CN208737218U - The replacing light source system and exposure machine of exposure machine - Google Patents
The replacing light source system and exposure machine of exposure machine Download PDFInfo
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- CN208737218U CN208737218U CN201821431456.3U CN201821431456U CN208737218U CN 208737218 U CN208737218 U CN 208737218U CN 201821431456 U CN201821431456 U CN 201821431456U CN 208737218 U CN208737218 U CN 208737218U
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- 238000012360 testing method Methods 0.000 claims abstract description 60
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000001816 cooling Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
This application discloses the replacing light source systems and exposure machine of a kind of exposure machine.The replacing light source system, including chamber, chamber include the work chamber being disposed adjacent, test chamber and replacement chamber, are provided with first light source in work chamber, replace in chamber and be provided with second light source；And guide rail, guide rail are arranged in chamber；Wherein, first light source can be moved in replacement chamber along guide rail, and second light source can be moved in test chamber along guide rail, be moved in work chamber after second light source test passes through further along guide rail.The embodiment of the present application without shutting down and cooling down when replacing Exposing Lamp, therefore improves production efficiency by the way that guide rail is arranged in chamber.
Description
Technical Field
The application relates to the technical field of display, concretely relates to light source replacement system and exposure machine of exposure machine.
Background
In the existing exposure process, after an exposure lamp used for exposure of an exposure machine is used for a period of time, the exposure lamp needs to be replaced along with the reduction of the illumination intensity of the exposure machine, and the exposure lamp is used only by confirming the illumination intensity, so that a very large shadow is generated on the restriction of continuous production and capacity.
When general exposure lamp neared its life, will influence the characteristic of product, at this moment need carry out new exposure lamp in advance and change, nevertheless change the exposure lamp and need shut down and cool down to it is also loaded down with trivial details relatively to change the procedure, if there is the quality that the operation is improper can direct influence the exposure in the change process, the inhomogeneous phenomenon of exposure appears on making the glass substrate, just so lead to producing all kinds of macroscopical and microcosmic defects on the glass substrate, influence the yields of whole glass substrate. In addition, the conventional exposure lamp replacement mode of the exposure equipment also involves the problem that the exposure lamp can be used after the illumination is stabilized from the lighting start, so that the exposure lamp can be used after a new lamp is stabilized, a large amount of time is wasted in the whole process, and the production efficiency is reduced.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a light source replacement system and exposure machine of exposure machine can improve production efficiency.
The embodiment of the application provides a light source replacement system of exposure machine, includes:
the chamber comprises a working chamber, a testing chamber and a replacing chamber which are arranged adjacently, wherein a first light source is arranged in the working chamber, and a second light source is arranged in the replacing chamber; and
a guide rail disposed within the chamber; wherein,
the first light source can move into the replacement cavity along the guide rail, the second light source can move into the test cavity along the guide rail, and the second light source moves into the working cavity along the guide rail after the test of the second light source is passed.
In the light source replacing system of the exposure machine, the working chamber and the testing chamber are arranged side by side, and the replacing chamber is arranged on the working chamber and the testing chamber.
In the light source replacement system of an exposure machine described in the present application, the guide rail is an annular guide rail.
In the light source replacing system of the exposure machine, a first moving plate, a second moving plate and a third moving plate are further arranged in the cavity; the first moving plate is arranged between the working chamber and the replacement chamber, the second moving plate is arranged between the testing chamber and the replacement chamber, and the third moving plate is arranged between the working chamber and the testing chamber.
In the light source replacing system of the exposure machine, the first moving plate includes a first moving part and a first fixed part, the second moving plate includes a second moving part and a second fixed part, and the third moving plate includes a third moving part and a third fixed part; wherein, be provided with first via hole on the first fixed part, the second fixed part is provided with the second via hole, the third fixed part is provided with the third via hole, the guide rail along first via hole, second via hole and third via hole setting.
In the light source replacement system of an exposure machine according to the present application, the first light source includes a first slider and a first light emitting portion provided on one side of the first slider, and the second light source includes a second slider and a second light emitting portion provided on one side of the second slider;
the first sliding portion and the second sliding portion are arranged on the guide rail, so that the first light source can move into the replacement cavity along the guide rail, the second light source can move into the test cavity along the guide rail, and the second light source moves into the working cavity along the guide rail after passing the test.
In the light source replacing system of the exposure machine, a reflector and a receiver are arranged in the working chamber; the reflector is used for reflecting the light rays emitted by the first light source to the receiver.
In the light source replacing system of the exposure machine, a test unit is further arranged in the test chamber;
the test unit is used for testing the second light source moved into the test chamber, so that the parameters of the second light source in the test chamber reach preset parameters.
In the light source replacing system of the exposure machine, the first light source and the second light source have the same shape and size
Correspondingly, the embodiment of the application also provides an exposure machine, which comprises the light source replacing system in any embodiment of the application.
The light source replacing system provided by the embodiment of the application comprises a cavity, wherein the cavity comprises a working cavity, a testing cavity and a replacing cavity which are arranged adjacently, a first light source is arranged in the working cavity, and a second light source is arranged in the replacing cavity; and a guide rail disposed within the chamber; the first light source can move into the replacing cavity along the guide rail, the second light source can move into the testing cavity along the guide rail, and the second light source is moved into the working cavity along the guide rail after the second light source passes the test. This application embodiment is through setting up the guide rail in the cavity, need not to shut down and cool down when changing the exposure lamp, consequently improved production efficiency.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a first schematic structural diagram of a light source replacement system according to an embodiment of the present application. .
Fig. 2 is a schematic structural diagram of a light source replacing system according to an embodiment of the present application.
Fig. 3 is a third schematic structural diagram of a light source replacement system according to an embodiment of the present application.
Fig. 4 is a fourth schematic structural diagram of a light source replacement system according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
Specifically, please refer to fig. 1, in which fig. 1 is a schematic structural diagram of a light source replacing system according to an embodiment of the present disclosure. The light source replacing system is used for replacing an exposure lamp in the exposure machine.
The utility model provides a light source replacement system of exposure machine, include:
the testing device comprises a chamber 100, a first light source 201 and a second light source 202, wherein the chamber comprises a working chamber 101, a testing chamber 102 and a replacing chamber 103 which are arranged adjacently, the working chamber 101 is internally provided with the first light source 201, and the replacing chamber 103 is internally provided with the second light source 202; and
a guide rail 301, the guide rail being disposed 301 within the chamber 100; wherein,
the first light source 201 can be moved into the replacement chamber 103 along the guide rail 301, the second light source 202 can be moved into the testing chamber 102 along the guide rail 301, and after the second light source 202 passes the test, the second light source 202 is moved into the work chamber 101 along the guide rail 301. For example, the first light source 201 and the second light source 202 may be mercury lamps, and the first light source 201 and the second light source 202 have the same shape and size.
For example, specifically, when the illuminance of the first light source 201 in the working chamber 101 decreases, the first light source 201 may enter the replacement chamber 103 through the guide rail 301, and at the same time, the second light source 202 in the replacement chamber 103 enters the test chamber 102 through the guide rail 301 for testing. After the second light source 202 is tested, that is, the illuminance of the second light source 202 reaches the preset illuminance, the second light source 202 moves into the working chamber 101 through the guide rail 301, that is, the replacement of the first light source 201 by the second light source 202 is completed.
In the embodiment of the present application, the process of replacing the first light source 101 in the working chamber 101 does not require human intervention, and thus the production efficiency can be improved. In addition, because the working chamber 101, the testing chamber 102 and the replacing chamber 103 form a closed space together in the replacing process, the probability of the second light source 202 being polluted is also reduced, and the production efficiency is further improved.
Referring next to fig. 2, in some embodiments, the work chamber 101 and the test chamber 102 are disposed side by side, and the replacement chamber 103 is disposed on the work chamber 101 and the test chamber 102. In the embodiment of the present application, the guide rail 301 may be an annular guide rail.
The chamber 100 is also provided with a first moving plate 50, a second moving plate 60 and a third moving plate 70; the first moving plate 50 is disposed between the working chamber 101 and the replacement chamber 103, the second moving plate 60 is disposed between the testing chamber 102 and the replacement chamber 103, and the third moving plate 70 is disposed between the working chamber 101 and the testing chamber 102.
The first moving plate 50 includes a first moving portion 501 and a first fixed portion 502, the second moving plate 60 includes a second moving portion 601 and a second fixed portion 602, and the third moving plate 70 includes a third moving portion 701 and a third fixed portion 702; the first fixing portion 502 is provided with a first via hole 503, the second fixing portion 602 is provided with a second via hole 603, the third fixing portion 702 is provided with a third via hole 703, and the guide rail is disposed along the first via hole 503, the second via hole 603, and the third via hole 703.
For example, the first fixing portion 502 and the second fixing portion 602 may be attached, the third fixing portion 702 may be perpendicular to the first fixing portion 502 and the second fixing portion 602, and the rail 301 may be a ring-shaped rail, and the first fixing portion 502, the second fixing portion 602, and the third fixing portion 702 may be disposed on an inner circumferential side of the rail 301. In particular, the first moving plate 50, the second moving plate 60, the third moving plate 70, and the guide rail 301 separate the working chamber 101, the testing chamber 102, and the replacement chamber 103. When the first light source 201 disposed in the working chamber 101 needs to be replaced, the process of replacing the first light source 201 may be completed by adjusting the positions of the first moving plate 50, the second moving plate 60, and the third moving plate 70.
For example, referring to fig. 3, when the first light source 201 needs to be replaced, the first moving portion 501 is first moved, so that an opening through which the first light source 201 can pass is formed between the working chamber 101 and the replacement chamber 103. That is, the first light source 201 may enter the replacement chamber 103 through the opening along the guide rail 301. At the same time, the third moving portion 701 is moved so that the second light source 202 in the detection chamber 102, which has been detected, can be moved into the work chamber 101 along the guide rail 301. Then, the second moving unit 601 is moved to cause the second light source 202 in the replacement chamber 103 to enter the test chamber 102 for detection. Thus, a replacement process of the first light source 201 is completed.
In some embodiments, referring to fig. 4, the first light source 201 includes a first slide 2011 and a first light emitting portion 2012 disposed at one side of the first slide 2011, and the second light source 202 includes a second slide 2021 and a second light emitting portion 2022 disposed at one side of the second slide 2021;
the first sliding portion 2011 and the second sliding portion 2021 are both disposed on the guide rail 301, so that the first light source 201 can move into the replacement chamber 103 along the guide rail 301, the second light source 202 can move into the testing chamber 102 along the guide rail 301, and after the second light source 202 passes the test, the second light source 202 moves into the working chamber 101 along the guide rail 301.
In some embodiments, with continued reference to fig. 4, a reflector 80 is disposed within the working chamber 101, and a receiver 90 is disposed outside the working chamber 101; the reflector 80 is used for reflecting the light emitted from the first light source 201 to the receiver 90.
For example, in particular, when the working chamber 101 is in the working state, the light emitted from the first light source 201 is irradiated on the reflector 80, and then the reflector 80 reflects the light emitted from the first light source 201 to the receiver 90. Then, the receiver 90 irradiates the substrate to be exposed with the light from the first light source 201 to complete the exposure process.
In some embodiments, a test unit is further disposed in the test chamber 102;
the testing unit 102 is configured to test the second light source moved into the testing chamber, so that the parameter of the second light source in the testing chamber reaches a preset parameter.
Correspondingly, this application still provides an exposure machine, includes the light source replacement system that any embodiment of this application provided.
The light source replacing system provided by the embodiment of the application comprises a chamber 100, wherein the chamber 100 comprises a working chamber 101, a testing chamber 102 and a replacing chamber 103 which are adjacently arranged, a first light source 201 is arranged in the working chamber 101, and a second light source 202 is arranged in the replacing chamber 103; and a guide 301, the guide 301 disposed within the chamber 100; the first light source 201 can be moved into the replacement chamber 103 along the guide rail 301, the second light source 202 can be moved into the testing chamber 102 along the guide rail 301, and the second light source 202 is moved into the work chamber 101 along the guide rail 301 after the test is passed. This application embodiment is through setting up guide rail 301 in cavity 100, need not to shut down and cool down when changing the exposure lamp, consequently improved production efficiency.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
The light source replacing system of the exposure machine and the exposure machine provided by the embodiment of the application are introduced in detail, a specific example is applied in the description to explain the principle and the implementation of the application, and the description of the embodiment is only used for helping to understand the technical scheme and the core idea of the application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (10)
1. A light source replacing system of an exposure machine, comprising:
the chamber comprises a working chamber, a testing chamber and a replacing chamber which are arranged adjacently, wherein a first light source is arranged in the working chamber, and a second light source is arranged in the replacing chamber; and
a guide rail disposed within the chamber; wherein,
the first light source can move into the replacement cavity along the guide rail, the second light source can move into the test cavity along the guide rail, and the second light source moves into the working cavity along the guide rail after the test of the second light source is passed.
2. The light source changing system according to claim 1, wherein the working chamber and the testing chamber are arranged side by side, and the changing chamber is arranged on the working chamber and the testing chamber.
3. The light source changing system of claim 2, wherein the rail is an annular rail.
4. The light source changing system according to claim 3, wherein a first moving plate, a second moving plate and a third moving plate are further disposed in the chamber; the first moving plate is arranged between the working chamber and the replacement chamber, the second moving plate is arranged between the testing chamber and the replacement chamber, and the third moving plate is arranged between the working chamber and the testing chamber.
5. The light source exchanging system of claim 4, wherein the first moving plate comprises a first moving portion and a first fixed portion, the second moving plate comprises a second moving portion and a second fixed portion, and the third moving plate comprises a third moving portion and a third fixed portion; wherein, be provided with first via hole on the first fixed part, the second fixed part is provided with the second via hole, the third fixed part is provided with the third via hole, the guide rail along first via hole, second via hole and third via hole setting.
6. The light source exchanging system according to claim 1, wherein the first light source includes a first sliding portion and a first light emitting portion provided on a side of the first sliding portion, and the second light source includes a second sliding portion and a second light emitting portion provided on a side of the second sliding portion;
the first sliding portion and the second sliding portion are arranged on the guide rail, so that the first light source can move into the replacement cavity along the guide rail, the second light source can move into the test cavity along the guide rail, and the second light source moves into the working cavity along the guide rail after passing the test.
7. The light source changing system of claim 1, wherein a reflector is further disposed within the working chamber, and a receiver is disposed outside the working chamber; the reflector is used for reflecting the light rays emitted by the first light source to the receiver.
8. The light source changing system according to any one of claims 1 to 7, wherein a test unit is further disposed in the test chamber;
the test unit is used for testing the second light source moved into the test chamber, so that the parameters of the second light source in the test chamber reach preset parameters.
9. The light source changing system according to claim 1, wherein the first light source and the second light source are identical in shape and size.
10. An exposure machine characterized by comprising the light source exchanging system according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821431456.3U CN208737218U (en) | 2018-08-31 | 2018-08-31 | The replacing light source system and exposure machine of exposure machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821431456.3U CN208737218U (en) | 2018-08-31 | 2018-08-31 | The replacing light source system and exposure machine of exposure machine |
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| CN208737218U true CN208737218U (en) | 2019-04-12 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108897198A (en) * | 2018-08-31 | 2018-11-27 | 武汉华星光电技术有限公司 | The replacing light source system and exposure machine of exposure machine |
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2018
- 2018-08-31 CN CN201821431456.3U patent/CN208737218U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108897198A (en) * | 2018-08-31 | 2018-11-27 | 武汉华星光电技术有限公司 | The replacing light source system and exposure machine of exposure machine |
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