CN208841188U - Finishing module and chemical-mechanical grinding device - Google Patents
Finishing module and chemical-mechanical grinding device Download PDFInfo
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- CN208841188U CN208841188U CN201821679954.XU CN201821679954U CN208841188U CN 208841188 U CN208841188 U CN 208841188U CN 201821679954 U CN201821679954 U CN 201821679954U CN 208841188 U CN208841188 U CN 208841188U
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- pipeline
- conditioner discs
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- connector
- finishing module
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Abstract
The utility model is related to a kind of finishing module and a kind of chemical-mechanical grinding device, and the finishing module includes: conditioner discs, for modifying the burnishing surface of polishing pad, the burnishing surface of the polishing pad is made to keep roughness；Conditioner discs connector has a joint face, for adsorbing the back side of the conditioner discs；Detection device, comprising: the first end of pipeline, the pipeline forms confined space between the pipeline, conditioner discs connector and the conditioner discs back side when the conditioner discs connector is adsorbed in the back side of the conditioner discs through the conditioner discs connector；Vacuum pump is connect with the second end of the pipeline, for vacuumizing to the pipeline；Baroceptor is connect with the pipeline, for detecting the air pressure in the pipeline.Using the finishing module, be able to detect that the conditioner discs falls situation.
Description
Technical field
The utility model relates to wafer productions to manufacture processing equipment field, and in particular to a kind of finishing module and chemical machinery
Milling apparatus.
Background technique
As semi-conductor industry develops rapidly, the size of electronic device is gradually reduced, to wanting for the surface smoothness of wafer
It asks and has reached nanoscale.When minimum feature size reaches 0.25 μm or less, it is necessary to carry out global planarizartion.The common overall situation is flat
Smoothization technology includes chemically mechanical polishing (CMP) technology, and the figure that wafer can be met simultaneously from processing performance and speed adds
Work requirement.
In the prior art, it is connected including polishing pad, conditioner discs with conditioner discs in common chemically mechanical polishing (CMP) system
Part, wherein the polishing pad is for placing polished wafer.The conditioner discs are set to above the polishing pad, are used for and institute
Polishing pad contact, friction are stated, to keep the roughness of the polishing pad, the conditioner discs connector is for installing conditioner discs.Institute
It states conditioner discs to be set to above the polishing pad, when the conditioner discs are fallen, can pound and fall on polishing pad, influence subsequent
Process of lapping.Once and conditioner discs are fallen, and when being placed with wafer on the polishing pad, will cause the damage of wafer, are influenced
The yield of wafer.
Utility model content
The purpose of this utility model is to provide a kind of finishing module and chemical-mechanical grinding devices, are able to detect conditioner discs
Fall trend, avoid conditioner discs from falling, improve the yield of wafer.
In order to solve the above technical problems, the following provide a kind of finishing modules, comprising: conditioner discs, for modifying polishing pad
Burnishing surface, make the polishing pad burnishing surface keep roughness；Conditioner discs connector has a joint face, for adsorbing
State the back side of conditioner discs；Detection device, comprising: the first end of pipeline, the pipeline runs through the conditioner discs connector, when described
When conditioner discs connector is adsorbed in the back side of the conditioner discs, the pipeline, conditioner discs connector and the conditioner discs back side
Between form confined space；Vacuum pump is connect with the second end of the pipeline, for vacuumizing to the pipeline；Air pressure sensing
Device is connect with the pipeline, for detecting the air pressure in the pipeline.
Optionally, the detection device further include: the first valve is set between the pipeline and the vacuum pump.
Optionally, first valve is triple valve, and the first port of the triple valve is connected to the first of the pipeline
End, the second port of the triple valve are connected to the vacuum pump；The detection device further includes one being connected to atmospheric environment
Branch, the branch are also connected to the third port of the triple valve.
Optionally, further include a controller, connect first valve and the baroceptor, for according to the gas
The testing result of pressure sensor controls the on off operating mode of first valve.
Optionally, the controller to the control of first valve include: when the baroceptor detect it is described
When air pressure in pipeline is greater than a preset threshold, controls first valve and the vacuum pump and the pipeline is connected.
Optionally, the detection device further includes the second valve, be set to the pipeline first end and first valve
Between door.
Optionally, the detection device further includes sealing ring, is sheathed on the company of the pipeline Yu the conditioner discs connector
Place is met, makes to be tightly connected between the pipeline and the conditioner discs connector.
Optionally, the sealing ring includes at least one of O-ring seal, lip-type packing.
Optionally, the conditioner discs connector includes magnetic absorption component, by described in magnetic absorption component absorption
Conditioner discs.
To solve the above-mentioned problems, the technical solution of the utility model also provides a kind of chemical-mechanical grinding device, comprising:
Finishing module described in any of the above embodiments.
Finishing module in the utility model includes the baroceptor for being connected to pipeline, and the pipeline includes running through to repair
The first end of whole disk connector may be constructed closed environment between the pipeline, conditioner discs and conditioner discs connector.When described true
After sky pump vacuumizes the pipeline, vacuum state is kept in the pipeline, however the once conditioner discs and the conditioner discs
Adsorption capacity weakens between connector or conditioner discs are fallen, and the vacuum state in the pipeline will be destroyed, in the pipeline
Air pressure change immediately, the baroceptor will detect the variation when the air pressure in preceding pipeline, and the external world can obtain
Know that current trim disk falls trend, so as to take the measure for preventing conditioner discs from falling, avoids conditioner discs from falling, damages throwing
The wafer placed on light pad, to improve the yield of wafer.
Further, the finishing module further includes controller, can control the conducting of the vacuum pump Yu the pipeline.
When the atmospheric pressure value that the baroceptor detects be greater than preset threshold when, the controller just control the vacuum pump with it is described
Pipeline conducting, so that being in vacuum state inside the pipeline, increases to finishing vacuumizing inside the pipeline
The adsorption capacity of disk, avoids conditioner discs from falling.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the finishing module in a kind of specific embodiment of the utility model；
Fig. 2 is the structural schematic diagram of the conditioner discs in a kind of specific embodiment of the utility model；
Fig. 3 is the connection relationship between controller and other each components in a kind of specific embodiment of the utility model
Schematic diagram.
Specific embodiment
Below in conjunction with the drawings and specific embodiments to the utility model proposes a kind of finishing module and chemical machinery grind
Mill equipment is described in further detail.
Fig. 1 to 3 is please referred to, wherein Fig. 1 is the structure of the finishing module in a kind of specific embodiment of the utility model
Schematic diagram, Fig. 2 are the structural schematic diagram of the conditioner discs in a kind of specific embodiment of the utility model, and Fig. 3 is that this is practical new
The connection relationship diagram between controller and other each components in a kind of specific embodiment of type.
In this specific embodiment, the finishing module includes: conditioner discs 101, for modifying the burnishing surface of polishing pad,
The burnishing surface of the polishing pad is set to keep roughness；Conditioner discs connector 103 has a joint face, for adsorbing the finishing
The back side of disk 101；Detection device 100, comprising: the first end of pipeline 102, the pipeline 102 runs through the conditioner discs connector
103, when the conditioner discs connector 103 is adsorbed in the back side of the conditioner discs 101, the pipeline 102, conditioner discs connector
Confined space is formed between 103 and 101 back side of the conditioner discs；Vacuum pump 106 is connect with the second end of the pipeline 102,
For being vacuumized to the pipeline 102；Baroceptor 108 is connect with the pipeline 102, for detecting in the pipeline 102
Air pressure.
In a specific embodiment, the conditioner discs 101 including matrix and are set to repairing for described matrix side
Whole sword.Described matrix is disc, is made of at least one of metallic nickel, cobalt, titanium, iron, copper etc..In fact, this field
Technical staff can according to need the material of selection preparation described matrix, as long as having certain hardness.
In a specific embodiment, the finishing sword is made of multiple abrasive grains, and the abrasive grain includes gold
At least one of hard rock, cubic boron nitride, polycrystalline diamond, polycrystal cubic boron nitride, CVD gas-phase grown diamond.It is practical
On, those skilled in the art can according to need the abrasive grain being arranged on the conditioner discs 101, it is only necessary to guarantee the mill
The roughness that material particle has certain hardness, can guarantee the polishing pad with the polishing pad friction.
In a kind of more preferably specific embodiment, the abrasive grain of the conditioner discs 101 is mostly ordered arrangement, to obtain
The finishing performance and dressing efficiency of optimization.
In specific embodiment shown in Fig. 2, described matrix includes stainless steel plane layer 201, silicon substrate layer 202 and sets
The diamond layer 203 in silicon base 202 is set, the surface of the diamond layer 203 is coupled with diamond abrasive grains 204, institute
It states diamond abrasive grains 204 and constitutes the finishing sword.
The conditioner discs connector 103, including a magnetic absorption component, for by being repaired described in the absorption of magnetic absorption component
Whole disk 101.Since the conditioner discs 101 are used to be in contact with polishing pad, to keep the roughness of the polishing pad, so described
Conditioner discs 101 often with the polishing pad friction, are lost larger, it is often necessary to change, when conditioner discs connector 103 passes through magnetism
When device is connected with the conditioner discs 101, the conditioner discs 101 are easy to disassemble.
The same side of the conditioner discs 101, the pipeline are arranged in the pipeline 102 for the conditioner discs connector 103
102 run through the conditioner discs connector 103.In the specific embodiment, the first end of the pipeline 101 conforms to the finishing
The back side of disk 101.When the relatively described conditioner discs connector 103 of the conditioner discs 101 falls or is displaced, ambient atmos into
Enter between the conditioner discs connector 103 and conditioner discs 101, pipeline 102, air pressure at the first end of the pipeline 102 is caused to be sent out
Changing changes so as to cause the air pressure in the pipeline 102, and vacuum environment is destroyed.
In the specific embodiment shown in Fig. 1,2, the first end of the pipeline 102 fits to the stainless steel of described matrix
The upper surface of plane layer 201, the diamond layer 203 are coupled with the surfaces of diamond abrasive grains 204 towards the polishing pad.
The tube body of the pipeline 102 should be it is fissureless, to prevent 102 tube body of pipeline from causing the close of confined space
The destruction of closing property.The duct wall of the pipeline 102 should also be as, to obtain enough hardness, preventing the pipe with certain thickness
Breakage occurs for road 102, influences the airtightness in the pipeline 102.The pipe can be set as needed in those skilled in the art
The shape of the cross section of the tube body in road 102.In the specific embodiment, the first end of the pipeline 102 conforms to the finishing
The surface of disk 101；In other specific embodiments, have between the first end of the pipeline 102 and the surface of conditioner discs 101
Confined space is constituted between one fixed gap, with the conditioner discs 101, conditioner discs connector 103.
In specific embodiment shown in Fig. 1, the baroceptor 108 is set to the first end of the pipeline 102
Between the second valve 104, detection be pipeline 102 between 102 first end of pipeline and the second valve 104 air pressure ring
Border.
The baroceptor 108 is the instrument for measuring the absolute pressure of gas, and main sensing element includes pair
The power of air pressure very sensitive film and thimble, the thimble are connected to a flexible resistor.When the air pressure liter of tested gas
When high or reduction, film can deform, and thimble movement be driven, to change the resistance for the flexible resistor that the thimble is connected to
Value influences the electric parameter that the baroceptor 108 exports.After user knows the occurrence of the electric parameter, it can obtain
Know the occurrence of tested air pressure.In a specific embodiment, analog-to-digital conversion is additionally provided in the baroceptor 108
The electric parameter is converted to digital signal, known for user by device.
In specific embodiment shown in Fig. 1, the main component of the baroceptor 108 is variable displacement type silicon fiml box.
When the atmospheric pressure in the transfiguration silicon fiml box external world changes, so that the thimble in the variable displacement type silicon fiml box moves, drive
The capacitance of the plane-parallel capacitor being connected in the variable displacement type silicon fiml box changes, to influence the air pressure transmission
The electric parameter that sensor 108 exports.
In fact, those skilled in the art can according to need the setting baroceptor 108, for example, when needing
When higher measurement accuracy, high-precision baroceptor 108 can choose, to obtain high-precision atmospheric pressure value, thus detecting
The conditioner discs 101 have higher precision when falling situation.
In a specific embodiment, the vacuum pump 106 is gas trapping pump.When the vacuum pump 106 works, institute
It states the gas molecule in pipeline 102 to be adsorbed or condense on the inner surface of the gas trapping pump, to reduce in container
Gas molecule number, achieved the purpose that vacuumize.In specific embodiment shown in Fig. 1, gas trapping pump according to
Air extracting function is realized by the adsorbent with biggish specific surface area.The adsorbent includes active carbon, silica gel etc..It is practical
On, it is true to the pumping in pipeline 102 to realize that other kinds of vacuum pump 106 can also be set as needed in those skilled in the art
Sky, such as getter pump, getter ion pump.
In a specific embodiment, the detection device 100 can also include alarm unit, with the air pressure sensing
Device 108 is connected.When the atmospheric pressure value that the baroceptor 108 detects is greater than preset threshold, Xiang Suoshu alarm unit hair
The number of delivering letters, the alarm unit issue alarm after receiving signal.In a specific embodiment, the alarm unit includes
At least one of buzzer, LED light, LCD display.In fact, those skilled in the art can be set as needed it is described
The specific configuration of alarm unit need to only have warning function.
In specific embodiment shown in Fig. 1, the detection device 100 further include: the first valve 105 is set to institute
It states between the first end of pipeline 102 and the vacuum pump 106, the pipeline 102 and the vacuum pump 106 is connected to, for controlling
Make the vacuumizing to the pipeline 102 of vacuum pump 106.
By the way that the first valve 105 is arranged, so that the vacuum pump 106 is controllable to vacuumizing for the pipeline 102, and can
Opportunity is vacuumized by the way that setting is appropriate, so that the vacuum pump 106 can be also used for preventing falling for the conditioner discs 101.
Specifically, the vacuum pump 106 and the pipeline 102 is connected when first valve 105, to the inside of the pipeline 102 into
Row vacuumizes.When first valve 105 is closed, then the vacuum pump 106 is disconnected with the pipeline 102, therefore, can be in institute
When stating baroceptor 108 and detecting the variation of current gas pressure, first valve 105 is connected, so that the vacuum pump 106 is right
The inside of pipeline 102 vacuumizes, so that the conditioner discs 101 are sucked, to prevent the conditioner discs 101 from falling.
In specific embodiment shown in Fig. 1, first valve 105 is triple valve, the of first valve 105
Single port is connected to the first end of the pipeline 102, and the second port of first valve 105 is connected to the vacuum pump 106；
The detection device 100 further includes a branch 107 for being connected to atmospheric environment, and described 107 one end of branch is connected to atmospheric environment,
The other end is connected to the third port of first valve 105.Therefore, 102 property of can choose of pipeline be connected to it is described
Vacuum pump 106 or the branch 107.When the pipeline 102 is connected to atmospheric environment, the purpose of vacuum breaker may be implemented, it is right
Air pressure in the pipeline 102 is adjusted, the conditioner discs 101 easy to disassemble.
In this specific embodiment, the detection device 100 further includes the second valve 104, is set to the pipeline 102
First end and first valve 105 between, connect the pipeline 102 first end and first valve 105.Described
Two valves 104 can be used for controlling the conducting of first valve 105 and 102 first end of pipeline, so that the detection device
100 have dual-switch.When second valve 104 conducting, first valve 105 is connected to the of the pipeline 102
It one end can be to the pipeline at this time regardless of the first end of the pipeline 102 is to be connected to branch 107 or vacuum pump 106
Environment in 102 impacts；When second valve 104 close when, first valve 105 not with the pipeline 102
First end connection.At this point, regardless of the triple valve 105 is connected to atmospheric environment or vacuum pump 106, in the pipeline 102
Environment is all unaffected.In a specific embodiment, second valve 104 is only being vacuumized or is being broken very
It is just opened when empty.
The detection device 100 further includes sealing ring 109, is sheathed on the outer surface of the first end of the pipeline 102, with institute
The outer surface for stating pipeline 102 fits, so that being tightly connected between the pipeline 102 and the conditioner discs connector 103, keeps away
Exempt from gap of the extraneous gas between the pipeline 102 and the conditioner discs connector 103 to enter in pipeline 102.The sealing
Circle 109 includes at least one of O-ring seal, lip-type packing.In fact, those skilled in the art can close as needed
Type and the position of the sealing ring 109 is arranged in reason.
Referring to Fig. 3, in a specific embodiment, the finishing module further includes a controller 300, it is separately connected
First valve 105, the second valve 104 and the baroceptor 108, for the inspection according to the baroceptor 108
The on state that result controls first valve 105 and the second valve 104 is surveyed, the first end of the pipeline 102 is connected to
One of branch 107 or vacuum pump 106.In a specific embodiment, the controller 300 is to first valve 105
Control includes: the control when the air pressure that the baroceptor 108 detects in the pipeline 102 is greater than a preset threshold
Device 300 processed controls first valve 105 and is connected to the vacuum pump 106, makes the first end and the vacuum of the pipeline 102
106 connection of pump.
Control by the controller 300 to first valve 105 prevents the conditioner discs 101 from falling.When described
When baroceptor 108 detects that the air pressure in the pipeline 102 is greater than a preset threshold, corresponding is in the pipeline 102
Gaseous environment change, there is air inlet in closed pipeline 102 originally.Since the duct wall of the pipeline 102 has
Certain thickness, therefore will not be chipping easily, causing the pipeline 102 the reason of air inlet occur can only be the first end
Gas leakage occurs for the confined space between the conditioner discs 101, and the conditioner discs 101 occur falling trend.Therefore, in the gas
When pressure sensor 108 detects that the air pressure in the pipeline 102 is greater than a preset threshold, controls first valve 105 and be connected to
To the vacuum pump 106, it is connected to the pipeline 102 with the vacuum pump 106, the pipeline 102 is vacuumized again.Work as institute
State 101 mass of conditioner discs it is smaller when, due to the air pressure difference of 101 two sides of conditioner discs, the conditioner discs 101 can be by extraneous big
Air pressure is withstood, and falling for the conditioner discs 101 is prevented.
In a specific embodiment, the controller 300 can also be not provided in the finishing module, but by user
The triple valve 105 is manually controlled to the gating of vacuum pump 106 and air according to the testing result of the baroceptor 108.
The finishing module of the specific embodiment at work, is adsorbed by the conditioner discs connector 103 described first
The back side of conditioner discs 101, so that the first end of pipeline 102 and 101 back side of conditioner discs form closed environment.Then control is true
Sky the 106, first valve 105 of pump and the second valve 104 vacuumize the pipeline 102, specific: opening the second valve
104, control the first valve 105 be connected the pipeline 102 first end and the vacuum pump 106, by 106 pairs of institutes of the vacuum pump
Pipeline 102 is stated to be vacuumized.In a specific embodiment, the baroceptor 108 detects reaches in the pipeline 102
To after required air pressure environment, the second valve 104 is closed, keeps closed between the first end and the second valve 104 of pipeline 102
Environment.
After completing to the vacuumizing of the pipeline 102, the baroceptor 108 carries out the air pressure in pipeline 102
Real-time monitoring.When detecting that the air pressure in pipeline 102 is greater than preset threshold, it is again turned on the second valve 104, controls the first valve
The 105 conducting first end of door and the vacuum pump 106, vacuumize the pipeline 102 by the vacuum pump 106.?
After completion vacuumizes, and the detection of baroceptor 108 reaches required air pressure environment, the second valve 104 is closed, keeps pipeline
Closed environment between 102 first end and the second valve 104, and the baroceptor is continued through to the pipeline 102
Interior air pressure environment is monitored.
Finishing module in the utility model includes the baroceptor of connecting pipe, and the pipeline includes through finishing
The first end of disk connector may be constructed closed environment between the conditioner discs and conditioner discs connector.When the vacuum pump pair
After the pipeline vacuumizes, vacuum state is kept in the pipeline, however the once conditioner discs and the conditioner discs connector
Between adsorption capacity weaken or fall, the vacuum state in the pipeline will be destroyed, and the baroceptor will
Detect that the external world is you can learn that current trim disk falls trend, so as to take when the air pressure in preceding pipeline changes
The measure that conditioner discs are fallen is prevented, to avoid conditioner discs from falling, the wafer placed on polishing pad is damaged, to improve wafer
Yield.
Further, the finishing module further includes controller, can control the conducting of the vacuum pump Yu the pipeline.
When the atmospheric pressure value that the baroceptor detects be greater than preset threshold when, the controller just control the vacuum pump with it is described
Pipeline conducting, so that being in vacuum state inside the pipeline, increases to finishing vacuumizing inside the pipeline
The adsorption capacity of disk, avoids conditioner discs from falling.
Specific embodiment of the present utility model also provides a kind of chemical-mechanical grinding device with above-mentioned finishing module,
During carrying out chemical mechanical grinding to wafer, detecting real-time and conditioner discs can be prevented fall, substantially reduce wafer and lack
Risk is fallen into, the yield of product is improved.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (10)
1. a kind of finishing module characterized by comprising
Conditioner discs make the burnishing surface of the polishing pad keep roughness for modifying the burnishing surface of polishing pad；
Conditioner discs connector has a joint face, for adsorbing the back side of the conditioner discs；
Detection device, comprising:
The first end of pipeline, the pipeline runs through the conditioner discs connector, when the conditioner discs connector is adsorbed in described repair
When the back side of whole disk, confined space is formed between the pipeline, conditioner discs connector and the conditioner discs back side；
Vacuum pump is connect with the second end of the pipeline, for vacuumizing to the pipeline；
Baroceptor is connect with the pipeline, for detecting the air pressure in the pipeline.
2. finishing module according to claim 1, which is characterized in that the detection device further include: the first valve, setting
Between the pipeline and the vacuum pump.
3. finishing module according to claim 2, which is characterized in that first valve is triple valve, the triple valve
First port be connected to the first end of the pipeline, the second port of the triple valve is connected to the vacuum pump；The inspection
Surveying device further includes a branch for being connected to atmospheric environment, and the branch is also connected to the third port of the triple valve.
4. finishing module according to claim 2, which is characterized in that further include a controller, connect first valve
With the baroceptor, for controlling the on off operating mode of first valve according to the testing result of the baroceptor.
5. finishing module according to claim 4, which is characterized in that control packet of the controller to first valve
It includes: when the air pressure that the baroceptor detects in the pipeline is greater than a preset threshold, controlling first valve and lead
Lead to the vacuum pump and the pipeline.
6. finishing module according to claim 2, which is characterized in that the detection device further includes the second valve, setting
Between the first end and first valve of the pipeline.
7. finishing module according to claim 1, which is characterized in that the detection device further includes sealing ring, is sheathed on
The junction of the pipeline and the conditioner discs connector makes to be tightly connected between the pipeline and the conditioner discs connector.
8. finishing module according to claim 7, which is characterized in that the sealing ring includes O-ring seal, lip packing
At least one of circle.
9. finishing module according to claim 1, which is characterized in that the conditioner discs connector includes magnetic absorption portion
Part adsorbs the conditioner discs by the magnetic absorption component.
10. a kind of chemical-mechanical grinding device characterized by comprising finishing as claimed in any one of claims 1-9 wherein
Component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821679954.XU CN208841188U (en) | 2018-10-17 | 2018-10-17 | Finishing module and chemical-mechanical grinding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821679954.XU CN208841188U (en) | 2018-10-17 | 2018-10-17 | Finishing module and chemical-mechanical grinding device |
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| Publication Number | Publication Date |
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| CN208841188U true CN208841188U (en) | 2019-05-10 |
Family
ID=66375646
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821679954.XU Active CN208841188U (en) | 2018-10-17 | 2018-10-17 | Finishing module and chemical-mechanical grinding device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112975749A (en) * | 2019-12-17 | 2021-06-18 | 大量科技股份有限公司 | Method for instantly reconditioning polishing pad |
| CN117564917A (en) * | 2024-01-15 | 2024-02-20 | 北京芯美达科技有限公司 | Polycrystalline diamond polishing equipment |
-
2018
- 2018-10-17 CN CN201821679954.XU patent/CN208841188U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112975749A (en) * | 2019-12-17 | 2021-06-18 | 大量科技股份有限公司 | Method for instantly reconditioning polishing pad |
| CN117564917A (en) * | 2024-01-15 | 2024-02-20 | 北京芯美达科技有限公司 | Polycrystalline diamond polishing equipment |
| CN117564917B (en) * | 2024-01-15 | 2024-04-02 | 北京芯美达科技有限公司 | Polycrystalline diamond polishing equipment |
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