CN208917301U - A kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism - Google Patents
A kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism Download PDFInfo
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- CN208917301U CN208917301U CN201821223557.1U CN201821223557U CN208917301U CN 208917301 U CN208917301 U CN 208917301U CN 201821223557 U CN201821223557 U CN 201821223557U CN 208917301 U CN208917301 U CN 208917301U
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- vacuum chamber
- vacuum
- support rod
- plate
- end plate
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Abstract
The utility model discloses a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanisms, it is fixed below vacuum chamber bottom plate that there are two cylinders, the tailpiece of the piston rod of two cylinders is connected on same end plate, the both ends of the end plate are respectively provided with a support rod, the support rod penetrates vacuum chamber bottom plate and stretches in vacuum chamber, the top connecting support seat of support rod, support rod, which passes through, is equipped with sealing plate at vacuum chamber bottom plate, be cased with bellows outside support rod between vacuum chamber and end plate, the bellows both ends respectively with sealing plate and end plate airtight connection.The disengaging of vacuum environment subtegulum frame and transmission mechanism may be implemented in the elevating mechanism of the utility model, so that the individual transmission of some or the multiple substrate frames in multiple substrate frames may be implemented under vacuum conditions, its course of work is steady, air-tightness is good, not will cause the variation of vacuum degree in whole work process.
Description
Technical field
The utility model relates to technical field of vacuum plating, are a kind of vacuum coating equipment vacuum chamber substrate frame liters specifically
Descending mechanism.
Background technique
Vacuum coating production line is that multiple vacuum chambers are distributed in same level plane, by glass plating in transmission device
Conveying under, handled by each vacuum chamber, realize surface coating.It is existing by glass plating transmission use there are two types of
Transmission mode, one is linear transport mode is used, one end is brought out into one, and another kind is using loopback mode, and disengaging all exists
The same end, but the substrate disengaging of both modes transmission is completed in different vacuum chambers, so that the number of vacuum chamber
Amount increases, and corresponding vacuum-pumping system can obviously increase.Such as to realize under same vacuum chamber environment to multiple substrate frames into
The round-trip individual transmission of row, then need a kind of mechanism that substrate frame can be made to be detached from vacuum chamber with transmission mechanism.
Summary of the invention
For above-mentioned the technical problems existing in the prior art, the utility model provides a kind of vacuum coating equipment vacuum chamber base
The disengaging of vacuum environment subtegulum frame and transmission mechanism may be implemented in horse elevating mechanism.
The technical solution adopted in the utility model is as follows: a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism, true
Fixed there are two cylinder below empty room bottom plate, the tailpiece of the piston rod of two cylinders is connected on same end plate, and the two of the end plate
End is respectively provided with a support rod, and the support rod penetrates vacuum chamber bottom plate and stretches in vacuum chamber, and the top of support rod connects support
Seat, support rod pass through and are equipped with sealing plate at vacuum chamber bottom plate, are cased with bellows, institute outside the support rod between vacuum chamber and end plate
State bellows both ends respectively with sealing plate and end plate airtight connection.
Further, it is connected between the support rod and sealing plate by linear bearing.
Further, it is equipped with guide rod on sealing plate, the guide plate cooperated with guide rod is equipped on support base.
Further, two grooves cooperated with substrate frame are equipped on support base.
The beneficial effects of the utility model are: the elevating mechanism of the utility model may be implemented vacuum environment subtegulum frame with
The disengaging of transmission mechanism, so that some in multiple substrate frames or multiple substrate frames may be implemented under vacuum conditions
Individual transmission, the course of work is steady, and concentricity is high, uses bellows to connect outside vacuum chamber, inside lifting and external lifting
Independent to separate, air-tightness is good, not will cause the variation of vacuum degree in whole work process.
Detailed description of the invention
Fig. 1 is the use state diagram of the utility model.
Fig. 2 is the partial cutaway view of the utility model.
Fig. 3 is the schematic perspective view of the utility model.
Specific embodiment
For the ease of understanding the utility model, below in conjunction with Figure of description and preferred embodiment to the utility model
Work more comprehensively, meticulously describes, but the protection scope of the utility model is not limited to embodiment in detail below.
As shown in Fig. 1-Fig. 3, a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism of the present embodiment, in vacuum chamber
Fixed there are two cylinder 2 below bottom plate 1, the tailpiece of the piston rod of two cylinders 2 is connected on same end plate 3, and the two of the end plate 3
End is respectively provided with a support rod 7, and the support rod 7 penetrates vacuum chamber bottom plate 1 and stretches in vacuum chamber, the top connection of support rod 7
Support base 5, is equipped with two grooves cooperated with substrate frame on support base 5, and support rod 7 passes through at vacuum chamber bottom plate 1 equipped with close
Sealing plate 6 is connected between support rod 7 and sealing plate 6 by linear bearing 8, guide rod 9 is equipped on sealing plate 6, in support base 5
It is equipped with the guide plate 10 cooperated with guide rod 9.Bellows 4, the wave are cased with outside support rod between vacuum chamber and end plate
4 both ends of line pipe respectively with 3 airtight connection of sealing plate 6 and end plate.
When a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism work of the utility model, two groups of cylinders stretch out simultaneously
Or shrink, it drives bellows to stretch or shrink and internal support rod is down or up, support base straight line above and below guide rod is transported
Dynamic, support base rising, which can jack up substrate frame, is detached from substrate frame and transmission mechanism, and support base decline then comes back to substrate frame
Transmission mechanism.
With the help of the introduction present in aforementioned specification and relevant drawings, the technology people of the utility model fields
Member will be appreciated that many modifications and other embodiments of the utility model.It will consequently be understood that the utility model is not limited to
Disclosed specific embodiment, modification and other embodiments are to be considered as included in scope of the appended claims.Although this
Specific term is used in text, they are only used with generic and descriptive sense, rather than limitation.
Claims (4)
1. a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism, it is characterised in that: be fixed with two below vacuum chamber bottom plate
A cylinder, the tailpiece of the piston rod of two cylinders are connected on same end plate, and the both ends of the end plate are respectively provided with a support rod, described
Support rod penetrates vacuum chamber bottom plate and stretches in vacuum chamber, the top connecting support seat of support rod, and support rod passes through vacuum chamber bottom
Be equipped with sealing plate at plate, be cased with bellows outside the support rod between vacuum chamber and end plate, the bellows both ends respectively with it is close
Sealing plate and end plate airtight connection.
2. a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism as described in claim 1, it is characterised in that: the support
It is connected between bar and sealing plate by linear bearing.
3. a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism as described in claim 1, it is characterised in that: in sealing plate
It is equipped with guide rod, the guide plate cooperated with guide rod is equipped on support base.
4. a kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism as described in claim 1, it is characterised in that: in support base
It is equipped with two grooves cooperated with substrate frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821223557.1U CN208917301U (en) | 2018-07-31 | 2018-07-31 | A kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821223557.1U CN208917301U (en) | 2018-07-31 | 2018-07-31 | A kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208917301U true CN208917301U (en) | 2019-05-31 |
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ID=66701931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821223557.1U Active CN208917301U (en) | 2018-07-31 | 2018-07-31 | A kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208917301U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108774731A (en) * | 2018-07-31 | 2018-11-09 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism |
-
2018
- 2018-07-31 CN CN201821223557.1U patent/CN208917301U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108774731A (en) * | 2018-07-31 | 2018-11-09 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum coating equipment vacuum chamber substrate frame elevating mechanism |
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