 × 10-2Pa, the first sealing ring 31 are metal packing washer, the second sealing ring 33 and third
Sealing ring 35 is rubber washer.
Metal packing washer can continue working at high temperature and keep good stability, to adapt to ultra-high vacuum system
7 carry out the needs of high-temperature baking；Simultaneously as p2 1.33 × 10-2pa of <, the convective heat transfer that gas can be eliminated and big portion absolutely
Divide residual gas thermally conductive, reaches good insulation effect, i.e., first annular chamber 32 has the function of vacuum heat-insulation, therefore, second
Rubber washer can be used in sealing ring 33 and third sealing ring 35, reduces cost；Simultaneously as the work pressure of metal packing washer
Power is far longer than the operating pressure of rubber washer, therefore, in actual use, the pressure difference of metal packing washer two sides can be made to be greater than
The pressure difference of rubber washer two sides.
Preferably, 1 lower end surface of first flange is equipped with first annular groove and second annular groove, first annular groove and the
The first annular chamber 32 is surrounded between two flanges, 2 upper surface, second annular groove and second flange surround institute between 2 upper surface
The second annular chamber 34 is stated, 2 upper surface of second flange is equipped with the first annular mounting groove successively arranged from inside to outside, the second annular peace
Tankage and third annular mounting groove, 31 lower end of the first sealing ring are embedded in first annular mounting groove, and 33 lower end of the second sealing ring is embedding
Enter in the second annular mounting groove, 35 lower end of third sealing ring is embedded in third annular mounting groove.
Here, first annular mounting groove, first annular groove, the second annular mounting groove, second annular groove, third annular
Staggered layout, reference Fig. 3, adjacent spacing between the two can reach most mounting groove self-assembling formation up and down from inside to outside
It is small, keep overall structure more compact；Also, by taking 1 lower end surface of first flange as an example, first annular groove and second annular groove it
Between share a first side wall, the minimum spacing of the thickness of the side wall, that is, between first annular groove and second annular groove should
Side wall is covered in above the second annular mounting groove, it is known that, the thickness of the thickness of the side wall is greater than the groove width of the second annular mounting groove,
To guarantee the intensity of the side wall；If first annular mounting groove, first annular groove, the second annular mounting groove, the second annular are recessed
Slot, third annular mounting groove are processed in 1 lower end surface of first flange, so that first annular mounting groove, first annular groove, second
Annular mounting groove, second annular groove, third annular mounting groove form layout horizontally arranged from inside to outside, at this point, the first ring
It there also is provided the second annular mounting groove between connected in star and second annular groove, first annular groove and the second annular mounting groove are total
With a second sidewall, the thickness of the side wall is far smaller than the thickness of the first side wall, and the intensity of the side wall substantially reduces.
Preferably, present embodiment further includes helium mass spectrometer leak detector 6, and conduit assembly 4 further includes the sub- pipe 46 of third and third
Valve 47, sub- 46 one end of pipe of third are connected to main pipeline 41, and sub- 46 other end of pipe of third is connect with helium mass spectrometer leak detector 6, third
Third valve 47 is installed on sub- pipe 46.
When leak detection, to ultra-high vacuum system 7 inside be blown helium；It closes the first valve 44, opens the second valve 45 and the
Three valves 47 detect the leak case of the second sealing ring 33；Then, the second valve 45 is closed, the first valve 44 and third are opened
Valve 47 detects the leak case of the first sealing ring 31.
Finally, it is stated that preferred embodiment above is merely intended for describing the technical solutions of the present application, but not for limiting the present application, to the greatest extent
Pipe has been described in detail the utility model by above preferred embodiment, but those skilled in the art should manage
Solution, can make various changes, without departing from the utility model claims book institute to it in the form and details
The range of restriction.
Claims (5)
1. a kind of ultrahigh vacuum flange seal attachment device, it is characterised in that: including first flange, second flange, seal assembly,
Conduit assembly and vacuum pump, the first flange and second flange are docked up and down, are provided between first flange and second flange
Seal assembly, seal assembly include the first sealing ring, first annular chamber, the second sealing ring, second set gradually from inside to outside
Annular chamber, third sealing ring, conduit assembly include main pipeline, the first son pipe, the second son pipe, the first valve and the second valve, master
Pipeline one end connects vacuum pump, and the main pipeline other end is managed respectively with the first son and the second sub- Guan Liantong, the first son pipe and the first ring
The connection of shape chamber, the second son pipe are connected to the second annular chamber, the first valve are equipped on the first sub- pipe, the is equipped on the second sub- pipe
Two valves, air pressure is p1 in ultra-high vacuum system, and first annular intracavitary air pressure is p2, and air pressure is p3, atmosphere in the second annular chamber
Pressure is p4, p1 < p2 < p3 < p4.
2. a kind of ultrahigh vacuum flange seal attachment device as described in claim 1, it is characterised in that: the p2 < 1.33 ×
10-2Pa, the first sealing ring are metal packing washer, and the second sealing ring and third sealing ring are rubber washer.
3. a kind of ultrahigh vacuum flange seal attachment device as claimed in claim 1 or 2, it is characterised in that: first method
Blue lower end surface is equipped with first annular groove and second annular groove, and institute is surrounded between first annular groove and second flange upper surface
First annular chamber is stated, second annular chamber, second flange upper end are surrounded between second annular groove and second flange upper surface
Face is equipped with first annular mounting groove, the second annular mounting groove and the third annular mounting groove successively arranged from inside to outside, and first is close
Seal lower end is embedded in first annular mounting groove, and the second sealing ring lower end is embedded in the second annular mounting groove, under third sealing ring
In end insertion third annular mounting groove.
4. a kind of ultrahigh vacuum flange seal attachment device as claimed in claim 1 or 2, it is characterised in that: further include helium matter
Leak detector is composed, conduit assembly further includes third pipe and third valve, and the sub- pipe one end of third is connected to main pipeline, and third sub- pipe is another
One end is connect with helium mass spectrometer leak detector, is equipped with third valve on the sub- pipe of third.
5. a kind of ultrahigh vacuum flange seal attachment device as described in claim 1, it is characterised in that: the first flange and
It is bolted between second flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821727682.6U CN209026360U (en) | 2018-10-24 | 2018-10-24 | A kind of ultrahigh vacuum flange seal attachment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821727682.6U CN209026360U (en) | 2018-10-24 | 2018-10-24 | A kind of ultrahigh vacuum flange seal attachment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209026360U true CN209026360U (en) | 2019-06-25 |
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ID=66907174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821727682.6U Active CN209026360U (en) | 2018-10-24 | 2018-10-24 | A kind of ultrahigh vacuum flange seal attachment device |
Country Status (1)
| Country | Link |
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| CN (1) | CN209026360U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113531246A (en) * | 2021-07-14 | 2021-10-22 | 上海铂世光半导体科技有限公司 | Sealing structure for vacuum cavity |
| CN114776907A (en) * | 2022-06-16 | 2022-07-22 | 点夺机电工程江苏有限公司 | On-line operation sealing device with double-layer sealing function for air pipe |
-
2018
- 2018-10-24 CN CN201821727682.6U patent/CN209026360U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113531246A (en) * | 2021-07-14 | 2021-10-22 | 上海铂世光半导体科技有限公司 | Sealing structure for vacuum cavity |
| CN114776907A (en) * | 2022-06-16 | 2022-07-22 | 点夺机电工程江苏有限公司 | On-line operation sealing device with double-layer sealing function for air pipe |
| CN114776907B (en) * | 2022-06-16 | 2022-09-06 | 点夺机电工程江苏有限公司 | Online operation sealing device with double-layer sealing function for air pipe |
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