CN208954967U - A kind of clamping device and semiconductor processing equipment - Google Patents
A kind of clamping device and semiconductor processing equipment Download PDFInfo
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- CN208954967U CN208954967U CN201822075836.4U CN201822075836U CN208954967U CN 208954967 U CN208954967 U CN 208954967U CN 201822075836 U CN201822075836 U CN 201822075836U CN 208954967 U CN208954967 U CN 208954967U
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- briquetting
- clamping device
- workpiece
- turntable
- clump weight
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Abstract
The utility model discloses a kind of clamping device and semiconductor processing equipments, are related to semiconductor processing technology field.The clamping device includes turntable, fixing seat, briquetting and clump weight, and turntable is configured to rotate around center；Multiple fixing seats are set on turntable, are used to support workpiece；The side at center of each fixing seat far from turntable is rotatably connected to a briquetting, and briquetting is configured as when turntable rotates, and the lower end of briquetting is lifted, so that the upper end of briquetting is connected to the edge of workpiece；Clump weight is detachably set to the lower end of briquetting, and the weight-adjustable of the clump weight on each briquetting.Clump weight is set in the clamping device, on the one hand it can guarantee that briquetting naturally droops when turntable stops operating, to facilitate the pick-and-place of substrate, it on the other hand can be by adjusting the weight of clump weight on each briquetting, the size for the power that adjustment briquetting applies to substrate, guarantee the fixed stability of substrate, reduces fragment rate.
Description
Technical field
The utility model relates to semiconductor processing technology fields more particularly to a kind of clamping device and semiconductor machining to set
It is standby.
Background technique
In the process of semiconductor substrate, many operating condition lower substrates are required in rotation status, this just needs to press from both sides
Mechanism fixed substrate is held, guarantees the stabilization of substrate, to guarantee the machining accuracy of substrate, while can also be to avoid substrate edges
Burr scratches equipment.
Currently, clamping device is constant to the chucking power of the substrate of different-thickness, and when clamping device is fixed compared with thin substrate, folder
Holding force is larger, and substrate is easy to break, and fragment rate is higher；When clamping device fixes thicker substrate, chucking power is smaller, and substrate is solid
It is fixed unstable, influence the machining accuracy of substrate.
Utility model content
One purpose of the utility model is to propose a kind of clamping device, can provide the workpiece of different-thickness and is suitable for
Chucking power, guarantee workpiece stability on the basis of avoid workpiece fragmentation.
For this purpose, the utility model uses following technical scheme:
A kind of clamping device, comprising:
Turntable, the turntable are configured to rotate around center；
Multiple fixing seats, multiple fixing seats are set on the turntable, are used to support workpiece；
The side of briquetting, each center of the fixing seat far from the turntable is rotatably connected to the briquetting,
The briquetting is configured as when the turntable rotates, and the lower end of the briquetting is lifted, so that the upper end of the briquetting is connected to
The edge of the workpiece；And
Clump weight is detachably set to the lower end of the briquetting, and the weight of the clump weight on each briquetting
It is adjustable.
Wherein, the quantity for the clump weight being arranged on each briquetting is adjustable.
Wherein, the clump weight is clamped or is threadedly coupled with the briquetting.
Wherein, top pillar is convexly equipped at the top of the fixing seat, the top pillar is used to support the workpiece.
Wherein, the top surface of the top pillar is provided with the first elastic layer.
Wherein, the surface of the upper end of the briquetting towards the workpiece is provided with the second elastic layer.
Wherein, second elastic layer is made of rubber or silica gel.
Wherein, the turntable includes:
Central plate；
Annular frame, the annular frame are arranged concentrically with the central plate, multiple fixing seat uniform intervals settings
In on the annular frame；And
Multiple dowels, the dowel connect the central plate and the annular frame.
Wherein, support column is provided on the dowel, the top surface of the support column is spherical surface.
Another purpose of the utility model is to propose a kind of semiconductor processing equipment, can be to the workpiece of different-thickness
Suitable chucking power is provided, guarantees the stability of workpiece, reduces fragment rate.
For this purpose, the utility model uses following technical scheme:
A kind of semiconductor processing equipment, including above-mentioned clamping device, the clamping device is to be processed for gripping
Workpiece.
The utility model has the advantages that the utility model provides a kind of clamping device and semiconductor processing equipment.In the clamping device
When turntable rotates, briquetting is overturn under the influence of centrifugal force, so that the upper end of briquetting is connected to the edge of substrate, passes through multiple pressures
The cooperation of block grips substrate.By setting clump weight, it on the one hand can guarantee that briquetting naturally droops when turntable stops operating,
To facilitate the pick-and-place of substrate, on the other hand briquetting can be adjusted to substrate by adjusting the weight of clump weight on each briquetting
The size of the power of application guarantees the fixed stability of the substrate of different-thickness, reduces fragment rate.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of clamping device provided by the utility model；
Fig. 2 is the partial structure diagram after clamping device provided by the utility model and work pieces mate.
Wherein:
1, turntable；11, annular frame；12, central plate；13, dowel；14, support column；2, fixing seat；21, top pillar；22,
Connecting shaft；3, briquetting；4, workpiece；5, clump weight.
Specific embodiment
The technical issues of to solve the utility model, the technical solution of use and the technical effect that reaches are clearer,
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
A kind of semiconductor processing equipment is present embodiments provided, such as can be semiconductor cleaning device or one chip extension
Furnace.Semiconductor processing equipment includes chamber and setting in the indoor clamping device of chamber, and clamping device is for fixing semiconductor work
Part, to be processed using other processing components to workpiece.
As depicted in figs. 1 and 2, clamping device includes turntable 1, multiple fixing seats 2 and briquetting 3.Turntable 1 can be in itself
Heart rotation.On the turntable 1, fixing seat 2 is used to support workpiece 4 for multiple settings of fixing seat 2.Briquetting 3 is rotatably arranged on fixing seat 2
On, and it is located at side of the fixing seat 2 far from 1 center of turntable.Specifically, fixing seat 2 is provided with company far from the side at 1 center of turntable
Spindle 22, the middle part of briquetting 3 are set in outside connecting shaft 22, and can be rotated relative to connecting shaft 22.When turntable 1 rotates, briquetting 3
It is rotated under the influence of centrifugal force relative to fixed seat 2, so that the lower end of briquetting 3 is lifted up, the upper end of briquetting 3 can be with workpiece
4 edge abuts.By the cooperation of multiple briquettings 3 in multiple fixing seats 2, the position of workpiece 4 can be gripped, so that work
Part 4 is rotated together with turntable 1.When turntable 1 stops operating, briquetting 3 restores under self gravitation effect to initial position, that is, presses
The lower end of block 3 naturally droops, so that the upper end of briquetting 3 is lifted, to facilitate the pick-and-place of workpiece 4.
For convenience of briquetting 3 rotate after is abutted with the edge of workpiece 4, multiple fixing seats 2 enclose set the region to be formed shape and
The shape of workpiece 4 is identical, multiple briquettings 3 not only can be improved to the clamping effect of workpiece 4, but also make briquetting 3 in centrifugal force
After flipping an angle under effect, the upper end of briquetting 3 can be abutted with the edge of workpiece 4.In the present embodiment, the shape of workpiece 4
For circle, as shown in Figure 1, turntable 1 is rounded, multiple fixing seats 2, which are enclosed, sets the region to be formed as circle.In other embodiments,
When workpiece 4 to be fixed is rectangle or ellipse, the shape in the region that multiple fixing seats 2 surround may be rectangle or ellipse
Shape.
Specifically, turntable 1 includes central plate 12, around the annular frame 11 and connecting central plate 12 of the setting of central plate 12
With the dowel 13 of annular frame 11.Central plate 12 can be connect with driving assembly, such as motor, to drive turntable 1 to rotate.
Multiple fixing seats 2 are disposed in an evenly spaced relation on annular frame 11, are conducive to improve the support effect to workpiece 4, it is solid to improve workpiece 4
Fixed stability.By the way that dowel 13 is arranged, may exist hollowed out area between central plate 12 and annular frame 11, can mitigate
The weight of turntable 1 reduces power required for driving assembly driving turntable 1, advantageously reduces the processing cost of energy consumption and turntable 1.
Since fixing seat 2 and briquetting 3 act on the edge of workpiece 4 to the power that workpiece 4 applies, the middle part of workpiece 4 lacks
Support, is easy to cause workpiece 4 to rupture because of unbalance stress, influences the processing quality of workpiece 4.For this purpose, as shown in Figure 1, even
It connects and is provided with support column 14 on muscle 13, by the way that support column 14 is arranged, the middle part of workpiece 4 can be supported, increase clamping device to work
The Support Position of 4 bottom surface of part is conducive to improve the fixed effect to workpiece 4.
To avoid support column 14 from scratching the surface of workpiece 4, the top surface of support column 14 can be spherical surface, and spherical surface can reduce branch
The contact area of dagger 14 and workpiece 4, and the surface of spherical surface is smooth, prevents support column 14 from scratching workpiece 4.
In the present embodiment, there are four the settings of dowel 13, a support column 14 is provided on each dowel 13, and prop up
Dagger 14 is set to the centre of dowel 13, is conducive to the support force that balanced workpiece 4 is subject to.In other embodiments, dowel
The quantity for the support column 14 being arranged in 13 quantity and each dowel 13 can be adjusted according to the actual situation.
As shown in Fig. 2, the top of fixing seat 2 is provided with top pillar 21, top pillar 21 is used to support workpiece 4.To guarantee that workpiece 4 exists
The top surface of the stationarity placed on clamping device, top pillar 21 is plane, play can occurs in the horizontal direction to avoid workpiece 4.
When to avoid being placed on workpiece 4 on top pillar 21, impact failure workpiece 4 of the top pillar 21 to workpiece 4, the top of top pillar 21
The first elastic layer can be set on face, the first elastic layer has certain elasticity, can buffer the impact force to workpiece 4, keep away
Exempt from workpiece 4 to collide with damage.Optionally, the first elastic layer can be made of rubber, silica gel or sponge elastomeric material, due to partly leading
Body workpiece 4 is needed using special reagent, in some machining processes to avoid the first elastic layer from polluting workpiece 4 or examination
Agent, the first elastic layer are preferably and the nonreactive stable material of reagent.
Workpiece 4 is in certain machining processes, and the reagent of addition has certain viscosity, to avoid viscous agent from influencing
It is naturally drooped when turntable 1 stops operating, clump weight 5 is additionally provided on briquetting 3, clump weight 5 is arranged in the lower end of briquetting 3, makes
The center of gravity for obtaining briquetting 3 is sunk, and is conducive to briquetting 3 and is restored automatically to initial position.
When actual processing, workpiece 4 has different thickness, the abutting force for the briquetting 3 that the workpiece 4 of different-thickness is able to bear
It is of different sizes.And briquetting 3 is related with centrifugal force suffered by briquetting 3 to the size of the abutting force at 4 edge of workpiece, in turntable 1
The timing of revolving speed one, the size for the centrifugal force that briquetting 3 is subject to is related with the quality of briquetting 3.
For avoid the occurrence of abutting force it is excessive and cause workpiece 4 rupture or abutting force it is too small and cause workpiece 4 fixation it is unreliable
The problems such as, the weight-adjustable of the clump weight 5 in the present embodiment on each briquetting 3.
Specifically, clump weight 5 is detachably connected with briquetting 3, to replace the clump weight 5 of different weight, so as to adjust pressure
The size for the power that block 3 applies workpiece 4.When the thickness of workpiece 4 is thicker, by increasing the quantity of clump weight 5, pressure can be increased
Block 3 avoids the positional shift in process of workpiece 4 to improve the stability fixed to workpiece 4 to the abutting force of workpiece 4,
Be conducive to improve the machining accuracy of workpiece 4, while equipment can also be scratched to avoid the burr at 4 edge of workpiece.
In other embodiments, multiple clump weights 5 can be set on each briquetting 3, and what is be arranged on each briquetting 3 matches
The quantity of pouring weight 5 is adjustable, and the quantity by increasing or decreasing clump weight 5 on each briquetting 3 adjusts briquetting 3 and applies to workpiece 4
The size of the power added.
Optionally, briquetting 3 can be realized by way of being clamped or being threadedly coupled with clump weight 5 and is detachably connected.With card
It is connected in example, card slot, the upper end opening of card slot can be set on briquetting 3, the opposite two sides of clump weight 5 are provided with card convex, card convex
Cooperate with card slot.When installing clump weight 5, clump weight 5 is slid into card slot by the opening of card slot upper end, and is matched with card slot clamping
It closes.Multiple clump weights 5 are installed for convenience of briquetting 3, the length of card slot is greater than the length of clump weight 5, can be successively sliding into card slot
Enter multiple clump weights 5.The top of card slot is set by that will be open, when turntable 1 rotates, the clump weight 5 on briquetting 3 is being centrifuged
It is clamped in card slot, can be detached to avoid clump weight 5 and briquetting 3 under the action of power.
When to avoid turntable 1 from rotating, the upper end of briquetting 3 excessive to the impact of workpiece 4 when the upper end of briquetting 3 abuts workpiece 4
The second elastic layer can be set towards the surface of workpiece 4, the second elastic layer can play buffer function, and workpiece 4 is avoided to damage.
The material of second elastic layer can be identical as the first elastic layer, and details are not described herein again.
The above content is only the preferred embodiment of the utility model, for those of ordinary skill in the art, according to this reality
With novel thought, there will be changes in the specific implementation manner and application range, and the content of the present specification should not be construed as
Limitations of the present invention.
Claims (10)
1. a kind of clamping device characterized by comprising
Turntable (1), the turntable (1) are configured to rotate around center；
Multiple fixing seats (2), multiple fixing seats (2) are set on the turntable (1), are used to support workpiece (4)；
The side of briquetting (3), center of each fixing seat (2) far from the turntable (1) is rotatably connected to described in one
Briquetting (3), the briquetting (3) are configured as when the turntable (1) rotates, and the lower end of the briquetting (3) is lifted, so that described
The upper end of briquetting (3) is connected to the edge of the workpiece (4)；And
Clump weight (5) is detachably set to the lower end of the briquetting (3), and the clump weight on each briquetting (3)
(5) weight-adjustable.
2. clamping device as described in claim 1, which is characterized in that the clump weight being arranged on each briquetting (3)
(5) quantity is adjustable.
3. clamping device as described in claim 1, which is characterized in that the clump weight (5) and the briquetting (3) clamping or spiral shell
Line connection.
4. clamping device as described in claim 1, which is characterized in that top pillar (21) are convexly equipped at the top of the fixing seat (2),
The top pillar (21) is used to support the workpiece (4).
5. clamping device as claimed in claim 4, which is characterized in that the top surface of the top pillar (21) is provided with the first elasticity
Layer.
6. clamping device as described in claim 1, which is characterized in that the upper end of the briquetting (3) is towards the workpiece (4)
Surface is provided with the second elastic layer.
7. clamping device as claimed in claim 6, which is characterized in that second elastic layer is made of rubber or silica gel.
8. such as clamping device of any of claims 1-7, which is characterized in that the turntable (1) includes:
Central plate (12)；
Annular frame (11), the annular frame (11) are arranged concentrically with the central plate (12), and multiple fixing seats (2) are equal
It is even to be arranged at intervals on the annular frame (11)；And
Multiple dowels (13), the dowel (13) connect the central plate (12) and the annular frame (11).
9. clamping device as claimed in claim 8, which is characterized in that support column (14) are provided on the dowel (13),
The top surface of the support column (14) is spherical surface.
10. a kind of semiconductor processing equipment, which is characterized in that including clamping device as claimed in any one of claims 1-9 wherein,
The clamping device is for gripping workpiece to be processed (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822075836.4U CN208954967U (en) | 2018-12-11 | 2018-12-11 | A kind of clamping device and semiconductor processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822075836.4U CN208954967U (en) | 2018-12-11 | 2018-12-11 | A kind of clamping device and semiconductor processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208954967U true CN208954967U (en) | 2019-06-07 |
Family
ID=66745774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822075836.4U Active CN208954967U (en) | 2018-12-11 | 2018-12-11 | A kind of clamping device and semiconductor processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208954967U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111508889A (en) * | 2020-03-13 | 2020-08-07 | 宁波润华全芯微电子设备有限公司 | Wafer bearing table for clamping wafer by using centrifugal force |
| CN114226183A (en) * | 2021-12-18 | 2022-03-25 | 瑞安市杰峰智能科技有限公司 | Rotation assisting mechanism applied to double-head rotating disc type AB glue injection machine |
| TWI808341B (en) * | 2020-08-24 | 2023-07-11 | 弘塑科技股份有限公司 | Substrate fixing device |
-
2018
- 2018-12-11 CN CN201822075836.4U patent/CN208954967U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111508889A (en) * | 2020-03-13 | 2020-08-07 | 宁波润华全芯微电子设备有限公司 | Wafer bearing table for clamping wafer by using centrifugal force |
| TWI808341B (en) * | 2020-08-24 | 2023-07-11 | 弘塑科技股份有限公司 | Substrate fixing device |
| CN114226183A (en) * | 2021-12-18 | 2022-03-25 | 瑞安市杰峰智能科技有限公司 | Rotation assisting mechanism applied to double-head rotating disc type AB glue injection machine |
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