CN208955408U - A kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable - Google Patents

A kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable Download PDF

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CN208955408U
CN208955408U CN201821191110.0U CN201821191110U CN208955408U CN 208955408 U CN208955408 U CN 208955408U CN 201821191110 U CN201821191110 U CN 201821191110U CN 208955408 U CN208955408 U CN 208955408U
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mirror
cavity
axis
spherical
paraboloidal
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王炜
杨晟
李勇
赵鑫
肖彬
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Abstract

The utility model discloses a kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable, one group of male-female spherical mirror constitutes off-axis positive-branch confocal unstable resonator in the x direction, and one group of concave-concave spherical mirror then constitutes off-axis negative branch confocal unstable resonator;Spherical aberration is 0 in resonant cavity when paraboloidal mirror is as hysteroscope, and spherical aberration is not 0 when spherical mirror is as hysteroscope;For slab laser, off-axis unsteady cavity is compared with symmetrical unstable confocal cavity, and secondary lobe number is reduced in the far-field distribution of output beam, and the energy for including in secondary lobe is greatly decreased, and the beam quality of output beam is substantially improved, therefore slab laser generally uses off-axis unsteady cavity structure.It is more excellent using the more efficient stability of spherical mirror as hysteroscope ratio using paraboloidal mirror, and the performance of paraboloidal mirror non-confocal chamber is better than paraboloidal mirror confocal cavity.Therefore the off-axis non-confocal chamber of paraboloidal mirror is more suitable for slab laser.

Description

A kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable
Technical field
The utility model relates to slab laser technical fields, more specifically, it relates to a kind of parabolic of efficient stable The off-axis unsteady cavity of face mirror.
Background technique
With the proposition of " face increasing ratio " technology, is rapidly developed, occurred as penetrated using the laser of lath-shaped gain media Frequency CO slab2Various types of products such as laser, semiconductor pumped solid batten laser, slab laser amplifier.This A little products have extensive and important application in fields such as industrial lasers processing, scientific researches.Due to increasing relatively thin in slab laser The beneficial good heat exchange characteristics of medium can be realized efficient cooling in such a way that diffusion is cooling, also make the structure of laser It is more compact.And use non-steady-waveguide mixing chamber that can match lath-shaped gain media well to obtain high light beam quality Laser output, therefore non-steady-waveguide mixing chamber is widely adopted in slab laser.
Unsteady cavity can be divided into two kinds of symmetrical unsteady cavity and off-axis unsteady cavity according to the transmission characteristic of light beam.Its structure is respectively such as Shown in following figure 1-4, F indicates focus in figure, and a is outgoing mirror half-breadth, and M is resonant cavity magnifying power, and L is cavity length.Compared to from Axis unsteady cavity is compared with symmetrical unstable confocal cavity, and secondary lobe number is reduced in the far-field distribution of output beam, includes in secondary lobe Energy be greatly decreased, and the beam quality M of output beam2The factor is only the 1/5 of symmetric cavity, therefore slab laser is generally adopted With off-axis unsteady cavity structure.
Utility model content
In view of the deficienciess of the prior art, the purpose of this utility model is to provide a kind of paraboloidal mirrors of efficient stable Off-axis unsteady cavity, to solve the problems mentioned in the above background technology.
To achieve the above object, the utility model provides the following technical solutions:
A kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable, one group of male-female spherical mirror constitute off-axis positive branch in the x direction Confocal unstable resonator, and one group of concave-concave spherical mirror then constitutes off-axis negative branch confocal unstable resonator;Resonant cavity when paraboloidal mirror is as hysteroscope Middle spherical aberration is 0, and spherical aberration is not 0 when spherical mirror is as hysteroscope, and spherical aberration can be to the work of laser resonator generation adverse effect.
As further program of the utility model, a length of L=(R of chamber1+R2)/2, unsteady cavity magnifying power M=-R2/R1, M2 Mirror is resonant cavity tail mirror, and M1 mirror is output coupling mirror, and the radius of curvature of M1, M2 mirror is respectively R1And R2, and M1, M2 are parabolic Face mirror, the direction y are then one-dimensional wave guide cavity, and a is the half-breadth of outgoing mirror, and d is the thickness of gain region, and laser is coupled from the edge of M1 mirror Output, β are plane where resonant cavity output beam, and spherical aberration is 0 in resonant cavity when using paraboloidal mirror as hysteroscope, and spherical mirror Spherical aberration is not 0 therefore can eliminate spherical aberration bring adverse effect using dual paraboloid hysteroscope when as hysteroscope.
As further program of the utility model, coordinate origin V0, i.e. the vertex of conical surface, the seat of A point in figure It is designated as (xc,yc,zc).It is e for eccentricity, the R of radius of curvature is conical surface, it can be described by following formula:
Distance r of the A point apart from z-axiscAre as follows:
rc=(xc 2+yc 2)1/2
Different conical surfaces can be described by the value of its eccentricity: the eccentricity e=0 of spherical surface, paraboloidal centrifugation Ellipsoid when rate e=1, e<1, e>1 are hyperboloid.
Aperture diaphragm is the paraboloidal mirror of mirror position, e=1, directional light either its coefficient of spherical aberration of the object of focal point asc =(1/4R3+Fa)=0, and the coefficient of spherical aberration of spherical mirror at this time is ass=1/4R3.Therefore work as and use paraboloid in slab laser Resonant cavity not will receive the influence of mirror surface spherical aberration when hysteroscope.
As further program of the utility model, with 2kW RF board bar CO2It is analyzed for laser.Work as resonance Corresponding power extraction efficiency when cavity mistuning angle is within the scope of ± 6mrad as shown in figure 8, imbalance when paraboloidal mirror resonant cavity function The changing rule of rate extraction efficiency is similar with spherical mirror resonator, when angle of lacking of proper care exceeds the range of ± 3mrad, resonant cavity Power extraction efficiency is remarkably decreased.The power for being computed the paraboloidal mirror resonant cavity when lacking of proper care angle within the scope of ± 6mrad mentions Take efficiency higher than spherical mirror resonator by 5.6%.
As further program of the utility model, when chamber is long constant, the extraction efficiency of paraboloidal mirror resonant cavity is 0.544, power extraction efficiency is in 0.54 or so fluctuation when chamber length reduces, and power extraction efficiency is in that decline becomes when chamber length increase Gesture;Extraction efficiency is promoted in the range of 0 to -1.8mm when chamber length reduces, and continues the extraction efficiency for reducing the long resonant cavity of chamber It can be still such case when chamber is long is reduced beyond 3mm always in 0.535 or so fluctuation, the power draw when chamber is long to be increased The changing rule of efficiency is similar with paraboloidal mirror resonant cavity.When chamber is long compared with confocal cavity chamber is long, become within the scope of -1mm to 1mm When change, the power extraction efficiency of paraboloidal mirror resonant cavity is higher than spherical mirror resonator by 3.5%;The result shows that paraboloidal mirror resonant cavity The influence of spherical aberration can be eliminated and the stability of laser and efficiency are improved.Therefore paraboloidal mirror resonant cavity is lath The optimal selection of laser.
As further program of the utility model, 2kW RF board bar CO2Other parameters are kept not in laser resonant cavity Become, only change the radius of curvature of two sides hysteroscope, power extraction efficiency is to work as curvature in fluctuating change when radius of curvature increases It is 0.553 that power extraction efficiency, which reaches maximum value, when radius increases 2mm, and hysteroscope curvature does not change, i.e., power draw when confocal Efficiency is 0.544.
As further program of the utility model, the non-confocal chamber for increasing hysteroscope radius of curvature 2mm is analyzed, When lacking of proper care angle within the scope of ± 6mrad, the power extraction efficiency of non-confocal chamber is higher than confocal cavity by 3.1%, when imbalance angle exists The power extraction efficiency of non-confocal chamber is higher than confocal cavity by 3.1% when within the scope of ± 6mrad.
In conclusion the utility model has the advantages that compared with prior art
For slab laser, off-axis unsteady cavity is compared with symmetrical unstable confocal cavity, the far field of output beam Secondary lobe number is reduced in distribution, and the energy for including in secondary lobe is greatly decreased, and the beam quality of output beam is substantially improved, therefore Slab laser generally uses off-axis unsteady cavity structure.The more efficient stabilization of spherical mirror is used as hysteroscope ratio using paraboloidal mirror Property is more excellent, and the performance of paraboloidal mirror non-confocal chamber is better than paraboloidal mirror confocal cavity again.Therefore the off-axis non-confocal of paraboloidal mirror Chamber is more suitable for slab laser.
For the structure feature and effect for more clearly illustrating the utility model, come with reference to the accompanying drawing with specific embodiment pair The utility model is described in detail.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of symmetrical Confocal unstable resonator.
Fig. 2 is the structural schematic diagram of symmetrical negative branch confocal cavity.
Fig. 3 is the structural schematic diagram of off-axis positive branch chamber in off-axis non-steady confocal cavity.
Fig. 4 is the structural schematic diagram of off-axis negative branch chamber in off-axis non-steady confocal cavity.
Fig. 5 is the overall schematic of off-axis non-steady-waveguide mixing chamber in the utility model.
Fig. 6 is the non-steady direction schematic diagram of off-axis non-steady-waveguide mixing chamber in the utility model.
Fig. 7 is the conical surface schematic diagram of the utility model.
Power extraction efficiency schematic diagram when Fig. 8 is the different resonance cavity mistunings of the utility model.
The power extraction efficiency schematic diagram of different type resonant cavity when Fig. 9 is the change of cavity length of the utility model.
Figure 10 is corresponding power extraction efficiency signal when the paraboloidal mirror chamber hysteroscope radius of curvature of the utility model changes Figure.
Figure 11 is the paraboloidal mirror non-confocal cavity configuration schematic diagram of the parabolic lens unsteady cavity of the utility model.
Figure 12 is the paraboloidal mirror confocal cavity structural schematic diagram of the parabolic lens unsteady cavity of the utility model.
The comparison of power extraction efficiency is shown when Figure 13 is the paraboloidal mirror confocal cavity and non-confocal cavity mistuning of the utility model It is intended to.
Specific embodiment
The technical solution of the utility model is described further in the following with reference to the drawings and specific embodiments.
A kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable is illustrated referring to off-axis non-steady-waveguide mixing chamber of Fig. 5, Fig. 6 Figure, M2 mirror are resonant cavity tail mirror, and M1 mirror is output coupling mirror, and the radius of curvature of M1, M2 mirror is respectively R1And R2, a length of L=of chamber (R1+R2)/2, unsteady cavity magnifying power M=-R2/R1.It is non-steady that one group of male-female spherical mirror constitutes off-axis positive-branch confocal in the x direction Chamber, and one group of concave-concave spherical mirror then constitutes off-axis negative branch confocal unstable resonator;And M1, M2 are paraboloidal mirror, the direction y is then one Waveguide cavity is tieed up, a is the half-breadth of outgoing mirror, and d is the thickness of gain region, and laser is coupled from the edge of M1 mirror and exported, and β is that resonant cavity is defeated Plane where light beam out.
What the hysteroscope in general laser resonant cavity was all made of is spherical mirror.The raising of slab laser output power can lead to The area for increasing gain region is crossed, therefore the lateral dimension of gain media is generally large in high-power strip laser, to make The size for obtaining hysteroscope on non-steady direction increases with it, and causes to generate the spherical aberration that can not ignore in resonant cavity, and spherical aberration will necessarily be right The output characteristics of laser has an adverse effect.But when using paraboloidal mirror as hysteroscope in resonant cavity spherical aberration for 0.Therefore it uses Dual paraboloid hysteroscope can eliminate spherical aberration bring adverse effect.
It is the schematic diagram of conical surface referring to Fig. 7, solid line indicates that conical surface, dotted line describe spherical surface, coordinate in figure Origin is V0, i.e. the vertex of conical surface, the coordinate of A point is (x in figurec,yc,zc), it is e, the R of radius of curvature for eccentricity For conical surface, can be described by following formula:
Distance r of the A point apart from z-axiscAre as follows:
rc=(xc 2+yc 2)1/2
Different conical surfaces can be described by the value of its eccentricity: the eccentricity e=0 of spherical surface, paraboloidal centrifugation Ellipsoid when rate e=1, e<1, e>1 are hyperboloid.
Aperture diaphragm is the paraboloidal mirror (e=1) of mirror position, directional light either its coefficient of spherical aberration of the object of focal point asc=(1/4R3+Fa)=0, and the coefficient of spherical aberration of spherical mirror at this time is ass=1/4R3.Therefore work as in slab laser using throwing Resonant cavity not will receive the influence of mirror surface spherical aberration when object plane hysteroscope.
The stability and power extraction efficiency of another aspect paraboloidal mirror resonant cavity are higher than spherical mirror resonator, with 2kW RF board bar CO2It is analyzed for laser.The corresponding power when resonant cavity imbalance angle is within the scope of ± 6mrad Extraction efficiency is as shown in figure 8, the changing rule of paraboloidal mirror resonant cavity power extraction efficiency is the same as spherical mirror resonator class when lacking of proper care Seemingly, when angle of lacking of proper care exceeds the range of ± 3mrad, the power extraction efficiency of resonant cavity is remarkably decreased.It is computed and works as error angle The power extraction efficiency for spending paraboloidal mirror resonant cavity when within the scope of ± 6mrad is higher than spherical mirror resonator by 5.6%.
The power extraction efficiency of different type resonant cavity when Fig. 9 is change of cavity length.When chamber is long constant, paraboloidal mirror resonance The extraction efficiency of chamber is 0.544, and power extraction efficiency is fluctuated 0.54 or so when chamber length reduces, and power draw when chamber length increase Efficiency is on a declining curve.
For spherical mirror resonant cavity, when chamber is long to be reduced, extraction efficiency is promoted in the range of 0 to -1.8mm, after The continuous extraction efficiency for reducing the long resonant cavity of chamber can be still this when chamber is long is reduced beyond 3mm always in 0.535 or so fluctuation Situation, when chamber is long to be increased, the changing rule of power extraction efficiency is similar with paraboloidal mirror resonant cavity.When chamber is long and confocal cavity chamber Length is compared, and when changing within the scope of -1mm to 1mm, the power extraction efficiency of paraboloidal mirror resonant cavity is higher than spherical mirror resonator 3.5%.
The above result shows that paraboloidal mirror resonant cavity can eliminate the influence of spherical aberration and make the stability and efficiency of laser It is improved.Therefore paraboloidal mirror resonant cavity is the optimal selection of slab laser.
Figure 10 is 2kW RF board bar CO2Other parameters remain unchanged in laser resonant cavity, only by the curvature of two sides hysteroscope The situation of change of resonant cavity power extraction efficiency when radius changes.Abscissa 0 represents confocal cavity, i.e. radius of curvature does not change, just Value indicates that hysteroscope radius of curvature increases, and negative value then indicates to reduce.As can be seen from the figure when hysteroscope radius of curvature reduces, resonance Chamber power extraction efficiency is integrally on a declining curve, and power extraction efficiency is to work as song in fluctuating change when radius of curvature increases It is 0.553 that power extraction efficiency, which reaches maximum value, when rate radius increases 2mm, and hysteroscope curvature does not change, i.e., power mentions when confocal Taking efficiency is 0.544.
Figure 11 and Figure 12 is respectively the structural schematic diagram of paraboloidal mirror non-confocal chamber Yu paraboloidal mirror confocal cavity, and a is output Mirror half-breadth, M are resonant cavity magnifying power, and L is cavity length.F1 indicates the focus of output coupling mirror in Figure 11, and F2 is tail mirror Focus;F is the common focal position of hysteroscope in Figure 12.
The non-confocal chamber for increasing 2mm to hysteroscope radius of curvature is analyzed.Figure 13 be paraboloidal mirror confocal cavity with it is non-total The case where power extraction efficiency when burnt cavity mistuning, solid line indicates confocal cavity, dotted line then indicate that hysteroscope radius of curvature increases 2mm Non-confocal chamber.As can be seen from the figure the anti-imbalance performance of non-confocal chamber be better than confocal cavity, be computed when imbalance angle ± The power extraction efficiency of non-confocal chamber is higher than confocal cavity by 3.1% when within the scope of 6mrad.And the non-confocal chamber when angle of lacking of proper care is negative Power extraction efficiency there is no an apparent downward trend, and when angle of lacking of proper care is positive and is worth, power extraction efficiency is gradually reduced.By This illustrates that not only power extraction efficiency is better than paraboloidal mirror confocal cavity and its stability similarly more to paraboloidal mirror non-confocal chamber It is good.
In conclusion off-axis unsteady cavity is compared with symmetrical unstable confocal cavity, output light for slab laser Secondary lobe number is reduced in the far-field distribution of beam, and the energy for including in secondary lobe is greatly decreased, and the beam quality of output beam is substantially It is promoted, therefore slab laser generally uses off-axis unsteady cavity structure.It is imitated as hysteroscope ratio using spherical mirror using paraboloidal mirror Rate more high stability is more excellent, and the performance of paraboloidal mirror non-confocal chamber is better than paraboloidal mirror confocal cavity again.Therefore paraboloidal mirror Off-axis non-confocal chamber is more suitable for slab laser.
Technical principle of the utility model has been described above with reference to specific embodiments, is only the preferred implementation of the utility model Mode.The protection scope of the utility model is not limited merely to above-described embodiment, technology belonging to the idea of the present invention Scheme belongs to the protection scope of the utility model.Those skilled in the art, which does not need to pay for creative labor, to be associated To other specific embodiments of the utility model, these modes are fallen within the protection scope of the utility model.

Claims (3)

1. a kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable, which is characterized in that one group of male-female spherical mirror structure in the x direction At off-axis positive-branch confocal unstable resonator, and one group of concave-concave spherical mirror then constitutes off-axis negative branch confocal unstable resonator, and paraboloidal mirror is as chamber Spherical aberration is 0 in resonant cavity when mirror, and spherical aberration is not 0 when spherical mirror is as hysteroscope.
2. a kind of off-axis unsteady cavity of paraboloidal mirror of efficient stable according to claim 1, which is characterized in that a length of L of chamber =(R1+R2)/2, unsteady cavity magnifying power M=-R2/R1, M2 mirror is resonant cavity tail mirror, and M1 mirror is output coupling mirror, M1, M2 mirror Radius of curvature is respectively R1And R2, and M1, M2 are paraboloidal mirror, the direction y is then one-dimensional wave guide cavity, and a is the half-breadth of outgoing mirror, d For the thickness of gain region, laser is coupled from the edge of M1 mirror and is exported, and β is plane where resonant cavity output beam.
3. a kind of off-axis unsteady cavity of paraboloidal mirror of efficient stable according to claim 2, which is characterized in that coordinate origin For V0, i.e., the vertex of conical surface, the coordinate of A point are (xc,yc,zc), it is e for eccentricity, the R of radius of curvature is conic Face can be described by following formula:
Distance r of the A point apart from z-axiscAre as follows:
rc=(xc 2+yc 2)1/2
Different conical surfaces can be described by the value of its eccentricity: the eccentricity e=0, paraboloidal eccentricity e=of spherical surface It is ellipsoid when 1, e<1, is hyperboloid when e>1;
Aperture diaphragm is the paraboloidal mirror of mirror position, e=1, directional light either its coefficient of spherical aberration of the object of focal point asc=(1/ 4R3+Fa)=0, and the coefficient of spherical aberration of spherical mirror at this time is ass=1/4R3
CN201821191110.0U 2018-07-25 2018-07-25 A kind of off-axis unsteady cavity of the paraboloidal mirror of efficient stable Expired - Fee Related CN208955408U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7481349B2 (en) 2019-01-22 2024-05-10 コヒレント, インコーポレイテッド Diode-pumped solid-state laser system for laser annealing.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7481349B2 (en) 2019-01-22 2024-05-10 コヒレント, インコーポレイテッド Diode-pumped solid-state laser system for laser annealing.

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