CN208984679U - A kind of probe card device that probe station uses - Google Patents
A kind of probe card device that probe station uses Download PDFInfo
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- CN208984679U CN208984679U CN201821309830.2U CN201821309830U CN208984679U CN 208984679 U CN208984679 U CN 208984679U CN 201821309830 U CN201821309830 U CN 201821309830U CN 208984679 U CN208984679 U CN 208984679U
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- sliding
- probe
- hole
- card device
- screw rod
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Abstract
The utility model discloses a kind of probe card devices that probe station uses, including probe face platform, placing groove is offered at the top of the probe face platform, probe card device ontology is placed in placing groove, first sliding groove is offered in the bottom interior wall of placing groove, the bottom of probe card device ontology is fixedly installed with the first sliding block, and first sliding block be slidably connected with first sliding groove, rotation slot is offered on the side inner wall of first sliding groove, tapped through hole is offered on first sliding block, the side of probe face platform offers first through hole, and first through hole, the same screw rod is rotatably equipped in first sliding groove and rotation slot, and one end of screw rod is threadedly coupled through tapped through hole and with tapped through hole.The utility model structure is simple, easy to operate, can quickly and easily move to probe card device ontology, improve its detection efficiency, makes its detection more comprehensively, meets the demand of people.
Description
Technical field
The utility model relates to probe card device technical field more particularly to a kind of probe card devices that probe station uses.
Background technique
Probe card device is the important test device in integrated circuit technology field, not yet encapsulates it applied in integrated circuit
Before, functional test is done with probe card for semiconductor substrate, probe card is responsible for the electricity between test macro and IC chip
Gas connects, and has many probes in probe card, and in test, the probe in probe card is contacted with the weld pad in semiconductor substrate, right
Semiconductor substrate output signal or the output valve for testing semiconductor substrate signal, existing probe card device generally include probe
The defect of card and probe card platform is, since probe card is just put into probe card platform, so that the movement and test of probe card
It is not convenient enough, so not being able to satisfy the demand of people.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of probe station proposed uses
Probe card device.
To achieve the goals above, the utility model adopts the technical scheme that
A kind of probe card device that probe station uses, including probe face platform offer at the top of the probe face platform
Placing groove is placed with probe card device ontology in placing groove, first sliding groove, probe card is offered in the bottom interior wall of placing groove
The bottom for setting ontology is fixedly installed with the first sliding block, and the first sliding block is slidably connected with first sliding groove, in the side of first sliding groove
Rotation slot is offered on wall, tapped through hole is offered on the first sliding block, and the side of probe face platform offers first through hole, and
The same screw rod is rotatably equipped in one through-hole, first sliding groove and rotation slot, and one end of screw rod is through tapped through hole and and spiral shell
The other end of the connection of line through hole whorl, screw rod through first through hole and extends to the outside of probe face platform and is fixedly installed with handle
Hand, the side of probe face platform are fixedly installed with fixed block, and the second through-hole is offered on fixed block, is slidably installed in the second through-hole
There is sliding bar, card slot is offered at the top of screw rod, and the bottom end of sliding bar is mutually clamped with card slot, on the two sides inner wall of the second through-hole
Offer second sliding slot, the two sides of sliding bar are fixedly installed with the second sliding block, and two the second sliding blocks respectively with it is corresponding
Second sliding slot be slidably connected, be fixedly installed with limit spring at the top of the second sliding block, limit spring far from the second sliding block one
End is fixedly installed in the top inner wall of second sliding slot.
Preferably, the outer ring of first bearing is fixedly installed in the rotation slot, and screw rod and the inner ring of first bearing are solid
Fixed connection.
Preferably, the outer ring of second bearing, and the inner ring of screw rod and second bearing are fixedly installed in the first through hole
It is fixedly connected.
Preferably, the quantity of the card slot is multiple, and multiple card slots annular equidistant is provided on screw rod.
Preferably, the bottom end of first sliding block is embedded with multiple first balls, and multiple first balls and first sliding groove
Roll connection.
Preferably, one end that two the second sliding blocks are located remotely from each other is embedded with multiple second balls, and multiple second balls
It rolls and connects with corresponding second sliding slot respectively.
The utility model has the beneficial effects that
It is logical by probe face platform, placing groove, probe card device ontology, first sliding groove, the first sliding block, rotation slot, screw thread
Hole, first through hole, screw rod and handle mutual cooperation under, quickly and easily probe card device ontology can be moved, mentioned
Its detection efficiency has been risen, has made its detection more comprehensively, swing handle, handle drives screw rod to be rotated, and screw rod drives the first sliding block
Moved, the first sliding block drive probe card device ontology moved, by fixed block, the second through-hole, sliding bar, card slot,
Under the mutual cooperation of second sliding slot, the second sliding block and limit spring, quickly and easily handle can be fixed, pull sliding
Bar, sliding bar drive the second sliding block to be moved, and the second sliding block compresses limit spring, and limit spring energy-absorbing removes sliding bar
In card slot, sliding bar is then unclamped, by being caught in sliding bar in card slot, this reality under the recoil of spring active force of limit spring
It is simple with new structure, it is easy to operate, quickly and easily probe card device ontology can be moved, improve its detection effect
Rate makes its detection more comprehensively, meets the demand of people.
Detailed description of the invention
Fig. 1 be the utility model proposes a kind of schematic view of the front view of probe card device that uses of probe station；
Fig. 2 be the utility model proposes a kind of part A structural schematic diagram of probe card device that uses of probe station.
In figure: 1 probe face platform, 2 placing grooves, 3 probe card device ontologies, 4 first sliding grooves, 5 first sliding blocks, 6 rotation slots,
7 tapped through holes, 8 first through hole, 9 screw rods, 10 handles, 11 fixed blocks, 12 second through-holes, 13 sliding bars, 14 card slots, 15 second are slided
Slot, 16 second sliding blocks, 17 limit springs.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
Referring to Fig.1-2, a kind of probe card device that probe station uses, including probe face platform 1, the top of probe face platform 1
Portion offers placing groove 2, and probe card device ontology 3 is placed in placing groove 2, offers first in the bottom interior wall of placing groove 2
Sliding slot 4, the bottom of probe card device ontology 3 is fixedly installed with the first sliding block 5, and the first sliding block 5 connects with the sliding of first sliding groove 4
It connects, rotation slot 6 is offered on the side inner wall of first sliding groove 4, tapped through hole 7, probe face platform 1 are offered on the first sliding block 5
Side offer first through hole 8, and the same screw rod 9 is rotatably equipped in first through hole 8, first sliding groove 4 and rotation slot 6,
And one end of screw rod 9 is threadedly coupled through tapped through hole 7 and with tapped through hole 7, the other end of screw rod 9 runs through first through hole 8 simultaneously
It extends to the outside of probe face platform 1 and is fixedly installed with handle 10, the side of probe face platform 1 is fixedly installed with fixed block
11, the second through-hole 12 is offered on fixed block 11, sliding bar 13 is slidably fitted in the second through-hole 12, the top of screw rod 9 opens up
There is card slot 14, and the bottom end of sliding bar 13 is clamped with 14 phase of card slot, and it is sliding that second is offered on the two sides inner wall of the second through-hole 12
Slot 15, the two sides of sliding bar 13 are fixedly installed with the second sliding block 16, and two the second sliding blocks 16 are respectively with corresponding second
Sliding slot 15 is slidably connected, and the top of the second sliding block 16 is fixedly installed with limit spring 17, and limit spring 17 is far from the second sliding block 16
One end be fixedly installed in the top inner wall of second sliding slot 15, pass through probe face platform 1, placing groove 2, probe card device ontology
3, under the mutual cooperation of first sliding groove 4, the first sliding block 5, rotation slot 6, tapped through hole 7, first through hole 8, screw rod 9 and handle 10,
Quickly and easily probe card device ontology 3 can be moved, improve its detection efficiency, make its detection more comprehensively, rotation
Handle 10, handle 10 drive screw rod 9 to be rotated, and screw rod 9 drives the first sliding block 5 to be moved, and the first sliding block 5 drives probe card
Device noumenon 3 is moved, and fixed block 11, the second through-hole 12, sliding bar 13, card slot 14, second sliding slot 15, the second sliding block are passed through
16 and limit spring 17 mutual cooperation under, quickly and easily handle 10 can be fixed, pull sliding bar 13, sliding bar
13 the second sliding blocks 16 of drive are moved, and the second sliding block 16 compresses limit spring 17, and 17 energy-absorbing of limit spring moves sliding bar 13
Out in card slot 14, sliding bar 13 is then unclamped, by making sliding bar 13 be caught in card under the recoil of spring active force of limit spring 17
In slot 14, the utility model structure is simple, easy to operate, can quickly and easily move, mention to probe card device ontology 3
Its detection efficiency has been risen, has made its detection more comprehensively, meets the demand of people.
In the utility model, it is fixedly installed with the outer ring of first bearing in rotation slot 6, and screw rod 9 and first bearing is interior
Circle is fixedly connected, and the outer ring of second bearing, and screw rod 9 and the fixed company of the inner ring of second bearing are fixedly installed in first through hole 8
It connects, the quantity of card slot 14 is multiple, and 14 annular of multiple card slots is equidistant is provided on screw rod 9, and the bottom end of the first sliding block 5 is embedded in
There are multiple first balls, and multiple first balls and first sliding groove 4 are rolled and connected, one end that two the second sliding blocks 16 are located remotely from each other
Multiple second balls are embedded with, and multiple second balls roll with corresponding second sliding slot 15 connect respectively, pass through probe
Workbench 1, placing groove 2, probe card device ontology 3, first sliding groove 4, the first sliding block 5, rotation slot 6, tapped through hole 7, first are logical
Under the mutual cooperation in hole 8, screw rod 9 and handle 10, quickly and easily probe card device ontology 3 can be moved, improved
Its detection efficiency makes its detection more comprehensively, and swing handle 10, handle 10 drives screw rod 9 to be rotated, and screw rod 9 drives first to slide
Block 5 is moved, and the first sliding block 5 drives probe card device ontology 3 to be moved, and passes through fixed block 11, the second through-hole 12, sliding
Bar 13, card slot 14, second sliding slot 15, the second sliding block 16 and limit spring 17 mutual cooperation under, can be quickly and easily to handle
Hand 10 is fixed, and pulls sliding bar 13, and sliding bar 13 drives the second sliding block 16 to be moved, the second sliding block 16 compression limit bullet
Spring 17,17 energy-absorbing of limit spring remove sliding bar 13 in card slot 14, then unclamp sliding bar 13, pass through limit spring 17
Under recoil of spring active force, it is caught in sliding bar 13 in card slot 14, the utility model structure is simple, and it is easy to operate, it can be quick
Easily probe card device ontology 3 is moved, improves its detection efficiency, makes its detection more comprehensively, meets people's
Demand.
Working principle: in use, when needing to move probe card device ontology 3, sliding bar 13, sliding are first pulled
Bar 13 drives the second sliding block 16 to be moved, and the second sliding block 16 compresses limit spring 17, and 17 energy-absorbing of limit spring makes sliding bar 13
It removes in card slot 14, then keeps sliding bar 13 motionless, swing handle 10, handle 10 drives screw rod 9 to be rotated, 9 band of screw rod
Dynamic first sliding block 5 is moved, and the first sliding block 5 drives probe card device ontology 3 to be moved, when probe card device ontology 3 moves
When moving suitable position, stop operating handle 10, keeps handle 10 motionless, then unclamps sliding bar 13, passes through limit spring
Under 17 recoil of spring active force, it is caught in sliding bar 13 in card slot 14, to realize quickly and easily to probe card device
Ontology 3 is moved, its detection efficiency is improved, and is made its detection more comprehensively, is met the demand of people.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (6)
1. a kind of probe card device that probe station uses, including probe face platform (1), which is characterized in that the probe face platform
(1) it offers placing groove (2), is placed with probe card device ontology (3) in placing groove (2), in the bottom of placing groove (2) at the top of
It is offered on wall first sliding groove (4), the bottom of probe card device ontology (3) is fixedly installed with the first sliding block (5), and the first sliding block
(5) it is slidably connected, is offered on the side inner wall of first sliding groove (4) rotation slot (6) with first sliding groove (4), on the first sliding block (5)
It offers tapped through hole (7), the side of probe face platform (1) offers first through hole (8), and first through hole (8), first sliding groove
(4) and in rotation slot (6) it is rotatably equipped with the same screw rod (9), and one end of screw rod (9) is through tapped through hole (7) and and spiral shell
Line through-hole (7) is threadedly coupled；
The other end of screw rod (9) is through first through hole (8) and extends to the outside of probe face platform (1) and is fixedly installed with handle
(10), the side of probe face platform (1) is fixedly installed with fixed block (11), and the second through-hole (12) are offered on fixed block (11),
It is slidably fitted with sliding bar (13), is offered at the top of screw rod (9) card slot (14) in second through-hole (12), and sliding bar (13)
Bottom end is mutually clamped with card slot (14), is offered on the two sides inner wall of the second through-hole (12) second sliding slot (15), sliding bar (13)
Two sides be fixedly installed with the second sliding block (16), and two the second sliding blocks (16) are sliding with corresponding second sliding slot (15) respectively
It is dynamic to connect, it is fixedly installed with limit spring (17) at the top of the second sliding block (16), limit spring (17) is far from the second sliding block (16)
One end be fixedly installed in the top inner wall of second sliding slot (15).
2. the probe card device that a kind of probe station according to claim 1 uses, which is characterized in that the rotation slot (6)
It is inside fixedly installed with the outer ring of first bearing, and screw rod (9) is fixedly connected with the inner ring of first bearing.
3. the probe card device that a kind of probe station according to claim 1 uses, which is characterized in that the first through hole
(8) outer ring of second bearing is fixedly installed in, and screw rod (9) is fixedly connected with the inner ring of second bearing.
4. the probe card device that a kind of probe station according to claim 1 uses, which is characterized in that the card slot (14)
Quantity is multiple, and multiple card slots (14) annular equidistant is provided on screw rod (9).
5. the probe card device that a kind of probe station according to claim 1 uses, which is characterized in that first sliding block
(5) bottom end is embedded with multiple first balls, and multiple first balls and first sliding groove (4) roll and connect.
6. the probe card device that a kind of probe station according to claim 1 uses, which is characterized in that two the second sliding blocks
(16) one end being located remotely from each other is embedded with multiple second balls, and multiple second balls respectively with corresponding second sliding slot
(15) connection is rolled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821309830.2U CN208984679U (en) | 2018-08-15 | 2018-08-15 | A kind of probe card device that probe station uses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821309830.2U CN208984679U (en) | 2018-08-15 | 2018-08-15 | A kind of probe card device that probe station uses |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208984679U true CN208984679U (en) | 2019-06-14 |
Family
ID=66781549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821309830.2U Active CN208984679U (en) | 2018-08-15 | 2018-08-15 | A kind of probe card device that probe station uses |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208984679U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342851A (en) * | 2020-11-09 | 2021-02-09 | 中南大学 | Roughness measuring device and roughness measuring method for spreading layer of plate-type track |
-
2018
- 2018-08-15 CN CN201821309830.2U patent/CN208984679U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342851A (en) * | 2020-11-09 | 2021-02-09 | 中南大学 | Roughness measuring device and roughness measuring method for spreading layer of plate-type track |
| CN112342851B (en) * | 2020-11-09 | 2021-11-02 | 中南大学 | Roughness measuring device and roughness measuring method for spreading layer of plate-type track |
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