CN209014805U - Slipping mechanism and microscope stand structure - Google Patents
Slipping mechanism and microscope stand structure Download PDFInfo
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- CN209014805U CN209014805U CN201821596338.8U CN201821596338U CN209014805U CN 209014805 U CN209014805 U CN 209014805U CN 201821596338 U CN201821596338 U CN 201821596338U CN 209014805 U CN209014805 U CN 209014805U
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Abstract
The utility model relates to a kind of slipping mechanism and microscope stand structure, slipping mechanism includes the first sliding component；Second sliding component, the second sliding component are equipped with slippage slot；Component is compressed, compressing component includes briquetting and the first press part, and briquetting and the first sliding component are set to slippage slot, and the first press part can extend into slippage slot and for compressing briquetting；And rolling assembly, rolling assembly include rotatable rolling member, rolling member is equipped with multiple, and rolling member rolls, the first sliding component is enable to move along slippage slot.It when needing to adjust the position of microscope ontology, pulls or the first sliding component is driven to move in the second sliding component, realize that the position of microscope ontology is adjusted；Simultaneously, first press part compresses briquetting, makes briquetting close to the first sliding component, so as to adjust the gap between the gap between the first side wall and third side wall, second sidewall and the 5th side wall, realizes effective rolling of rolling member, improve sliding efficiency and precision and improve position degree of regulation.
Description
Technical field
The utility model relates to the metal wire welding technology field of semiconductor, more particularly to a kind of slipping mechanism and micro-
Mirror support structure.
Background technique
Microscope is the important component in semiconductor gold thread ultrasound ball welder, is used to check whether the bonding of wafer to reach
Written standards.
However, needing to adjust microscopical position during checking whether wafer is bonded qualification, to meet adjustment
It needs.Existing microscope stand is not only at high cost, but also adjustment is complicated for operation, and Adjustment precision is poor, to meet wafer bonding
Demands on examination.
Summary of the invention
Based on this, it is necessary to provide a kind of slipping mechanism and microscope stand structure.The slipping mechanism can be realized to aobvious
The position of micro mirror ontology is adjusted, and adjusts easy to operate, degree of regulation height；The microscope stand structure includes sliding plane above-mentioned
Structure, the multifreedom motion that can be realized microscope stand structure are adjusted, and meet the demands on examination of wafer bonding.
Its technical solution is as follows:
On the one hand, a kind of slipping mechanism, including the first sliding component are provided, the first sliding component is equipped with first be oppositely arranged
Side wall and second sidewall；Second sliding component, the second sliding component are equipped with slippage slot, and the cell wall of slippage slot includes the third being oppositely arranged
Side wall and the 4th side wall；Component is compressed, compressing component includes briquetting and the first press part, and briquetting is equipped with the 5th side being oppositely arranged
Wall and the 6th side wall, briquetting and the first sliding component are set to slippage slot, the first side wall and the setting of third side wall face, second sidewall
It is arranged with the 5th side wall face, the 6th side wall and the setting of the 4th side wall face, the first press part can extend into slippage slot and be used for
Compress briquetting；And rolling assembly, rolling assembly include rotatable rolling member, rolling member is equipped with multiple, and a part of rolling member is set
Between the first side wall and third side wall, another part rolling member is set between second sidewall and the 5th side wall, rolling member rolling,
The first sliding component is set to move along slippage slot.
Above-mentioned slipping mechanism, by the setting of the first sliding component, the second sliding component and rolling member, when needing to adjust microscope
It when the position of ontology, pulls or the first sliding component is driven to move in the second sliding component, realize that the position of microscope ontology is adjusted；
Meanwhile first press part compress briquetting, make briquetting close to the first sliding component, so as to adjust the first side wall and third side wall it
Between gap, the gap between second sidewall and the 5th side wall, realize effective rolling of rolling member, improve sliding efficiency and essence
It spends and improves position degree of regulation.
Technical solution is illustrated further below:
The first side wall is equipped with the first slot in one of the embodiments, and second sidewall is equipped with the second slot, and third side wall is equipped with
Third slot, the 5th side wall are equipped with the 4th slot, and the first slot and third slot cooperatively form the first rolling groove, the second slot and the cooperation of the 4th slot
The second rolling groove is formed, a part of rolling member rolls in the first rolling groove, and another part rolling member rolls in the second rolling groove
It is dynamic.
Rolling assembly further includes guide rod in one of the embodiments, and guide rod is equipped with multiple, the first slot, the second slot, third
It is all provided in slot and the 4th slot there are two guide rod and two guide rods is arranged in spacing, four guide rods formation in the first rolling groove the
One rail portion, four guide rods in the second rolling groove form the second rail portion, and a part of rolling member and the first rail portion cooperate, simultaneously
It is rolled in the first rolling groove, another part rolling member cooperates with the second rail portion and rolls in the second rolling groove.
Rolling assembly further includes retainer in one of the embodiments, there are two retainer is set and is respectively arranged on correspondence
The first rolling groove and the second rolling groove, retainer be equipped with multiple maintaining parts, rolling member be set to corresponding maintaining part.
The second sliding component is equipped with threaded hole in one of the embodiments, and threaded hole is equipped with multiple and is arranged in spacing,
First press part and threaded hole are correspondingly provided with multiple and are cooperatively connected with threaded hole.
Compressing component in one of the embodiments, further includes the second press part, the second press part and the first press part point
Not She Yu the second sliding component opposite sides, the second press part can extend into slippage slot and for compressing the first sliding component.
On the other hand, a kind of microscope stand structure, including microscope ontology are additionally provided；Such as any one above-mentioned technical side
Slipping mechanism described in case, there are two slipping mechanism is set, two slipping mechanisms are respectively the first slipping mechanism and the second sliding plane
Structure, microscope ontology are set to the second sliding component of the first slipping mechanism, and it is sliding that the first sliding component of the first slipping mechanism is set to second
Second sliding component of telephone-moving structure is simultaneously arranged in angle；And supporting mechanism, supporting mechanism include support shaft, the second slipping mechanism
One end of first sliding component is equipped with overlap aperture and is sheathed on support shaft, and one end of the first sliding component of the second slipping mechanism can
It is rotated around support shaft.
Above-mentioned microscope stand structure realizes that the position of two one-movement-freedom-degrees is adjusted by the setting of slipping mechanism, the
First sliding component one end of two slipping mechanisms and support shaft cooperation rotate, and the adjusting of a rotational freedom are realized, to realize
The multiple degrees of freedom position of microscope ontology is adjusted.
Technical solution is illustrated further below:
Supporting mechanism further includes support rod and the adjustable plate that is flexibly connected with support rod in one of the embodiments, is adjusted
Section plate can be moved along the length direction of support rod, and support shaft is set to adjustable plate.
One end of the first sliding component of the second slipping mechanism is additionally provided with the first limiting section in one of the embodiments, adjusts
Section plate is additionally provided with the second limiting section with the cooperation of the first limiting section, and one end of the first sliding component of the second slipping mechanism is around support shaft
It rotates, the first limiting section and the second limiting section is made to cooperate progress rotary spacing.
It in one of the embodiments, further include regulating mechanism, regulating mechanism includes movable plate, rotating member and mounting base,
Mounting base is set to the second sliding component of the first slipping mechanism, and movable plate is flexibly connected with mounting base, and rotating member is rotatably set to
Mounting base, rotating member are equipped with sliding tooth, and movable plate is equipped with the rack gear cooperated with sliding tooth, and microscope ontology is set to movable plate, turn
Moving part rotates and movable plate can be driven to move along mounting base, makes movable plate that microscope ontology be driven to move.
Detailed description of the invention
Fig. 1 is the overall structure diagram of microscope stand structure in embodiment；
Fig. 2 is the second slipping mechanism overall structure of the explosion figure in Fig. 1 embodiment；
Fig. 3 is the second slipping mechanism overall structure installation diagram in Fig. 1 embodiment；
Fig. 4 is Fig. 1 embodiment supporting mechanism and the second slipping mechanism schematic diagram；
Fig. 5 is the overall structure installation diagram of the regulating mechanism in Fig. 1 embodiment；
Fig. 6 is the examined tablet and wafer structure schematic diagram in embodiment.
Attached drawing mark explanation:
100, the first slipping mechanism, the 200, second slipping mechanism, the 210, first sliding component, the 211, first slot, 212, second
Slot, the 213, first limiting section, the 220, second sliding component, 221, slippage slot, 222, third slot, 223, threaded hole, 230, briquetting,
231, the 4th slot, the 241, first press part, the 242, second press part, 251, rolling member, 252, retainer, 253, guide rod, 254,
Retainer, 300, microscope ontology, 410, support shaft, 420, support rod, 430, adjustable plate, the 431, second limiting section, 440, branch
Support seat, 510, movable plate, 520, rotating member, 530, mounting base, 600, tablet, 610, wafer.
Specific embodiment
The embodiments of the present invention are described in detail with reference to the accompanying drawing:
It should be noted that it can be directly in another element when alleged element is with another element " fixation " in text
Above or there may also be elements placed in the middle.When an element is considered as with another element " connection ", it be can be directly
It is connected to another element in succession or may be simultaneously present centering elements.On the contrary, when element is referred to as " directly existing " another element
When "upper", intermediary element is not present.Term as used herein "vertical", "horizontal", "left" and "right" and similar table
It states for illustrative purposes only, is not meant to be the only embodiment.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model
The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term " and or " used herein packet
Include any and all combinations of one or more related listed items.
Embodiment as shown in Figures 1 to 6 provides a kind of slipping mechanism, including the first sliding component 210, the first sliding
Part 210 is equipped with the first side wall being oppositely arranged and second sidewall；Second sliding component 220, the second sliding component 220 are equipped with slippage slot
221, the cell wall of slippage slot 221 includes the third side wall and the 4th side wall being oppositely arranged；Component is compressed, compressing component includes briquetting
230 and first press part 241, briquetting 230 be equipped with the 5th side wall and the 6th side wall being oppositely arranged, briquetting 230 and the first sliding
Part 210 is set to slippage slot 221, the first side wall and the setting of third side wall face, second sidewall and the setting of the 5th side wall face, the
Six side walls and the setting of the 4th side wall face, the first press part 241 can extend into slippage slot 221 and for compressing briquetting 230；And
Rolling assembly, rolling assembly include rotatable rolling member 251, and rolling member 251 is equipped with multiple, and a part of rolling member 251 is set to
Between the first side wall and third side wall, another part rolling member 251 is set between second sidewall and the 5th side wall, rolling member 251
It rolls, the first sliding component 210 is enable to move along slippage slot 221.
By the setting of the first sliding component 210, the second sliding component 220 and rolling member 251, when needing to adjust microscope ontology
When 300 position, pulls or the first sliding component 210 is driven to move in the second sliding component 220, realize microscope ontology 300
Position is adjusted；Meanwhile first press part 241 compress briquetting 230, make briquetting 230 close to the first sliding component 210, so as to adjust
The gap between gap, second sidewall and the 5th side wall between the first side wall and third side wall is saved, realizes having for rolling member 251
Effect rolls, and improves sliding efficiency and precision and improves position degree of regulation.
Microscope ontology 300 is the important component of semiconductor ultrasound gold wire bonder, is to check whether the bonding of wafer reaches
To the inspection part of default mark.Because usually there is different specifications (such as size) in different products, microscope sheet
Body 300 needs to carry out the mobile adjusting of its own position as needed, to meet the actual needs checked when checking, and existing
Supporting structure it is not only with high costs, but also adjust inconvenient, and degree of regulation is poor.
The first sliding component 210, the second sliding component 220, briquetting 230, the first press part 241 and rolling member is arranged in the present embodiment
251, the first sliding component 210 and briquetting 230 are placed in the slippage slot 221 of the second sliding component 220, and the first press part 241 protrudes into
Slippage slot 221 simultaneously compresses briquetting 230, at this point, briquetting 230 is close to the first sliding component 210, by squeezing action, to adjust first
The gap between gap and second sidewall and the 5th side wall between side wall and third side wall, and then rolling member 251 is enable to exist
There are certain prestressing force in gap adjusted and when realizing mobile, there are certain frictional force, realize when the first sliding component
210 in slippage slot 221 it is mobile adjust after position it is relatively stable, to keep degree of regulation higher, it is logical to meet microscope ontology 300
Cross the demand of sliding adjusting position and high-precision adjusting.
As shown in fig. 6, chip 610 to be checked is on a tablet 600, when inspection, by the sliding of slipping mechanism into
The position of row microscope ontology 300 is adjusted, to realize to whether wafer bonding achievees the purpose that meet the requirements inspection；In addition,
The small volume of chip 610 enables microscope ontology 300 accurately to reach preferable sight by the accurate adjusting of slipping mechanism
Position is examined, improves and checks precision.
Further, as shown in Figures 2 and 3, slippage slot 221 is arranged in rectangular groove structure, the first sliding component 210, second
Sliding component 220 and briquetting 230 are in rectangular block architecture setting and setting in a strip shape.So set, structure is more simple, production
Processing and assembly are more convenient, reduce production cost.
Further, rolling member 251 is ball.Ball is low in cost, reduces production cost.
As with the embodiments shown in figures 2 and 3, the first side wall is equipped with the first slot 211, and second sidewall is equipped with the second slot 212, the
Three side walls are equipped with third slot 222, and the 5th side wall is equipped with the 4th slot 231, and the first slot 211 and third slot 222 cooperatively form the first rolling
Dynamic slot, the second slot 212 and the 4th slot 231 cooperatively form the second rolling groove, and a part of rolling member 251 rolls in the first rolling groove
Dynamic, another part rolling member 251 rolls in the second rolling groove.
As shown in Figures 2 and 3, the first rolling groove and the second rolling groove are located at the two sides of the first sliding component 210, and first
There is rolling member 251 in rolling groove and the second rolling groove.When the first sliding component 210 is moved along slippage slot 221, rolling member 251
It rolls simultaneously, to realize the Relative sliding of opposite second sliding component 220 of the first sliding component 210.
As with the embodiments shown in figures 2 and 3, rolling assembly further includes guide rod 253, and guide rod 253 is equipped with multiple, the first slot
211, it is all provided in the second slot 212, third slot 222 and the 4th slot 231 there are two guide rod 253 and two guide rods 253 is set in spacing
It sets, four in the first rolling groove guide rod 253 forms the first rail portion, and four guide rods 253 in the second rolling groove form second
Rail portion, a part of rolling member 251 cooperate and roll in the first rolling groove, another part rolling member 251 with the first rail portion
Cooperate with the second rail portion and is rolled in the second rolling groove.
As shown in Figures 2 and 3, guide rod 253 in rod structure be arranged, guide rod 253 be respectively arranged on corresponding first slot 211,
Two slot angles of the slot angular position of the second slot 212, third slot 222 and the 4th slot 231, such as the first slot 211 are equipped with one
Guide rod 253 makes two guide rods 253 form the guide rail structure in first slot 211, four guide rods in the first rolling groove in turn
253 are just collectively formed the first rail portion；Second rail portion is similarly.
When the first press part 241 compresses briquetting 230, briquetting 230 is adjusting the first side wall close to the first sliding component 210
When gap between the gap and second sidewall and the 5th side wall between third side wall, guide rod 253 is made tightly to compress rolling member
251 and corresponding cell wall, to realize better scroll techniques effect, realizes and precisely adjust.
As with the embodiments shown in figures 2 and 3, rolling assembly further includes retainer 254252, and retainer 254252 is equipped with two
A and be respectively arranged on corresponding first rolling groove and the second rolling groove, retainer 254252 is equipped with multiple maintaining parts, rolling member
251 are set to corresponding maintaining part.
The plate-like structure setting of retainer 254252, maintaining part are the retaining hole on retainer 254252, retaining hole
It is correspondingly arranged with rolling member 251 (such as ball).
Further, retainer 254252 is arranged in the plastic plate structure of hollow out, guarantees adjacent rolling member 251 (as rolled
Pearl) interference and friction will not be generated.Holding number of perforations on retainer 254252 is corresponding with corresponding 251 number of rolling member to be set
It sets.The quantity of the hole count and rolling member 251 on retainer 254252 can be also adjusted according to stroke size.
As with the embodiments shown in figures 2 and 3, the second sliding component 220 be equipped with threaded hole 223, threaded hole 223 be equipped with it is multiple,
And be arranged in spacing, the first press part 241 is correspondingly provided with multiple and is cooperatively connected with threaded hole 223 with threaded hole 223.
As shown in Fig. 2, three the first press parts 241 are arranged in spacing, and three compress there are three the first press part 241 sets
Part enters slippage slot 221 with corresponding 223 corresponding matching of threaded hole and after rotating respectively, to compress briquetting 230, structure letter
It is single, it is easy to operate.
Further, guide rod 253 is the high-accuracy grinding tool thimble of high rigidity, compresses briquetting 230 by the first press part 241,
To adjust the trip between four guide rods 253 between rolling member 251 to gap, guarantee that repetitive positioning accuracy is high, the first press part
241 can be the major part reticulate pattern knob that hand can be facilitated stubborn, to be coupled with the threaded hole 223 of the second sliding component 220.
In addition, to avoid the first sliding component 210 from sliding out the slippage slot 221 of the second sliding component 220, as needed, second
The corresponding predeterminated position of the slippage slot 221 of sliding component 220 is limited equipped with screw.
As with the embodiments shown in figures 2 and 3, compressing component further includes the second press part 242, the second press part 242 and
One press part 241 is respectively arranged on the opposite sides of the second sliding component 220, and the second press part 242 can extend into slippage slot 221, simultaneously
For compressing the first sliding component 210.
After adjusting moving distance by slipping mechanism, due in 300 checking process of microscope ontology, it would still be possible to due to
Inevitable other factors cause to occur between the first sliding component 210 and the second sliding component 220 after adjusting slight opposite
Sliding, therefore, after adjustment, protrudes into slippage slot 221 by the second press part 242 and compresses tight first sliding component 210, from
And realize that the position of the first sliding component 210 is stablized, guarantee the precision that subsequent wafer bonding checks.
Certainly, the second sliding component 220 is equipped with the hole for protruding into the first press part 241, and the first press part 241 can be spiral shell
Rod structure is also possible to the other structures met the requirements, and those skilled in the art can be specifically arranged as needed, here not
It repeats again.
Embodiment as shown in Figure 1 and Figure 5 additionally provides a kind of microscope stand structure, including microscope ontology 300；
Slipping mechanism as described in any one above-mentioned embodiment, there are two slipping mechanism is set, two slipping mechanisms are respectively the first sliding
Mechanism 100 and the second slipping mechanism 200, microscope ontology 300 are set to the second sliding component of the first slipping mechanism 100, and first is sliding
First sliding component of telephone-moving structure 100 is set to the second sliding component 220 of the second slipping mechanism 200 and is arranged in angle；And support machine
Structure, supporting mechanism include support shaft 410, and one end of the first sliding component 210 of the second slipping mechanism 200 is equipped with overlap aperture and covers
Set on support shaft 410, one end of the first sliding component 210 of the second slipping mechanism 200 can be rotated around support shaft 410.
By the setting of slipping mechanism, realize that the position of two one-movement-freedom-degrees is adjusted, the first of the second slipping mechanism 200
210 one end of sliding component and the cooperation of support shaft 410 rotate, and the adjusting of a rotational freedom are realized, to realize microscope ontology
300 multiple degrees of freedom position is adjusted.
As shown in Figure 1 and Figure 5, the sliding of the slippage slot glide direction of the first slipping mechanism 100 and the second slipping mechanism 200
Slot 221 cooperates glide direction in 90 ° of angle settings, and the axis of support shaft 410 is arranged in vertical structure, utilizes first to be formed
Slipping mechanism 100 and the second slipping mechanism 200 realize the adjusting of X-direction and Y-direction, pass through the first of the second slipping mechanism 200
Sliding component 210 is rotated around support shaft 410, realizes the rotation in direction about the z axis, to realize that the position of three degree of freedom is adjusted.
First sliding component 210 of the second slipping mechanism 200 can be rotated around support shaft 410, this is because when bonding equipment is raw
When production, microscope ontology 300 must be far from working region, at this time, by the first sliding component for rotating the second slipping mechanism 200
210 rotate around support shaft 410, thus by the rotation of microscope ontology 300 to the places of location conflicts will not occur when working, when wanting
When checking welding result, microscope ontology 300 is rotated back to and checks position, which is not described herein again.
It should be noted that the first slipping mechanism 100 is identical with the structure of the second slipping mechanism 200, it is intended merely to here
What is illustrated conveniently distinguishes, and is not necessarily referring to different structures, and Fig. 2 is the second slipping mechanism 200 into Fig. 4.
Embodiment as shown in Figure 1 and Figure 4, supporting mechanism further include support rod 420 and are flexibly connected with support rod 420
Adjustable plate 430, adjustable plate 430 can be moved along the length direction of support rod 420, and support shaft 410 is set to adjustable plate 430.
Support rod 420 in longitudinally disposed, adjustable plate 430 be flexibly connected with support rod 420 and can along support rod 420 into
Row moves up and down adjusting, and support shaft 410 is set to the upper end of adjustable plate 430.
Further, as shown in Figure 1, adjustable plate 430 be equipped with adjustment hole, adjustment hole in bar shaped be arranged and it is longitudinally disposed,
Support rod 420 is equipped with matching hole, consolidates adjustable plate 430 by structures such as screw or bolts and with adjustment hole and matching hole cooperation
Realize adjustable plate 430 on support rod 420 by adjusting the position for the adjustment hole that screw is arranged in bar shaped due to support rod 420
Upper and lower position installation and adjustment, to realize that adjustable plate 430 is moved along the length direction of support rod 420.
Further, as shown in Figure 1, adjustment hole is equipped with multiple and is arranged in spacing.
As shown in figure 1, adjustment hole in left and right and on have four, thus can not only adjusting screw or bolt same
The upper and lower position of adjustment hole realize that adjustable plate 430 moves on the length direction of support rod 420, additionally it is possible to by adjusting screw or
Bolt realizes that adjustable plate 430 moves on the length direction of support rod 420 in the position in upper and lower two different adjustment holes, thus real
The upper and lower position of existing microscope ontology 300 is adjusted.
At the same time it can also be adjusted between two adjustment holes in left and right, realizes that corresponding position in the horizontal direction is adjusted, mention
Rise whole adjusting freedom degree.
In addition, the lower end of support rod 420 is additionally provided with support base 440.Support base 440 is plate-like or block structure is arranged, simultaneously
It is fixed with the lower thread of support rod 420.Plate or block structure are convenient for keeping stablizing with ground face contact, provide stable branch
Support.
Certainly, as needed, as shown in figure 4, limit can also be arranged towards the side of support rod 420 in adjustable plate 430
Item (does not indicate) in figure, and support rod 420 is correspondingly provided with limiting slot corresponding with positive stop strip.Adjustable plate 430 is carried out along support rod 420
When moving up and down adjusting, positive stop strip cooperates the effect for realizing limit cooperation with limiting slot, and generation in adjustment process is avoided to tilt, simultaneously
And then the precision of upper and lower displacement is influenced, improve degree of regulation.
It should be noted that positive stop strip and limiting slot here can be only arranged according to the setting of adjustment hole it is a set of, can also
More sets are arranged, to meet actual adjusting needs.When being such as equipped with the adjustment hole of left and right, then need to be arranged two sets of positive stop strips and limit
Position slot, those skilled in the art can be specifically arranged as needed, and which is not described herein again.
One end of embodiment as shown in Figure 1 and Figure 4, the first sliding component 210 of the second slipping mechanism 200 is additionally provided with first
Limiting section 213, adjustable plate 430 are additionally provided with the second limiting section 431 with the cooperation of the first limiting section 213, the second slipping mechanism 200
One end of first sliding component 210 rotates around support shaft 410, rotates the first limiting section 213 and the cooperation of the second limiting section 431
Limit.
As shown in figure 4, the first limiting section 213 is in spacing breach structure setting, the second limiting section 431 is in retention bead structure
Setting, when 210 one end of the first sliding component of the second slipping mechanism 200 is rotated around support shaft 410, after turning to certain position, by
It in the blocking of the second limiting section 431, will be unable to continue to rotate, to realize the purpose of limit.
It should be noted that the amplitude of limit is decided according to the actual requirements.Such as needs according to the observation, microscope sheet is adjusted
When the position of body 300, satisfaction microscope ontology 300 can be moved to some preset position can (as setting be rotated by 90 ° for
Maximum rotated position), those skilled in the art can be specifically arranged as needed, and which is not described herein again.
Embodiment as shown in Figure 1, microscope stand structure further include regulating mechanism, regulating mechanism include movable plate 510,
Rotating member 520 and mounting base 530, mounting base 530 are set to the second sliding component of the first slipping mechanism 100, movable plate 510 and installation
Seat 530 is flexibly connected, and rotating member 520 is rotatably set to mounting base 530, and rotating member 520 is equipped with sliding tooth, and movable plate 510 is set
There is the rack gear with sliding tooth cooperation, microscope ontology 300 is set to movable plate 510, and rotating member 520 rotates and can drive movement
Plate 510 moves along mounting base 530, makes movable plate 510 that microscope ontology 300 be driven to move.
As shown in Figure 1, rotating member 520 is arranged in rotation shaft structure, the both ends of rotation axis are equipped with rotational handle or annulus, when
Rotation rotational handle and when rotation axis being driven to rotate, the rack gear fit engagement of sliding tooth and movable plate 510 in rotation axis, simultaneously
Movable plate 510 is driven to move, so as to move movable plate 510 along mounting base 530, movable plate 510 is moved, to drive peace
It is mobile loaded on microscope ontology 300 thereon, realize the position adjustment an of one-movement-freedom-degree.
Further, it is additionally provided with fixing seat (not indicated in figure), fixing seat is set to mounting base 530 and the first slipping mechanism
Between 100 the second sliding component, fixing seat is in bending plate structure setting, and the of one end of fixing seat and the first slipping mechanism 100
Two sliding components are fixed, and the other end and mounting base 530 of fixing seat are fixed.The bending angle of bending plate according to the needs of adjustment and
Fixed, which is not described herein again.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of slipping mechanism characterized by comprising
First sliding component, first sliding component are equipped with the first side wall being oppositely arranged and second sidewall；
Second sliding component, second sliding component are equipped with slippage slot, and the cell wall of the slippage slot includes the third side being oppositely arranged
Wall and the 4th side wall；
Component is compressed, the component that compresses includes briquetting and the first press part, and the briquetting is equipped with the 5th side wall being oppositely arranged
With the 6th side wall, the briquetting and first sliding component are set to the slippage slot, the first side wall and the third side
The setting of wall face, the second sidewall and the 5th side wall face setting, the 6th side wall and the 4th side wall face
Setting, first press part can extend into the slippage slot and for compressing the briquetting；And
Rolling assembly, the rolling assembly include rotatable rolling member, and the rolling member is equipped with multiple, a part of rolling
Part is set between the first side wall and the third side wall, and rolling member described in another part is set to the second sidewall and described
Between 5th side wall, the rolling member rolls, first sliding component is enable to move along the slippage slot.
2. slipping mechanism according to claim 1, which is characterized in that the first side wall be equipped with the first slot, described second
Side wall is equipped with the second slot, and the third side wall is equipped with third slot, and the 5th side wall is equipped with the 4th slot, first slot and described
Third slot cooperatively forms the first rolling groove, and second slot and the 4th slot cooperatively form the second rolling groove, described in a part
Rolling member rolls in first rolling groove, and rolling member described in another part rolls in second rolling groove.
3. slipping mechanism according to claim 2, which is characterized in that the rolling assembly further includes guide rod, the guide rod
Equipped with multiple, be all provided in first slot, second slot, the third slot and the 4th slot there are two the guide rod and
Two guide rods are arranged in spacing, the first rail portion of the guide rod formation of four in first rolling groove, and described second
Four guide rods in rolling groove form the second rail portion, and a part of rolling member and first rail portion cooperate, simultaneously
It is rolled in first rolling groove, rolling member described in another part and second rail portion cooperate and in second rolling
It is rolled in dynamic slot.
4. slipping mechanism according to claim 2, which is characterized in that the rolling assembly further includes retainer, the guarantor
Corresponding first rolling groove and second rolling groove are held there are two erections and are respectively arranged on, the retainer is equipped with more
A maintaining part, the rolling member are set to the corresponding maintaining part.
5. slipping mechanism according to claim 1, which is characterized in that second sliding component is equipped with threaded hole, the spiral shell
Pit is equipped with multiple and is arranged in spacing, first press part and the threaded hole be correspondingly provided with it is multiple and with the screw thread
Hole is cooperatively connected.
6. slipping mechanism according to claim 1, which is characterized in that the component that compresses further includes the second press part, institute
It states the second press part and first press part is respectively arranged on the opposite sides of second sliding component, the second press part energy
Enough protrude into the slippage slot and for compressing first sliding component.
7. a kind of microscope stand structure characterized by comprising
Microscope ontology；
Slipping mechanism as claimed in any one of claims 1 to 6, there are two the slipping mechanism is set, two slipping mechanisms point
Not Wei the first slipping mechanism and the second slipping mechanism, it is described second sliding to be set to first slipping mechanism microscope ontology
Move part, first sliding component of first slipping mechanism is set to second sliding component, simultaneously of second slipping mechanism
It is arranged in angle；And
Supporting mechanism, the supporting mechanism include support shaft, and one end of first sliding component of second slipping mechanism is set
There is overlap aperture and be sheathed on the support shaft, one end of first sliding component of second slipping mechanism can be around described
Support shaft rotation.
8. microscope stand structure according to claim 7, which is characterized in that the supporting mechanism further include support rod and
The adjustable plate being flexibly connected with the support rod, the adjustable plate can be moved along the length direction of the support rod, the branch
Support is located in the adjustable plate.
9. microscope stand structure according to claim 8, which is characterized in that described the first of second slipping mechanism
One end of sliding component is additionally provided with the first limiting section, and the adjustable plate is additionally provided with the second limit with first limiting section cooperation
Portion, one end of first sliding component of second slipping mechanism rotates around the support shaft, make first limiting section and
The second limiting section cooperation carries out rotary spacing.
10. according to the described in any item microscope stand structures of claim 7-9, which is characterized in that it further include regulating mechanism, institute
Stating regulating mechanism includes movable plate, rotating member and mounting base, and the mounting base is set to described the second of first slipping mechanism
Sliding component, the movable plate are flexibly connected with the mounting base, and the rotating member is rotatably set to the mounting base, and described turn
Moving part is equipped with sliding tooth, and the movable plate is equipped with the rack gear cooperated with the sliding tooth, and the microscope ontology is set to the shifting
Movable plate, the rotating member rotate and the movable plate can be driven to move along mounting base, keep the movable plate drive described micro-
Mirror ontology is mobile.
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| CN201821596338.8U CN209014805U (en) | 2018-09-28 | 2018-09-28 | Slipping mechanism and microscope stand structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109116538A (en) * | 2018-09-28 | 2019-01-01 | 广东阿达智能装备有限公司 | Slipping mechanism and microscope stand structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109116538A (en) * | 2018-09-28 | 2019-01-01 | 广东阿达智能装备有限公司 | Slipping mechanism and microscope stand structure |
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