CN208949384U - A kind of oil shielding volatilization device - Google Patents
A kind of oil shielding volatilization device Download PDFInfo
- Publication number
- CN208949384U CN208949384U CN201821403683.5U CN201821403683U CN208949384U CN 208949384 U CN208949384 U CN 208949384U CN 201821403683 U CN201821403683 U CN 201821403683U CN 208949384 U CN208949384 U CN 208949384U
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- CN
- China
- Prior art keywords
- oil
- evaporation
- shallow slot
- volatilization device
- shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 238000001704 evaporation Methods 0.000 claims abstract description 43
- 230000008020 evaporation Effects 0.000 claims abstract description 42
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 238000005485 electric heating Methods 0.000 claims abstract description 13
- 239000000446 fuel Substances 0.000 claims abstract description 13
- 238000010276 construction Methods 0.000 claims abstract description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 238000010025 steaming Methods 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 239000011104 metalized film Substances 0.000 description 4
- 210000002469 basement membrane Anatomy 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 2
- 210000002421 cell wall Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Fats And Perfumes (AREA)
Abstract
The utility model provides a kind of oil shielding volatilization device, it is pumped including boat formula heating plate, electric heating tube, fuel feed pump and microfluidic control, the boat formula heating plate upper surface is provided with evaporation shallow slot, the bottom surface of the evaporation shallow slot is horizontal flat construction, the electric heating tube is embedded in the boat formula heating plate, the electric heating tube is arranged below the evaporation shallow slot, and the oil inlet end of the fuel feed pump connects the oil outlet of the microfluidic control pump, and the oil outlet of the fuel feed pump is connected to the evaporation shallow slot.Oil shielding volatilization device has the advantages that design science, oil mass are stable, oil pressure is uniform, good product quality.
Description
Technical field
The utility model relates to a kind of metallized films, and oily screening arrangement is deposited, and specifically, relate to a kind of oil shielding
Volatilization device.
Background technique
Metallized film used in thin film capacitor needs steaming by vacuum roll coater hydatogenesis metal
Before sending out deposited metal, whole picture film surface needs are isolated into specified according to the technical requirement of downstream client's thin film capacitor
Width, and isolation strip will also reach specified width, which width, and the region of evaporation metal is needed to be referred to as metal layer, and isolation region is claimed
To be left white.At this moment a kind of technique and material are needed just to prevent metal deposit in a kind of separation layer of coating on base films in advance, and
And guarantee that this is left white the performance that area keeps original basement membrane, and intervene without secondary " pollution " material, in order to avoid influence later period thin-film electro
Container performance.
Shielding oil is currently used isolated material, but existing oil shielding volatilization device is due to shielding oil volatilization residual
The Multiple factors such as uncontrollable temperature adjustment point after rate, residual quantity and residual lead to the screen for being difficult quantitative, the even pressure of control offer
Oil vapour is covered, the unstability for shielding oil vapour will affect the effect for being left white area, and then influence the quality of thin film capacitor finished product.
In order to solve the above problems, people are seeking always a kind of ideal technical solution.
Summary of the invention
The purpose of this utility model is that in view of the deficiencies of the prior art, to provide, a kind of design science, oil mass be stable, oil
Press uniform, good product quality oil shielding volatilization device.
To achieve the goals above, the technical scheme adopted by the utility model is a kind of oil shields volatilization device, including
Boat formula heating plate, electric heating tube, fuel feed pump and microfluidic control pump, the boat formula heating plate upper surface is provided with evaporation shallow slot, institute
The bottom surface for stating evaporation shallow slot is horizontal flat construction, and the electric heating tube is embedded in the boat formula heating plate, the electric heating
Pipe is arranged below the evaporation shallow slot, and the oil inlet end of the fuel feed pump connects the oil outlet of the microfluidic control pump, the confession
The oil outlet of oil pipe is connected to the evaporation shallow slot.
Based on above-mentioned, the shape of the evaporation shallow slot is horizontal stripe shape, and the evaporation shallow slot includes two sides disposed in parallel
With the curved transition sections of connection two sides end.
Based on above-mentioned, the depth of the evaporation shallow slot is 0.5-2mm.
Based on above-mentioned, the depth of the evaporation shallow slot is 1mm.
Based on above-mentioned, it further includes the nozzle plate covered above the evaporation shallow slot, is offered on the nozzle plate multiple
Jet port, multiple jet ports are transversely arranged on the nozzle plate, and the left and right sides on the outside of each jet port is all provided with
It is equipped with vertical retaining wall, the front and rear sides on the outside of each jet port are open design.
Based on above-mentioned, the nozzle plate includes lateral plate and the steam groove that is arranged in the middle part of the lateral plate, institute
The surface that the evaporation shallow slot is arranged in steam groove is stated, the steam groove is in the horizontal stripe shape of uniform throughout, the steam
The section of groove is to be bent upwards arc-shaped, and multiple jet ports are provided with the slot bottom of the steam groove.
Based on above-mentioned, the left and right ends of the steam groove are smoothly connected with the lateral plate by cambered surface.
Based on above-mentioned, it further includes pedestal, and accommodating chamber is provided at the top of the pedestal, and the boat formula heating plate is arranged in institute
It states in accommodating chamber, the front and rear sides of the transverse direction plate offer multiple card slots, and multiple card slots are symmetrically dispersed in institute
Steam groove two sides, the card slot spaced set of every side are stated, the pedestal front and rear sides correspond to multiple card slot difference
It is provided with buckle.
Based on above-mentioned, the height of the vertical retaining wall is 0.5-1.5cm.
Based on above-mentioned, the height of the vertical retaining wall is 1cm.
The utility model has substantive features and progress compared with the prior art, and specifically, the utility model passes through institute
The setting of microfluidic control pump is stated, can at regular time and quantity be inputted shielding oil in the evaporation shallow slot, since the evaporation shallow slot is deep
Degree is very shallow, and shielding oil can be unfolded in large area, is laid in the evaporation shallow slot, the electricity being embedded in the boat formula heating plate adds
Heat pipe can by even heat pass to the shielding oil in the evaporation shallow slot, so that the shielding oil of each position be made to keep steady
Fixed pressure is uniformly volatilized, and is provided the shielding oil vapour of quantitative, even pressure, is provided basis for product quality, with design science,
The advantages of oil mass is stable, oil pressure is uniform, good product quality.
Detailed description of the invention
Fig. 1 is the schematic diagram of oil shielding volatilization device in the utility model.
Fig. 2 is the external structure of oil shielding volatilization device in the utility model.
Fig. 3 is the main view of nozzle plate in the utility model.
Fig. 4 is the bottom view of Fig. 3.
In figure: 1. boat formula heating plates;2. evaporating shallow slot;3. electric heating tube;4. fuel feed pump;5. microfluidic control pumps;6.
Shield oil vessel;7. nozzle plate;8. buckle;9. pedestal;41. the oil inlet end of fuel feed pump;71. lateral plate;72. steam
Groove;73. card slot;74. jet port;75. vertical retaining wall.
Specific embodiment
Below by specific embodiment, the technical solution of the utility model is described in further detail.
Embodiment 1
As shown in Figs 1-4, a kind of oil shielding volatilization device, including boat formula heating plate 1, electric heating tube 3, fuel feed pump 4 and micro-
Flow control pump 5,1 upper surface of boat formula heating plate are provided with evaporation shallow slot 2, and the bottom surface of the evaporation shallow slot 2 is horizontal straight
Structure, the electric heating tube 3 are embedded in the boat formula heating plate 1, and the electric heating tube 3 is arranged under the evaporation shallow slot 2
Side, the oil inlet end 41 of the fuel feed pump 4 connect the oil outlet of the microfluidic control pump 5, and the oil outlet of the fuel feed pump 4 is connected to institute
State evaporation shallow slot 2.The shape of the evaporation shallow slot 2 is specially horizontal stripe shape, and the evaporation shallow slot 2 includes two sides disposed in parallel
Depth with the curved transition sections of connection two sides end, the evaporation shallow slot 2 is 0.5-2mm.
Working principle: by the oil inlet connection shielding oil vessel 6 of microfluidic control pump 5, microfluidic control pump 5 can periodically be determined
Amount ground inputs shielding oil in the evaporation shallow slot 2, and since 2 depth of evaporation shallow slot is very shallow, shielding oil can be opened up in large area
It opens, is laid in the evaporation shallow slot 2, it, can be equal by heat after being embedded in the energization of electric heating tube 3 in the boat formula heating plate 1
The shielding oil in the evaporation shallow slot 2 is passed to evenly, to make the shielding oil of each position that stable pressure be kept uniformly to wave
Hair provides the shielding oil vapour of quantitative, even pressure.
It further includes the nozzle plate 7 covered above the evaporation shallow slot 2, offers multiple jet ports on the nozzle plate 7
74, multiple jet ports 74 are transversely arranged on the nozzle plate 7, and the left and right sides in each 74 outside of jet port is all provided with
It is equipped with vertical retaining wall 75, the front and rear sides in each 74 outside of jet port are open design.The nozzle plate 7 includes laterally
Plate 71 and the steam groove 72 that 71 middle part of lateral plate is arranged in, the steam groove 72 are arranged in the evaporation shallow slot
2 surface, the steam groove 72 are in the horizontal stripe shape of uniform throughout, and the section of the steam groove 72 is (vertical with Fig. 3 paper
Direction) be to be bent upwards arc-shaped, multiple jet ports 74 are provided with the slot bottom of the steam groove 72.The steaming
The left and right ends of vapour groove 72 are smoothly connected with the lateral plate 71 by cambered surface.The height of the vertical retaining wall 75 is 0.5-
1.5cm。
7 working principle of nozzle plate: last one directional stream-guidance device of the nozzle plate 7 as oil vapour, when oil vapour volatilizees
To steam groove 72, since the cell wall of steam groove 72 is in uniform arc-shaped, oil vapour can be equably drained to each spray
At loophole 74, when oil vapour is sprayed from the jet port 74, the vertical retaining wall 75 of the left and right sides limits the expansion of oil vapour transverse direction
It dissipates, guidance oil vapour dissipates (perpendicular to the direction of Fig. 3 paper) along longitudinal direction, is multiple times than the width dimensions of oil vapour in the longitudinal direction
Width dimensions in its transverse direction, with being longitudinally travelled for basement membrane, oil vapour is similar to overcoating, and (i.e. oil vapour is constantly covered on
It is attached oil shielded layer on) be sprayed on basement membrane, oily shielded layer thick middle thin edge, under tension, edge
Oil film burr can be " pulled " and be in line, to improve the linearity and clarity for being left white regions shield oil edge boundary line, avoid
Metal layer edge leaves burr, occurs " partial discharge " and " gap discharge ", influences the service life of thin film capacitor.
In order to facilitate the dismounting of nozzle plate 7, it further includes pedestal 9, and accommodating chamber, the boat are provided at the top of the pedestal 9
Formula heating plate 1 is arranged in the accommodating chamber, and the front and rear sides of the transverse direction plate 71 offer multiple card slots 73, Duo Gesuo
It states card slot 73 and is symmetrically dispersed in 72 two sides of steam groove, 73 spaced set of the card slot of every side, before the pedestal 9
Two sides correspond to multiple card slots 73 and are respectively arranged with buckle 8 afterwards;In use, card slot 73 is locked by the buckle 8 or
It opens, facilitates the dismounting of the nozzle plate 7.
Embodiment 2
The present embodiment the difference from embodiment 1 is that: preferably by evaporate shallow slot 2 depth be set as 1mm, vertical retaining wall
75 height is set as 1cm.
It is detected, uses original technique, the shielding oil of existing equipment is left white area's oil film thickness average value as 60 nanometers, deviation
Range: 60%, locally there is flowing oil film between film layer.After the oil shielding volatilization device in the present embodiment, shielding oil is left white area
Oil film thickness average value is 30 nanometers, deviation range: 10%.By contrast, the oil shielding volatilization device in the present embodiment has oil film
Effectively cleaning oil film provides convenience when the features such as consistency of thickness is strong, more uniform, more metal vapor deposition, and makes into
Product metallized film oil remnants reach trace, improve metallized film utilization rate, have expanded its application field.
Finally it should be noted that: above embodiments are only to illustrate the technical solution of the utility model rather than limit it
System;Although the utility model has been described in detail with reference to the preferred embodiment, those of ordinary skill in the art should
Understand: specific implementation of the utility model can still be modified or is equally replaced to some technical characteristics
It changes;Without departing from the spirit of technical solutions of the utility model, should all cover in the claimed technical solution of the utility model
In range.
Claims (10)
1. a kind of oil shielding volatilization device, it is characterised in that: including boat formula heating plate, electric heating tube, fuel feed pump and microfluidic control
Pump, the boat formula heating plate upper surface are provided with evaporation shallow slot, and the bottom surface of the evaporation shallow slot is horizontal flat construction, the electricity
Heating tube is embedded in the boat formula heating plate, and the electric heating tube is arranged below the evaporation shallow slot, the fuel feed pump
Oil inlet end connects the oil outlet of the microfluidic control pump, and the oil outlet of the fuel feed pump is connected to the evaporation shallow slot.
2. oil shielding volatilization device according to claim 1, it is characterised in that: the shape of the evaporation shallow slot is horizontal stripe
Shape, the evaporation shallow slot include the curved transition sections of two sides disposed in parallel and connection two sides end.
3. it is according to claim 1 or 2 oil shielding volatilization device, it is characterised in that: it is described evaporation shallow slot depth be
0.5-2mm。
4. oil shielding volatilization device according to claim 3, it is characterised in that: the depth of the evaporation shallow slot is 1mm.
5. according to claim 1,2 or 4 described in any item oil shielding volatilization devices, it is characterised in that: it further includes covering in institute
The nozzle plate above evaporation shallow slot is stated, offers multiple jet ports on the nozzle plate, multiple jet ports are transversely arranged on
On the nozzle plate, the left and right sides on the outside of each jet port is provided with vertical retaining wall, each jet port outside
Front and rear sides be open design.
6. oil shielding volatilization device according to claim 5, it is characterised in that: the nozzle plate includes lateral plate and sets
The steam groove in the middle part of the lateral plate is set, the surface of the evaporation shallow slot, the steaming is arranged in the steam groove
Vapour groove is in the horizontal stripe shape of uniform throughout, and the section of the steam groove is to be bent upwards arc-shaped, multiple jet ports
It is provided with the slot bottom of the steam groove.
7. oil shielding volatilization device according to claim 6, it is characterised in that: the left and right ends of the steam groove and institute
Lateral plate is stated to be smoothly connected by cambered surface.
8. oil shielding volatilization device according to claim 6 or 7, it is characterised in that: it further includes pedestal, the pedestal top
Portion is provided with accommodating chamber, and the boat formula heating plate is arranged in the accommodating chamber, and the front and rear sides of the transverse direction plate open up
There are multiple card slots, multiple card slots are symmetrically dispersed in steam groove two sides, the card slot spaced set of every side,
The pedestal front and rear sides correspond to multiple card slots and are respectively arranged with buckle.
9. oil shielding volatilization device according to claim 5, it is characterised in that: the height of the vertical retaining wall is 0.5-
1.5cm。
10. oil shielding volatilization device according to claim 9, it is characterised in that: the height of the vertical retaining wall is 1cm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821403683.5U CN208949384U (en) | 2018-08-29 | 2018-08-29 | A kind of oil shielding volatilization device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821403683.5U CN208949384U (en) | 2018-08-29 | 2018-08-29 | A kind of oil shielding volatilization device |
Publications (1)
Publication Number | Publication Date |
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CN208949384U true CN208949384U (en) | 2019-06-07 |
Family
ID=66736312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201821403683.5U Withdrawn - After Issue CN208949384U (en) | 2018-08-29 | 2018-08-29 | A kind of oil shielding volatilization device |
Country Status (1)
Country | Link |
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CN (1) | CN208949384U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108842134A (en) * | 2018-08-29 | 2018-11-20 | 郑州华晶新能源科技有限公司 | A kind of oil shielding volatilization device |
-
2018
- 2018-08-29 CN CN201821403683.5U patent/CN208949384U/en not_active Withdrawn - After Issue
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108842134A (en) * | 2018-08-29 | 2018-11-20 | 郑州华晶新能源科技有限公司 | A kind of oil shielding volatilization device |
CN108842134B (en) * | 2018-08-29 | 2024-01-16 | 郑州华晶新能源科技有限公司 | Oil shielding volatilizing device |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20190607 Effective date of abandoning: 20240116 |
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AV01 | Patent right actively abandoned |
Granted publication date: 20190607 Effective date of abandoning: 20240116 |
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AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |