CN208753269U - Chip conveying compresses detection device - Google Patents
Chip conveying compresses detection device Download PDFInfo
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- CN208753269U CN208753269U CN201821279972.9U CN201821279972U CN208753269U CN 208753269 U CN208753269 U CN 208753269U CN 201821279972 U CN201821279972 U CN 201821279972U CN 208753269 U CN208753269 U CN 208753269U
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- chip
- delivery track
- waste product
- rotating arm
- probe
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Abstract
It is conveyed the utility model discloses a kind of chip and compresses detection device, belong to conveying equipment field, including the delivery track for conveying chip, the check bit for detecting chip, the waste product arranging mechanism for placing waste product, the detection device for moving transplantation device that chip is detected and for pressing detection chip；The transplantation device will be moved to the check bit from the delivery track to chip, effective chip after the transplantation device will test is moved to the delivery track from the check bit, and the discarded chip after the transplantation device will test is moved to waste product arranging mechanism from the check bit.The utility model efficiently solves the problems, such as to need to stop when detecting chip in the prior art easy to damage during production line and wafer inspection, chip can be detected while production line persistently conveys, reduce the entire production technology time, reasonably optimizing resource distribution, production efficiency is improved, the production capacity and yields of chip has been effectively ensured.
Description
Technical field
Originally practical to be related to conveying equipment field more particularly to a kind of chip conveying compression detection device.
Background technique
Chip is one of most important raw material of LED, is the luminous component of LED, LED most crucial part, the quality of chip
It will directly determine the performance of LED.
In the production process of chip, automatic feeding device is generallyd use to convey to chip, to complete correlation
Technique produces good chip.Meanwhile the quality to the chip of output being needed to detect, to ensure yields.
In the prior art, in the detection process of chip, it is often necessary to stop production line to detect chip, detection finishes
Afterwards, restart production line, after next group chip reaches predetermined station, stop production line and detected, moved in circles.Although logical
The production method for crossing automation detects wafer quality, but needs the continuous conveying for stopping production line, greatly shadow
The production efficiency for having rung chip causes a large amount of wasting of resources；And the mode in the detection process, generalling use compression is examined
Chip is surveyed, usually due to the excessive damage chip of pressure.
Utility model content
In view of the above problems, chip conveying provided by the utility model compresses detection device, to solve existing skill
It needs to stop production line, wafer inspection process problem easy to damage when detection chip in art, can persistently be conveyed in production line
While it is safe and stable chip is detected, reduce the entire production technology time, reasonably optimizing resource distribution improves
The production capacity and yields of chip has been effectively ensured in production efficiency.
To achieve the above object, the technical solution that the utility model is taken are as follows:
A kind of chip conveying provided by the utility model compresses detection device, including for conveying chip delivery track,
For detecting the check bit of chip, the waste product arranging mechanism for placing waste product, the transplanting dress detected for moving chip
It sets and for compressing the detection device for detecting chip；The transplantation device will be moved to the inspection from the delivery track to chip
Location, effective chip after the transplantation device will test are moved to the delivery track, the transplanting dress from the check bit
It sets the discarded chip after will test and is moved to waste product arranging mechanism from the check bit；
The detection device includes multiple probes for detecting chip and the fixed frame for fixing the probe；It is described
Probe is set to above the check bit；The fixed frame includes firm banking, rotating arm and for driving the rotating arm
Power mechanism；The rotating arm is rotatably affixed at the firm banking, before the rotating arm is divided by the firm banking
Rotating arm and rear rotating arm；Rotating arm is rotatably affixed at the power mechanism after described；The probe is slidably fixed on institute
Preceding rotating arm is stated, is provided with flexible connection mechanism between the probe and the preceding rotating arm；
Wherein, when the rotating arm is in a horizontal position, downward, the probe can slide up and down the end of probe.
Chip provided by the utility model conveying compresses detection device, it is preferable that the probe through be fixed on it is described before
Rotating arm, the probe are divided into probe top and probe lower part by the preceding rotating arm, and the flexible connection mechanism is set to
Between the probe lower part and the preceding rotating arm, the probe top is provided with stop nut.
Chip conveying provided by the utility model compresses detection device, it is preferable that the power mechanism is cylinder rod straight line
The cylinder of movement；The cylinder rod of the cylinder is rotatably affixed at the rear rotating arm；The flexible connection mechanism is spring.
Chip conveying provided by the utility model compresses detection device, it is preferable that the detection is located at the waste product and puts
Mechanism is set to the same side of the delivery track；The transplantation device is can 360 ° of the horizontal direction mechanical arms rotated.
Chip conveying provided by the utility model compresses detection device, it is preferable that the side of the delivery track is provided with
Feeding device, the feeding device include elevating mechanism one and delivery device；The delivery device is by chip to be measured from the liter
Descending mechanism one is moved to the delivery track.
Chip conveying provided by the utility model compresses detection device, it is preferable that the other side of the delivery track is arranged
There is blanking device, the blanking device includes elevating mechanism two and pulling mechanism；The pulling mechanism will test after chip from
The delivery track is moved to the elevating mechanism two.
Chip conveying provided by the utility model compresses detection device, it is preferable that the feeding device further includes for inciting somebody to action
Chip is sent into the sliding equipment one of the elevating mechanism one, and the blanking device further includes that chip is removed to the elevating mechanism two
Sliding equipment two.
Chip conveying provided by the utility model compresses detection device, it is preferable that the chip conveying compresses detection device
It further include delivery track one being set side by side with the delivery track and for moving the chip on the delivery track one
Transplantation device one；The transplantation device one will be moved to the check bit, the transplanting from the delivery track one to chip
Effective chip after device one will test is moved to the delivery track one from the check bit, and the transplantation device one will test
Discarded chip afterwards is moved to waste product arranging mechanism from the check bit.
Chip conveying provided by the utility model compresses detection device, it is preferable that the waste product arranging mechanism includes lifting
Mechanism three, pulling mechanism one and waste product put position；Waste product after the pulling mechanism one will test puts displacement from the waste product
It moves to the elevating mechanism three.
Chip conveying provided by the utility model compresses detection device, it is preferable that the waste product arranging mechanism further includes using
In the sliding equipment three that waste product is removed to the elevating mechanism three.
The technical scheme has the following advantages or beneficial effects:
It includes for conveying the delivery track of chip, for examining that chip conveying provided by the utility model, which compresses detection device,
Survey the check bit of chip, the waste product arranging mechanism for placing waste product, for moving the transplantation device and use that chip is detected
In the detection device of pressure detection chip；The transplantation device will be moved to the check bit, institute from the delivery track to chip
Effective chip after stating transplantation device and will test is moved to the delivery track from the check bit, and the transplantation device will test
Discarded chip afterwards is moved to waste product arranging mechanism from the check bit.The utility model efficiently solves to be detected in the prior art
Need to stop problem easy to damage during production line and wafer inspection when chip, it can be while production line persistently conveys pair
Chip is detected, and the entire production technology time is reduced, and reasonably optimizing resource distribution improves production efficiency, is effectively ensured
The production capacity and yields of chip.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, the utility model and its spy
Sign, shape and advantage will become more apparent, and identical label indicates identical part in all the attached drawings.Do not press deliberately
Attached drawing is drawn according to ratio, it is preferred that emphasis is the purport of the utility model is shown.
Fig. 1 is the plan structure signal that the chip conveying that the utility model embodiment 1 provides compresses that detection device is rotated by 90 °
Figure；
Fig. 2 is the schematic elevation view that the chip conveying that the utility model embodiment 1 provides compresses detection device；
Fig. 3 is the schematic perspective view for the detection device that the utility model embodiment 1 provides.
Specific embodiment
The utility model is further described with specific embodiment with reference to the accompanying drawing, but it is practical not as this
Novel restriction.
Embodiment 1:
As shown in Figures 1 to 3, chip conveying provided by the utility model compresses detection device, including for conveying chip
Delivery track 1, the check bit 2 for detecting chip, the waste product arranging mechanism 3 for placing waste product, for move chip carry out
The transplantation device 4 of detection and for compress detection chip detection device 9；Detection device 9, including four for detecting chip
Probe 91 and fixed frame 93 for fixing probe 91；Probe 91 is set to 2 top of check bit；Fixed frame 3 includes firm banking
931, rotating arm 932 and the power mechanism 933 for driving rotating arm 932；Rotating arm 932 is rotatably affixed at firm banking
931, rotating arm 932 is divided into preceding rotating arm 9321 and rear rotating arm 9322 by firm banking 931；Rotating arm 9322 can revolve afterwards
Turn to be fixed on power mechanism 933；Probe 91 is slidably fixed on preceding rotating arm 9321, sets between probe 91 and preceding rotating arm 9321
It is equipped with the flexible connection mechanism 9323 in compression or normal condition；When rotating arm 932 is in a horizontal position, probe 91
Downward, probe 91 can slide up and down on head；Power mechanism 933 is the cylinder of cylinder rod linear motion；The cylinder rod of cylinder 933 can
Rear rotating arm 9322 is fixed in rotation；Probe 91 rotating arm 9321, probe 91 before being fixed on are separated by preceding rotating arm 9321
For probe top 911 and probe lower part 912, flexible connection mechanism 9323 be set to probe lower part 912 and preceding rotating arm 9321 it
Between, probe top 911 is provided with the stop nut 913 for preventing probe 91 from falling off；Flexible connection mechanism 9323 is spring；Using spy
The setting that needle 91 is slidably matched in flexible connection mechanism 9323, when the contact of probe 91 is placed in the chip on check bit 2,
When the pressure that probe 91 applies wafer compacting is excessive, it can be jacked upwards under the reaction force of pressure, to prevent pressure excessive
Damage chip；Simultaneously because flexible connection mechanism 9323 is existing, guarantee to compress always when probe 91 is jacked upwards
Chip detects chip with facilitating, and after detection, probe 1 can be under the action of flexible connection mechanism 323
Reply script state.
Transplantation device 4 will be moved to check bit 2 from delivery track 1 to chip, transplantation device 4 will test after effective chip
It is moved to delivery track 1 from check bit 2, the discarded chip after transplantation device 4 will test is moved to waste product ordering machine from check bit 2
Structure 3；It further includes delivery track being set side by side with delivery track 11 and for moving that chip conveying, which compresses detection device,
The transplantation device 1 of chip on delivery track 1；Transplantation device 1 will be moved to check bit from delivery track 1 to chip
2, effective chip after transplantation device 1 will test is moved to delivery track 1 from check bit 2, after transplantation device 1 will test
Discarded chip be moved to waste product arranging mechanism 3 from check bit 2.Chip is placed in charging tray 00 and transports on delivery track 1, when
When charging tray 00 is moved to specific station, mobile chip to the check bit 2 from delivery track 1 of transplantation device 4 is detected, and is expected at this time
Box moves always new position under the action of delivery track 1, and transplantation device 4 will test qualified chip and be moved to delivery track
Waste product is moved on waste product arranging mechanism 3, moves in circles by the magazine on 1, and delivery track 1 is not off in the process, and one
Straight lasting conveying solves the problems, such as to need to stop pipeline when detecting chip in the prior art, energy while detecting chip
Enough continual conveying chips, improve production efficiency；Two are set by delivery track simultaneously, it is as efficient as possible to utilize inspection
Location detects the time of chip, keeps check bit running at full capacity, further increases production efficiency.
Check bit 2, detection device 9, transplantation device 4, transplantation device 1 and waste product arranging mechanism 3 are respectively positioned on delivery track 1
Between delivery track 1；Check bit 2 is set to the same side of the delivery track in the waste product arranging mechanism；Transplanting dress
Set 4 and transplantation device 1 be can 360 ° of horizontal direction rotation mechanical arms.It is convenient using the mechanical arm for capableing of 360 ° of rotations
Chip after mobile chip to be detected and detection, and the qualified chip of monitoring is placed into the magazine with delivery track movement,
Guarantee in detection process, conveying circuit does not stop, continuous operation.
The side of delivery track 1 and delivery track 1 is provided with feeding device 5, and feeding device 5 includes elevating mechanism one
51, delivery device 52 and sliding equipment 1；Chip to be measured is moved to delivery track from elevating mechanism 1 by delivery device 52
1, sliding equipment 1 moves the wafer into elevating mechanism 1；The other side of delivery track 1 and delivery track 1 is provided with down
Expect that device 6, blanking device 6 include elevating mechanism 2 61, pulling mechanism 62 and sliding equipment 2 63；After pulling mechanism 62 will test
Chip be moved to elevating mechanism 2 61 from delivery track 1, sliding equipment 2 63 moves the wafer into elevating mechanism 2 61；Waste product pendulum
Laying mechanism 3 puts position 33 and sliding equipment 3 34 including elevating mechanism 3 31, pulling mechanism 1, waste product；Pulling mechanism 1
Waste product after will test puts position 3 from waste product and is moved to elevating mechanism 3 31, and waste product is removed elevating mechanism by sliding equipment 3 34
3 31.The structure setting of position is put by feeding device, blanking device and waste product, it is further to improve automated production effect
Rate improves production capacity.
When the wafer transfer device provided using the utility model embodiment 1, the magazine for filling chip is stacked respectively
To sliding equipment one, under the action of sliding equipment one, the magazine for filling chip is sent into elevating mechanism one, elevating mechanism one
Rising, delivery device pushes away magazine such as delivery track, and magazine transports on delivery track, when magazine is moved to specific station,
Mobile chip is to check bit from the magazine on delivery track for transplantation device, and detection device is detected, and at the same time, magazine exists
It is moved always under the action of delivery track, transplantation device will test qualified chip and be moved on delivery track in new position
In magazine, waste product is moved to waste product and puts magazine on position, repeats detection operation, the magazine equipped with detection acceptable wafers is defeated
It send close to blanking device under the action of track, under the action of pulling mechanism, magazine enters elevating mechanism two, and magazine is with lifting
Mechanism two declines, and in the effect of sliding equipment two, magazine removes elevating mechanism two and enters next procedure, meanwhile, equipped with waste product
Magazine enters elevating mechanism three under the action of pulling mechanism one, and elevating mechanism three declines, and gives up under the action of sliding equipment three
Product remove elevating mechanism three and enter next procedure.
In conclusion chip conveying provided by the utility model compresses detection device, efficiently solves and examine in the prior art
It needs to stop production line, chip problem easy to damage in the detection process when surveying chip, can persistently be conveyed in production line same
When safely and steadly chip is detected, reduce the entire production technology time, reasonably optimizing resource distribution improves production
The production capacity and yields of chip has been effectively ensured in efficiency.
It should be appreciated by those skilled in the art that those skilled in the art combine the prior art and above-described embodiment can be real
The existing change case, it will not be described here.It is such to change the substantive content for having no effect on the utility model, it is also not superfluous herein
It states.
The preferred embodiment of the utility model is described above.It is to be appreciated that the utility model not office
It is limited to above-mentioned particular implementation, devices and structures not described in detail herein should be understood as with the common side in this field
Formula is practiced；Anyone skilled in the art, do not depart from technical solutions of the utility model make it is many possible
Changes and modifications or equivalent example modified to equivalent change, this has no effect on the substantive content of the utility model.Therefore,
All contents without departing from technical solutions of the utility model, it is made by the above technical examples according to the technical essence of the present invention
Any simple modifications, equivalents, and modifications, still fall within technical solutions of the utility model protection in the range of.
Claims (10)
1. a kind of conveying of chip compresses detection device, which is characterized in that including for conveying chip delivery track, for detecting
The check bit of chip, the waste product arranging mechanism for placing waste product, for moving the transplantation device and be used for that chip is detected
Compress the detection device of detection chip；The transplantation device will be moved to the check bit, institute from the delivery track to chip
Effective chip after stating transplantation device and will test is moved to the delivery track from the check bit, and the transplantation device will test
Discarded chip afterwards is moved to waste product arranging mechanism from the check bit；
The detection device includes multiple probes for detecting chip and the fixed frame for fixing the probe；The probe
It is set to above the check bit；The fixed frame includes firm banking, rotating arm and the power for driving the rotating arm
Mechanism；The rotating arm is rotatably affixed at the firm banking, and the rotating arm is divided into preceding rotation by the firm banking
Arm and rear rotating arm；Rotating arm is rotatably affixed at the power mechanism after described；The probe be slidably fixed on it is described before
Rotating arm is provided with flexible connection mechanism between the probe and the preceding rotating arm；
Wherein, when the rotating arm is in a horizontal position, downward, the probe can slide up and down the end of probe.
2. chip conveying as described in claim 1 compresses detection device, which is characterized in that the probe is described through being fixed on
Preceding rotating arm, the probe are divided into probe top and probe lower part, the flexible connection mechanism setting by the preceding rotating arm
Between the probe lower part and the preceding rotating arm, the probe top is provided with stop nut.
3. chip conveying as claimed in claim 2 compresses detection device, which is characterized in that the power mechanism is that cylinder rod is straight
The cylinder of line movement；The cylinder rod of the cylinder is rotatably affixed at the rear rotating arm；The flexible connection mechanism is spring.
4. chip conveying as described in claim 1 compresses detection device, which is characterized in that the detection is located at the waste product and puts
Laying mechanism is set to the same side of the delivery track；The transplantation device is can 360 ° of the horizontal direction mechanical arms rotated.
5. chip conveying as described in claim 1 compresses detection device, which is characterized in that the side of the delivery track is arranged
There is feeding device, the feeding device includes elevating mechanism one and delivery device；The delivery device is by chip to be measured from described
Elevating mechanism one is moved to the delivery track.
6. chip conveying as claimed in claim 5 compresses detection device, which is characterized in that the other side of the delivery track is set
It is equipped with blanking device, the blanking device includes elevating mechanism two and pulling mechanism；The pulling mechanism will test after chip
The elevating mechanism two is moved to from the delivery track.
7. chip conveying as claimed in claim 6 compresses detection device, which is characterized in that the feeding device further includes being used for
Chip is sent into the sliding equipment one of the elevating mechanism one, the blanking device further includes that chip is removed to the elevating mechanism
Two sliding equipment two.
8. chip conveying as described in claim 1 compresses detection device, which is characterized in that the chip conveying compresses detection dress
Setting further includes delivery track one being set side by side with the delivery track and for moving the crystalline substance on the delivery track one
The transplantation device one of piece；The transplantation device one will be moved to the check bit, the shifting from the delivery track one to chip
Effective chip after cultivation device one will test is moved to the delivery track one from the check bit, and the transplantation device one will inspection
Discarded chip after survey is moved to waste product arranging mechanism from the check bit.
9. the chip conveying as described in claim 1~8 any one compresses detection device, which is characterized in that the waste product pendulum
Laying mechanism includes that elevating mechanism three, pulling mechanism one and waste product put position；The pulling mechanism one will test after waste product from institute
It states waste product and puts position and be moved to the elevating mechanism three.
10. chip conveying as claimed in claim 9 compresses detection device, which is characterized in that the waste product arranging mechanism also wraps
Include the sliding equipment three for waste product to be removed to the elevating mechanism three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821279972.9U CN208753269U (en) | 2018-08-09 | 2018-08-09 | Chip conveying compresses detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821279972.9U CN208753269U (en) | 2018-08-09 | 2018-08-09 | Chip conveying compresses detection device |
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| Publication Number | Publication Date |
|---|---|
| CN208753269U true CN208753269U (en) | 2019-04-16 |
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ID=66059802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821279972.9U Active CN208753269U (en) | 2018-08-09 | 2018-08-09 | Chip conveying compresses detection device |
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| Country | Link |
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| CN (1) | CN208753269U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109003912A (en) * | 2018-08-09 | 2018-12-14 | 江苏天奇氢电装备有限公司 | Chip conveying compresses detection device |
-
2018
- 2018-08-09 CN CN201821279972.9U patent/CN208753269U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109003912A (en) * | 2018-08-09 | 2018-12-14 | 江苏天奇氢电装备有限公司 | Chip conveying compresses detection device |
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