CN208965078U - A kind of crucible single crystal growing furnace with position limiting structure - Google Patents
A kind of crucible single crystal growing furnace with position limiting structure Download PDFInfo
- Publication number
- CN208965078U CN208965078U CN201821688872.1U CN201821688872U CN208965078U CN 208965078 U CN208965078 U CN 208965078U CN 201821688872 U CN201821688872 U CN 201821688872U CN 208965078 U CN208965078 U CN 208965078U
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- China
- Prior art keywords
- crucible
- single crystal
- guide groove
- crystal growing
- growing furnace
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- 239000013078 crystal Substances 0.000 title claims abstract description 23
- 230000003028 elevating effect Effects 0.000 claims abstract description 29
- 230000008901 benefit Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of crucible single crystal growing furnace with position limiting structure, including crucible, for controlling the elevating lever that crucible moves up and down and the station for installing elevating lever, the top of the elevating lever is connected with gag lever post, conducting bar is provided on the station, be provided with lateral guide groove on the conducting bar, one end setting card of the gag lever post set in lateral guide groove in fixture block.By the setting of lateral guide groove and gag lever post, highest and lowest position that can be mobile to crucible be limited, and avoid that crucible excessively rises or excessive descent causes the structure of crucible or single crystal growing furnace to destroy, the service life of raising crucible single crystal growing furnace.
Description
Technical field
The utility model relates to silicon single crystal rod production equipment fields, and in particular to a kind of crucible monocrystalline with position limiting structure
Furnace.
Background technique
Single crystal growing furnace be it is a kind of inert gas for example nitrogen, in the environment based on helium, with graphite heater by polysilicon
Equal polycrystalline materials fusing, with the equipment of Grown by CZ Method dislocation-free monocrystalline.In single crystal growing furnace production process, the liter of crucible can be controlled
Easily there is the case where excessively rising or excessive descent, can cause to the structure of crucible or single crystal growing furnace in drop, existing single crystal furnace equipment
It destroys, influences service life.
Utility model content
In order to solve the above-mentioned technical problem the utility model provides a kind of crucible single crystal growing furnace with position limiting structure.
The utility model is achieved through the following technical solutions:
A kind of crucible single crystal growing furnace with position limiting structure, including crucible, for control elevating lever that crucible moves up and down and
For installing the station of elevating lever, the top of the elevating lever is connected with gag lever post, is provided with and leads on the station
Item, is provided with lateral guide groove on the conducting bar, one end setting card of the gag lever post set in lateral guide groove in fixture block.This programme
Setting is limited gag lever post and is being gone up and down with gag lever post due to the setting of lateral guide groove between the top and station of elevating lever
Equivalent length on bar direction, when gag lever post is moved to it is parallel with elevating lever when, elevating lever rises to extreme higher position, and crucible is located at
The maximum height of permission；When gag lever post is moved to one end of lateral guide groove and when with the feasible angle maximum of elevating lever, elevating lever
Drop to extreme lower position, crucible is located at the minimum altitude allowed；It, can be to the highest and lowest position of crucible movement by this structure
Limited, avoid crucible excessively rise or excessive descent cause the structure of crucible or single crystal growing furnace destroy, improve crucible single crystal growing furnace
Service life.The structure of this structure is simple, and feasibility is high.
Preferably, the lateral guide groove is vertical with lifting rod axis, one end of the lateral guide groove and elevating lever and
The tie point place straight line of gag lever post, the axis of elevating lever are located on same plummet face.
Preferably, observation of the personnel to crucible lifting height for ease of operation, transversely guide groove is set on the conducting bar
It is equipped with scale strip.
Preferably, in the process of moving up and down in order to avoid crucible, the fixture block on gag lever post is detached from lateral guide groove and loses
Position-limiting action, the conducting bar both ends are fixed on station by mounting post, and the gag lever post is placed between conducting bar and station.
Preferably, be provided with the first connection sheet and the second connection sheet on the fixture block, the both ends of the lateral guide groove with
The corresponding position of first connection sheet and the second connection sheet is respectively arranged with the first contact and the second contact, first contact and
Warning circuit is provided between two contacts.First connection sheet and the second connection sheet realize the first contact of both ends of lateral guide groove respectively
With the connection of the second contact, the connection in circuit, when fixture block is moved to the both ends of lateral guide groove, the first connection sheet are alerted with realization
Or second connection sheet be realize the first contact and the second contact connection, warning circuit work alarm, avoid excessively rise or under
The case where drop.
Further, the warning circuit is light warning circuit.
The utility model compared with prior art, has the following advantages and benefits:
1, the utility model is by the setting of lateral guide groove and gag lever post, can to the mobile highest and lowest position of crucible into
Row limitation, avoids that crucible excessively rises or excessive descent causes the structure of crucible or single crystal growing furnace to destroy, raising crucible single crystal growing furnace
Service life.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the utility model embodiment, constitutes the one of the application
Part does not constitute the restriction to the utility model embodiment.
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the structural schematic diagram of the utility model fixture block.
Fig. 3 is the schematic diagram of warning circuit in embodiment 2.
Specific embodiment
For the purpose of this utility model, technical solution and advantage is more clearly understood, below with reference to embodiment and attached drawing,
The utility model is described in further detail, and the exemplary embodiment and its explanation of the utility model are only used for explaining this
Utility model is not intended to limit the scope of the present invention.
Embodiment 1
A kind of crucible single crystal growing furnace with position limiting structure as shown in Figure 1, including crucible, move up and down for controlling crucible
Elevating lever 1 and station 2 for installing elevating lever 1, the top of the elevating lever 1 is connected with gag lever post 3, the behaviour
Make to be provided with conducting bar 4 on platform 2, lateral guide groove 41 is provided on the conducting bar 4, one end setting card of the gag lever post 3 sets transverse direction
In guide groove 41 in fixture block 42.Top herein, noun of locality when laterally referring both to normal use.
Embodiment 2
The present embodiment optimizes on the basis of the above embodiments, and lateral guide groove 41 is vertical with 1 axis of elevating lever, described
One end of lateral guide groove 41 and the tie point of elevating lever 1 and gag lever post 3 where straight line, elevating lever 1 axis be located at same lead
On the flat side of a hammer.Using the above structure, when fixture block is moved to the both ends of lateral guide groove 41, crucible is moved to extreme higher position and lowest order
It sets.As shown in Figure 1, crucible is located at highest point, and gag lever post 3 hangs down with 41 phase of lateral guide groove at this point, elevating lever 1 rises to highest point
Directly；After elevating lever moves down, since gag lever post is flexibly connected with elevating lever 1, fixture block moves in lateral guide groove, leads when fixture block moves to
When the slot other end, elevating lever 1 drops to minimum point, and crucible is located at lowest part.
As shown in Fig. 2, the first connection sheet 421 and the second connection sheet 422 are provided on fixture block 42,421 He of the first connection sheet
Second connection sheet 422 can be separately positioned on 42 two sides of fixture block, the both ends of the lateral guide groove 41 and the first connection sheet 421 and second
The corresponding position of connection sheet 422 is respectively arranged with the first contact and the second contact, sets between first contact and the second contact
It is equipped with warning circuit.Light warning circuit can be used in warning circuit, and circuit structure as shown in Figure 3, the first contact for example can be used
A, after the second contact B is connected by the first connection sheet 421 or the second connection sheet 422, LED operation reaches the mesh of alarm
's.
As shown in Figure 1,4 both ends of conducting bar are fixed on station 2 by mounting post, the gag lever post 3 is placed in conducting bar 4
Between station 2.
Transversely guide groove 41 is provided with scale strip 43 on the conducting bar 4.Scale strip is non-uniform scale strip.
Above-described specific embodiment, to the purpose of this utility model, technical scheme and beneficial effects carried out into
One step is described in detail, it should be understood that being not used to limit the foregoing is merely specific embodiment of the present utility model
Determine the protection scope of the utility model, within the spirit and principle of the utility model, any modification for being made equally is replaced
It changes, improve, should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of crucible single crystal growing furnace with position limiting structure, including crucible, for control elevating lever (1) that crucible moves up and down and
For installing the station (2) of elevating lever (1), which is characterized in that the top of the elevating lever (1) is connected with gag lever post
(3), it is provided with conducting bar (4) on the station (2), is provided with lateral guide groove (41), the gag lever post on the conducting bar (4)
(3) one end setting card set in lateral guide groove (41) in fixture block (42).
2. a kind of crucible single crystal growing furnace with position limiting structure according to claim 1, which is characterized in that the lateral guide groove
(41) vertical with elevating lever (1) axis, the connection of one end and elevating lever (1) and gag lever post (3) of the lateral guide groove (41)
Put place straight line, the axis of elevating lever (1) is located on same plummet face.
3. a kind of crucible single crystal growing furnace with position limiting structure according to claim 1, which is characterized in that the conducting bar (4)
On transversely guide groove (41) be provided with scale strip (43).
4. a kind of crucible single crystal growing furnace with position limiting structure according to claim 1, which is characterized in that the conducting bar (4)
Both ends are fixed on station (2) by mounting post, and the gag lever post (3) is placed between conducting bar (4) and station (2).
5. a kind of crucible single crystal growing furnace with position limiting structure according to claim 1, which is characterized in that the fixture block (42)
On be provided with the first connection sheet (421) and the second connection sheet (422), the both ends of the lateral guide groove (41) and the first connection sheet
(421) and the corresponding position of the second connection sheet (422) is respectively arranged with the first contact and the second contact, first contact and
Warning circuit is provided between two contacts.
6. a kind of crucible single crystal growing furnace with position limiting structure according to claim 5, which is characterized in that the warning circuit
For light warning circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821688872.1U CN208965078U (en) | 2018-10-18 | 2018-10-18 | A kind of crucible single crystal growing furnace with position limiting structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821688872.1U CN208965078U (en) | 2018-10-18 | 2018-10-18 | A kind of crucible single crystal growing furnace with position limiting structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208965078U true CN208965078U (en) | 2019-06-11 |
Family
ID=66759652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821688872.1U Expired - Fee Related CN208965078U (en) | 2018-10-18 | 2018-10-18 | A kind of crucible single crystal growing furnace with position limiting structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208965078U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114438593A (en) * | 2021-12-22 | 2022-05-06 | 浙江东尼电子股份有限公司 | Silicon carbide single crystal growth device |
-
2018
- 2018-10-18 CN CN201821688872.1U patent/CN208965078U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114438593A (en) * | 2021-12-22 | 2022-05-06 | 浙江东尼电子股份有限公司 | Silicon carbide single crystal growth device |
| CN114438593B (en) * | 2021-12-22 | 2024-04-12 | 浙江东尼电子股份有限公司 | Silicon carbide single crystal growth device |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190611 |