CN208806236U - A kind of silicon wafer protective device based on semiconductor fabrication process - Google Patents
A kind of silicon wafer protective device based on semiconductor fabrication process Download PDFInfo
- Publication number
- CN208806236U CN208806236U CN201821854543.XU CN201821854543U CN208806236U CN 208806236 U CN208806236 U CN 208806236U CN 201821854543 U CN201821854543 U CN 201821854543U CN 208806236 U CN208806236 U CN 208806236U
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- China
- Prior art keywords
- main body
- fixedly connected
- silicon wafer
- body case
- fabrication process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 62
- 239000010703 silicon Substances 0.000 title claims abstract description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000001681 protective effect Effects 0.000 title claims abstract description 16
- 239000012528 membrane Substances 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims description 10
- 238000005273 aeration Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 244000043261 Hevea brasiliensis Species 0.000 claims description 3
- 229920003052 natural elastomer Polymers 0.000 claims description 3
- 229920001194 natural rubber Polymers 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 abstract description 51
- 239000004743 Polypropylene Substances 0.000 abstract description 3
- 230000000704 physical effect Effects 0.000 abstract description 3
- -1 polypropylene Polymers 0.000 abstract description 3
- 229920001155 polypropylene Polymers 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 8
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The silicon wafer protective device based on semiconductor fabrication process that the utility model proposes a kind of; including; main body case; one side surface of the main body case is fixedly connected with action leg; one end of two action legs is fixedly installed with road wheel; another side surface of the main body case is fixedly connected with action bar, and one end of two action bars is fixedly connected to knob, and a side surface of the main body case is hinged with cover board by hinge.The silicon wafer protective device based on semiconductor fabrication process; in actual use; functional membrane can be combined by Multi-layer biaxial tension polypropylene film; have the characteristics that physical property is stable, air-tightness is good, high mechanical strength; we open cover board; multiple silicon wafers are inserted into article putting groove one by one; each article putting groove is inserted into a piece of silicon wafer; then appropriate air is inputted by gas nozzle with equipment such as pumps, to solve existing silicon wafer protecting box narrow application range, inconvenient problem with use.
Description
Technical field
The utility model relates to production process of semiconductor fields, more particularly, to a kind of silicon based on semiconductor fabrication process
Wafer protective device.
Background technique
It is generally known that semiconductor, refers to material of the electric conductivity between conductor and insulator under room temperature.Semiconductor is being received
Sound is mechanical, electrical to have a wide range of applications depending on fields such as machine and thermometrics.Today most electronic product, such as computer, mobile electricity
Core cell in words or digital audio tape all has extremely close connection with semiconductor.Common semiconductor material has
Silicon, germanium, GaAs etc., and silicon is even more most influential one kind in business application in various semiconductor materials.
Silicon wafer just refers to that silicon wafer used in silicon semiconductor circuit production, wafer are the base stocks for manufacturing IC.Silicon
Wafer is that element silicon is purified (99.999%), and long silicon crystal bar is made followed by by these pure silicons, becomes manufacture quartz half
The material of conductor is ground by photomechanical production, polishing, and polysilicon is melted pull-out monocrystalline silicon crystal bar, then by the programs such as slice
It is cut into wafer very thin one by one.
Silicon wafer quality is hard but property is crisp, and slightly colliding with can damage.Either to silicon wafer in production process
Short-distance transport, or transporting for long-distance, require satisfactory packaging.In order to reach sufficient guarantor to silicon wafer
Shield can be matched for the silicon wafer of different size using corresponding protecting box.Because silicon wafer specification is more, one
As have the plurality of specifications such as 2 inches, 4 inches, 5 inches, 6 inches, 8 inches, 12 inches, some manufacturers produce the silicon of special requirement
Wafer, thickness are not quite similar again, if being difficult to meet the requirements using the protecting box of same specification, slightly thick can not be caught in, slightly
Thin is easy to fall off damage again.It is may but need the protecting box of plurality of specifications even being both 12 inches of silicon wafer.?
In packed and transported, and all sizes must be matched.Thus, it is necessary to the protecting box of various specifications, it is not only shared
Space is very big, and when use is also extremely inconvenient.
Utility model content
The silicon wafer protective device based on semiconductor fabrication process that the utility model proposes a kind of, it is existing to solve
Silicon wafer protecting box narrow application range, inconvenient problem with use.
The technical solution of the utility model is achieved in that a kind of silicon wafer protection based on semiconductor fabrication process
Device, including, main body case a, side surface of the main body case is fixedly connected with action leg, and one end of two action legs is equal
It is fixedly installed with road wheel, another side surface of the main body case is fixedly connected with action bar, one end of two action bars
It is fixedly connected to knob, a side surface of the main body case is hinged with cover board by hinge.
The surface of the main body case has been respectively fixedly connected with fixed block and lower fixed block.
The inner sidewall of the main body case is provided with fixed device, and the fixed device includes functional membrane.
Preferably, the upper surface of two the upper fixing blocks is fixedly connected to connecting column, two lower fixed blocks
Lower surface is fixedly connected to link block, and the lower surface of two link blocks offers connector, is convenient for multiple present apparatus
It is stacked.
Preferably, the surface of the functional membrane is fixedly connected with main body box inner wall, the lower surface of the functional membrane and master
Inflatable chamber is formed between body chamber interior wall, convenient for fixed silicon wafer.
Preferably, object placing cavity is formed between two adjacent surfaces of the functional membrane, the inner sidewall of the object placing cavity is fixed
It is connected with Anti-skid sheet, the interior bottom wall of the object placing cavity is fixedly connected with magma, convenient for protection silicon wafer.
Preferably, the making material of the magma includes silica gel, and the upper surface of the magma offers article putting groove, the function
Energy film is internally provided with holding plate, and the making material of the holding plate includes natural rubber, convenient for being kept fixed the shape of device
Shape.
Preferably, the lower surface of the functional membrane is fixedly connected with locating piece, the lower surface of multiple locating pieces with
Bottom wall is fixedly connected in main body case, and the side of the locating piece offers venthole, and the inner wall of multiple ventholes runs through
And another side surface of locating piece is extended to, it circulates in inflatable chamber convenient for air.
Preferably, a side surface of the main body case offers aeration aperture, and the inner wall of the aeration aperture runs through and extends to
Main body box inner wall, the inner wall of the aeration aperture are fixedly connected with gas nozzle, and the gas nozzle is connected to inflatable chamber fixation, convenient for control
Volume of air inside inflatable chamber.
Using above-mentioned technical proposal, the utility model has the following beneficial effects:
1, by setting main body case, the inner sidewall of main body case is provided with fixed device, and fixed device includes functional membrane, thus
Make the present apparatus have the effect of protect silicon wafer and the scope of application it is wider, in actual use, functional membrane can be by more
Layer bidirectional stretching polypropylene film is combined, and has the characteristics that physical property is stable, air-tightness is good, high mechanical strength, we
Cover board is opened, multiple silicon wafers are inserted into article putting groove one by one, each article putting groove is inserted into a piece of silicon wafer, then with inflating
The equipment such as machine input appropriate air by gas nozzle, enter appropriate air in inflatable chamber, air makes to inflate by vent flow
Intracavitary portion fills gradually, at the same the Anti-skid sheet of every piece of silicon wafer both side surface by inflation intracavity gas bring pressure to this
Silicon wafer direction squeezes, by silicon wafer stuck fast, magma, Anti-skid sheet and functional membrane all matter that silicon wafer directly contacts
Ground is softer and does not have corner angle, we, which cover cover board, can carry out the transport on long and short way, simultaneously as the special designing of the present apparatus,
Depending on specification is as needed, but the scope of application is wider, for example is suitable for the present apparatus of inch, and it is different not only to can protect thickness
Inch silicon wafer, the silicon wafer of inch and inch is equally applicable, but silicon wafer specification is too small, just too wasting space
, the present apparatus of more small dimension should be used, the protective device specification for thus needing to prepare, quantity have just been lacked very much, saved
Cost, to make that the present apparatus has the effect of protecting silicon wafer and the scope of application is wider.
2, by setting main body case, a side surface of main body case is fixedly connected with action leg, and one end of two action legs is equal
It is fixedly installed with road wheel, so that the present apparatus is made to have the effect of convenient transportation, use, in actual use, connecting column
Diameter it is more smaller than the internal diameter of connector, when we need amount transport, after the present apparatus installs, fixes silicon wafer
Multiple present apparatus stacked on top can be put, be readily transported, the connecting column insertion for the device being located below is corresponding positioned at upper
In the connector of the device in face, stacked in multi-layers is convenient for amount transport, makes multiple present apparatus shapes by connector and connecting column grafting
At whole relative securement, we assemble after external whole to do a fixation with rope etc. again just very firm, when me
When needing small-scale short-distance transport, cover cover board, hold knob, present apparatus oblique pull is played into dragging, it is time saving and energy saving,
If the tension of silicon wafer card bleeds off some air by gas nozzle when taking, to make the present apparatus that there is convenient transportation, use
Effect.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the main body case structure top view of the utility model；
Fig. 3 is the upper fixed-block-architecture (FBA) perspective view of the utility model；
Fig. 4 is the connecting block structure bottom view of the utility model；
Fig. 5 is the positioning block structure side view of the utility model.
Wherein: 1, main body case；2, action leg；3, road wheel；4, action bar；5, it shakes hands；6, cover board；7, upper fixed block；71,
Connecting column；8, lower fixed block；81, link block；82, connector；9, functional membrane；91, inflatable chamber；92, object placing cavity；93, Anti-skid sheet；
94, magma；95, article putting groove；96, holding plate；97, locating piece；98, venthole；99, gas nozzle.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-5 is please referred to, the utility model provides a kind of technical solution: a kind of Silicon Wafer based on semiconductor fabrication process
Piece protective device, including, main body case 1 a, side surface of main body case 1 is fixedly connected with action leg 2, one end of two action legs 2
It is fixedly installed with road wheel 3, another side surface of main body case 1 is fixedly connected with action bar 4, and one end of two action bars 4 is equal
It is fixedly connected with knob 5, a side surface of main body case 1 is hinged with cover board 6 by hinge.
The surface of main body case 1 has been respectively fixedly connected with fixed block 7 and lower fixed block 8, the upper surface of two upper fixed blocks 7
It is fixedly connected to connecting column 71, the lower surface of two lower fixed blocks 8 is fixedly connected to link block 81, two link blocks 81
Lower surface offers connector 82, by be arranged main body case 1, a side surface of main body case 1 be fixedly connected with action leg 2, two
One end of a action leg 2 is fixedly installed with road wheel 3, to make the present apparatus have the effect of convenient transportation, use, in reality
In use process, the diameter of connecting column 71 is more smaller than the internal diameter of connector 82, when we need amount transport, the present apparatus
Install, fix silicon wafer after multiple present apparatus stacked on top can be put, be readily transported, by the company for the device being located below
It connects column 71 to be inserted into the connector 82 of corresponding device located above, stacked in multi-layers is convenient for amount transport, passes through connector 82
The whole relative securement for forming multiple present apparatus with 71 grafting of connecting column, we are whole again with rope etc. in outside after assembling
It is just very firm to do a fixation, when we need small-scale short-distance transport, covers cover board 6, holds knob 5, incite somebody to action this
Device oblique pull plays dragging, time saving and energy saving, if the tension of silicon wafer card, bleeds off some air i.e. by gas nozzle 99 when taking
Can, so that the present apparatus be made to have the effect of convenient transportation, use.
The inner sidewall of main body case 1 is provided with fixed device, and fixed device includes functional membrane 9, the surface of functional membrane 9 and main body
1 inner sidewall of case is fixedly connected, and inflatable chamber 91 is formed between 1 inner wall of lower surface and main body case of functional membrane 9, and functional membrane 9 is adjacent
Object placing cavity 92 is formed between two surfaces, the inner sidewall of object placing cavity 92 is fixedly connected with Anti-skid sheet 93, the interior bottom wall of object placing cavity 92
It is fixedly connected with magma 94, the making material of magma 94 includes silica gel, and the upper surface of magma 94 offers article putting groove 95, functional membrane
9 are internally provided with holding plate 96, and the making material of holding plate 96 includes natural rubber, the lower surface of functional membrane 9 is fixedly connected
There is locating piece 97, the lower surface of multiple locating pieces 97 is fixedly connected with bottom wall in main body case 1, and the side of locating piece 97 offers
The inner wall of venthole 98, multiple ventholes 98 runs through and extends to another side surface of locating piece 97, a side surface of main body case 1
Aeration aperture is offered, the inner wall of aeration aperture runs through and extends to 1 inner sidewall of main body case, and the inner wall of aeration aperture is fixedly connected with gas nozzle
99, gas nozzle 99 is connected to the fixation of inflatable chamber 91, and by the way that main body case 1 is arranged, the inner sidewall of main body case 1 is provided with fixed device, Gu
Determining device includes functional membrane 9, thus make the present apparatus have the effect of protect silicon wafer and the scope of application it is wider, actually using
In the process, functional membrane 9 can be combined by Multi-layer biaxial tension polypropylene film, have physical property is stable, air-tightness is good,
The characteristics of high mechanical strength, we open cover board 6, and multiple silicon wafers are inserted into one by one in article putting groove 95, each article putting groove 95
It is inserted into a piece of silicon wafer, appropriate air is then inputted by gas nozzle 99 with equipment such as pumps, appropriate air is made to enter inflation
In chamber 91, air makes to fill gradually inside inflatable chamber 91 by the flowing of venthole 98, while every piece of silicon wafer both side surface
Anti-skid sheet 93 is squeezed by gas bring pressure in inflatable chamber 91 to the silicon wafer direction, by silicon wafer stuck fast,
Magma 94, Anti-skid sheet 93 and all quality of functional membrane 9 that silicon wafer directly contacts are softer and do not have corner angle, we cover cover board 6
Can carry out the transport on long and short way, simultaneously as the special designing of the present apparatus, depending on specification is as needed, but the scope of application compared with
Extensively, for example it is suitable for 12 inches of the present apparatus, not only can protect 12 inches of different silicon wafers of thickness, 8 inches and 6 inches
Silicon wafer be equally applicable, but silicon wafer specification is too small, just too wasting space, should use this dress of more small dimension
It sets, protective device specification, the quantity for thus needing to prepare just have been lacked very much, cost are saved, so that the present apparatus be made to have
Protect silicon wafer and the wider effect of the scope of application.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (7)
1. a kind of silicon wafer protective device based on semiconductor fabrication process, which is characterized in that including main body case (1) is described
One side surface of main body case (1) is fixedly connected with action leg (2), and one end of two action leg (2) is fixedly installed with row
Driving wheel (3), another side surface of the main body case (1) are fixedly connected with action bar (4), one end of two action bar (4)
It is fixedly connected to knob (5), a side surface of the main body case (1) is hinged with cover board (6) by hinge；
The surface of the main body case (1) has been respectively fixedly connected with fixed block (7) and lower fixed block (8)；
The inner sidewall of the main body case (1) is provided with fixed device, and the fixed device includes functional membrane (9).
2. a kind of silicon wafer protective device based on semiconductor fabrication process according to claim 1, it is characterised in that:
The upper surface of two the upper fixing blocks (7) is fixedly connected to connecting column (71), the lower surface of two lower fixed blocks (8)
It is fixedly connected to link block (81), the lower surface of two link blocks (81) offers connector (82).
3. a kind of silicon wafer protective device based on semiconductor fabrication process according to claim 1, it is characterised in that:
The surface of the functional membrane (9) is fixedly connected with main body case (1) inner sidewall, the lower surface of the functional membrane (9) and main body case (1)
Inflatable chamber (91) are formed between inner wall.
4. a kind of silicon wafer protective device based on semiconductor fabrication process according to claim 3, it is characterised in that:
Object placing cavity (92) are formed between two adjacent surfaces of the functional membrane (9), the inner sidewall of the object placing cavity (92) is fixedly connected
Have Anti-skid sheet (93), the interior bottom wall of the object placing cavity (92) is fixedly connected with magma (94).
5. a kind of silicon wafer protective device based on semiconductor fabrication process according to claim 4, it is characterised in that:
The making material of the magma (94) includes silica gel, and the upper surface of the magma (94) offers article putting groove (95), the function
Film (9) is internally provided with holding plate (96), and the making material of the holding plate (96) includes natural rubber.
6. a kind of silicon wafer protective device based on semiconductor fabrication process according to claim 3, it is characterised in that:
The lower surface of the functional membrane (9) is fixedly connected with locating piece (97), and the lower surface of multiple locating pieces (97) is and main body
The interior bottom wall of case (1) is fixedly connected, and the side of the locating piece (97) offers venthole (98), multiple ventholes (98)
Inner wall runs through and extends to locating piece (97) another side surface.
7. a kind of silicon wafer protective device based on semiconductor fabrication process according to claim 3, it is characterised in that:
One side surface of the main body case (1) offers aeration aperture, and the inner wall of the aeration aperture runs through and extends on the inside of main body case (1)
Wall, the inner wall of the aeration aperture are fixedly connected with gas nozzle (99), and the gas nozzle (99) is connected to inflatable chamber (91) fixation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821854543.XU CN208806236U (en) | 2018-11-12 | 2018-11-12 | A kind of silicon wafer protective device based on semiconductor fabrication process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821854543.XU CN208806236U (en) | 2018-11-12 | 2018-11-12 | A kind of silicon wafer protective device based on semiconductor fabrication process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208806236U true CN208806236U (en) | 2019-04-30 |
Family
ID=66239674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821854543.XU Expired - Fee Related CN208806236U (en) | 2018-11-12 | 2018-11-12 | A kind of silicon wafer protective device based on semiconductor fabrication process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208806236U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111092037A (en) * | 2019-12-10 | 2020-05-01 | 王尧 | Shockproof and easy-to-clean wafer box |
| CN113968375A (en) * | 2021-11-02 | 2022-01-25 | 张月琴 | Silicon wafer storage and transportation box |
-
2018
- 2018-11-12 CN CN201821854543.XU patent/CN208806236U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111092037A (en) * | 2019-12-10 | 2020-05-01 | 王尧 | Shockproof and easy-to-clean wafer box |
| CN113968375A (en) * | 2021-11-02 | 2022-01-25 | 张月琴 | Silicon wafer storage and transportation box |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190430 |