CN208895832U - A kind of CMP planarization equipment clamping device - Google Patents
A kind of CMP planarization equipment clamping device Download PDFInfo
- Publication number
- CN208895832U CN208895832U CN201821727211.5U CN201821727211U CN208895832U CN 208895832 U CN208895832 U CN 208895832U CN 201821727211 U CN201821727211 U CN 201821727211U CN 208895832 U CN208895832 U CN 208895832U
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- CN
- China
- Prior art keywords
- electric pushrod
- workbench
- clamping device
- cmp planarization
- fixture block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a kind of CMP planarization equipment clamping devices, including workbench, the worktable upper surface side is welded with baffle, one end of the baffle has been bolted the second electric pushrod, clamping plate has been bolted in the telescopic end of second electric pushrod, the table surface side offers through slot, the other side of the workbench offers sliding slot, the inside of the sliding slot is placed with connecting plate, the CMP planarization equipment clamping device, side above workbench is provided with the second electric pushrod, two clamping plates are pushed by corresponding two the second electric pushrods, then the object processed will be needed to be placed between two clamping plates, until by object to clamping, and then facilitate fixation of the operator to object, since clamping plate is as made of two snap-gauges and spring assembly, and then in the mistake of clamping Cheng Zhong plays the role of a buffering during clamping.
Description
Technical field
The utility model relates to materials processing technology field, specially a kind of CMP planarization equipment clamping device.
Background technique
A kind of CMP planarization equipment uses positioning fixture as a kind of clamping device applied on semiconductor transistor elements material,
It is being continuously updated and is improving, when being processed by shot blasting using CMP planarization equipment to materials such as semiconductor chips, the weight of acquirement
Ten-strike and breakthrough, for a part the reason is that because of the innovation and progress of technology, another part reason is exactly because of a kind of CMP planarization
The use of equipment locating and clamping apparatus, so that it is more stable to the clamping of semiconductor transistor elements material, to improve product
The success rate of quality and polishing.
The existing clamping device for CMP planarization equipment has the following problems during use: due to partly leading
There are many kinds for body wafer material, and semiconductor transistor elements material shape is had nothing in common with each other, and during polishing it, needs to use
To different types of fixed device, so that it is very cumbersome to operate.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of CMP planarization equipment clamping device, and having can be solid
It the advantages that fixed semiconductor transistor elements material of different shapes, solves the existing clamping device for CMP planarization equipment and is using
Existing following problems in the process: since there are many kinds for semiconductor transistor elements material, and semiconductor transistor elements material shape is had nothing in common with each other,
During polishing to it, need to use different types of fixed device, so that it is very cumbersome to operate
The problem of.
To realize above-mentioned fixation semiconductor transistor elements material purpose of different shapes, the utility model provides following technical side
Case: a kind of CMP planarization equipment clamping device, including workbench, the worktable upper surface side are welded with baffle, the gear
One end of plate has been bolted the second electric pushrod, and folder has been bolted in the telescopic end of second electric pushrod
Plate, the table surface side offer through slot, and the other side of the workbench offers sliding slot, and the inside of the sliding slot is put
It is equipped with connecting plate, the side of the connecting plate has been screwed the first electric pushrod, first electric pushrod
Telescopic end has the second fixture block by screw connection, and the telescopic end of another first electric pushrod has first by screw connection
Fixture block, the front surface of the workbench offers threaded hole, and threaded hole is connected with sliding slot, and adjusting screw rod is screwed into the cunning
The inside of slot, and one end of adjusting screw rod is welded and fixed together with connecting plate, second electric pushrod and first electronic push away
Bar is electrically connected with the power supply.
Preferably, the clamping plate includes two snap-gauges and the first spring, wherein the middle position of two snap-gauges is provided with
First spring, and the both ends of the first spring are fixed together with snap-gauge by rivet respectively.
Preferably, the side of second fixture block and first fixture block offers semi-circular recesses, second folder
One side surface of block integrally formed with card slot, a side surface of first fixture block integrally formed with card column, and the card column with
The card slot is fixed.
Preferably, the semi-circular recesses are internally provided with intermediate plate, and pass through second between intermediate plate and semi-circular recesses
Spring is fixedly connected.
Preferably, the lower surface of the snap-gauge and the first spring is welded with sliding block, and sliding block is slidably connected with through slot.
Preferably, the corner of the lower surface of the workbench four is fixed with footing, and the lower surface of footing by screw
It is bonded with rubber mat.
Compared with prior art, the utility model provides a kind of CMP planarization equipment clamping device, has following beneficial
Effect:
1, the CMP planarization equipment clamping device, is provided with the second electric pushrod by the side above workbench, passes through
Corresponding two the second electric pushrods push two clamping plates, then the object processed will be needed to be placed between two clamping plates,
Until by object to clamping, and then facilitate fixation of the operator to object, since clamping plate is by two snap-gauges and spring assembly
Made of, and then during clamping, play the role of a buffering during clamping, prevents firmly excessive to object
It causes to damage.
2, the CMP planarization equipment clamping device, is provided with the first electric pushrod by the other side in workbench,
The telescopic end of one electric pushrod is connected with the first fixture block and the second fixture block, and a side surface of the first fixture block is provided with card slot, and second
The surface of fixture block is provided with card column, by the flexible of the first electric pushrod telescopic end, until card column is fastened togather with card slot, just
Circular object can be fixed, also offer sliding slot on the surface of workbench, the bottom end of connecting plate is placed on the interior of sliding slot
The side in portion, connecting plate is connected with adjusting screw rod, by turning adjusting screw rod, drives connecting plate to be moved forward and backward, and then adjust two
Distance between a fixture block can fix the circular object of different length.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the utility model overlooking structure diagram；
Fig. 3 is the enlarged structure schematic diagram in the utility model Fig. 1 at a；
Fig. 4 be in the utility model Fig. 2 A-A to structural schematic diagram.
In figure: 1, workbench；2, footing；3, adjusting screw rod；4, threaded hole；5, the first fixture block；6, card column；7, card slot；8,
Second fixture block；9, the first electric pushrod；10, connecting plate；11, clamping plate；111, snap-gauge；112, the first spring；12, it second electronic pushes away
Bar；13, baffle；14, through slot；15, intermediate plate；16, second spring；17, sliding slot.
Specific embodiment
In conjunction with Fig. 1-4, a kind of CMP planarization equipment clamping device, including workbench 1, the welding of 1 upper surface side of workbench
There is baffle 13, one end of baffle 13 has been bolted the second electric pushrod 12, and the telescopic end of the second electric pushrod 12 passes through
It is bolted clamping plate 11,1 surface side of workbench offers through slot 14, and through slot 14 opens up two altogether, and two through slots 14 are in
Lateral position parallelly distribute on, the other side of workbench 1 offer sliding slot 17, and sliding slot 17 opens up two altogether, and two sliding slots 17 are in
Genesis analysis, the inside of sliding slot 17 are placed with connecting plate 10, and the side of connecting plate 10 has been screwed the first electric pushrod
9, the telescopic end of first electric pushrod 9 has the second fixture block 8 by screw connection, another the first electric pushrod 9 stretches
There is the first fixture block 5 at end by screw connection, and the front surface of workbench 1 offers threaded hole 4, and threaded hole 4 is connected with sliding slot 17
Logical, adjusting screw rod 3 is screwed into the inside of sliding slot 17, and one end of adjusting screw rod 3 is welded and fixed together with connecting plate 10, and second
Electric pushrod 12 and the first electric pushrod 9 are electrically connected with the power supply.
Further, clamping plate 11 includes two snap-gauges 111 and the first spring 112, wherein the interposition of two snap-gauges 111
The place of setting is provided with the first spring 112, and the both ends of the first spring 112 are fixed together with snap-gauge 111 by rivet respectively,
The side of second fixture block 8 and the first fixture block 5 offers semi-circular recesses, and a side surface of the second fixture block 8 is integrally formed with card
Slot 7, a side surface of the first fixture block 5 is integrally formed with card column 6, and card column 6 is fixed with card slot 7, semi-circular recesses it is interior
Portion is provided with intermediate plate 15, and is fixedly connected between intermediate plate 15 and semi-circular recesses by second spring 16, in order to enable it is being pressed from both sides
When holding circular object, what can be clamped is tighter, and does not damage circular object itself, under snap-gauge 111 and the first spring 112
Surface is welded with sliding block, and sliding block is slidably connected with through slot 14, and the corner of lower surface four of workbench 1 is fixed by screw
There is footing 2, and the lower surface of footing 2 is bonded with rubber mat, the first electric pushrod 9 and the second electric pushrod 12 in the present embodiment
Model EC2-CA.
Working principle: this is practical install after can use, as operator in use, first according to the shape of object
Shape is selected with that method of clamping, if object is square structure, need to be only placed on the object between two clamping plates 11, then
Two clamping plates 11 are pushed by the second electric pushrod 12 until by the object to clamping, it, can be with since the length of clamping plate 11 is longer
Multiple objects are simultaneously clamped on, then the object is processed simultaneously, greatly improves working efficiency, if object is round knot
Object need to be only placed between the first fixture block 5 and the second fixture block 8 by structure, then by the promotion of the first electric pushrod 9 so that the
Two fixture blocks 8 fit together with the first fixture block 5, until card column 6 snap-fits into the inside of card slot 7, the circular object is tight to fixing,
Can also according to the length of circular object, to turn adjusting screw rod 3, so that internal slide of the connecting plate 10 in sliding slot 17,
The distance in same 17 two connecting plates 10 in inside of sliding slot is adjusted, it is easy to operate to fix the circular object of different length, and function
It can more comprehensively.
Elaborate many details in the above description in order to fully understand the utility model.But above description
It is only the preferred embodiment of the utility model, the utility model can be come with being much different from other way described herein
Implement, therefore the utility model is not limited by specific implementation disclosed above.Any those skilled in the art exist simultaneously
It does not depart under technical solutions of the utility model ambit, it is all practical new to this using the methods and technical content of the disclosure above
Type technical solution makes many possible changes and modifications or equivalent example modified to equivalent change.It is all without departing from this
The content of utility model technical solution any is simply repaired according to the technical essence of the utility model is made to the above embodiment
Change, equivalent variations and modification, in the range of still falling within technical solutions of the utility model protection.
Claims (6)
1. a kind of CMP planarization equipment clamping device, including workbench (1), it is characterised in that: workbench (1) upper surface
Side is welded with baffle (13), and one end of the baffle (13) has been bolted the second electric pushrod (12), and described second
The telescopic end of electric pushrod (12) has been bolted clamping plate (11), and workbench (1) the surface side offers through slot
(14), the other side of the workbench (1) offers sliding slot (17), and the inside of the sliding slot (17) is placed with connecting plate (10),
The side of the connecting plate (10) has been screwed the first electric pushrod (9), and one the first electric pushrod (9) is stretched
Contracting end has the second fixture block (8) by screw connection, and the telescopic end of another first electric pushrod (9) has by screw connection
The front surface of first fixture block (5), the workbench (1) offers threaded hole (4), and threaded hole (4) is connected with sliding slot (17),
Adjusting screw rod (3) screws the inside into the sliding slot (17), and one end of adjusting screw rod (3) is weldingly fixed on connecting plate (10)
Together, second electric pushrod (12) and the first electric pushrod (9) are electrically connected with the power supply.
2. a kind of CMP planarization equipment clamping device according to claim 1, it is characterised in that: clamping plate (11) packet
Include two snap-gauges (111) and the first spring (112), wherein the middle position of two snap-gauges (111) is provided with the first spring
(112), and the both ends of the first spring (112) are fixed together with snap-gauge (111) by rivet respectively.
3. a kind of CMP planarization equipment clamping device according to claim 1, it is characterised in that: second fixture block (8)
Offer semi-circular recesses with the side of first fixture block (5), a side surface of second fixture block (8) integrally formed with
Card slot (7), a side surface of first fixture block (5) is integrally formed with card column (6), and the card column (6) and the card slot (7)
It is fixed.
4. a kind of CMP planarization equipment clamping device according to claim 3, it is characterised in that: the semi-circular recesses
Be internally provided with intermediate plate (15), and be fixedly connected between intermediate plate (15) and semi-circular recesses by second spring (16).
5. a kind of CMP planarization equipment clamping device according to claim 2, it is characterised in that: the snap-gauge (111) with
The lower surface of first spring (112) is welded with sliding block, and sliding block is slidably connected with through slot (14).
6. a kind of CMP planarization equipment clamping device according to claim 1, it is characterised in that: the workbench (1)
The corner of lower surface four is fixed with footing (2) by screw, and the lower surface of footing (2) is bonded with rubber mat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821727211.5U CN208895832U (en) | 2018-10-24 | 2018-10-24 | A kind of CMP planarization equipment clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821727211.5U CN208895832U (en) | 2018-10-24 | 2018-10-24 | A kind of CMP planarization equipment clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208895832U true CN208895832U (en) | 2019-05-24 |
Family
ID=66576742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821727211.5U Expired - Fee Related CN208895832U (en) | 2018-10-24 | 2018-10-24 | A kind of CMP planarization equipment clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208895832U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111346450A (en) * | 2020-04-17 | 2020-06-30 | 深圳市怡盛源净水产业有限公司 | Processing equipment for filter element in air purifier |
-
2018
- 2018-10-24 CN CN201821727211.5U patent/CN208895832U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111346450A (en) * | 2020-04-17 | 2020-06-30 | 深圳市怡盛源净水产业有限公司 | Processing equipment for filter element in air purifier |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190524 Termination date: 20211024 |