CN209007492U - Exhaust rectangular table - Google Patents
Exhaust rectangular table Download PDFInfo
- Publication number
- CN209007492U CN209007492U CN201821566707.9U CN201821566707U CN209007492U CN 209007492 U CN209007492 U CN 209007492U CN 201821566707 U CN201821566707 U CN 201821566707U CN 209007492 U CN209007492 U CN 209007492U
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- workbench body
- air discharge
- exhaust
- discharge duct
- slot
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Abstract
The utility model discloses a kind of exhaust rectangular tables, including workbench body, the cross section of the workbench body is rectangular, several first axis air discharge ducts and the second axial exhaust slot are provided in workbench body, first axis air discharge duct is mutually perpendicular to intersect with the second axial exhaust slot, a gas vent and multiple electric discharge ventholes are provided in workbench body, gas vent, multiple electric discharge ventholes are respectively arranged at first axis air discharge duct and the second axial exhaust slot infall, the middle part of workbench body is equipped with connector, connector is equipped with multiple through-holes, through-hole connects with electric discharge venthole.Connector in utility model works playscript with stage directions body is connect with air extractor, air extractor opens the electric discharge venthole for making the through-hole in connector and workbench body, first axis air discharge duct, the second axial exhaust slot, rectangle air discharge duct and forms air flue, by the air emptying between semiconductor polycrystal silicon chip and workbench body, it is convenient for secondary operation using draught head.
Description
Technical field
The utility model relates to a kind of exhaust rectangular tables, and in particular to a kind of structurally reasonable, compact stabilization, it is economical
It is conveniently used for the exhaust rectangular table of storage semiconductor polycrystal silicon chip.
Background technique
Chinese Patent Application No.: 201320863303.7, disclose a kind of edger unit vacuum platform, including vacuum platform
Ontology, one end face of vacuum platform ontology are work top, and the work top is arranged at intervals with multiple vacuum slots, described
The work top is protruded from the top of vacuum slot, the vacuum slot offers vacuum absorption holes, and the vacuum absorption holes connect
Logical vacuum generating device.
Chinese Patent Application No.: 201520709994.4, a kind of combined multipurpose magnetic vacuum workbench is disclosed, is wrapped
Table base is included, bottom plate, front apron, rear baffle, left plate and right side plate, the bottom plate are installed on the table base
Level is fixedly mounted on the table base, the front apron, rear baffle, left plate and right side plate and the workbench bottom
Seat is vertically arranged;The bottom plate is divided into the first work top, the second work top, third and worked by the left plate and right side plate
Table top, the 4th work top and the 5th work top, third work top setting is in second work top and the
Between four work tops, the lower section of the third work top is equipped with vacuum cavity.
Chinese Patent Application No.: 201220438895.3, disclose a kind of dust-proof desk comprising workbench body and
The dust collecting system connecting with workbench body is provided with work top in the workbench body, is provide on the work top
There is dust-blocking cover;The dust collecting system includes dust suction supervisor, dust suction branch pipe, connecting tube, dust catcher and support of motor, the dust suction
Supervisor lower section connects at least one dust suction branch pipe, and one end of the dust suction branch pipe is connected to dust suction supervisor, the other end and workbench
Ontology connection, described connecting tube one end are connected on dust suction supervisor, and the other end is connected on dust catcher, the motor and dust suction
Device connection, for driving dust catcher to operate, offers exhaust outlet on the dust catcher, for flue dust to be discharged.
Structure is complicated for foregoing invention creation, and stability and reliability are poor.
Utility model content
The purpose of this utility model is that overcome the drawbacks described above of the prior art, provide it is a kind of structurally reasonable, it is compact steady
Fixed, high availability, economy is conveniently used for the exhaust rectangular table of polycrystalline silicon semiconductor chip manufacture.
To achieve the above object, the technical scheme that the utility model is provided is as follows: a kind of exhaust rectangular table, including
The cross section of workbench body, the workbench body is rectangular, and several first axis air discharge ducts are provided in workbench body
And the second axial exhaust slot, first axis air discharge duct are mutually perpendicular to intersect, be provided in workbench body with the second axial exhaust slot
One gas vent and multiple electric discharge ventholes, gas vent, multiple electric discharge ventholes are respectively arranged at first axis air discharge duct and
Two axial exhaust slot infalls, the middle part of workbench body are equipped with connector, and connector is equipped with multiple through-holes, through-hole and electric discharge
Venthole connects.
According to the above technical requirements, several first axis air discharge ducts are parallel to each other and equidistant arrangement is set to workbench
On ontology, several second axial exhaust slots are mutually perpendicular to and equidistant arrangement is set in workbench body.
According to the above technical requirements, a rectangle air discharge duct, first axis air discharge duct and are provided in the workbench body
Two axial exhaust slots are set to the inside of rectangle air discharge duct.
According to the above technical requirements, several first axis air discharge ducts are mutual by two adjacent edge slots of rectangle air discharge duct
Two adjacent edges of rectangle air discharge duct are mutually communicated by perforation, several second axial exhaust slots.
According to the above technical requirements, the bottom of the workbench body is provided with one in locating slot along multiple locating slots are recessed with
Cotter way and a link slot.
According to the above technical requirements, positioning pin or set screw can be set in the cotter way, can be arranged in the link slot
There are magnet or connection bolt.
According to the above technical requirements, the bottom end of the workbench body is also recessed with limiting slot, and magnetic can be arranged in limiting slot
Iron.
According to the above technical requirements, the bottom end of the workbench body is also recessed with limiting slot, and magnetic can be arranged in limiting slot
Iron.
According to the above technical requirements, the size of the workbench body is 275MM*275MM.
The benificial effect of the utility model is to the connector in workbench body can connect with the air extractor of external engine body
It connects, air extractor opens four electric discharge ventholes, several first axis for making four through-holes in connector and workbench body
Air discharge duct, several second axial exhaust slots, rectangle air discharge duct form air flue, will be located to be processed partly leading above workbench body
Air emptying between body polysilicon chip and workbench body is convenient for semiconductor polycrystal using draught head to form vacuum
Silicon chip is fixed to carry out secondary operation in workbench body, structurally reasonable, job stability and high reliablity, working face
With high usage, economy is convenient.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of the utility model exhaust rectangular table;
Fig. 2 is the schematic top plan view figure of the utility model exhaust rectangular table;
Fig. 3 is the bottom view of the utility model exhaust rectangular table.
Specific embodiment
With reference to the accompanying drawing and preferred embodiment is further described with regard to the technical solution of the utility model.
As shown in Figure 1-Figure 3, a kind of exhaust rectangular table described in the utility model, including workbench body 1, institute
The cross section for stating workbench body 1 is rectangular, and several be parallel to each other and the first axle of equidistant arrangement is provided in workbench body 1
To air discharge duct 11 and several it is parallel to each other and the second axial exhaust slot 12 of equidistant arrangement, first axis air discharge duct 11 and the second axis
It is mutually perpendicular to intersect to air discharge duct 12, a gas vent 21 and four electric discharge ventholes 22, gas vent is provided in workbench body 1
21, four electric discharge ventholes 22 are respectively arranged at 12 infall of first axis air discharge duct 11 and the second axial exhaust slot, work
The middle part of playscript with stage directions body 1 is equipped with discoid for being connected and fixed the connector 3 of external engine body, sets that there are four through-holes on connector 3
31, through-hole 31 connects with electric discharge venthole 22.
Further, a rectangle air discharge duct 10, first axis air discharge duct are provided on the top edge of the workbench body 1
11 and second axial exhaust slot 12 be set to the inside of rectangle air discharge duct 10.
Specifically, two adjacent edge slots of rectangle air discharge duct 10 are mutually communicated by several first axis air discharge ducts 11,
Two adjacent edges of rectangle air discharge duct 10 are mutually communicated by several second axial exhaust slots 12.
Further, four bottoms of the workbench body 1 are recessed there are two locating slot 4 along upper difference, open in locating slot 4
There are a cotter way 41 and a link slot 42.
Specifically, positioning pin can be set in the cotter way 41, workbench body is connect positioning, the company with external engine body
Magnet can be provided in access slot 42 to be connected and fixed with external engine body.
Further, the bottom end of the workbench body 1 is also recessed with limiting slot 40, and magnet can be arranged in limiting slot 40
(attached drawing is mark) is further connected and fixed with external engine body, and shaking when reducing body work avoids error.
Further, the size of the workbench body 1 is 275MM*275MM, and more existing circular work table top increases
Working area.
More than, as preferred embodiment, the connector 3 in workbench body 1 can be evacuated dress with having for external engine body
Set connection, if air extractor open make four through-holes 31 and workbench body 1 in connector 3 four electric discharge ventholes 22,
Dry first axis air discharge duct 11, several second axial exhaust slots 12, rectangle air discharge duct 10 form air flue, will be located at workbench body
Air between the semiconductor polycrystal silicon chip to be processed and workbench body 1 of 1 top empties, to form vacuum, utilizes gas
Pressure difference is fixed to carry out secondary operation, structurally reasonable, the operation is stable in workbench body 1 convenient for semiconductor polycrystal silicon chip
Property and high reliablity, working face there is high usage, economy is convenient.
Above-described is only the principles of the present invention and preferred embodiment.It should be pointed out that the common skill of this field
For art personnel, without departing from the principle of this utility model, moreover it is possible to make several variations and modifications, also should be regarded as belonging to
In the protection scope of the utility model.
Claims (8)
1. a kind of exhaust rectangular table, including workbench body, it is characterised in that: the cross section of the workbench body is in
It is rectangular-shaped, several first axis air discharge ducts and the second axial exhaust slot, first axis air discharge duct and are provided in workbench body
Two axial exhaust slots are mutually perpendicular to intersect, and are provided with a gas vent and multiple electric discharge ventholes in workbench body, gas vent, multiple
Electric discharge venthole is respectively arranged at first axis air discharge duct and the second axial exhaust slot infall, sets in the middle part of workbench body
There is connector, connector is equipped with multiple through-holes, and through-hole connects with electric discharge venthole.
2. exhaust rectangular table according to claim 1, it is characterised in that: several first axis air discharge duct phases
Mutually parallel and equidistant arrangement is set in workbench body, and several second axial exhaust slots are mutually perpendicular to and equidistant arrangement is set to
In workbench body.
3. exhaust rectangular table according to claim 1, it is characterised in that: be provided with a square in the workbench body
Shape air discharge duct, first axis air discharge duct and the second axial exhaust slot are set to the inside of rectangle air discharge duct.
4. exhaust rectangular table according to claim 3, it is characterised in that: several first axis air discharge ducts will
Two adjacent edge slots of rectangle air discharge duct are mutually communicated, and several second axial exhaust slots are by two adjacent edge phases of rectangle air discharge duct
Mutually perforation.
5. exhaust rectangular table according to claim 1, it is characterised in that: the bottom of the workbench body is along recessed
There are multiple locating slots, a cotter way and a link slot are provided in locating slot.
6. exhaust rectangular table according to claim 5, it is characterised in that: can be arranged in the cotter way positioning pin or
Set screw can be provided with magnet or connection bolt in the link slot.
7. exhaust rectangular table according to claim 1, it is characterised in that: the bottom end of the workbench body is also recessed
Equipped with limiting slot, magnet can be set in limiting slot.
8. exhaust rectangular table according to claim 1, it is characterised in that: the size of the workbench body is
275MM*275MM。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821566707.9U CN209007492U (en) | 2018-09-26 | 2018-09-26 | Exhaust rectangular table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821566707.9U CN209007492U (en) | 2018-09-26 | 2018-09-26 | Exhaust rectangular table |
Publications (1)
Publication Number | Publication Date |
---|---|
CN209007492U true CN209007492U (en) | 2019-06-21 |
Family
ID=66834306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201821566707.9U Active CN209007492U (en) | 2018-09-26 | 2018-09-26 | Exhaust rectangular table |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN209007492U (en) |
-
2018
- 2018-09-26 CN CN201821566707.9U patent/CN209007492U/en active Active
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