CN208796950U - The vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission - Google Patents
The vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission Download PDFInfo
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- CN208796950U CN208796950U CN201821753737.0U CN201821753737U CN208796950U CN 208796950 U CN208796950 U CN 208796950U CN 201821753737 U CN201821753737 U CN 201821753737U CN 208796950 U CN208796950 U CN 208796950U
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- vacuum chamber
- moving cell
- transmission
- vacuum
- driving motor
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Abstract
The utility model discloses a kind of vacuum chamber ion beam correction of the flank shape processing unit (plant)s of vacuum sealing transmission, including vacuum chamber, it further include ion source movement mechanism, ion source movement mechanism include the driving motor being set to outside vacuum chamber and with the driving axis connection of driving motor and be set to the indoor transmission component of vacuum, transmission component and driving motor are sequentially connected inside and outside vacuum chamber by waterproof transmission discreteness, and transmission component is connect with ion source.The utility model can be used ordinary motor instead of vacuum motor, reduce motor cost due to using sealed transmission part to be driven on vacuum wall.
Description
Technical field
The utility model relates to vacuum environment work pieces process, such as ion beam correction of the flank shape to process technical field more particularly to one
The vacuum chamber ion beam correction of the flank shape processing unit (plant) of kind vacuum sealing transmission.
Background technique
Currently, ion beam correction of the flank shape process equipment is designed frequently with single vacuum-chamber design or dual-vacuum chamber.Ion beam is repaired at present
All movement mechanisms of shape processing unit (plant) are all located in vacuum chamber, and driving motor also is located in vacuum chamber, work in vacuum environment,
Therefore driving motor must use vacuum motor.Vacuum motor is expensive compared with ordinary motor, and driving motor occupies vacuum
Space increases vacuum-chamber dimensions, increases vacuum space, increases vacuum-pumping system load, improves ion beam correction of the flank shape
The cost of processing unit (plant).
Utility model content
The utility model provides a kind of vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission, to solve mesh
The transmission mechanism of preceding vacuum chamber ion beam correction of the flank shape processing unit (plant) technical problem with high costs.
In order to solve the above technical problems, the utility model proposes technical solution are as follows:
A kind of vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission, including vacuum chamber, further include ion source fortune
Motivation structure, ion source movement mechanism include the driving motor being set to outside vacuum chamber and with the driving axis connection of driving motor and
It is set to the indoor transmission component of vacuum, transmission component and driving motor are carried out inside and outside vacuum chamber by waterproof transmission discreteness
Transmission connection, transmission component are connect with ion source.
As further improvement of the utility model:
Preferably, vacuum chamber ion beam correction of the flank shape processing unit (plant) includes that the main vacuum chamber being tightly connected by gate valve and pair are true
Empty room, secondary vacuum chamber is interior to be equipped with Z-direction moving cell, and Z-direction moving cell includes transmission component and driving motor；Z-direction moving cell
Transmission component and driving motor be sequentially connected inside and outside secondary vacuum chamber by waterproof transmission discreteness.
Preferably, ion source movement mechanism includes the vertical folded X set to moving cell and Y-direction moving cell；X is single to movement
Member and Y-direction moving cell include corresponding transmission component and driving motor；X is into moving cell and Y-direction moving cell, with master
The transmission component and driving motor of the moving cell of the wall connection of vacuum chamber pass through waterproof transmission discreteness inside and outside main vacuum chamber
It is sequentially connected.
Preferably, ion source movement mechanism includes X to moving cell, Y-direction moving cell and Z-direction moving cell, and X is to movement
Unit, Y-direction moving cell and Z-direction moving cell, which are mutually perpendicular to, and three is folded sets, the moving cell connecting with the wall of vacuum chamber
Transmission component and driving motor are sequentially connected inside and outside vacuum chamber by waterproof transmission discreteness.
Preferably, waterproof transmission discreteness is magnetic fluid seal driving component.
Preferably, magnetic fluid seal driving component includes the input shaft that atmospheric side is arranged in and the output that inlet side is arranged in
Axis, input shaft are driven main body by magnetorheological sealing and are connected with exporting axis.
The utility model has the following beneficial effects:
1, the vacuum chamber ion beam correction of the flank shape processing unit (plant) of the vacuum sealing transmission of the utility model, due to being adopted on vacuum wall
It is driven with sealed transmission part, ordinary motor can be used instead of vacuum motor, reduce motor cost, while may be selected bigger
The motor of model provides bigger rotating torque and faster revolving speed, can improve the acceleration and speed of corresponding axis, be very beneficial for from
Beamlet correction of the flank shape processing, can process the optical element of higher precision within a short period of time.
2, in a preferred approach, the vacuum chamber ion beam correction of the flank shape processing unit (plant) of the vacuum sealing transmission of the utility model, can
With the ion beam correction of the flank shape processing unit (plant) for being suitable for single vacuum chamber and dual-vacuum chamber, driving motor is external, reduces fortune in vacuum chamber
The size of motivation structure can reduce the size of vacuum chamber, reduce vacuum chamber volume, reduces vacuum-pumping system load, makes vacuum
Cell structure is more optimized rationally, manufacturing cost decline.
Other than objects, features and advantages described above, there are also other purposes, feature and excellent for the utility model
Point.Below with reference to accompanying drawings, the utility model is described in further detail.
Detailed description of the invention
The attached drawing constituted part of this application is used to provide a further understanding of the present invention, the utility model
Illustrative embodiments and their description are not constituteed improper limits to the present invention for explaining the utility model.In attached drawing
In:
Fig. 1 is single vacuum chamber ion beam correction of the flank shape processing unit (plant) of the vacuum sealing transmission of the preferred embodiment in the utility model 1
Structural schematic diagram；
Fig. 2 is the structural schematic diagram of the magnetic fluid seal driving component of the preferred embodiment in the utility model 1；
Fig. 3 is the dual-vacuum chamber ion beam correction of the flank shape system of processing of the vacuum sealing transmission of the preferred embodiment in the utility model 2
Structural schematic diagram.
Each label indicates in figure:
1, main vacuum chamber；2, secondary vacuum chamber；3, gate valve；4, workpiece；5, ion source；6, workpiece motion s mechanism；8, ion
Source movement mechanism；9, X is to moving cell；10, Y-direction moving cell；11, Z-direction moving cell；12, inlet side transmission shaft；13, defeated
Shaft；14, magnetorheological sealing is driven main body；15, input shaft；16, vacuum-chamber wall.
Specific embodiment
The embodiments of the present invention are described in detail below in conjunction with attached drawing, but the utility model can be by right
It is required that the multitude of different ways for limiting and covering is implemented.
Following embodiment only for illustrating, is limited the combination of technical characteristic, and any technology is special
Sign across embodiment can reasonably be combined.
Embodiment 1:
Referring to Fig. 1, the present embodiment is the example that single vacuum chamber uses vacuum sealing transmission.The present embodiment is vacuum sealing biography
Dynamic vacuum chamber ion beam correction of the flank shape processing unit (plant), including vacuum chamber are provided with ion source movement mechanism, ion source fortune in vacuum chamber
For motivation structure 8 for driving ion source 5 to process workpiece 4, ion source movement mechanism includes that X is moved to moving cell 9, Y-direction
Unit 10 and Z-direction moving cell 11, X is to moving cell 9, Y-direction moving cell 10 and Z-direction moving cell 11 is mutually perpendicular to and three
It is folded to set, the moving cell (positioned at the bottom) being connect with the wall of vacuum chamber include the driving motor being set to outside vacuum chamber and
With the driving axis connection of driving motor and be set to the indoor transmission component of vacuum.The waterproof transmission discreteness of the present embodiment is magnetic current
Body waterproof transmission discreteness.Referring to fig. 2, (a) is magnetic fluid seal driving main body 14 and the input shaft 15 that atmospheric side is arranged in figure；
It (b) is magnetic fluid seal driving main body 14 and the output shaft 13 that inlet side is set；It (c) is to be installed on magnet fluid sealing component
Structural schematic diagram on vacuum-chamber wall 16, in figure input shaft 15 (being arranged in atmospheric side) by magnetorheological sealing transmission main body 14 and
Connection (is arranged in inlet side) in output shaft 13.
Transmission component and driving motor are sequentially connected inside and outside vacuum chamber by waterproof transmission discreteness.Ion source 5
It is arranged on the moving cell of top layer.
When implementation, ion source movement mechanism 8 can also include one or more rotating device, these rotating devices are not
It is arranged in the bottom, the moving cell of the bottom still uses above-mentioned structure.Due to being driven on vacuum wall 16 using sealing
Component transmission can be used ordinary motor instead of vacuum motor, reduce motor cost, while larger number electricity may be selected
Machine provides bigger rotating torque and faster revolving speed, can improve the acceleration and speed of corresponding axis, is very beneficial for ion beam throwing
Light can process the optical element of higher precision within a short period of time.
Embodiment 2:
Referring to Fig. 3, the present embodiment is the example that dual-vacuum chamber uses vacuum sealing transmission.The vacuum sealing of the present embodiment passes
Dynamic vacuum chamber ion beam correction of the flank shape processing unit (plant), it is secondary including the main vacuum chamber 1 being tightly connected by gate valve 3 and secondary vacuum chamber 2
Workpiece motion s mechanism 6 is equipped in vacuum chamber 2, workpiece motion s mechanism 6 includes the Z-direction movement below the Working position of workpiece 4
Unit 11, Z-direction moving cell 11 include transmission component and driving motor；The transmission component and driving motor of Z-direction moving cell 11
It is sequentially connected inside and outside secondary vacuum chamber 2 by waterproof transmission discreteness.Ion source movement mechanism 8 includes the vertical folded X set
To moving cell 9 and Y-direction moving cell 10；X to moving cell 9 and Y-direction moving cell 10 include corresponding transmission component and
Driving motor；X is into moving cell 9 and Y-direction moving cell 10, the transmission group for the moving cell connecting with the wall of main vacuum chamber 1
Part and driving motor are sequentially connected inside and outside main vacuum chamber 1 by waterproof transmission discreteness.
It is moved by workpiece motion s mechanism 6 and 8 complementary fit of ion source movement mechanism, it is not necessary to configure dedicated transmission
Workpiece 4 is transmitted on the fixture of main vacuum chamber 1 by device, and cost is greatly saved.Using the structure of the present embodiment, two can be used in
It further reduced equipment on the basis of guaranteeing machining accuracy using sealed gearing device on the moving cell in a direction
Cost.
Embodiment 3:
The dual-vacuum chamber ion beam processing system of the present embodiment and 2 structure of embodiment are essentially identical, and details are not described herein.Two
Person's the difference is that only: in the present embodiment, the ion source movement mechanism 8 of main vacuum chamber 1 is configured to XYA structure, secondary vacuum
The workpiece motion s mechanism 6 of room 2 is configured to ZC structure.I.e. Z-direction moving cell 11 and C is arranged to rotating unit in workpiece motion s mechanism 6
(can rotate around Z-direction), C is connected between fixture and Z-direction moving cell 11 to rotating unit；Ion source movement mechanism 8 be arranged A to
To moving cell 9 and Y-direction moving cell 10, A is connected to ion source 5 to rotating unit by rotating unit (can around X to rotation) and X
And X is between moving cell 9 or Y-direction moving cell 10.It therefore can also be by the bottom grade kinematic axis of two movement mechanisms
Electric machine external is in outside vacuum chamber, that is, X-axis motor and Z axis electric machine external, similar to Example 2 herein.When implementation, also it can be used
According to circumstances being equipped in workpiece motion s mechanism 6 or ion source movement mechanism 8 can rotate around the B that Y-direction rotates to rotating unit
Unit is not provided with not influencing the vacuum sealing drive mechanism of basic motion unit in the bottom.
In summary, the available ion beam correction of the flank shape processing unit (plant) for being suitable for single vacuum chamber and dual-vacuum chamber of the utility model,
Driving motor is external, reduces the size of movement mechanism in vacuum chamber, can reduce the size of vacuum chamber, reduces vacuum chamber and holds
Product reduces vacuum-pumping system load, keeps vacuum chamber structure more optimized rationally, manufacturing cost decline.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission, including vacuum chamber, which is characterized in that further include
Ion source movement mechanism (8), the ion source movement mechanism (8) include the driving motor being set to outside the vacuum chamber and with
The driving axis connection of the driving motor and it is set to the indoor transmission component of the vacuum, the transmission component and the driving
Motor is sequentially connected inside and outside the vacuum chamber by waterproof transmission discreteness, and the transmission component and ion source (5) are even
It connects.
2. the vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission according to claim 1, which is characterized in that institute
Stating vacuum chamber ion beam correction of the flank shape processing unit (plant) includes the main vacuum chamber (1) being tightly connected by gate valve and secondary vacuum chamber (2), institute
It states in secondary vacuum chamber (2) and is equipped with Z-direction moving cell (11), the Z-direction moving cell (11) includes transmission component and driving motor；
The transmission component and driving motor of the Z-direction moving cell (11) are inside and outside by sealing transmission group the secondary vacuum chamber (2)
Part is sequentially connected.
3. the vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission according to claim 2, which is characterized in that institute
Stating ion source movement mechanism (8) includes the vertical folded X set to moving cell (9) and Y-direction moving cell (10)；The X is to movement
Unit (9) and Y-direction moving cell (10) include corresponding transmission component and driving motor；The X is to moving cell (9) and Y
To in moving cell (10), the transmission component and driving motor for the moving cell connecting with the wall (16) of main vacuum chamber (1) are in institute
State inside and outside being sequentially connected by waterproof transmission discreteness of main vacuum chamber (1).
4. the vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission according to claim 1, which is characterized in that institute
Stating ion source movement mechanism (8) includes X to moving cell (9), Y-direction moving cell (10) and Z-direction moving cell (11), the X
It is mutually perpendicular to moving cell (9), Y-direction moving cell (10) and Z-direction moving cell (11) and three folds and sets, the wall with vacuum chamber
(16) transmission component of the moving cell connected and driving motor are carried out inside and outside the vacuum chamber by waterproof transmission discreteness
Transmission connection.
5. the vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission according to any one of claim 1 to 4,
It is characterized in that, the waterproof transmission discreteness is magnetic fluid seal driving component.
6. the vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission according to claim 5, which is characterized in that institute
Stating magnetic fluid seal driving component includes the input shaft (15) that atmospheric side is arranged in and the output shaft (13) that inlet side is arranged in, institute
It states input shaft (15) and is connect by magnetorheological sealing transmission main body (14) with the output shaft (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821753737.0U CN208796950U (en) | 2018-10-26 | 2018-10-26 | The vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821753737.0U CN208796950U (en) | 2018-10-26 | 2018-10-26 | The vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208796950U true CN208796950U (en) | 2019-04-26 |
Family
ID=66212320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821753737.0U Active CN208796950U (en) | 2018-10-26 | 2018-10-26 | The vacuum chamber ion beam correction of the flank shape processing unit (plant) of vacuum sealing transmission |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208796950U (en) |
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2018
- 2018-10-26 CN CN201821753737.0U patent/CN208796950U/en active Active
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