CN208948862U - A kind of silicon powder recycling dust-extraction unit - Google Patents
A kind of silicon powder recycling dust-extraction unit Download PDFInfo
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- CN208948862U CN208948862U CN201821514051.6U CN201821514051U CN208948862U CN 208948862 U CN208948862 U CN 208948862U CN 201821514051 U CN201821514051 U CN 201821514051U CN 208948862 U CN208948862 U CN 208948862U
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Abstract
The utility model discloses a kind of silicon powder recycling dust-extraction unit, including sequentially connected reacting furnace, cyclone separator, deduster, silicon powder tank, it further include silicon powder separating and reclaiming device and silicon powder bag, silicon powder separating and reclaiming device entrance and the outlet of silicon powder tank connect, the outlet of silicon powder separating and reclaiming device is connect with silicon powder bag, is additionally provided with gas vent on silicon powder separating and reclaiming device.The present apparatus passes through multi-stage separation dedusting, the different silicon powder of partial size as far as possible in collection system, and by adding silicon powder separating and reclaiming device in silicon powder tank discharge port, effectively avoid the waste of the fugitive dust and silicon powder in discharge process, the degree that recycles of raw materials for production is improved, while being also advantageous for the health of operating personnel.
Description
Technical field
The utility model relates to polysilicon preparation field, in particular to a kind of silicon powder recycles dust-extraction unit.
Background technique
Polysilicon is the basic material for manufacturing the solar battery sheet of photovoltaic power generation.Meanwhile with electronic-grade polycrystalline silicon be original
The monocrystalline silicon of material production is the basic material of electronics and information industry, is production large scale integrated circuit, semiconductor resolution element, electricity
The raw material of power electronic device.Polysilicon production process has 70% or more to use improved Siemens in the world at present.So-called west
Men Zifa, the also referred to as hydrogen reduction of trichlorosilane are that one kind generates polysilicon by the way that chemical reaction occurs in reduction furnace
Method.
The synthesis step of trichlorosilane is to use steam drying after being crushed to 80~120 mesh using industrial silica fume, through silicon powder meter
Boiling batch hopper is added in measuring tank, is passed through hydrogen chloride gas for silicon powder and brings fluidized bed furnace into, generates SiHCl in boiling reaction in furnace3, together
Shi Shengcheng SiCl4、SiH2Cl2, metal chloride, polychlorostyrene silane, the components such as hydrogen synthesis gas, synthesis gas is at the top of synthetic furnace
Out, it is sent into wet method dedusting system after removing part entrainment silicon powder into dry-dedusting system, removes the tiny silica dust in gas,
Part of the metal oxide contained by water decomposition gas, synthesis gas is sent to synthesis air drying separation process after purification.
And in SiHCl3During dry method dust, tiny silicon powder can not be completely removed in this step, and recycle
The part silicon powder arrived is easy to raise in silicon powder tank discharge process, leads to the waste of dust pollution and silicon powder.
Utility model content
In view of this, the present invention provides a kind of silicon powders to recycle dust-extraction unit, passes through multi-stage separation dedusting, as far as possible hand
The different silicon powder of partial size in machine system, and by adding silicon powder separating and reclaiming device in silicon powder tank discharge port, effectively avoid
The waste of fugitive dust and silicon powder in discharge process, improves the degree that recycles of raw materials for production, while being also advantageous for making
The health of industry personnel.
In order to solve the above technical problems, the technical solution of the utility model is a kind of silicon powder recycling dust-extraction unit, including according to
Reacting furnace, cyclone separator, deduster, the silicon powder tank of secondary connection further include silicon powder separating and reclaiming device and silicon powder bag, silicon powder point
It is connected from recyclable device entrance and the outlet of silicon powder tank, the outlet of silicon powder separating and reclaiming device is connect with silicon powder bag, silicon powder separation and recovery
Gas vent is additionally provided on device.
Preferably, silicon powder separating and reclaiming device is that silicon powder separates and recovers chamber, silicon powder separation and recovery chamber include cavity with
And the damping fin of portion two sides in the cavity is set.
Preferably, the cavity of silicon powder separation and recovery chamber is polyhedron, and normal section is hexagon.
Preferably, the damping fin of cavity two sides tilts down, the damping fin on the left of cavity and the damping fin phase on the right side of cavity
It is mutually arranged in a crossed manner.
Preferably, damping fin is detachably connected with cavity wall, and damping fin is multiple groups, the damping of two sidewalls opposite position
Piece is one group, and more preferably damping fin is 2-3 group.
Preferably, above-mentioned silicon powder recycling dust-extraction unit further includes sink, and sink is separated and recovered by exhaust hose and silicon powder
Gas vent connection on device, gas vent are set to silicon powder separation and recovery chamber outside top.Sink separates back for receiving silicon powder
The reaction gas being separated in receiving apparatus.
Preferably, cyclone separator includes being sequentially connected the first cyclone separator and the second cyclone separator, the first whirlwind
Separator is connect with reacting furnace, and the second cyclone separator is connect with deduster.
Preferably, silicon powder bag is also connect with return flow line, and return flow line is connected to silicon powder bag and reacting furnace, for what will be recycled
Silicon powder is back in reacting furnace that the reaction was continued.
More preferably, above-mentioned silicon powder recycling dust-extraction unit further includes heat exchanger, the entrance of heat exchanger with react outlet of still
Connection, heat exchanger exit are connect with the first cyclone inlet.
The utility model provides a kind of silicon powder recycling dust-extraction unit, including sequentially connected reacting furnace, cyclone separator,
Deduster, silicon powder tank, silicon powder bag.Cyclone separator is two-stage separator, including the first separator and the second separator, reacting furnace
The gas of generation, successively by two stage cyclone separator and deduster, has collected the biggish silicon of partial particulate entrainment of silicon powder
Powder has achieved the purpose that preliminary dust removal.
In the exit of silicon powder tank, it is also provided with silicon powder separating and reclaiming device, silicon powder separating and reclaiming device is one hollow
Cavity, in the cavity wall two sides be provided with multiple groups damping fin, can effectively increase the contact area of silicon powder and cavity, so that silicon
The lesser silicon powder of particle is able to separate in cavity with gas componant in powder, falls into following silicon powder bag, and the gas isolated
Body, which then passes through gas vent and is passed through sink, to be absorbed.
The utility model provides a kind of silicon powder recycling dust-extraction unit, and grain diameter is different in effective recycling generating process
Silicon powder increases silicon powder separation and recovery chamber, avoids dust pollution, and effectively especially during silicon powder tank discharging
Silicon powder has been recycled, the safety of production is improved, has also improved the producing level of raw materials for production.
Detailed description of the invention
Fig. 1, utility model device figure.
Specific embodiment
In order to make those skilled in the art more fully understand the technical solution of the utility model, below with reference to specific implementation
The utility model is described in further detail for mode.
Polysilicon is the basic material for manufacturing the solar battery sheet of photovoltaic power generation.Meanwhile with electronic-grade polycrystalline silicon be original
The monocrystalline silicon of material production is the basic material of electronics and information industry, is production large scale integrated circuit, semiconductor resolution element, electricity
The raw material of power electronic device.Polysilicon production process has 70% or more to use improved Siemens in the world at present.So-called west
Men Zifa, the also referred to as hydrogen reduction of trichlorosilane are that one kind generates polysilicon by the way that chemical reaction occurs in reduction furnace
Method.The raw material of the production method is trichlorosilane and hydrogen.When temperature is 1 050~1 150 DEG C, trichlorosilane and hydrogen
Following reaction: SiHCl mainly occurs in reduction furnace for gas3+H2=Si+3HCl, this is a kind of hydrogen reduction reaction.
The synthesis step of trichlorosilane is to use steam drying after being crushed to 80~120 mesh using industrial silica fume, through silicon powder meter
Boiling batch hopper is added in measuring tank, is passed through hydrogen chloride gas for silicon powder and brings fluidized bed furnace into, generates SiHCl in boiling reaction in furnace3, together
Shi Shengcheng SiCl4、SiH2Cl2, metal chloride, polychlorostyrene silane, the components such as hydrogen synthesis gas, synthesis gas is at the top of synthetic furnace
Out, it is sent into wet method dedusting system after removing part entrainment silicon powder into dry-dedusting system, removes the tiny silica dust in gas,
Part of the metal oxide contained by water decomposition gas, synthesis gas is sent to synthesis air drying separation process after purification.
And in SiHCl3During dry method dust, tiny silicon powder can not be completely removed in this step, and recycle
The part silicon powder arrived is easy to raise in silicon powder tank discharge process, leads to the waste of dust pollution and silicon powder.
The utility model provides a kind of silicon powder recycling dust-extraction unit, and grain diameter is different in effective recycling generating process
Silicon powder increases silicon powder separation and recovery chamber, avoids dust pollution, and effectively especially during silicon powder tank discharging
Silicon powder has been recycled, the safety of production is improved, has also improved the producing level of raw materials for production.
Embodiment
The present embodiment device includes with flowering structure: reacting furnace 1, into pipe 1.1, outlet pipe 1.2, heat exchanger 9, the first whirlwind
Separator 2, the second cyclone separator 3, deduster 4, silicon powder tank 5, silicon powder separation and recovery chamber 6, cavity 6.1, damping fin 6.2, row
Stomata 6.3, sink 8, silicon powder bag 7.
The silicon powder of the present embodiment recycles dust-extraction unit, including sequentially connected reacting furnace 1, cyclone separator, deduster 4,
Silicon powder tank 5, silicon powder bag 7, be provided on reacting furnace it is cooling enter pipe 1.1 and outlet pipe 1.2, silicon powder tank and silicon powder bag it
Between be additionally provided with silicon powder separating and reclaiming device, silicon powder separating and reclaiming device is substantially a silicon powder separation and recovery chamber 6, reclaiming chamber
Entrance and the outlet of silicon powder tank connect, and the outlet of reclaiming chamber is connect with silicon powder bag, is additionally provided with gas vent in reclaiming chamber outside top
6.3.Reclaiming chamber includes cavity 6.1 and the damping fin 6.2 that portion two sides in the cavity are arranged.Cavity is polyhedron, normal section
For hexagon.The damping fin of cavity two sides tilts down, and the damping fin on the right side of damping fin and cavity on the left of cavity intersects
Setting.Damping fin is detachably connected with cavity wall, and the damping fin of two sidewalls opposite position is one group, and damping fin is 2-3 group.
Gas vent is connected to by exhaust hose with sink, and sink is for receiving the reaction gas being separated in silicon powder separating and reclaiming device.
The cyclone separator of the present embodiment is two-stage separator, including is sequentially connected the first cyclone separator 2 and the second rotation
Wind separator 3, the first cyclone separator are connect with reacting furnace, and the second cyclone separator is connect with deduster.
The present embodiment silicon powder bag is also connect with return flow line, and return flow line is connected to silicon powder bag and reacting furnace, for that will recycle
Silicon powder be back in reacting furnace that the reaction was continued.There are also heat exchanger, the entrances of heat exchanger between reacting furnace and cyclone separator
It is connect with reaction outlet of still, heat exchanger exit is connect with the first cyclone inlet.Heat exchanger is used for generating in reacting furnace
Compounding substances carry out cooling heat exchange.
When the present apparatus is run, the gas that reacting furnace generates successively passes through two stage cyclone separator and dedusting entrainment of silicon powder
Device has collected the biggish silicon powder of partial particulate, has achieved the purpose that preliminary dust removal.In the exit of silicon powder tank, silicon powder separation
Multiple groups damping fin in reclaiming chamber can effectively increase the contact area of silicon powder and cavity, so that the lesser silicon of particle in silicon powder
Powder is able to separate in cavity with gas componant, falls into following silicon powder bag, and the silicon powder being recovered to can return in reacting furnace
It recycles, can also collect as other purposes, and the gas isolated then passes through gas vent is passed through sink and is absorbed.
Above are merely preferred embodiments of the utility model, it is noted that above-mentioned preferred embodiment should not regard
For limitations of the present invention, the protection scope of the utility model should be defined by the scope defined by the claims..For
For those skilled in the art, without departing from the spirit and scope of the utility model, it can also make several
Improvements and modifications, these improvements and modifications also should be regarded as the protection scope of the utility model.
Claims (9)
1. a kind of silicon powder recycles dust-extraction unit, including sequentially connected reacting furnace, cyclone separator, deduster, silicon powder tank, special
Sign is, further includes silicon powder separating and reclaiming device and silicon powder bag, and the silicon powder separating and reclaiming device entrance and the outlet of silicon powder tank connect
It connects, the silicon powder separating and reclaiming device outlet is connect with silicon powder bag, is additionally provided with gas vent on the silicon powder separating and reclaiming device.
2. silicon powder according to claim 1 recycles dust-extraction unit, which is characterized in that the silicon powder separating and reclaiming device is silicon
Powder separates and recovers chamber, and the silicon powder separation and recovery chamber includes cavity and the damping fin that portion two sides in the cavity are arranged.
3. silicon powder according to claim 2 recycles dust-extraction unit, which is characterized in that the cavity is polyhedron.
4. silicon powder according to claim 3 recycles dust-extraction unit, which is characterized in that the damping fin of the cavity two sides is downward
Inclination, the damping fin on the right side of damping fin and cavity on the left of the cavity intersect setting.
5. silicon powder according to claim 4 recycles dust-extraction unit, which is characterized in that the damping fin and cavity wall are removable
Connection is unloaded, the damping fin is multiple groups.
6. silicon powder according to claim 5 recycles dust-extraction unit, which is characterized in that further include sink, the sink passes through
Exhaust hose is connected to the gas vent on silicon powder separating and reclaiming device, and the gas vent is set to top on the outside of silicon powder separation and recovery chamber
Portion.
7. silicon powder according to claim 6 recycles dust-extraction unit, which is characterized in that the cyclone separator includes successively connecting
The first cyclone separator and the second cyclone separator are connect, first cyclone separator is connect with reacting furnace, second whirlwind
Separator is connect with deduster.
8. silicon powder according to claim 7 recycles dust-extraction unit, which is characterized in that the silicon powder bag also connects with return flow line
It connects, the return flow line connection silicon powder bag and reacting furnace, for the silicon powder of recycling to be back in reacting furnace, the reaction was continued.
9. silicon powder according to claim 8 recycles dust-extraction unit, which is characterized in that it further include heat exchanger, the heat exchanger
Entrance with reaction outlet of still connect, the heat exchanger exit is connect with the first cyclone inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821514051.6U CN208948862U (en) | 2018-09-14 | 2018-09-14 | A kind of silicon powder recycling dust-extraction unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821514051.6U CN208948862U (en) | 2018-09-14 | 2018-09-14 | A kind of silicon powder recycling dust-extraction unit |
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| Publication Number | Publication Date |
|---|---|
| CN208948862U true CN208948862U (en) | 2019-06-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821514051.6U Active CN208948862U (en) | 2018-09-14 | 2018-09-14 | A kind of silicon powder recycling dust-extraction unit |
Country Status (1)
| Country | Link |
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| CN (1) | CN208948862U (en) |
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2018
- 2018-09-14 CN CN201821514051.6U patent/CN208948862U/en active Active
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