CN208819018U - 一种用于曝光机的混合波段扫描光源系统 - Google Patents
一种用于曝光机的混合波段扫描光源系统 Download PDFInfo
- Publication number
- CN208819018U CN208819018U CN201821678977.9U CN201821678977U CN208819018U CN 208819018 U CN208819018 U CN 208819018U CN 201821678977 U CN201821678977 U CN 201821678977U CN 208819018 U CN208819018 U CN 208819018U
- Authority
- CN
- China
- Prior art keywords
- lamp bead
- light source
- lamp
- exposure machine
- wave band
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- 239000011324 bead Substances 0.000 claims abstract description 105
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims abstract description 4
- WPWLFFMSSOAORQ-UHFFFAOYSA-N 5-bromo-4-chloro-3-indolyl acetate Chemical compound C1=C(Br)C(Cl)=C2C(OC(=O)C)=CNC2=C1 WPWLFFMSSOAORQ-UHFFFAOYSA-N 0.000 claims abstract description 4
- VUFOSBDICLTFMS-UHFFFAOYSA-M ethyl-hexadecyl-dimethylazanium;bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)CC VUFOSBDICLTFMS-UHFFFAOYSA-M 0.000 claims abstract description 4
- 230000005855 radiation Effects 0.000 claims description 9
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 8
- 238000005286 illumination Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- NGYIMTKLQULBOO-UHFFFAOYSA-L mercury dibromide Chemical compound Br[Hg]Br NGYIMTKLQULBOO-UHFFFAOYSA-L 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000001473 noxious effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821678977.9U CN208819018U (zh) | 2018-10-17 | 2018-10-17 | 一种用于曝光机的混合波段扫描光源系统 |
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CN201821678977.9U CN208819018U (zh) | 2018-10-17 | 2018-10-17 | 一种用于曝光机的混合波段扫描光源系统 |
Publications (1)
Publication Number | Publication Date |
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CN208819018U true CN208819018U (zh) | 2019-05-03 |
Family
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CN201821678977.9U Withdrawn - After Issue CN208819018U (zh) | 2018-10-17 | 2018-10-17 | 一种用于曝光机的混合波段扫描光源系统 |
Country Status (1)
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CN (1) | CN208819018U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109100921A (zh) * | 2018-10-17 | 2018-12-28 | 浙江欧珑电气有限公司 | 一种用于曝光机的混合波段扫描光源系统 |
-
2018
- 2018-10-17 CN CN201821678977.9U patent/CN208819018U/zh not_active Withdrawn - After Issue
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109100921A (zh) * | 2018-10-17 | 2018-12-28 | 浙江欧珑电气有限公司 | 一种用于曝光机的混合波段扫描光源系统 |
CN109100921B (zh) * | 2018-10-17 | 2023-10-20 | 浙江欧珑电气有限公司 | 一种用于曝光机的混合波段扫描光源系统 |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A mixed band scanning light source system for an exposure machine Effective date of registration: 20191225 Granted publication date: 20190503 Pledgee: China Minsheng Banking Corp Wenzhou branch Pledgor: ZHEJIANG OULONG ELECTRIC Co.,Ltd. Registration number: Y2019330000306 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20190503 Effective date of abandoning: 20231020 |
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AV01 | Patent right actively abandoned |
Granted publication date: 20190503 Effective date of abandoning: 20231020 |
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AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231101 Granted publication date: 20190503 Pledgee: China Minsheng Banking Corp Wenzhou branch Pledgor: ZHEJIANG OULONG ELECTRIC Co.,Ltd. Registration number: Y2019330000306 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right |