CN208832847U - Laughing gas rectification and purification device - Google Patents
Laughing gas rectification and purification device Download PDFInfo
- Publication number
- CN208832847U CN208832847U CN201821543422.3U CN201821543422U CN208832847U CN 208832847 U CN208832847 U CN 208832847U CN 201821543422 U CN201821543422 U CN 201821543422U CN 208832847 U CN208832847 U CN 208832847U
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- Prior art keywords
- gas
- pipeline
- heat exchanger
- laughing
- laughing gas
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 title claims abstract description 164
- 235000013842 nitrous oxide Nutrition 0.000 title claims abstract description 79
- 238000000746 purification Methods 0.000 title claims abstract description 40
- 239000007788 liquid Substances 0.000 claims abstract description 40
- 238000001816 cooling Methods 0.000 claims abstract description 16
- 239000007791 liquid phase Substances 0.000 claims abstract description 16
- 239000000470 constituent Substances 0.000 claims abstract description 6
- 239000012071 phase Substances 0.000 claims abstract description 5
- 238000005191 phase separation Methods 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 61
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 34
- 239000005977 Ethylene Substances 0.000 claims description 34
- 238000005057 refrigeration Methods 0.000 claims description 13
- 239000007792 gaseous phase Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 150000001336 alkenes Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 4
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 12
- 235000011037 adipic acid Nutrition 0.000 description 6
- 239000001361 adipic acid Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000003444 anaesthetic effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- DKQVJMREABFYNT-UHFFFAOYSA-N ethene Chemical group C=C.C=C DKQVJMREABFYNT-UHFFFAOYSA-N 0.000 description 1
- -1 ethylene, ethylene Chemical group 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Abstract
The laughing gas rectification and purification device of the utility model includes so that unstripped gas is isolated the level-one rectifying column of gas phase and liquid phase for carrying out rectifying to unstripped gas, passing through piping connection with unstripped gas gas source;For carrying out rectifying to liquid phase, so that liquid phase separation is gone out the two-stage rectification tower of laughing gas and heavy constituent, pass through piping connection with level-one rectifying column;Laughing gas for the discharge to two-stage rectification tower carries out cooling treatment, makes the liquefied cryogenic heat exchanger of laughing gas, the laughing gas discharge pipe of two-stage rectification tower is connect after cryogenic heat exchanger with laughing gas liquid storage tank.The advantages of the technical solution of the utility model, is: can carry out rectification and purification to the gas componant in chemical industry tail gas, isolate laughing gas component, and purifying is electronic grade product, improves the utility value of tail gas.
Description
Technical field
The utility model relates to chemical fields, more particularly to a kind of laughing gas rectification and purification device.
Background technique
Adipic acid is a kind of important fine chemical product, under normal circumstances, every production 1mol adipic acid by-product 0.8~
The N of 1.0mol2O, N2O is a kind of gas for potentially resulting in greenhouse effects and ozone layer reduction, and unimolecule, which heats potentiality, is
CO2298 times, therefore, adipic acid tail gas direct emission will lead to greenhouse effects.As the demand of adipic acid is increasing,
Adipic acid production scale constantly expands, and contains N2The improvement of O tail gas is just particularly important.
N2O is commonly called as " laughing gas ", has oxidisability and anesthetic effect, is widely used in medical treatment, electronics industry, is a kind of tool
There are the gas products of good economic value.
Containing N2O tail gas is directly discharged to atmosphere, not only results in environmental pollution, also will cause the serious wasting of resources, because
This, which is recycled adipic acid tail gas, seems particularly significant, and has considerable economic benefit.
Currently, domestic laughing gas market is well sold and in short supply, most laughing gas will be from external import, and import price is higher.It is domestic
There are no the technical solutions that electron level liquid laughing gas is produced from chemical industry tail gas.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of laughing gas rectification and purifications for effectively reducing pollution and waste
Device.
The laughing gas rectification and purification device of the utility model, comprising:
For carrying out rectifying to unstripped gas, unstripped gas is set to isolate the level-one rectifying column of gas phase and liquid phase, with unstripped gas
Gas source passes through piping connection;
For making the liquid phase separation go out the two-stage rectification tower of laughing gas and heavy constituent to liquid phase progress rectifying, with
Level-one rectifying column passes through piping connection;
Laughing gas for the discharge to the two-stage rectification tower carries out cooling treatment, makes the liquefied low-temperature heat exchange of the laughing gas
Device, the laughing gas discharge pipe of the two-stage rectification tower are connect after the cryogenic heat exchanger with laughing gas liquid storage tank.
The laughing gas rectification and purification device of the utility model, wherein it is also equipped with first throttle valve on the laughing gas discharge pipe,
The first throttle valve is set between the cryogenic heat exchanger and laughing gas liquid storage tank, to laugh to the liquid in laughing gas discharge pipe
Gas reducing pressure by regulating flow.
The laughing gas rectification and purification device of the utility model, wherein level-one rectifying column and unstripped gas gas source pass through air delivering pipeline
Connection, the air delivering pipeline successively passes through the first tower bottom reboiler, the cryogenic heat exchanger of the level-one rectifying column, so that described defeated
Unstripped gas in air pipe inputs level-one rectifying column after providing heat for the first tower bottom reboiler, cooled down by cryogenic heat exchanger.
The laughing gas rectification and purification device of the utility model, wherein the gaseous phase outlet of the tower top of level-one rectifying column and the first tower
It pushes up condenser and pipeline connection, the first gas-liquid separation is passed through by pipeline connection, the first overhead condenser and the first gas-liquid separator
The gaseous state outlet of device is connect with the first blowdown piping, and first blowdown piping is by the cryogenic heat exchanger, so that described the
It is vented after gas rewarming in one blowdown piping, the liquid outlet of first gas-liquid separator is connected to level-one rectifying column.
The laughing gas rectification and purification device of the utility model, wherein the gaseous phase outlet of the tower top of two-stage rectification tower and the second tower
It pushes up condenser and pipeline connection, the second gas-liquid separation is passed through by pipeline connection, the second overhead condenser and the second gas-liquid separator
The gaseous state outlet of device is connect with laughing gas discharge pipe, and the liquid outlet of second gas-liquid separator is connected to two-stage rectification tower.
The laughing gas rectification and purification device of the utility model, wherein it further include ethylene refrigeration system, the ethylene refrigeration system
Including the ethylene compressor for compressing to ethylene, the gas vent of ethylene compressor is throttled by the first pipeline connection second
Valve, the second throttle by return line connect ethylene compressor gas access, the ethylene ethylene compressor with
It being recycled between second throttle, the first pipeline successively passes through the second tower bottom reboiler, the cryogenic heat exchanger of two-stage rectification tower, and first
Ethylene in pipeline cools in the second tower bottom reboiler of two-stage rectification tower, and the ethylene in the first pipeline is in low-temperature heat exchange
It cools in device, return line successively passes through the second tower top of the first overhead condenser of level-one rectifying column, two-stage rectification tower
Condenser, cryogenic heat exchanger, the ethylene in return line is in the first overhead condenser, the second overhead condenser, cryogenic heat exchanger
Middle offer cooling capacity.
The laughing gas rectification and purification device of the utility model, wherein the first pipeline and return line pass through the second pipeline connection,
One end of second pipeline and the tie point of the first pipeline are between cryogenic heat exchanger and second throttle, second pipe
The other end on road and the tie point of return line are between the second overhead condenser and cryogenic heat exchanger, on second pipeline
It is provided with third throttle valve.
The laughing gas rectification and purification device of the utility model, wherein it further include freon refrigeration system, the freon refrigeration
System includes the freon compressore for compressing to freon, and the gas vent of freon compressore passes through third pipeline connection
4th throttle valve, the 4th throttle valve pass through the gas access of the 4th piping connection freon compressore, and the freon exists
It is recycled between ethylene compressor and the 4th throttle valve, the 4th pipeline passes through cryogenic heat exchanger, and the freon in the 4th pipeline is low
Cooling capacity is provided in warm heat exchanger.
Chemical industry tail gas rectification and purification can be electronic-grade dental gas by the technical solution of the utility model.The skill of the utility model
The advantages of art scheme, is: can carry out rectification and purification to the gas componant in chemical industry tail gas, isolate laughing gas component, and purify and be
Electronic grade product improves the utility value of tail gas.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the laughing gas rectification and purification device of the utility model.
Specific embodiment
As shown in Figure 1, the laughing gas rectification and purification device of the utility model, comprising:
For carrying out rectifying to unstripped gas, unstripped gas is made to isolate the level-one rectifying column T1 and unstripped gas of gas phase and liquid phase
Gas source passes through piping connection;
For carrying out rectifying to liquid phase, liquid phase separation is set to go out the two-stage rectification tower T2 of laughing gas and heavy constituent, with level-one essence
It evaporates tower and passes through piping connection;
Laughing gas for the discharge to two-stage rectification tower carries out cooling treatment, makes the liquefied cryogenic heat exchanger E1 of laughing gas, and two
The laughing gas discharge pipe 11 of grade rectifying column is connect after cryogenic heat exchanger with laughing gas liquid storage tank.
The laughing gas rectification and purification device of the utility model, wherein first throttle valve V11 is also equipped on laughing gas discharge pipe,
First throttle valve is set between cryogenic heat exchanger and laughing gas liquid storage tank, is dropped with throttling to the liquid laughing gas in laughing gas discharge pipe
Pressure.
The laughing gas rectification and purification device of the utility model, wherein level-one rectifying column and unstripped gas gas source pass through air delivering pipeline
12 connections, air delivering pipeline 12 successively passes through the first tower bottom reboiler E2, the cryogenic heat exchanger of level-one rectifying column, so that air delivering pipeline
Interior unstripped gas inputs level-one rectifying column after providing heat for the first tower bottom reboiler, cooled down by cryogenic heat exchanger.
The laughing gas rectification and purification device of the utility model, wherein the gaseous phase outlet of the tower top of level-one rectifying column and the first tower
It pushes up condenser E3 and pipeline connection, the first gas-liquid is passed through by pipeline connection, the first overhead condenser and the first gas-liquid separator V1
The gaseous state outlet of separator is connect with the first blowdown piping 13, and the first blowdown piping passes through cryogenic heat exchanger, so that the first emptying
It is vented after gas rewarming in pipeline, the liquid outlet of the first gas-liquid separator is connected to level-one rectifying column.
The laughing gas rectification and purification device of the utility model, wherein the liquid-phase outlet of the tower bottom of two-stage rectification tower is put with second
Blank pipe road 14 is connected to, and the second blowdown piping 14 passes through cryogenic heat exchanger, so as to be vented after the gas rewarming in the second blowdown piping,
The laughing gas rectification and purification device of the utility model, wherein the gaseous phase outlet of the tower top of two-stage rectification tower and the second tower
It pushes up condenser E5 and pipeline connection, the second gas-liquid is passed through by pipeline connection, the second overhead condenser and the second gas-liquid separator V2
The gaseous state outlet of separator is connect with laughing gas discharge pipe, and the liquid outlet of the second gas-liquid separator is connected to two-stage rectification tower.
The laughing gas rectification and purification device of the utility model, wherein further include ethylene refrigeration system, ethylene refrigeration system includes
The gas vent of ethylene compressor C1 for compressing to ethylene, ethylene compressor are connected to second throttle by the first pipeline 21
V12, second throttle connect the gas access of ethylene compressor by return line 31, and ethylene is in ethylene compressor and the second section
It is recycled between stream valve, the first pipeline successively passes through the second tower bottom reboiler E4, the cryogenic heat exchanger of two-stage rectification tower, the first pipeline
In ethylene cool in the second tower bottom reboiler of two-stage rectification tower, the ethylene in the first pipeline is in cryogenic heat exchanger
It cools, return line 31 is successively by the first overhead condenser E3 of level-one rectifying column, the second tower top of two-stage rectification tower
Condenser E5, cryogenic heat exchanger, the ethylene in return line is in the first overhead condenser, the second overhead condenser, low-temperature heat exchange
Cooling capacity is provided in device.
The laughing gas rectification and purification device of the utility model, wherein the first pipeline 21 passes through the second pipeline with return line 31
22 connections, one end of the second pipeline 22 and the tie point of the first pipeline are between cryogenic heat exchanger and second throttle, and second
The other end of pipeline and the tie point of return line are between the second overhead condenser and cryogenic heat exchanger, on the second pipeline 22
It is provided with third throttle valve V13.
The laughing gas rectification and purification device of the utility model, wherein further include freon refrigeration system, freon refrigeration system
Including the freon compressore C2 for compressing to freon, the gas vent of freon compressore is connected to by third pipeline 23
4th throttle valve V14, the 4th throttle valve connect the gas access of freon compressore by the 4th pipeline 24, and freon is in ethylene
It is recycled between compressor and the 4th throttle valve, the 4th pipeline passes through cryogenic heat exchanger, and the freon in the 4th pipeline is changed in low temperature
Cooling capacity is provided in hot device.
Chemical industry tail gas rectification and purification can be electronic-grade dental gas by the technical solution of the utility model.Dominating process route
Be: the unstripped gas containing laughing gas component enters this rectification and purification device after preliminary treatment, passes through the laughing gas of the utility model
After rectification and purification device cools down raw material gas liquefaction, into level-one rectifying column, in level-one rectifying column, light component impurity is taken off
It removes, subsequently into two-stage rectification tower, by heavy constituent impurity removal, finally obtains the laughing gas product of electron level.
The advantages of the technical solution of the utility model, is: rectification and purification can be carried out to the gas componant in chemical industry tail gas,
Laughing gas component is isolated, and purifying is electronic grade product, improves the utility value of tail gas.
The specific embodiment for carrying out laughing gas rectification and purification using the laughing gas rectification and purification device of the utility model is as follows:
40 DEG C of raw gas pressure 18.6bar temperature, flow 4500Nm3/ h, into level-one rectifying column T1 the first tower bottom again
Device E2 is boiled, subsequently into cryogenic heat exchanger E1, enters in the middle part of level-one rectifying column T1 after heat exchanger liquefaction cooling, carries out low temperature essence
It evaporates, in level-one rectifying column, light component is constantly discharged from tower top, after the first overhead condenser E3 condensation, into the first gas-liquid
Separator V1 carries out gas-liquid separation, and the gaseous impurities of light component are discharged from the first gas-liquid separator V1, multiple through cryogenic heat exchanger E1
Go out device after temperature, the liquid phase isolated returns to level-one rectifying column, completes rectifying circulation, the liquid phase being discharged from level-one rectifying tower bottom
Into the middle part of two-stage rectification tower, in two-stage rectification tower, heavy constituent impurity is discharged from tower bottom, goes out after cryogenic heat exchanger rewarming
Device is discharged, after the second overhead condenser E5 condensation, into the second gas-liquid from tower top using laughing gas as the light component of main component
Separator V2 gas-liquid separation, liquid phase return to two-stage rectification tower, gas phase, that is, high-purity laughing gas and enter cryogenic heat exchanger cooling liquefaction
Afterwards, cryogenic heat exchanger removes product storage tank after first throttle valve V11 reducing pressure by regulating flow out.
The present apparatus is made of two sets of refrigeration compressors.Low pressure ethylene is after ethylene compressor C1 compression, into two-stage rectification
Tower T2 is divided into two strands, after stock-traders' know-how second throttle V12 throttling, is first subsequently into cryogenic heat exchanger E1 after cooling
Overhead condenser E3 enters the second overhead condenser E5 offer cooling capacity after providing cooling capacity, and in addition a stock-traders' know-how third throttle valve V13 is saved
After stream, two strands are converged into cryogenic heat exchanger, after cryogenic heat exchanger rewarming, return ethylene compressor entrance.Low pressure freon is through fluorine
After Leon compressor C2 pressurization, after the 4th throttle valve V14 throttling cooling, into after cryogenic heat exchanger E1 rewarming, freon is returned
Compressor completes compression circulation.
Above are merely preferred embodiments of the utility model, it is noted that for the ordinary skill people of the art
For member, without departing from the principle of this utility model, it can also make several improvements and retouch, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (8)
1. a kind of laughing gas rectification and purification device characterized by comprising
For carrying out rectifying to unstripped gas, unstripped gas is set to isolate the level-one rectifying column of gas phase and liquid phase, with unstripped gas gas source
Pass through piping connection;
For carrying out rectifying to the liquid phase, the liquid phase separation is set to go out the two-stage rectification tower of laughing gas and heavy constituent, with level-one
Rectifying column passes through piping connection;
Laughing gas for the discharge to the two-stage rectification tower carries out cooling treatment, makes the liquefied cryogenic heat exchanger of the laughing gas,
The laughing gas discharge pipe of the two-stage rectification tower is connect after the cryogenic heat exchanger with laughing gas liquid storage tank.
2. laughing gas rectification and purification device as described in claim 1, which is characterized in that be also equipped on the laughing gas discharge pipe
One throttle valve, the first throttle valve is set between the cryogenic heat exchanger and laughing gas liquid storage tank, to laughing gas discharge pipe
Interior liquid laughing gas reducing pressure by regulating flow.
3. laughing gas rectification and purification device as claimed in claim 2, which is characterized in that level-one rectifying column passes through with unstripped gas gas source
Air delivering pipeline connection, the air delivering pipeline successively pass through the first tower bottom reboiler, the cryogenic heat exchanger of the level-one rectifying column, with
Level-one essence is inputted after so that the first tower bottom reboiler of unstripped gas in the air delivering pipeline provided heat, cooled down by cryogenic heat exchanger
Evaporate tower.
4. laughing gas rectification and purification device as claimed in claim 3, which is characterized in that the gaseous phase outlet of the tower top of level-one rectifying column
With the first overhead condenser by pipeline connection, the first overhead condenser and the first gas-liquid separator pass through pipeline connection, and first
The gaseous state outlet of gas-liquid separator is connect with the first blowdown piping, and first blowdown piping passes through the cryogenic heat exchanger, with
It is vented after making the gas rewarming in first blowdown piping, the liquid outlet and level-one rectifying column of first gas-liquid separator
Connection.
5. laughing gas rectification and purification device as claimed in claim 4, which is characterized in that the gaseous phase outlet of the tower top of two-stage rectification tower
With the second overhead condenser by pipeline connection, the second overhead condenser and the second gas-liquid separator pass through pipeline connection, and second
The gaseous state outlet of gas-liquid separator is connect with laughing gas discharge pipe, the liquid outlet and two-stage rectification tower of second gas-liquid separator
Connection.
6. laughing gas rectification and purification device as claimed in claim 5, which is characterized in that further include ethylene refrigeration system, the second
Alkene refrigeration system includes the ethylene compressor for compressing to ethylene, and the gas vent of ethylene compressor passes through the first pipeline connection
Second throttle, the second throttle connect the gas access of ethylene compressor by return line, and the ethylene is in ethylene
It is recycled between compressor and second throttle, the second tower bottom reboiler, the low temperature that the first pipeline successively passes through two-stage rectification tower change
Hot device, the ethylene in the first pipeline cool in the second tower bottom reboiler of two-stage rectification tower, the ethylene in the first pipeline
It cools in cryogenic heat exchanger, return line successively passes through the first overhead condenser of level-one rectifying column, two-stage rectification tower
The second overhead condenser, cryogenic heat exchanger, ethylene in return line the first overhead condenser, the second overhead condenser,
Cooling capacity is provided in cryogenic heat exchanger.
7. laughing gas rectification and purification device as claimed in claim 6, which is characterized in that the first pipeline and return line pass through second
Pipeline connection, one end of second pipeline and the tie point of the first pipeline between cryogenic heat exchanger and second throttle,
The other end of second pipeline and the tie point of return line are described between the second overhead condenser and cryogenic heat exchanger
Third throttle valve is provided on second pipeline.
8. laughing gas rectification and purification device as claimed in claim 7, which is characterized in that it further include freon refrigeration system, it is described
Freon refrigeration system includes the freon compressore for compressing to freon, and the gas vent of freon compressore passes through the
The 4th throttle valve of three pipeline connections, the 4th throttle valve pass through the gas access of the 4th piping connection freon compressore, institute
It states freon and is recycled between ethylene compressor and the 4th throttle valve, the 4th pipeline passes through cryogenic heat exchanger, in the 4th pipeline
Freon provides cooling capacity in cryogenic heat exchanger.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201821543422.3U CN208832847U (en) | 2018-09-20 | 2018-09-20 | Laughing gas rectification and purification device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201821543422.3U CN208832847U (en) | 2018-09-20 | 2018-09-20 | Laughing gas rectification and purification device |
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Publication Number | Publication Date |
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CN208832847U true CN208832847U (en) | 2019-05-07 |
Family
ID=66314141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201821543422.3U Withdrawn - After Issue CN208832847U (en) | 2018-09-20 | 2018-09-20 | Laughing gas rectification and purification device |
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CN (1) | CN208832847U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109084527A (en) * | 2018-09-20 | 2018-12-25 | 中科瑞奥能源科技股份有限公司 | Laughing gas rectification and purification device and laughing gas rectificating method |
CN114538391A (en) * | 2022-03-01 | 2022-05-27 | 中船(邯郸)派瑞特种气体股份有限公司 | Slave NF3Recovery of high purity N from waste gas2O apparatus and method for recovering same |
-
2018
- 2018-09-20 CN CN201821543422.3U patent/CN208832847U/en not_active Withdrawn - After Issue
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109084527A (en) * | 2018-09-20 | 2018-12-25 | 中科瑞奥能源科技股份有限公司 | Laughing gas rectification and purification device and laughing gas rectificating method |
CN109084527B (en) * | 2018-09-20 | 2024-06-11 | 中科瑞奥能源科技股份有限公司 | Laughing gas rectifying and purifying device and laughing gas rectifying method |
CN114538391A (en) * | 2022-03-01 | 2022-05-27 | 中船(邯郸)派瑞特种气体股份有限公司 | Slave NF3Recovery of high purity N from waste gas2O apparatus and method for recovering same |
CN114538391B (en) * | 2022-03-01 | 2023-11-03 | 中船(邯郸)派瑞特种气体股份有限公司 | From NF 3 Recovery of high purity N from exhaust gas 2 O device and recovery method thereof |
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