CN208819839U - A kind of electronic cover plate mechanism for auto of slot type - Google Patents
A kind of electronic cover plate mechanism for auto of slot type Download PDFInfo
- Publication number
- CN208819839U CN208819839U CN201821322418.4U CN201821322418U CN208819839U CN 208819839 U CN208819839 U CN 208819839U CN 201821322418 U CN201821322418 U CN 201821322418U CN 208819839 U CN208819839 U CN 208819839U
- Authority
- CN
- China
- Prior art keywords
- cover board
- groove body
- transmission mechanism
- slot type
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of electronic cover plate mechanism for auto of slot type, including groove body, transmission mechanism protects outer cover, transmission mechanism, upper sealing panel and slot type cover board, the transmission mechanism is located at groove body Internal back end, the transmission mechanism protection is outer to be covered on groove body side, the upper sealing panel is set to transmission mechanism upper end, the upper sealing panel is set to groove body upper end, the slot type cover board is set to groove body upper end, the slot type cover board is located at upper sealing panel front end, the utility model cover-opening structure is slider-crank mechanism, the mechanism structure is simple, it is easily manufactured, it is in stable condition, it is less prone to failure, the mode of uncapping of the utility model is using motor driven, save process of manually uncapping, the labor intensity for not only reducing worker avoids personnel are improper when uncapping from operating the generation for leading to injury to personnel accident simultaneously, motor driven, speed of uncapping is fast, greatly Improve the working efficiency of semiconductor wet process.
Description
Technical field
The utility model belongs to electronic field；It is related to wet process equipment and technology；Specifically a kind of electronic cover board machine of slot type
Structure.
Background technique
The switch placement of the cover board of correlation machine each section groove body requires manual operation by workers in wet process at present, covers
Plate has certain weight, and since these cover boards are located at the top of machine, makes troubles to the operation of worker, while manual operation
It can occur to cause personnel injured accident occur in the process manually uncapped due to misoperation, by manual operation, speed of uncapping
Degree is slower, and efficiency of uncapping is lower, very unfavorable for industrial production and profit.
Utility model content
The purpose of this utility model is to provide a kind of electronic cover plate mechanism for auto of slot type.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of electronic cover plate mechanism for auto of slot type, including groove body, transmission mechanism protection outer cover, transmission mechanism, upper sealing panel and
Slot type cover board, the transmission mechanism are located at groove body Internal back end, and the transmission mechanism protection is outer to be covered on groove body side, it is described on
Sealing plate is set to transmission mechanism upper end, and the upper sealing panel is set to groove body upper end, and the slot type cover board is set to groove body upper end, described
Slot type cover board is located at upper sealing panel front end.
The groove body is the square structure of upper opening, and groove body two sides inner wall is equipped with the first track groove of indent and interior
The second recessed track groove, the groove body inner back side are equipped with partition, and the membrane backside is equipped with transmission mechanism fixed platform, described
Groove body lateral wall corresponding to transmission mechanism fixed platform is equipped with transmission mechanism support plate.
Cell wall is equipped with limit raised line, the second track slot structure and the first track groove up and down in first track groove
It is identical.
The transmission mechanism includes driving motor, motor fixing frame, driving bearing, the second belt pulley, belt, the first belt
Wheel and motor output shaft are held, and the driving motor is fixed in the transmission mechanism fixed platform of groove body by motor fixing frame,
The motor output shaft, which is held, to be installed in transmission mechanism support plate, and first belt pulley is installed on motor output shaft and holds, institute
It states driving bearing to be installed in transmission mechanism support plate, second belt pulley is installed on driving bearing one end, the driving
The bearing other end connects slot type cover board, and first belt pulley is connect with the second belt pulley by belt.
The slot type cover board includes the first cover board, the second cover board, third cover board, rail wheel I, rail wheel bearing I, track
It takes turns II, rail wheel bearing I I, driven bearing and cover board and drives bearing, first cover board drives bearing to be fixed on by cover board
On the inner sidewall of groove body, second cover board is connect by driven bearing with the first cover board, and the third cover board passes through rail wheel
Bearing I I is connect with the second cover board, and the rail wheel II is installed on the both ends rail wheel bearing I I, the installation of third cover board two sides
There are track wheel bearing I, the rail wheel I to be installed on rail wheel bearing I both ends, the rail wheel I and rail wheel II are all installed
In in the track groove of groove body.
The cover board driving bearing is in driving bearing connection.
When wet process board needs to open the cover board of the part groove body of correlation machine, start hatch emergency release cock, transmission
Motor will drive the first pulley movements by output bearing, and the first belt pulley drives the second belt pulley by belt, due to
Second belt wheel drive shaft is held to be connected with cover board driving bearing, so cover board drive shaft is caused to forward dynamic, and then making first
Cover board opens upwards, since the second cover board connects the first cover board by driven bearing, so during the first cover board is dug,
Second cover board begins with the trend dug, since the second cover board is connect by rail wheel bearing I I with third cover board, and third lid
The rail wheel I and rail wheel II of plate are limited by the positive stop strip in groove body track groove, so that third cover board can only be in the horizontal direction
It is mobile, the cover board of the part groove body of machine is opened so that the second cover board shrinks drive third cover board and moves horizontally backward.
The utility model has the beneficial effects that manual switch top blind flange in semiconductor wet process is changed to by the utility model
It is DYN dynamic, the labor intensity of worker can be not only reduced in this way, simultaneously because motor driven, speed of uncapping is fast, uncaps
Stablize, greatly improves the working efficiency of semiconductor wet process, the cover-opening structure that the utility model uses is crank block
Mechanism, the mechanism structure is simple, easily manufactured, and configuration state is stablized, and is less prone to failure, even if breaking down, due to simple
Structure can very easily repair and finish, the mode of uncapping of the utility model saves process of manually uncapping using motor driven,
The labor intensity of worker can not only be reduced in this way at the same avoid personnel when uncapping due to the volume of lid, quality it is excessive with
And improper operation leads to the generation of injury to personnel accident, improves the safety of equipment.
Detailed description of the invention
In order to facilitate the understanding of those skilled in the art, the utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is a kind of structural schematic diagram of the electronic cover plate mechanism for auto of slot type of the utility model；
Fig. 2 is a kind of trough body structure schematic diagram of the electronic cover plate mechanism for auto of slot type of the utility model；
Fig. 3 is a kind of track slot structure schematic diagram of the groove body of the electronic cover plate mechanism for auto of slot type of the utility model；
Fig. 4 is a kind of schematic diagram of transmission mechanism of the electronic cover plate mechanism for auto of slot type of the utility model；
Fig. 5 is a kind of slot type covering plate structure schematic diagram of the electronic cover plate mechanism for auto of slot type of the utility model.
Specific embodiment
As shown in Figure 1, a kind of electronic cover plate mechanism for auto of slot type, including groove body 1, transmission mechanism protection outer cover 2, transmission mechanism 3,
Upper sealing panel 4 and slot type cover board 5, transmission mechanism 3 are located at 1 Internal back end of groove body, and transmission mechanism protects outer cover 2 to be set to groove body 1
Side, upper sealing panel 4 are set to 3 upper end of transmission mechanism, and upper sealing panel 4 is set to 1 upper end of groove body, and slot type cover board 5 is set on groove body 1
End, slot type cover board 5 are located at 4 front end of upper sealing panel.
As described in Figure 2, groove body 1 is the square structure of upper opening, and 1 two sides inner wall of groove body is equipped with the first track groove 11 of indent
And the second track groove 12 of indent, 1 inner back side of groove body are equipped with partition 15, it is fixed flat that transmission mechanism are equipped on rear side of partition 15
Platform 14,1 lateral wall of groove body corresponding to transmission mechanism fixed platform 14 are equipped with transmission mechanism support plate 13.
As shown in figure 3, in the first track groove 11 up and down cell wall be equipped with limit raised line 111,12 structure of the second track groove with
First track groove 11 is identical.
As shown in figure 4, transmission mechanism 3 includes driving motor 31, motor fixing frame 32, driving bearing 33, the second belt pulley
34, belt 35, the first belt pulley 36 and motor output shaft hold 37, and driving motor 31 is fixed on groove body by motor fixing frame 32
In 1 transmission mechanism fixed platform 14, motor output shaft holds 37 and is installed in transmission mechanism support plate 13, the first belt pulley 36 peace
It is held on 37 loaded on motor output shaft, driving bearing 33 is installed in transmission mechanism support plate 13, and the second belt pulley 34 is installed on drive
On 33 one end of dynamic bearing, driving 33 other end of bearing connects slot type cover board 5, and the first belt pulley 36 and the second belt pulley 34 pass through skin
Band 35 connects.
As shown in figure 5, slot type cover board 5 includes the first cover board 51, the second cover board 52, third cover board 53, rail wheel I54, rail
Road wheel bearing I55, rail wheel II56, rail wheel bearing I I57, driven bearing 58 and cover board drive bearing 59, the first cover board 51
Bearing 59 is driven to be fixed on the inner sidewall of groove body 1 by cover board, the second cover board 52 passes through driven bearing 58 and the first cover board 51
Connection, the third cover board are connect by rail wheel bearing I I57 with the second cover board 52, and rail wheel II56 is installed on track wheel shaft
The both ends II57 are held, 53 two sides of third cover board are equipped with rail wheel bearing I 55, and rail wheel I54 is installed on 55 liang of rail wheel bearing I
End, rail wheel I54 and rail wheel II56 are all installed in the track groove of groove body 1.
Cover board drives bearing 59 to connect in driving bearing 33.
When wet process board needs to open the cover board of the part groove body of correlation machine, start hatch emergency release cock, transmission
Motor will drive the first pulley movements by output bearing, and the first belt pulley drives the second belt pulley by belt, due to
Second belt wheel drive shaft is held to be connected with cover board driving bearing, so cover board drive shaft is caused to forward dynamic, and then making first
Cover board opens upwards, since the second cover board connects the first cover board by driven bearing, so during the first cover board is dug,
Second cover board begins with the trend dug, since the second cover board is connect by rail wheel bearing I I with third cover board, and third lid
The rail wheel I and rail wheel II of plate are limited by the positive stop strip in groove body track groove, so that third cover board can only be in the horizontal direction
It is mobile, the cover board of the part groove body of machine is opened so that the second cover board shrinks drive third cover board and moves horizontally backward.
The utility model has the beneficial effects that manual switch top blind flange in semiconductor wet process is changed to by the utility model
It is DYN dynamic, the labor intensity of worker can be not only reduced in this way, simultaneously because motor driven, speed of uncapping is fast, uncaps
Stablize, greatly improves the working efficiency of semiconductor wet process, the cover-opening structure that the utility model uses is crank block
Mechanism, the mechanism structure is simple, easily manufactured, and configuration state is stablized, and is less prone to failure, even if breaking down, due to simple
Structure can very easily repair and finish, the mode of uncapping of the utility model saves process of manually uncapping using motor driven,
The labor intensity of worker can not only be reduced in this way at the same avoid personnel when uncapping due to the volume of lid, quality it is excessive with
And improper operation leads to the generation of injury to personnel accident, improves the safety of equipment.
Above content is only to the utility model structure example and explanation, the technology people of affiliated the art
Member makes various modifications or additions to the described embodiments or is substituted in a similar manner, without departing from reality
With novel structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (4)
1. a kind of electronic cover plate mechanism for auto of slot type, including groove body (1), transmission mechanism protect outer cover (2), transmission mechanism (3), upper sealing
Plate (4) and slot type cover board (5), which is characterized in that the transmission mechanism (3) is located at groove body (1) Internal back end, the driver
Structure protects outer cover (2) to be set to groove body (1) side, and the upper sealing panel (4) is set to transmission mechanism (3) upper end, the upper sealing panel
(4) it is set to groove body (1) upper end, the slot type cover board (5) is set to groove body (1) upper end, and the slot type cover board (5) is located at upper sealing panel
(4) front end.
2. the electronic cover plate mechanism for auto of a kind of slot type according to claim 1, which is characterized in that the groove body (1) is upper opening
Square structure, groove body (1) the two sides inner wall be equipped with indent the first track groove (11) and indent the second track groove
(12), groove body (1) inner back side is equipped with partition (15), and transmission mechanism fixed platform is equipped on rear side of the partition (15)
(14), groove body (1) lateral wall corresponding to the transmission mechanism fixed platform (14) is equipped with transmission mechanism support plate (13)；
In first track groove (11) up and down cell wall be equipped with limit raised line (111), the second track groove (12) structure with
First track groove (11) is identical.
3. the electronic cover plate mechanism for auto of a kind of slot type according to claim 1, which is characterized in that the transmission mechanism (3) includes
Driving motor (31), motor fixing frame (32), driving bearing (33), the second belt pulley (34), belt (35), the first belt pulley
(36) and motor output shaft is held (37), and the driving motor (31) is fixed on the biography of groove body (1) by motor fixing frame (32)
In motivation structure fixed platform (14), the motor output shaft holds (37) and is installed on transmission mechanism support plate (13), and described first
Belt pulley (36) is installed on motor output shaft and holds on (37), and the driving bearing (33) is installed on transmission mechanism support plate (13)
On, second belt pulley (34) is installed on driving bearing (33) one end, and driving bearing (33) other end connects slot type
Cover board (5), first belt pulley (36) are connect with the second belt pulley (34) by belt (35).
4. the electronic cover plate mechanism for auto of a kind of slot type according to claim 1, which is characterized in that the slot type cover board (5) includes
First cover board (51), the second cover board (52), third cover board (53), rail wheel I (54), rail wheel bearing I (55), rail wheel II
(56), rail wheel bearing I I (57), driven bearing (58) and cover board driving bearing (59), first cover board (51) pass through lid
Plate driving bearing (59) is fixed on the inner sidewall of groove body (1), and second cover board (52) passes through driven bearing (58) and first
Cover board (51) connection, the third cover board are connect by rail wheel bearing I I (57) with the second cover board (52), the rail wheel II
(56) rail wheel bearing I I (57) both ends are installed on, third cover board (53) two sides are equipped with rail wheel bearing I (55), described
Rail wheel I (54) is installed on rail wheel bearing I (55) both ends, and the rail wheel I (54) and rail wheel II (56) are all installed on
In the track groove of groove body (1)；
Cover board driving bearing (59) connects in driving bearing (33).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821322418.4U CN208819839U (en) | 2018-08-16 | 2018-08-16 | A kind of electronic cover plate mechanism for auto of slot type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821322418.4U CN208819839U (en) | 2018-08-16 | 2018-08-16 | A kind of electronic cover plate mechanism for auto of slot type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208819839U true CN208819839U (en) | 2019-05-03 |
Family
ID=66273620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821322418.4U Expired - Fee Related CN208819839U (en) | 2018-08-16 | 2018-08-16 | A kind of electronic cover plate mechanism for auto of slot type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208819839U (en) |
-
2018
- 2018-08-16 CN CN201821322418.4U patent/CN208819839U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190503 Termination date: 20210816 |