CN208961626U - A kind of cutting liquid jetting device - Google Patents

A kind of cutting liquid jetting device Download PDF

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Publication number
CN208961626U
CN208961626U CN201821869849.2U CN201821869849U CN208961626U CN 208961626 U CN208961626 U CN 208961626U CN 201821869849 U CN201821869849 U CN 201821869849U CN 208961626 U CN208961626 U CN 208961626U
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CN
China
Prior art keywords
guide groove
injection pipe
liquid jetting
cutting liquid
jetting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201821869849.2U
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Chinese (zh)
Inventor
邱丽珉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Towa Semiconductor Equipment (suzhou) Co Ltd
Original Assignee
Towa Semiconductor Equipment (suzhou) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Towa Semiconductor Equipment (suzhou) Co Ltd filed Critical Towa Semiconductor Equipment (suzhou) Co Ltd
Priority to CN201821869849.2U priority Critical patent/CN208961626U/en
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Publication of CN208961626U publication Critical patent/CN208961626U/en
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Abstract

The utility model discloses a kind of cutting liquid jetting devices, including rack, from the guide pad rack outwardly extending injection pipe group and be detachably connected in the rack, the injection pipe group includes multiple bent injection pipes, at least one guide groove is offered on the guide pad, at least one described injection pipe is ordinatedly embedded in the guide groove and consistent with the extending direction of the guide groove.The cutting liquid jetting device of the utility model bends injection pipe by guide groove, so that the liquid outlet alignment of injection pipe needs cooling position, does not need additional artificial be adjusted to it.

Description

A kind of cutting liquid jetting device
Technical field
The utility model relates to a kind of cutting liquid jetting devices.
Background technique
Semiconductor is in cutting, since calorific value is larger, is easy to influence semiconducting behavior and cutting effect, it is therefore desirable to spray Cutting fluid is penetrated to cool down it.But the temperature sensitive degree in each position of semiconductor is different, if the distribution of cutting fluid is not Rationally, it will cause the waste of cutting fluid or reduction cooling effects.It, will be corresponding and when cutting different semiconductors Injection direction is readjusted on ground, is wasted time very much, is influenced processing efficiency.
Summary of the invention
The purpose of the utility model is to provide a kind of cutting liquid jetting device, which can rapidly adjust nozzle So that it is directed at the thermally sensitive position of semiconductor, improves cooling effect.
In order to achieve the above objectives, the technical solution adopted in the utility model is: a kind of cutting liquid jetting device, including machine Frame, from the guide pad rack outwardly extending injection pipe group and be detachably connected in the rack, the injection Pipe group includes multiple bent injection pipes, offers at least one guide groove on the guide pad, at least one described injection Pipe is ordinatedly embedded in the guide groove and consistent with the extending direction of the guide groove.
Preferably, the injection direction of the injection pipe in the guide groove and the extending direction of the guide groove are embedded Unanimously.
Preferably, the injection pipe group has multiple injection pipes, and the extending direction of injection pipe described in wherein at least two is mutual It is not identical.
Preferably, the first guide groove that lower section extends from back to front is offered on the guide pad, and is located at institute The second guide groove and third guide groove at left and right sides of the first guide groove are stated, second guide groove and third guide groove are about institute It is symmetrical to state the first guide groove.
It is further preferred that second guide groove and third guide groove prolong away from the direction of first guide groove It stretches.
It is further preferred that the two sides on the guide pad positioned at first guide groove are each provided with one and upwardly extend Boss, second guide groove and third guide groove are provided on the boss.
Preferably, the injection pipe is made of stainless steel.
Preferably, in the injection pipe group at least there are two the injection pipe liquid outlet be it is flat.
Preferably, the bottom surface of the guide pad is concordant with the bottom surface of the rack.
Preferably, the rack is provided with mounting groove, and the guide pad is ordinatedly embedded in the mounting groove.
Due to the application of the above technical scheme, the utility model has the advantage that this is practical new compared with prior art The cutting liquid jetting device of type bends injection pipe by guide groove, so that the liquid outlet alignment of injection pipe needs cooling position, Additional artificial be adjusted to it is not needed.
Detailed description of the invention
Attached drawing 1 is a kind of cutting liquid jetting device axis surveys view of the utility model;
Attached drawing 2 is a kind of rack of cutting liquid jetting device of the utility model and the axis surveys view of injection pipe group;
Attached drawing 3 is the axis surveys view of the guide pad of the utility model;
Attached drawing 4 is the axis surveys view of another guide pad of the utility model;
Wherein: 1, rack;11, mounting groove;2, injection pipe group;3, guide pad;31, the first guide groove;32, the second guiding Slot;33, third guide groove;34, boss.
Specific embodiment
The technical solution of the utility model is further elaborated with reference to the accompanying drawing.
Referring to FIG. 1 to FIG. 4 be the utility model a kind of cutting liquid jetting device, including rack 1, from rack 1 to The injection pipe group 2 of outer extension and the guide pad 3 being detachably connected in rack 1, injection pipe group include at least one bendable The injection pipe of folding offers at least one guide groove on guide pad 3, is embedded the injection direction of the injection pipe in guide groove and leads Extending direction to slot is consistent.In use, injection pipe need to be only cooperatively disposed in corresponding guide groove, the spray in guide groove The thermally sensitive region of semiconductor workpiece can be faced by penetrating pipe.Injection pipe group has multiple injection pipes, wherein at least two institute The extending direction for stating injection pipe is different, therefore multiple regions can be simultaneously cooled on semiconductor workpiece.
Guide pad 3 can be set there are many structure, and the guide groove on every kind of guide pad 3 adapts to different types of semiconductor Workpiece cutting, it is very convenient as long as replacing the semiconductor workpiece cutting that different types of guide pad 3 copes with corresponding type Fast.
Ginseng as shown in figure 3 and figure 4, in the present embodiment, offers lower section from back to front extends first and leads on guide pad 3 To slot 31, and it is located at the second guide groove 32 and third guide groove 33 of 31 left and right sides of the first guide groove, due to partly leading Body Workpiece structure is symmetrical, therefore the second guide groove 32 and third guide groove 33 are also symmetrically arranged about the first guide groove 31.Such as Shown in Fig. 3, in certain embodiments, the second guide groove 32 and third guide groove 33 prolong away from the direction of the first guide groove 31 It stretches.As shown in figure 4, the second guide groove 32 and third guide groove 33 are towards close to the first guiding in other some embodiments The direction of slot 31 extends.
The left and right sides on guide pad 3 positioned at the first guide groove 31 is each provided with the boss upwardly extended 34, and second Guide groove 32 and third guide groove 33 are provided on boss 34.
Injection pipe is made of stainless steel, and is easy bending, adjusts injection direction during being easy to use.
Referring to figure 1 and figure 2, in injection pipe group 2 at least there are two injection pipe liquid outlet be it is flat.It is flat go out The injection pipe of liquid mouth ejects the wider width of cutting fluid, the use when position for having large area suitable for workpiece needs cooling.
The bottom surface of guide pad 3 is concordant with the bottom surface of the rack 1, in this way the peace convenient for the injection apparatus of the utility model Dress.
Shown in Figure 2, rack 1 is provided with mounting groove 11, and guide pad 3 is cooperatively disposed in mounting groove 11, mounting groove 11 are conducive to the contraposition of guide pad 3, install more convenient when the guide pad 3.
The above embodiments are only for explaining the technical ideas and features of the present invention, and its object is to allow be familiar with technique Personage can understand the content of the utility model and implement accordingly, do not limit the protection scope of the present invention. All equivalent change or modifications according to made by the spirit of the present invention essence, should all cover the protection scope of the utility model it It is interior.

Claims (10)

1. a kind of cutting liquid jetting device, it is characterised in that: including rack (1), from the rack (1) outwardly extending injection pipe Group (2) and the guide pad (3) being detachably connected on the rack (1), the injection pipe group include multiple bent Injection pipe offers at least one guide groove on the guide pad (3), at least one described injection pipe is ordinatedly embedded described It is consistent with the extending direction of the guide groove in guide groove.
2. a kind of cutting liquid jetting device according to claim 1, it is characterised in that: be embedded the institute in the guide groove The injection direction for stating injection pipe is consistent with the extending direction of the guide groove.
3. a kind of cutting liquid jetting device according to claim 1, it is characterised in that: the injection pipe group has multiple sprays Pipe is penetrated, the extending direction of injection pipe described in wherein at least two is different.
4. a kind of cutting liquid jetting device according to claim 1, it is characterised in that: offered on the guide pad (3) From back to front lower section extend the first guide groove (31), and be located at left and right sides of first guide groove (31) second Guide groove (32) and third guide groove (33), second guide groove (32) and third guide groove (33) are about first guiding Slot (31) is symmetrical.
5. a kind of cutting liquid jetting device according to claim 4, it is characterised in that: second guide groove (32) and Three guide grooves (33) extend away from the direction of first guide groove (31).
6. a kind of cutting liquid jetting device according to claim 4, it is characterised in that: be located at institute on the guide pad (3) The two sides for stating the first guide groove (31) are each provided with the boss upwardly extended (34), second guide groove (32) and third Guide groove (33) is provided on the boss (34).
7. a kind of cutting liquid jetting device according to claim 1, it is characterised in that: the injection pipe is by stainless steel At.
8. a kind of cutting liquid jetting device according to claim 1, it is characterised in that: in the injection pipe group (2) at least It is flat there are two the liquid outlet of the injection pipe.
9. a kind of cutting liquid jetting device according to claim 1, it is characterised in that: the bottom surface of the guide pad (3) with The bottom surface of the rack (1) is concordant.
10. a kind of cutting liquid jetting device according to claim 1, it is characterised in that: the rack (1) is provided with installation Slot (11), the guide pad (3) are ordinatedly embedded in the mounting groove (11).
CN201821869849.2U 2018-11-14 2018-11-14 A kind of cutting liquid jetting device Active CN208961626U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821869849.2U CN208961626U (en) 2018-11-14 2018-11-14 A kind of cutting liquid jetting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821869849.2U CN208961626U (en) 2018-11-14 2018-11-14 A kind of cutting liquid jetting device

Publications (1)

Publication Number Publication Date
CN208961626U true CN208961626U (en) 2019-06-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821869849.2U Active CN208961626U (en) 2018-11-14 2018-11-14 A kind of cutting liquid jetting device

Country Status (1)

Country Link
CN (1) CN208961626U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113905848A (en) * 2019-07-04 2022-01-07 日商地球股份有限公司 Processing cooling device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113905848A (en) * 2019-07-04 2022-01-07 日商地球股份有限公司 Processing cooling device
CN113905848B (en) * 2019-07-04 2023-09-19 日商地球股份有限公司 Machining cooling device

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