CN208965023U - The regulating device of heater on ion plating equipment - Google Patents

Abstract

The regulating device for the heater that the utility model discloses a kind of on ion plating equipment, apply the machinery field in vacuum coating equipment, solves the non-uniform technical problem of substrate coating, its key points of the technical solution are that including being horizontally fixed on the intracorporal pedestal of vacuum tank, the heater being vertically installed on pedestal, the lower end of the heater is equipped with sliding plate, it is horizontal on the pedestal to be equipped with two for sliding plate sliding and parallel sliding rail, the rack gear parallel with the sliding rail is fixed on the sliding plate, the rack gear is equipped with the gear being engaged with rack, the horizontal sliding tooth wheel that is equipped with rotates and extends the connecting rod outside vacuum chamber on the gear；The angle of heater can be adjusted in having the technical effect that for having, so that target being capable of better alignment substrate, it is ensured that coating process uniformly carries out.

Description

The regulating device of heater on ion plating equipment

Technical field

The utility model relates to the machinery fields of vacuum coating equipment, more specifically, it relates to which a kind of be used for ion plating The regulating device of heater on film machine.

Background technique

Vacuum coating be it is a kind of by physical method generate thin-film material technology evaporate the atom of material in vacuum chamber The source of being heated isolates, by after electron impact ionization with ion deposition in the surface of solids, referred to as ion plating.

With reference to Fig. 1, vacuum pump 13 generates heat evacuating air in vacuum chamber 1, heater 2, so that fixing on the heaters Target 3 be evaporated into molecule or atom, then discharged by aura 15 so that molecule or atom ionization, air inlet pipe 11 into Gas drives ion to be attached on substrate so that ion is flowed to gas outlet 12.When target 3 is different from the relative position of substrate 14 When, so that the angle that the ion evaporated on target 3 flows to substrate 14 is different, so that ion is attached to the situation on substrate 14 not Together.Since target 3 is fixed on heater 2, and the position of prior art heater 2 can not be adjusted, so that target 3 Position can not be adjusted, and cause the ion ionized on target 3 that can not be uniformly adhered on substrate 14, therefore need to design A kind of device that can adjust heater locations.

Utility model content

In view of the deficienciess of the prior art, the purpose of this utility model is to provide a kind of on ion plating equipment The regulating device of heater, its advantage is that, the angle of heater can be adjusted, so that target can be preferably right Quasi- substrate, it is ensured that coating process uniformly carries out.

The above-mentioned technical purpose of the utility model has the technical scheme that a kind of for ion film plating The regulating device of heater on machine, including being horizontally fixed on the intracorporal pedestal of vacuum tank, the heating being vertically installed on pedestal Device, the lower end of the heater are equipped with sliding plate, horizontal cunnings slide equipped with two for sliding plate and parallel on the pedestal Rail, the rack gear parallel with the sliding rail is fixed on the sliding plate, and the rack gear is equipped with the gear being engaged with rack, institute The horizontal sliding tooth wheel that is equipped on gear is stated to rotate and extend the connecting rod outside vacuum chamber.

Through the above technical solutions, heater is arranged in vacuum chamber, heater is evaporated into target when working Molecule or atom, so that target forms a tunic on substrate.When link rotatable, connecting rod band moving gear is rotated, from And make the rack gear engaged with gear mobile.Rack gear is fixed on slide plate, and when rack gear is mobile, sliding plate moves together with rack gear It is dynamic, so that the horizontal distance between heater and substrate is adjusted, so that the angle that target ion flows to substrate is different, so as to Obtain an optimal angle.Sliding rail is set on pedestal, and sliding plate slides on the slide rail, and sliding rail is played fixed and led to sliding plate To effect.Connecting rod extends vacuum chamber, so that staff be facilitated to adjust sliding plate outside vacuum chamber.

The utility model is further arranged to: being equipped between the heater and the sliding plate for driving the heating The bracket rotated before and after device, the bracket include the vertical pivot being vertically arranged on sliding plate, horizontal through vertical pivot and be fixed on The Contraband shape frame of the heater lower end, the intermediate position of the Contraband shape frame are rotatably connected on the vertical pivot.

Through the above technical solutions, vertical pivot is fixed on sliding plate, Contraband shape frame is fixed on the heaters, and Contraband shape frame turns It is dynamic to be connected on vertical pivot so that heater can swing, the depth of parallelism of target and substrate is further adjusted, so that target Material ion can uniformly flow to substrate.

The utility model is further arranged to: the side of the Contraband shape frame is equipped with fixing axle, in the plane of the vertical pivot to Extend supporting block outside, the lower end that first bevel gear is located on the sliding plate is equipped with supporting block, edge in the supporting block vertically Perpendicular to the fixed axis direction level it is equipped with drive rod, one end of the drive rod is equipped with engages with the first bevel gear Second bevel gear.

Through the above technical solutions, second bevel gear rotates, first bevel gear rotation is driven, so that fixing axle and the One bevel gear rotates simultaneously, and fixing axle is fixedly connected with Contraband shape frame, so that Contraband shape frame rotates synchronously, it is final to realize that adjusting adds The depth of parallelism of hot device and substrate.First bevel gear and second bevel gear rotate, so that two people are orthogonal to rotation connection It is tied, to facilitate the installation of drive rod.

The utility model is further arranged to: the drive rod include the polygon prism being plugged in the second bevel gear, The locking post being connected on polygon prism is slid, the supporting block is equipped with the locking hole cooperated with the locking post.

Through the above technical solutions, polygon prism is plugged in second bevel gear, locking post sliding is connected on polygon prism.When When locking post is detached from from locking hole, polygon prism is rotated at this time, so that polygon prism drives the rotation of the second spur gear, works as locking When column cooperation is in locking hole, so that locking post is stuck in locking hole, polygon prism is stuck in locking post, and second bevel gear is stuck in more ribs In column, so that the second spur gear is locked, heater autobiography is prevented.

The utility model is further arranged to: the two sides of the sliding plate are horizontal to be equipped with several protruding shafts, the protruding shaft On be equipped with the idler wheel being connected in the sliding rail.

Through the above technical solutions, the setting of idler wheel further facilitates rotation and connects so that sliding plate sliding is more smooth Bar, so that connecting rod sliding tooth wheel is more laborsaving when rotating.

The utility model is further arranged to: the upper surface of the positioning plate is rotatably connected to locating wheel, the locating wheel It is in contact with the side wall of the sliding rail.

Through the above technical solutions, locating wheel is contacted with the side wall of sliding rail so that can only sliding plate along sliding rail Length direction sliding, prevents from being stuck in sliding plate slipping between two sliding rails, it is ensured that sliding plate subtracts simultaneously along linear slide The resistance being subject in small sliding plate slipping.

The utility model is further arranged to: being equipped with sliding sleeve on the sliding plate along the vertical direction, the vertical axis connects It connects in the sliding sleeve.

Through the above technical solutions, vertical axis is connected in sliding sleeve, so that vertical pivot and being connected on vertical pivot Contraband shape frame and heater are rotated along the axis of vertical pivot, and setting in this way facilitates rotation heater, so that target alignment vacuum chamber Opening, is convenient for changing target.

The utility model is further arranged to: being equipped with plunger, institute along the direction perpendicular to sliding sleeve on the side wall of the sliding sleeve It states vertical pivot and is equipped with the annular groove cooperated with the plunger, axial direction circumferential uniformly distributed and institute of the edge perpendicular to vertical pivot in the annular groove State 4 circular grooves of the head fits of plunger.

Through the above technical solutions, plunger Elastic Contact in annular groove, can not either influence vertical axis, while preventing from adding Hot device moves up.Four circumferentially uniformly distributed circular grooves prevent heater from disposably turning so that every 90 ° of the rotation of heater can make a short pause Dynamic angle is excessive, so that the inertia of rotation is also big, it has not been convenient to which heater is moved to most suitable position.

The utility model is further arranged to: the plunger body is equipped with spring, and the head of the spring is equipped with piston, institute The head for stating piston is equipped with spherical surface.

Through the above technical solutions, piston can slide in plunger, piston and annular groove and circular groove Elastic Contact.Work as piston When cooperation is in circular groove, heater is continued to rotate, the elastic force for needing to overcome spring to piston at this time, to play reduction heater The effect of revolving speed, so that heater makes a short pause when not rotating 90 °.

In conclusion the utility model has the following beneficial effects:

1, heater can either horizontal sliding, also can swing, to further adjust between target and substrate Angle is conducive to improve the uniformity during substrate coating；

2, the setting of drive rod can either drive second bevel gear to rotate, while can lock to second bevel gear.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the vacuum coating of the present embodiment.

Fig. 2 is the structural schematic diagram of the present embodiment Yu vacuum chamber positional relationship.

Fig. 3 is the whole structural schematic diagram of the present embodiment.

Fig. 4 is the structural schematic diagram of the bracket of the present embodiment.

Fig. 5 is the sliding sleeve of the present embodiment and the structural schematic diagram of vertical pivot.

Fig. 6 is the structural schematic diagram of the plunger of the present embodiment.

Appended drawing reference: 1, vacuum chamber；11, air inlet pipe；12, escape pipe；13, vacuum pump；14, substrate；15, aura is put Electricity；2, heater；21, target；3, pedestal；31, sliding rail；32, rack gear；33, gear；34, connecting rod；35, limit base；4, bracket； 5, sliding plate；51, Contraband shape frame；52, fixing axle；53, first bevel gear；54, second bevel gear；55, supporting block；551, it locks Hole；56, protruding shaft；57, idler wheel；58, locating wheel；6, vertical pivot；61, annular groove；62, circular groove；7, drive rod；71, polygon prism；72, it locks Tight column；8, sliding sleeve；81, plunger；82, piston；83, spring；84, spherical surface.

Specific embodiment

The utility model is described in further detail below in conjunction with attached drawing.

Embodiment: referring to figs. 2 and 3, a kind of regulating device of the heater on ion plating equipment, including it is horizontal solid Be scheduled on vacuum chamber 1(and vacuum chamber 1 hereinafter occur all referring to Fig. 2) pedestal 3 of bottom, it is horizontally disposed on the base 3 Two parallel sliding rails 31, sliding connection sliding plate 5, heater 2 is vertically arranged on sliding plate 5, is being heated on sliding rail 31 The side of device 2 is pasted with target 21.When heater 2 works, target 21 is evaporated, then is ionized into target 21 by high-voltage electricity Ionic condition, so that target 21, which is attached to substrate 14(, substrate 14 hereinafter occurs all referring to Fig. 1) on, form film. When sliding slides in sliding rail 31, distance of the target 21 apart from substrate 14 is different at this time, so that ion flies to the angle of substrate 14 Degree is different, so that the uniformity that 21 ion of target is attached to substrate 14 is different, convenient for adjusting out the optimal flight of 21 ion of target Angle.

With reference to Fig. 3 and Fig. 4, rack gear 32 is set along the length direction of sliding rail 31 in the upper surface of sliding plate 5, on rack gear 32 Setting and 32 meshed gears 33 of rack gear, the connecting rod 34 for driving gear 33 to rotate is horizontally mounted on gear 33, works as rotation When connecting rod 34, connecting rod 34 is rotated with moving gear 33, so that drive rack 32 is mobile so that sliding plate 5 with heater 2 together It is mobile.Limit base 35 is fixed on sliding rail 31, connecting rod 34 passes through limit base 35, when so that connecting rod 34 rotating, connecting rod 34 and sliding rail It is not subjected to displacement between 31, displacement is generated between sliding plate 5 and sliding rail 31, so as to adjust between heater 2 and substrate 14 Positional relationship.Connecting rod 34 extends the outside of vacuum chamber 1, thus the convenient position for adjusting sliding plate 5 on the outside of vacuum chamber 1 It sets.

With reference to Fig. 3 and Fig. 4, protruding shaft 56 is outward extended in the two sides of sliding plate 5, the same side is arranged two protruding shafts 56, and two A protruding shaft 56 is located at the rear and front end of sliding plate 5.Idler wheel 57 is set in protruding shaft 56, idler wheel 57 rolls in sliding rail 31, To convert the roll friction between idler wheel 57 and sliding rail 31 for the sliding friction power between sliding plate 5 and sliding rail 31, thus So that the power for applying very little on connecting rod 34 can drive sliding plate 5 mobile.Four positioning are rotatablely connected in the upper surface of sliding plate 5 Wheel 58, the two sides of the equally distributed sliding plate 5 of locating wheel 58 and is bonded with the side wall of sliding rail 31, thus is avoided that sliding plate 5 exists It during sliding, is stuck between two sliding rails 31, while ensuring that sliding plate 5 along linear slide, reduces 5 slipping of sliding plate In the resistance that is subject to.

With reference to Fig. 4, between heater 2 and sliding plate 5 between setting, bracket 4 is used for so that heater 2 is in vertical plane Front and back rotation further adjusts target 21(with reference to the angle of Fig. 3) and substrate 14,21 ion of target is obtained optimal Move angle guarantees that target 21 is uniformly adhered to the surface of substrate 14.Bracket 4 includes being vertically arranged in erecting on sliding plate 5 Axis 6, the Contraband shape frame 51 for being fixed on 2 lower end of heater, process two parallel end faces, the centre of Contraband shape frame 51 on vertical pivot 6 The direction of section vertical plane passes through vertical pivot 6 and is rotatably connected on vertical pivot 6.When Contraband shape frame 51 rotates, it is fixed on Contraband shape frame Heater 2 on 51 is rotated together with Contraband shape frame 51, so that heater 2 is adjusted between substrate 14 by Contraband shape frame 51 Angle.

With reference to Fig. 4, fixing axle 52 is set in the side of Contraband shape frame 51, the interlude of fixing axle 52 and Contraband shape frame 51 is coaxially simultaneously And 51 one of fixing axle 52 and Contraband shape frame, first bevel gear 53 is set in fixing axle 52, is extended outwardly in the plane of vertical pivot 6 Supporting block 55 out are arranged drive rod 7 along the direction perpendicular to supporting block 55 in supporting block 55 and drive rod 7 are rotatably connected on branch In bracer 55, second bevel gear 54 is set in one end of drive rod 7, when drive rod 7 rotates, drives 54 turns of second bevel gear It is dynamic, it is further driven to the rotation of first bevel gear 53, fixing axle 52 is further driven to and Contraband shape frame 51 rotates.Second bevel gear 54 is small In first bevel gear 53, from can more accurately adjust angle.

It include that the polygon prism 71 being plugged in second bevel gear 54, sliding are connected to polygon prism in drive rod 7 with reference to Fig. 4 Locking post 72 on 71, offers the locking hole 551 cooperated with locking post 72 in supporting block 55, and locking post 72 is equipped with several The cylinder of fin, locking post 72 is interior to process hexagonal inner hole, and polygon prism 71 is hexagon column, and polygon prism 71 is plugged on locking post 72 It is interior.When locking post 72 is detached from from locking hole 551, polygon prism 71 is rotated at this time, so that the driving of polygon prism 71 second is straight Gear 33 rotates, when the cooperation of locking post 72 is in locking hole 551, so that locking post 72 is stuck in locking hole 551, polygon prism 71 It is stuck in locking post 72, second bevel gear 54 is stuck in polygon prism 71, so that the second spur gear 33 is locked, prevents heater 2 certainly It passes.

With reference to Fig. 5, it is plugged with sliding sleeve 8 in the lower end of vertical pivot 6, sliding sleeve 8 is fixed on vertically on sliding plate 5, and vertical pivot 6 rotates It is connected in sliding sleeve 8, so that vertical pivot 6 and heater 2 can be rotated around the axis of sliding sleeve 8, setting in this way facilitates rotation to add Hot device 2, so that target 21(refers to Fig. 3) it is directed at the opening of vacuum chamber 1, it is convenient for changing target 21.The edge on the side wall of sliding sleeve 8 Perpendicular to the axis direction thread connecting plunger 81 of sliding sleeve 8, annular groove 61 is processed in the lower end of vertical pivot 6, the sliding of plunger 81 is connected to In annular groove 61, setting prevents vertical pivot 6 from moving up in this way.

With reference to Fig. 5 and Fig. 6,4 circular grooves 62 are circumferentially evenly distributed with along the direction perpendicular to vertical pivot 6 in annular groove 61, plunger 81 Head fits are in circular groove 62, so that vertical pivot 6 is limited after not rotating 90 °.Plunger 81 includes the spring in plunger 81 83, spherical surface 84 is arranged in the piston 82 being fixed on spring 83, the head of piston 82, and plunger 81 is contradicted by 83 elasticity of spring In annular groove 61, when vertical pivot 6 rotates 90 degree, it can be stuck in circular groove 62, continue to rotate vertical pivot 6, need to overcome spring 83 at this time To the elastic force of piston 82, to limit the rotation of vertical pivot 6, spherical surface 84 be stuck in piston 82 will not in circular groove 62, so that perpendicular Axis 6 can rotate under the conditions of big external force.Can either allow in this way vertical pivot 6 rotate, and can to vertical pivot 6 do not rotate 90 ° after Constraint can be received.

Action process: prime minister sticks in target 21 on heater 2, then rotation of drive rod 7, adjusts heater 2 and base The angle of piece 14；It is then switched off the door of vacuum chamber 1, in external pivot link 34, to adjust between heater 2 and substrate 14 Distance；Finally, rotating riser when replacement target 21, so that target 21 overturns 180 °, after the completion of replacement, target 21 is gone back to Position originally.

This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but As long as all by the protection of Patent Law in the scope of the claims of the utility model.

Claims (9)

1. a kind of regulating device of the heater on ion plating equipment, which is characterized in that including being horizontally fixed on vacuum tank The lower end of pedestal (3) in body (1), the heater (2) being vertically installed on pedestal (3), the heater (2) is equipped with sliding plate (5), horizontal on the pedestal (3) to be equipped with two for sliding plate (5) sliding and parallel sliding rail (31), the sliding plate (5) On be fixed with the rack gear parallel with the sliding rail (31) (32), the rack gear (32) be equipped with and rack gear (32) meshed gears (33), horizontal on the gear (33) to be equipped with driving gear (33) rotation and extend the connecting rod (34) of vacuum chamber (1) outside.

2. the regulating device according to claim 1 for the heater on ion plating equipment, which is characterized in that described to add It is equipped between hot device (2) and the sliding plate (5) for driving the bracket (4) rotated before and after the heater (2), the bracket (4) include be vertically arranged on sliding plate (5) vertical pivot (6), horizontal through vertical pivot (6) and be fixed on the heater (2) The intermediate position of the Contraband shape frame (51) of lower end, the Contraband shape frame (51) is rotatably connected on the vertical pivot (6).

3. the regulating device according to claim 2 for the heater on ion plating equipment, which is characterized in that the Contraband The side of shape frame (51) is equipped with fixing axle (52), and the fixing axle (52) is equipped with first bevel gear (53), the vertical pivot (6) It is extended outward in plane supporting block (55), edge is equipped with perpendicular to the fixing axle (52) direction level on the supporting block (55) Drive rod (7), one end of the drive rod (7) are equipped with the second bevel gear (54) engaged with the first bevel gear (53).

4. the regulating device according to claim 3 for the heater on ion plating equipment, which is characterized in that the drive Lever (7) includes the polygon prism (71) being plugged on the second bevel gear (54), slides the lock being connected on polygon prism (71) Tight column (72), the supporting block (55) are equipped with the locking hole (551) cooperated with the locking post (72).

5. the regulating device according to claim 1 for the heater on ion plating equipment, which is characterized in that the cunning The two sides level for moving plate (5) is equipped with several protruding shafts (56), is equipped on the protruding shaft (56) and is connected to the sliding rail (31) In idler wheel (57).

6. the regulating device according to claim 5 for the heater on ion plating equipment, which is characterized in that the cunning The upper surface for moving plate (5) is rotatably connected to locating wheel (58), and the locating wheel (58) is in contact with the side wall of the sliding rail (31).

7. the regulating device according to claim 2 for the heater on ion plating equipment, which is characterized in that the cunning It moves on plate (5) and is equipped with sliding sleeve (8) along the vertical direction, vertical pivot (6) sliding is connected in the sliding sleeve (8).

8. the regulating device according to claim 7 for the heater on ion plating equipment, which is characterized in that the cunning It covers and is equipped with plunger (81) along the direction perpendicular to sliding sleeve (8) on the side wall of (8), the vertical pivot (6) is equipped with and the plunger (81) annular groove (61) cooperated, the middle axial direction along perpendicular to vertical pivot (6) of the annular groove (61) are circumferentially evenly distributed with and the plunger (81) 4 circular grooves (62) of head fits.

9. the regulating device according to claim 8 for the heater on ion plating equipment, which is characterized in that the column It fills in and is equipped with spring (83) inside (81), the head of the spring (83) is equipped with piston (82), and the head of the piston (82) is equipped with Spherical surface (84).