CN208937913U - A kind of wafer development load carrier and developing machine - Google Patents
A kind of wafer development load carrier and developing machine Download PDFInfo
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- CN208937913U CN208937913U CN201821990973.4U CN201821990973U CN208937913U CN 208937913 U CN208937913 U CN 208937913U CN 201821990973 U CN201821990973 U CN 201821990973U CN 208937913 U CN208937913 U CN 208937913U
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Abstract
The utility model provides a kind of wafer development load carrier and developing machine, belongs to developing technique field.It includes movable component；It is used to support the fixation kit of movable component, movable component is movably mounted on fixation kit；For driving movable component to carry out mobile driving assembly on fixation kit, driving assembly and movable component are sequentially connected.Automation apparatus of the device for wafer is cleaned, and structure is simple and easy to use.
Description
Technical field
The utility model relates to developing technique field more particularly to a kind of wafer development load carriers and developing machine.
Background technique
Tank development machine is that wafer is placed in developer liquids, will be passed through using the chemical reaction of developer solution and photoresist
The equipment that the crystal column surface figure of exposure is removed or retained needs up and down to move wafer by a small margin in developing process, to reach more
Good development effect.
Currently, use more tank development machine is mostly manual, design structure existing defects personnel lift development manually,
Increase employee work amount, working strength；Meanwhile frequently being developed with manual lifting and being easy fatigue operation, product quality is not only influenced,
There is also some potential safety problemss.
Utility model content
The purpose of this utility model is to provide a kind of wafer development load carrier and developing machines, it is intended to solve the prior art
In developing machine in manually lifting develop time-consuming and laborious problem.
To achieve the above object, the technical solution of the utility model is:
A kind of wafer development load carrier, the wafer development load carrier include:
Movable component；
It is used to support the fixation kit of the movable component, the movable component is movably mounted at the fixation kit
On；
For driving the movable component to carry out mobile driving assembly on the fixation kit, the driving component with
The movable component transmission connection.
As a kind of technical solution of the utility model, the fixation kit includes:
It is used to support the limiting bracket of the movable component, the movable component is movably mounted at the limiting bracket
On；
It is used to support the locating support of the limiting bracket, the limiting bracket and the driving component are pacified with being respectively separated
On the locating support.
According to the wafer of the utility model embodiment development load carrier, driven by the motor in driving assembly eccentric
Wheel pushes hanging basket, hanger, fixed block, supporting support, crossbeam, column, link block, linear motion axis in movable component with baffle
Hold and bearing block where whole adjustable shelf and connection frame realize and pump on feed rod in limiting bracket.
Meanwhile driving assembly and hanging basket of the motor with movable eccentric wheel and where baffle, hanger, fixed block, supporting support, crossbeam, column,
Link block, linear motion bearing, adjustable shelf whole where bearing block and connection frame be placed in bottom plate, support plate, transverse plate,
Where longitudinal plate, feed rod, side plate, feed rod fixed plate on whole limiting bracket, thus ensure that the entirety of this mechanical device
Stability.It is dual to ensure that entire mechanism in addition, motor is installed in the main body of tank development machine in such a way that bolt is fixed
Stability；Secondly, all components where the automatic rotating machine tool hanging basket of wafer cleaning are all made of welding and the fixation of bolt
Mode, it is ensured that integral installation and disassembling section are convenient and efficient, time saving and energy saving.Meanwhile the device makes in tank development machine
Mechanical automation campaign is realized in wafer development lifting, and the wafer in developer liquids is carried out moving by a small margin up and down for mechanical automation
It is dynamic, better development effect can be reached；This kind of design structure is lifted by mechanical automation develops, and reduces employee work amount
And working strength, development quality is not only increased, and operation is convenient and safe.
In addition, also there is following additional technology for wafer development load carrier according to the utility model embodiment
Feature:
As a kind of technical solution of the utility model, the locating support includes bottom plate and support plate, the support plate,
The limiting bracket and the driving component are mounted on the bottom plate with being respectively separated.
According to the positioning rack structure, the effect for supporting entire limit assembly and movable component can be realized, so that this machine
The stability of tool device is stronger firmer.
As a kind of technical solution of the utility model, the limiting bracket includes feed rod, side plate and feed rod fixed plate,
The feed rod and the side plate are mounted on to parallel interval on the bottom plate respectively, the both ends of the feed rod respectively with the bottom
Plate, feed rod fixed plate connection.
According to the overall structure of the limiting bracket, motor, eccentric wheel and baffle can be played certain limit and
The effect of positioning, and linear bearing seat is pumped on feed rod, and then realize entire hanging basket, hang
The movement of frame, so that mechanical automation campaign is realized in the wafer development lifting in tank development machine, by the wafer in developer liquids
Moving by a small margin up and down for mechanical automation is carried out, better development effect can be reached；This kind of design structure passes through machinery certainly
Dynamicization lifting development, reduces employee work amount and working strength, not only increases development quality, and operates convenient and peace
Entirely.
As a kind of technical solution of the utility model, the driving component includes motor, eccentric wheel and baffle, described
One end of motor and the eccentric wheel are sequentially connected, and the baffle is mounted on the eccentric wheel, the eccentric wheel and the work
Dynamic component transmission connection.
By the operating of the motor, the rotation with movable eccentric wheel and baffle, and then drive linear bearing seat on feed rod
It pumps, so that entire hanging basket and hanger be driven to be moved, realizes the effect of mechanical automation lifting development.
As a kind of technical solution of the utility model, the driving component further includes transverse plate and longitudinal plate, the cross
It is mounted on the bottom plate to plate, and is connect with the side of the longitudinal plate in parallel；The longitudinal plate is vertically installed at institute
It states on bottom plate, and between the support plate and the limiting bracket；The motor is mounted in the longitudinal plate, and with institute
State eccentric wheel transmission connection.
The transverse plate and longitudinal plate are used to support entire electric machine structure, so that whole device is more stable and firm
Gu.
As a kind of technical solution of the utility model, the movable component includes adjustable shelf and connection frame, the activity
Frame is movably mounted on the limiting bracket, and is sequentially connected with the driving component, the connection frame and the activity
Frame connection.
As a kind of technical solution of the utility model, the adjustable shelf includes link block, bearing block and linear motion
Bearing；The bearing block is movably mounted on the limiting bracket, and is connect with the link block；The link block and institute
State connection frame connection；The linear motion bearing is mounted on the bearing block.
By abutting the link block with eccentric wheel, baffle, and then when motor operating, pass through driving eccentric wheel rotation
Link block movement is driven, so that the linear bearing seat that driving is connected to link block pumps on feed rod, into
And hanging basket is driven to move.
As a kind of technical solution of the utility model, the connection frame include hanger, fixed block, supporting support, crossbeam,
Column and the hanging basket cleaned automatically for wafer；The column is connect with the link block；The both ends of the crossbeam respectively with
The column, hanger connection, the both ends of the supporting support are connect with the column, the hanger respectively；The fixation
Block is mounted on the hanger, and respectively with the supporting support, the beam welding；The hanging basket is connect with the hanger；
The supporting support and the crossbeam parallel interval are arranged, and the column and the hanger parallel interval are arranged.
The barrel structure is the automatic rotating machine tool of wafer cleaning, is realized in tank development machine by the movement of hanging basket
Mechanical automation campaign is realized in wafer development lifting, and the wafer in developer liquids is carried out moving by a small margin up and down for mechanical automation
It is dynamic, better development effect can be reached；This kind of design structure is lifted by mechanical automation develops, and reduces employee work amount
And working strength, development quality is not only increased, and operation is convenient and safe.
A kind of developing machine, the developing machine include above-described wafer development load carrier.
Developing machine with above-mentioned wafer development load carrier, uses enhanced convenience, operates also more just
It is prompt.
The beneficial effects of the utility model are:
The present apparatus provides a kind of wafer development load carrier, the cleaning wafer for mechanical automation comprising activity
Component；It is used to support the fixation kit of the movable component, the movable component is movably mounted on the fixation kit；
For driving the movable component to carry out mobile driving assembly, the driving component and the activity on the fixation kit
Component transmission connection.Wafer development load carrier pushes work with baffle by the motor band movable eccentric wheel in driving assembly
Hanging basket, hanger, fixed block, supporting support, crossbeam, column, link block, linear motion bearing and bearing block institute in dynamic component
It realizes in whole adjustable shelf and connection frame and pumps on the feed rod in limiting bracket.Meanwhile motor drives
Driving assembly and hanging basket, hanger, fixed block, supporting support, crossbeam, column, link block, straight line where eccentric wheel and baffle are transported
Dynamic bearing, adjustable shelf whole where bearing block and connection frame be placed in bottom plate, support plate, transverse plate, longitudinal plate, feed rod,
Where side plate, feed rod fixed plate on whole limiting bracket, to ensure that the whole stability of this mechanical device.In addition,
Motor is installed in the main body of tank development machine in such a way that bolt is fixed, the dual stability that ensure that entire mechanism；Secondly,
All components where the automatic rotating machine tool hanging basket of wafer cleaning are all made of the fixed form of welding and bolt, it is ensured that whole
Installation and disassembling section are convenient and efficient, time saving and energy saving.Meanwhile the device makes the development lifting of the wafer in tank development machine real
Wafer in developer liquids is carried out moving by a small margin up and down for mechanical automation, can reached more by existing mechanical automation campaign
Good development effect；This kind of design structure is lifted by mechanical automation develops, and reduces employee work amount and working strength,
Development quality is not only increased, and operation is convenient and safe.
The utility model provides a kind of developing machine by above-mentioned design, which has above-mentioned wafer development carrying machine
Structure has the characteristics that structure is simple and easy to use.
Detailed description of the invention
It, below will be to required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
The attached drawing used is briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore not
It should be considered as the restriction to range, for those of ordinary skill in the art, without creative efforts,
It can also be obtained according to these attached drawings other relevant attached drawings.
Fig. 1 is the structural schematic diagram of wafer provided by the embodiment of the utility model development load carrier；
Fig. 2 is wafer provided by the embodiment of the utility model development load carrier first angle schematic diagram；
Fig. 3 is structural diagram of base plate provided by the embodiment of the utility model；
Fig. 4 is supporting plate structure schematic diagram provided by the embodiment of the utility model；
Fig. 5 is lateral plate structure schematic diagram provided by the embodiment of the utility model；
Fig. 6 is feed rod fixed plate structure schematic diagram provided by the embodiment of the utility model；
Fig. 7 is eccentric wheel structure schematic diagram provided by the embodiment of the utility model；
Fig. 8 is eccentric wheel first angle schematic diagram provided by the embodiment of the utility model；
Fig. 9 is transverse plate structural schematic diagram provided by the embodiment of the utility model；
Figure 10 is longitudinal plate structural schematic diagram provided by the embodiment of the utility model；
Figure 11 is connecting block structure schematic diagram provided by the embodiment of the utility model；
Figure 12 is barrel structure schematic diagram provided by the embodiment of the utility model；
Figure 13 is hanger structure schematic diagram provided by the embodiment of the utility model；
Figure 14 is fixed-block-architecture (FBA) schematic diagram provided by the embodiment of the utility model；
Figure 15 is beam structure schematic diagram provided by the embodiment of the utility model；
Figure 16 is pillar construction schematic diagram provided by the embodiment of the utility model.
Icon: 1- wafer development load carrier；2- movable component；3- fixation kit；4- driving assembly；5- limiting bracket；
6- locating support；7- bottom plate；8- support plate；9- feed rod；10- side plate；11- feed rod fixed plate；12- eccentric wheel；13- baffle；14-
Transverse plate；15- longitudinal plate；16- adjustable shelf；17- connection frame；18- link block；19- bearing block；20- linear motion bearing；21-
Hanging basket；22- hanger；23- fixed block；24- crossbeam；25- column.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.
Therefore, requirement is not intended to limit to the detailed description of the embodiments of the present invention provided in the accompanying drawings below
The scope of the utility model of protection, but it is merely representative of the selected embodiment of the utility model.Based in the utility model
Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts, all
Belong to the range of the utility model protection.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present invention, it should be noted that the orientation or positional relationship of the instructions such as term " on ", "lower"
For be based on the orientation or positional relationship shown in the drawings or the utility model product using when the orientation or position usually put
Relationship is merely for convenience of describing the present invention and simplifying the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
In addition, in the present invention unless specifically defined or limited otherwise, fisrt feature on second feature or
Under may include that the first and second features directly contact, may include the first and second features be not direct contact but logical yet
Cross the other characterisation contact between them.Moreover, fisrt feature is on second feature, top and above include fisrt feature
Right above second feature and oblique upper, or first feature horizontal height is merely representative of higher than second feature.Fisrt feature is
Under two features, lower section and fisrt feature included below be directly below and diagonally below the second feature, or be merely representative of fisrt feature
Level height is less than second feature.
In addition, the terms such as term "horizontal", "vertical" are not offered as requiring component abswolute level or pendency, but can be slightly
Low dip.It is not to indicate that the structure has been had to if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical"
It is complete horizontal, but can be slightly tilted.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set
Set ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
Embodiment:
The present embodiment provides one kind in developing machine comprising wafer development load carrier 1, wafer development load carrier 1
It lifts and develops for wafer.
The specific structure of wafer development load carrier 1 is as hereinbefore set forth.
Fig. 1 is please referred to, cooperation is mentioned referring to Fig. 2, wafer development of the wafer development load carrier 1 for mechanical automation
It draws comprising movable component 2 is used to support the fixation kit 3 of movable component 2 and for driving movable component 2 in fixed group
Mobile driving assembly 4 is carried out on part 3；Wherein, movable component 2 is movably mounted on fixation kit 3, driving assembly 4 with
Movable component 2 is sequentially connected.
Wherein, fixation kit 3 includes being used to support the limiting bracket 5 of movable component 2 and being used to support determining for limiting bracket 5
Position bracket 6；Movable component 2 is movably mounted on limiting bracket 5, and limiting bracket 5 and driving assembly 4 are installed with being respectively separated
On locating support 6.
Referring to figure 3., cooperation is referring to Fig. 4, and locating support 6 includes bottom plate 7 and support plate 8, support plate 8, limiting bracket 5 with
And driving assembly 4 is mounted on bottom plate 7 with being respectively separated.By 6 structure of locating support, the entire limit group of support can be realized
The effect of part and movable component 2, so that the stability of this mechanical device is stronger firmer.
Referring to figure 3., bottom plate 7 is that certain thickness steel plate is process, and is opened up on bottom plate 7 there are four bolt fixing hole,
Overall structure is fixed on developing machine equipment body by the bolt fixing hole；Four are also provided on bottom plate 7 to be screwed
The transverse plate 14 of motor is fixed on bottom plate 7 by hole by the threaded securing bores；It is used in addition, being also provided with two on bottom plate 7
The through hole of fixed feed rod 9 and three are used for 10 threaded securing bores of connecting lateral plate.
Referring to figure 4., the V-shaped structure in the longitudinal cross-section of support plate 8, support plate 8 are fixed by bolts in the transverse direction of motor
On plate 14.
Limiting bracket 5 includes 9 fixed plate of feed rod 9, side plate 10 and feed rod, and feed rod 9 and side plate 10 are with distinguishing parallel interval
It is mounted on bottom plate 7, the both ends of feed rod 9 are connect with bottom plate 7,9 fixed plate of feed rod respectively.
Referring to figure 5., cooperation reference Fig. 2, the generally cylindrical structure of feed rod 9, the lower end of feed rod 9 are fixed on bottom plate 7,
Upper end is connected in 9 fixed plate of feed rod；Meanwhile through hole there are three being opened up on side plate 10, side plate 10 is consolidated by the through hole
Fixed is connected on bottom plate 7；Also, the upper end of side plate 10 is also provided with three threaded holes, is consolidated side plate 10 by the threaded hole
Surely it is connected in feed rod fixed plate 11.
Fig. 6 is please referred to, square hole is offered in feed rod fixed plate 11, column 25 is connect by the square hole with 9 fixed plate of feed rod；
Meanwhile opened up in feed rod fixed plate 11 there are two fixed circular hole, the upper end of feed rod 9 is mounted on by feed rod 9 by the fixation circular hole
In fixed plate；In addition, open up in feed rod fixed plate 11 there are three through hole, by the through hole by feed rod fixed plate 11 and side plate
10 connect.
According to the overall structure of the limiting bracket 5, certain limit can be played to motor, eccentric wheel 12 and baffle 13
The effect of position and positioning, and linear bearing seat 19 is pumped on feed rod 9, and then realize entire
The movement of hanging basket 21, hanger 22, so that mechanical automation campaign is realized in the wafer development lifting in tank development machine, by developer solution
Wafer in body carries out moving by a small margin up and down for mechanical automation, can reach better development effect；This kind of design structure
It is lifted and is developed by mechanical automation, reduced employee work amount and working strength, not only increase development quality, Er Qiecao
It is convenient and safe to make.
Fig. 7 is please referred to, referring to Fig. 2 and Fig. 8, driving assembly 4 includes motor, eccentric wheel 12 and baffle 13, motor for cooperation
One end and eccentric wheel 12 be sequentially connected, baffle 13 is mounted on eccentric wheel 12, and eccentric wheel 12 and movable component 2 are sequentially connected.
Referring to figure 2., baffle 13 is circular configuration, opens up that there are three through holes on baffle 13, by the through hole with spiral shell
It tethers the mode connect baffle 13 is fixed on eccentric wheel 12.
Fig. 7 is please referred to, referring to Fig. 2 and Fig. 8, eccentric wheel 12 is cylindrical structure, the stepped knot in longitudinal cross-section for cooperation
Structure.A round through hole is offered on the symmetrical centre of eccentric wheel 12 position on the lower side, and keyway is installed in the circle through hole.
Meanwhile three threaded holes are also provided on eccentric wheel 12, baffle 13 is mounted on eccentric wheel 12 by threaded hole.
By the operating of the motor, the rotation with movable eccentric wheel 12 and baffle 13, and then linear bearing seat 19 is driven to exist
It pumps on feed rod 9, so that entire hanging basket 21 and hanger 22 be driven to be moved, realizes mechanical automation lifting
The effect of development.
Driving assembly 4 further includes transverse plate 14 and longitudinal plate 15, and transverse plate 14 is mounted in parallel on bottom plate 7, and with it is vertical
It is connected to the side of plate 15；Longitudinal plate 15 is vertically installed on bottom plate 7, and between support plate 8 and limiting bracket 5；Electricity
Machine is mounted in longitudinal plate 15, and is sequentially connected with eccentric wheel 12.
Fig. 9 is please referred to, is opened up on transverse plate 14 there are four long hole, transverse plate 14 is fixed on bottom plate 7 by the long hole.
Meanwhile be also provided on transverse plate 14 two fixed support plates 8 through hole and three for fixing the screw thread of longitudinal plate 15
Hole.
Please refer to Figure 10, offered in longitudinal plate 15 for fix a motor be positioned through hole and four motors are fixed
Threaded hole；Meanwhile it being also provided with the through hole for connecting transverse plate 14 thereon.
The transverse plate 14 and longitudinal plate 15 are used to support entire electric machine structure so that whole device more it is stable and
Securely.
Movable component 2 includes adjustable shelf 16 and connection frame 17, and adjustable shelf 16 is movably mounted on limiting bracket 5, and
It is sequentially connected with driving assembly 4, connection frame 17 is connect with adjustable shelf 16.
Adjustable shelf 16 includes link block 18, bearing block 19 and linear motion bearing 20；Bearing block 19 is moveably mounted
It is connect on limiting bracket 5, and with link block 18；Link block 18 is connect with connection frame 17；Linear motion bearing 20 is mounted on axis
It holds on seat 19.
Figure 11 is please referred to, central location long hole is offered on the center of link block 18, which is ladder-like run through
Eccentric wheel 12 is mounted in link block 18 by hole by the long hole.Meanwhile eight are offered on link block 18 for fixed straight line
The through hole of bearing block 19 and four threaded holes for vertical columns 25.
Linear bearing seat 19 determines specific size according to selected ball bushing, and linear bearing seat 19 can be
It is moved up and down on feed rod 9.Meanwhile the end of linear bearing seat 19 is equipped with flange, which plays fixed straight line movement
The effect of ball bearing.
By abutting the link block 18 with eccentric wheel 12, baffle 13, and then when motor operating, by driving eccentric wheel
12 rotate and link block 18 are driven to move, so that the linear bearing seat 19 that driving is connected to link block 18 carries out on feed rod 9
It pumps, and then hanging basket 21 is driven to move.
Connection frame 17 include hanger 22, fixed block 23, supporting support, crossbeam 24, column 25 and for wafer it is automatically clear
The hanging basket 21 washed；Column 25 is connect with link block 18；The both ends of crossbeam 24 are connect with column 25, hanger 22 respectively, supporting support
Both ends connect respectively with column 25, hanger 22；Fixed block 23 is mounted on hanger 22, and respectively with supporting support, crossbeam 24
Welding；Hanging basket 21 is connect with hanger 22；Supporting support and 24 parallel interval of crossbeam are arranged, and column 25 is set with 22 parallel interval of hanger
It sets.
Figure 12 is please referred to, the structure in a rectangular trapezoid of hanging basket 21, the hanging basket 21 of the angle trapezium structure is directly by five surface side plates, 10 structure
It makes, five surface side plates 10 are all made of porous plate welding fabrication, and 10 welding position of side plate is porous plate marginal position；Angle ladder
Without side plate 10 on trapezoidal hypotenuse in the hanging basket 21 of shape structure.
Figure 13 is please referred to, multiple through-holes are offered on hanger 22, by the through-hole by hanger 22 and hanging basket 21, fixed block 23
It connects by bolted connection.
Figure 14 is please referred to, fixed block 23 is welded with crossbeam 24, supporting support respectively；The generally stud knot of fixed block 23
Structure uses square steel welding fabrication.Eight through holes are offered thereon, by the through hole by fixed block 23 and hanger 22 with spiral shell
The mode connect is tethered to connect.
Supporting support is column structure, and supporting support is connect by welding with column 25, fixed block 23.
Figure 15 is please referred to, crossbeam 24 uses square steel welding fabrication, the side that crossbeam 24 and column 25, fixed block 23 pass through welding
Formula connection.
Figure 16 is please referred to, column 25 uses square steel, and column 25 is connect by welding with crossbeam 24, supporting support；
Column 25, has been connect in a manner of bolted by through hole there are four opening up thereon by four through holes with link block 18
Come.
21 structure of hanging basket is the automatic rotating machine tool of wafer cleaning, and tank development machine is realized by the movement of hanging basket 21
In wafer development lifting realize mechanical automation campaign, the wafer in developer liquids is subjected to the small size up and down of mechanical automation
Degree movement, can reach better development effect；This kind of design structure is lifted by mechanical automation develops, and reduces employee's work
Work amount and working strength not only increase development quality, and operation is convenient and safe.
According to the wafer of the utility model embodiment development load carrier 1, driven by the motor in driving assembly 4 inclined
Heart wheel 12 and baffle 13 push hanging basket 21 in movable component 2, hanger 22, fixed block 23, supporting support, crossbeam 24, column 25,
Whole adjustable shelf 16 and connection frame 17 are realized in limiting bracket where link block 18, linear motion bearing 20 and bearing block 19
It pumps on feed rod 9 in 5.Meanwhile motor with where movable eccentric wheel 12 and baffle 13 driving assembly 4 with hang
Basket 21, hanger 22, fixed block 23, supporting support, crossbeam 24, column 25, link block 18, linear motion bearing 20, bearing block 19
The adjustable shelf 16 and connection frame 17 of place entirety are placed in bottom plate 7, support plate 8, transverse plate 14, longitudinal plate 15, feed rod 9, side
Where plate 10, feed rod fixed plate 11 on whole limiting bracket 5, to ensure that the whole stability of this mechanical device.This
Outside, motor is installed in the main body of tank development machine in such a way that bolt is fixed, the dual stability that ensure that entire mechanism；Its
Secondary, all components where the automatic rotating machine tool hanging basket 21 of wafer cleaning are all made of the fixed form of welding and bolt, really
It protects integral installation and disassembling section is convenient and efficient, it is time saving and energy saving.Meanwhile the device makes the wafer in tank development machine develop
Mechanical automation campaign is realized in lifting, and the wafer in developer liquids is carried out moving by a small margin up and down for mechanical automation, can
Reach better development effect；This kind of design structure is lifted by mechanical automation develops, and reduces employee work amount and work
Make intensity, not only increases development quality, and operation is convenient and safe.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (10)
- The load carrier 1. a kind of wafer develops, which is characterized in that the wafer development load carrier includes:Movable component；It is used to support the fixation kit of the movable component, the movable component is movably mounted on the fixation kit；For driving the movable component to carry out mobile driving assembly on the fixation kit, the driving component with it is described Movable component transmission connection.
- The load carrier 2. wafer according to claim 1 develops, it is characterised in that: the fixation kit includes:It is used to support the limiting bracket of the movable component, the movable component is movably mounted on the limiting bracket；It is used to support the locating support of the limiting bracket, the limiting bracket and the driving component are mounted on being respectively separated On the locating support.
- The load carrier 3. wafer according to claim 2 develops, it is characterised in that: the locating support includes bottom plate and branch Fagging, the support plate, the limiting bracket and the driving component are mounted on the bottom plate with being respectively separated.
- The load carrier 4. wafer according to claim 3 develops, it is characterised in that: the limiting bracket includes feed rod, side Plate and feed rod fixed plate, the feed rod and the side plate are mounted on to parallel interval on the bottom plate respectively, the feed rod Both ends are connect with the bottom plate, the feed rod fixed plate respectively.
- The load carrier 5. wafer according to claim 3 develops, it is characterised in that: the driving component includes motor, partially Heart wheel and baffle, one end of the motor and the eccentric wheel are sequentially connected, and the baffle is mounted on the eccentric wheel, institute It states eccentric wheel and the movable component is sequentially connected.
- The load carrier 6. wafer according to claim 5 develops, it is characterised in that: the driving component further includes transverse plate And longitudinal plate, the transverse plate are mounted in parallel on the bottom plate, and are connect with the side of the longitudinal plate；The longitudinal plate It is vertically installed on the bottom plate, and between the support plate and the limiting bracket；The motor is mounted on described In longitudinal plate, and it is sequentially connected with the eccentric wheel.
- The load carrier 7. wafer according to claim 2 develops, it is characterised in that: the movable component include adjustable shelf and Connection frame, the adjustable shelf are movably mounted on the limiting bracket, and are sequentially connected with the driving component, the company Frame is connect to connect with the adjustable shelf.
- The load carrier 8. wafer according to claim 7 develops, it is characterised in that: the adjustable shelf includes link block, axis Hold seat and linear motion bearing；The bearing block is movably mounted on the limiting bracket, and is connected with the link block It connects；The link block is connect with the connection frame；The linear motion bearing is mounted on the bearing block.
- The load carrier 9. wafer according to claim 8 develops, it is characterised in that: the connection frame includes hanger, fixation Block, supporting support, crossbeam, column and the hanging basket cleaned automatically for wafer；The column is connect with the link block；It is described The both ends of crossbeam are connect with the column, the hanger respectively, the both ends of the supporting support respectively with the column, described hang Frame connection；The fixed block is mounted on the hanger, and respectively with the supporting support, the beam welding；The hanging basket It is connect with the hanger；The supporting support and the crossbeam parallel interval are arranged, the column and the hanger parallel interval Setting.
- 10. a kind of developing machine, it is characterised in that: the developing machine includes that the described in any item wafer developments of claim 1 to 9 are held Mounted mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821990973.4U CN208937913U (en) | 2018-11-29 | 2018-11-29 | A kind of wafer development load carrier and developing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821990973.4U CN208937913U (en) | 2018-11-29 | 2018-11-29 | A kind of wafer development load carrier and developing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208937913U true CN208937913U (en) | 2019-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821990973.4U Active CN208937913U (en) | 2018-11-29 | 2018-11-29 | A kind of wafer development load carrier and developing machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109254505A (en) * | 2018-11-29 | 2019-01-22 | 吉林麦吉柯半导体有限公司 | A kind of wafer development load carrier and developing machine |
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2018
- 2018-11-29 CN CN201821990973.4U patent/CN208937913U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109254505A (en) * | 2018-11-29 | 2019-01-22 | 吉林麦吉柯半导体有限公司 | A kind of wafer development load carrier and developing machine |
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