CN208844176U - A kind of bar magnet being segmented liquid cooling - Google Patents
A kind of bar magnet being segmented liquid cooling Download PDFInfo
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- CN208844176U CN208844176U CN201821408752.1U CN201821408752U CN208844176U CN 208844176 U CN208844176 U CN 208844176U CN 201821408752 U CN201821408752 U CN 201821408752U CN 208844176 U CN208844176 U CN 208844176U
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- bar magnet
- cooling
- liquid cooling
- magnet body
- intake tunnel
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Abstract
The utility model discloses a kind of bar magnets for being segmented liquid cooling, including bar magnet body, the groove being circumferentially equally spaced there are four setting in the bar magnet external week, magnetic receiver is respectively arranged in each groove, liquid cooling channel is equipped with inside the bar magnet body, the liquid cooling channel includes the cooling duct that main intake tunnel at the bar magnet body center and four are circumferentially distributed in main intake tunnel surrounding, between two neighboring groove, the main intake tunnel is connected with cooling duct by multiple cooling water via holes being equally spaced between the two for each cooling duct.The present apparatus can beat the cooling uniformity for improving bar magnet body.
Description
Technical field
The utility model relates to magnetic control film coating fields, and in particular to a kind of bar magnet.
Background technique
During sputtering technology, most of energy conversion is at heat, it is therefore desirable to carry out to components such as vacuum chamber, cathodes
Water is cooling.But traditional magnetron sputtering plating film cathode device is all cooled down using single-ended water inlet, and cooling water is from one end inflow, then from another
One end outflow exports the temperature difference of cooling water and entrance cooling water up to 20 DEG C, works long hours, permanent magnet and target both ends
Temperature difference also up to 20 DEG C, thus bar magnet along its length on change of magnetic field strength it is larger, Magnetic field inhomogeneity is splashed according to magnetic control
Penetrate principle, the atom of argon ion bombardment target material surface and form film, if target temperature is low, atom needs more bombardments dynamic
It can just sputter out, therefore the difference of target both ends temperature will cause the in uneven thickness of film, to influence the equal of plated film
Even property.
Utility model content
Purpose of the utility model is to solve the deficiencies of the above prior art and provide one kind to be mentioned by sub-sectional cooling
The bar magnet of high cooling uniformity.
A kind of bar magnet being segmented liquid cooling, including bar magnet body set that there are four be circumferentially equally spaced the bar magnet external week
Groove, magnetic receiver is respectively arranged in each groove, is equipped with liquid cooling channel inside the bar magnet body, the liquid cooling channel includes position
Main intake tunnel at bar magnet body center and four are circumferentially distributed in the cooling duct of main intake tunnel surrounding, and described is every
Between two neighboring groove, the main intake tunnel and cooling duct pass through multiple the two that are equally spaced for one cooling duct
Between cooling water via hole be connected.
Preferably, the material of the bar magnet body is stainless steel or aluminium alloy.
Situations such as coolant liquid sputters in order to prevent, leakage further includes the baffle positioned at bar magnet body both ends.
In order to improve the contact area of coolant liquid and tubing, the cross-sectional shape of the cooling duct is sector.
In order to obtain strongest magnetic field strength, accelerate the efficiency of plated film, the magnetic receiver is electrical pure iron magnetic receiver.
Preferably, 2-5 cooling water via hole is provided between the main intake tunnel and each cooling duct.
The utility model has the advantages that
It intakes compared to traditional one end, the design scheme of one end water outlet, the present apparatus cleverly passes through intermediate main water inlet
The setting of the water inlet of cooling duct in middle position and is placed equidistant with multiple by channel, and original monopole curve that cools is beaten
Disorderly at the temperature inversion curve for possessing multiple ebbs, cooling uniformity be that (n is that single cooling is led to for n times of single-ended water inlet system
The quantity of cooling water via hole in road), in actual use, due to the hydraulic pressure at each cooling water via hole is different and cooling water from
Body possesses certain thermal heat transfer capability, so cooling water temperature hot-spot between two adjacent cooling water via holes does not occur
Problem, so this rotating cathode greatly promotes cooling uniformity while guaranteeing cooling efficiency, thus relative to traditional rotation
It turns out cloudy for pole, the uniformity that the utilization rate of target still forms a film all greatly is improved.
Detailed description of the invention
Fig. 1 is the cross-sectional view of the utility model；
Fig. 2 is the main view of the utility model；
1. 2. cooling duct of magnetic receiver, 3. bar magnet body, 4. 6. right baffle-plate of main 5. cooling water via hole of intake tunnel 7. is right
Baffle.
Specific embodiment
In order to deepen the understanding to the utility model, the utility model is made below in conjunction with embodiment and attached drawing further
It is described in detail, which is only used for explaining the utility model, does not constitute the restriction to scope of protection of the utility model.
A kind of bar magnet being segmented liquid cooling, including bar magnet body 3, it is preferable that the material of the bar magnet body is stainless steel or aluminium
Alloy fills in the groove as shown in Figure 1,3 periphery of bar magnet body is set there are four the groove that is circumferentially equally spaced
There is magnetic receiver 1, liquid cooling channel is equipped with inside the bar magnet body, the liquid cooling channel includes the master at 3 center of bar magnet body
Intake tunnel 4 and four are circumferentially distributed in the cooling duct 2 of main intake tunnel surrounding, and the cooling duct 2 is located at adjacent
Between two grooves, it is preferable that the cross-sectional shape of the cooling duct is sector, and the main intake tunnel 4 and cooling are logical
It is connected between road 2 by 2 cooling water via holes 5 being equally distributed between main intake tunnel 4 and cooling duct 2.
As shown in Fig. 2, the bar magnet further includes the baffle positioned at bar magnet body both ends, respectively right baffle-plate 6 and right shell body
7。
This bar magnet periphery is inwardly equipped with two groups of cooling water via holes 5 altogether, and (one group there are four cooling water via hole, four cooling water mistakes
Hole is connected with four cooling ducts respectively), being filled at cooling duct 2 and 3 periphery of bar magnet body again prevents leak with copper plug, cold
But uniformity can be improved 2 times or so compared to traditional single-ended intake design.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (5)
1. a kind of bar magnet for being segmented liquid cooling, which is characterized in that including bar magnet body, set in the bar magnet external week there are four circumferentially
The groove being equally spaced is respectively arranged with magnetic receiver in each groove, liquid cooling channel is equipped with inside the bar magnet body, and the liquid cooling is logical
Road includes the cooling duct that main intake tunnel at the bar magnet body center and four are circumferentially distributed in main intake tunnel surrounding,
Between two neighboring groove, the main intake tunnel and cooling duct pass through multiple equidistant points for each cooling duct
The cooling water via hole of cloth between the two is connected.
2. a kind of bar magnet for being segmented liquid cooling according to claim 1, which is characterized in that the material of the bar magnet body is not
Become rusty steel or aluminium alloy.
3. a kind of bar magnet for being segmented liquid cooling according to claim 1, which is characterized in that further include being located at bar magnet body both ends
Baffle.
4. a kind of bar magnet for being segmented liquid cooling according to claim 1, which is characterized in that the cross section of the cooling duct
Shape is sector.
5. a kind of bar magnet for being segmented liquid cooling according to claim 1, which is characterized in that main intake tunnel and each cooling are logical
2-5 cooling water via hole is provided between road.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821408752.1U CN208844176U (en) | 2018-08-30 | 2018-08-30 | A kind of bar magnet being segmented liquid cooling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821408752.1U CN208844176U (en) | 2018-08-30 | 2018-08-30 | A kind of bar magnet being segmented liquid cooling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208844176U true CN208844176U (en) | 2019-05-10 |
Family
ID=66357852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821408752.1U Active CN208844176U (en) | 2018-08-30 | 2018-08-30 | A kind of bar magnet being segmented liquid cooling |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208844176U (en) |
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2018
- 2018-08-30 CN CN201821408752.1U patent/CN208844176U/en active Active
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