CN208736600U - Capacitive baroceptor - Google Patents
Capacitive baroceptor Download PDFInfo
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- CN208736600U CN208736600U CN201821750407.6U CN201821750407U CN208736600U CN 208736600 U CN208736600 U CN 208736600U CN 201821750407 U CN201821750407 U CN 201821750407U CN 208736600 U CN208736600 U CN 208736600U
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- 239000012528 membrane Substances 0.000 claims abstract description 200
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- 230000035945 sensitivity Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- 238000013467 fragmentation Methods 0.000 description 4
- 238000006062 fragmentation reaction Methods 0.000 description 4
- 230000002209 hydrophobic effect Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000005494 condensation Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229920002338 polyhydroxyethylmethacrylate Polymers 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- 230000007423 decrease Effects 0.000 description 1
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Abstract
The utility model discloses a kind of capacitive baroceptor, capacitive baroceptor includes the first pole plate and the second pole plate being oppositely arranged, first pole plate is set as the first sensitive membrane contacted with outside air, and second pole plate is set as the second sensitive membrane contacted with outside air；An at least surface for first sensitive membrane is at least partly set as dimple convex surface, and/or, an at least surface for second sensitive membrane is at least partly set as dimple convex surface.In this way, the concaveconvex structure on dimple convex surface can buffer the stress that sensitive membrane generates when deformation occurs, so that the damage-resistant ability of sensitive membrane and capacitive baroceptor can be improved, enhance reliable, the stability of capacitive baroceptor.
Description
Technical field
The utility model relates to sensor technical field, in particular to a kind of capacitive baroceptor.
Background technique
The second pole plate that capacitive baroceptor generally comprises the first pole plate as sensitive membrane, forms in substrate, the
One pole plate and the second polar plate interval are oppositely arranged, and form capacitor between the first pole plate and the second pole.When gas pressure loads P changes
When, the first pole plate can deformation occurs, so as to cause the spacing d variation between the first pole plate and the second pole plate, and then can cause electricity
Hold the variation of C, therefore, according to the variation of capacitor C, the changing value Δ P of air pressure can be measured.
For conventional condenser baroceptor, at least have the disadvantage in that
1) in wet environment or when difference variation is larger, the first polar board surface is easy accumulation hydrone, thus meeting
Influence sensitivity.
2) it is limited to the elastic property of the first pole plate, when the first pole plate is clashed or instantaneous super-atmospheric pressure etc. is special
When service condition, deformation occurs immediately generates stress, even broken for the first pole plate, thus will lead to transducer sensitivity decline,
Even fail.
Utility model content
The main purpose of the utility model is to propose a kind of capacitive baroceptor, it is intended to which solution exists in the prior art
One of the technical issues of.
To achieve the above object, the utility model proposes a kind of capacitive baroceptor, the condenser type air pressure sensings
Device includes the first pole plate and the second pole plate being oppositely arranged, and first pole plate is set as the contact with outside air first sensitivity
Film, second pole plate are set as the second sensitive membrane contacted with outside air；
An at least surface for first sensitive membrane is at least partly set as dimple convex surface, and/or, described second is sensitive
An at least surface for film is at least partly set as dimple convex surface.
Optionally, the surfaces externally and internally of first sensitive membrane is at least partly set as dimple convex surface, the dimple convex surface
Including forming in the first dimple convex surface of the outer surface of first sensitive membrane and forming in the inner surface of first sensitive membrane
The second dimple convex surface；
The high spot on first dimple convex surface and the recess on second dimple convex surface are correspondingly arranged, and described first
The recess on dimple convex surface and the high spot on second dimple convex surface are correspondingly arranged.
Optionally, the surfaces externally and internally of second sensitive membrane is at least partly set as dimple convex surface, the dimple convex surface
Including forming in the third dimple convex surface of the outer surface of second sensitive membrane and forming in the inner surface of second sensitive membrane
The 4th dimple convex surface；
The high spot on third dimple convex surface and the recess on the 4th dimple convex surface are correspondingly arranged, and the third
The recess on dimple convex surface and the high spot on the 4th dimple convex surface are correspondingly arranged.
Optionally, the dimple convex surface is set as the concaveconvex shape that convex peak successively connects with trench；Or
The dimple convex surface is set as the concaveconvex shape that convex peak successively connects with Pinggu, alternatively, the dimple convex surface is arranged
The concaveconvex shape successively to connect for flat peak with trench.
Optionally, the Z-Correct bump mapping Z-correct on the dimple convex surface is set as strip.
Optionally, micron order or nanoscale are divided between the adjacent convex peak or adjacent trench on the dimple convex surface.
Optionally, an at least entire surface for first sensitive membrane is set as dimple convex surface；And/or it is described second quick
An at least entire surface for sense film is set as dimple convex surface.
Optionally, the capacitive baroceptor has the substrate being oppositely arranged with first pole plate, the substrate
For being installed with goods support；
The middle section of the substrate makees that setting is thinned to the direction close to first pole plate, quick to form described second
Feel film, and forms the intercommunicating pore for being connected to outside air in the side away from first pole plate of the substrate.
Optionally, the periphery of part is equipped with insulating layer, the insulating layer between first sensitive membrane and the second sensitive membrane
Inside limits closed containing cavity.
Optionally, the capacitive baroceptor is set as MEMS sensor.
The utility model capacitive baroceptor range is big, high sensitivity, performance it is stable and durable, it can be achieved that waterproof,
Automatically cleaning etc..
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, the structure that can also be shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the structural schematic diagram of one embodiment of the utility model capacitive baroceptor；
Fig. 2 is the partial enlarged view in Fig. 1 at A；
Fig. 3 is the structural schematic diagram of the first embodiment on dimple convex surface in Fig. 1；
Fig. 4 is the structural schematic diagram of the second embodiment on dimple convex surface in Fig. 1；
Fig. 5 is the structural schematic diagram of the 3rd embodiment on dimple convex surface in Fig. 1；
Fig. 6 is the structural schematic diagram of another embodiment of the utility model capacitive baroceptor；
Fig. 7 is the structural schematic diagram of the another embodiment of the utility model capacitive baroceptor；
Fig. 8 is the structural schematic diagram of the utility model capacitive baroceptor another embodiment；
Fig. 9 is the structural schematic diagram of the utility model capacitive baroceptor another embodiment again.
Drawing reference numeral explanation:
| Label | Title | Label | Title |
| 100 | Capacitive baroceptor | 20 | Second sensitive membrane |
| 10 | First sensitive membrane | 21 | Third dimple convex surface |
| 11 | First dimple convex surface | 22 | 4th dimple convex surface |
| 12 | Second dimple convex surface | 30 | Substrate |
| 13 | Closed containing cavity | 31 | Intercommunicating pore |
| 14 | Insulating layer |
The embodiments will be further described with reference to the accompanying drawings for the realization, functional characteristics and advantage of the utility model aim.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describing, it is clear that described embodiment is only a part of the embodiment of the utility model, rather than all
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
Under every other embodiment obtained, fall within the protection scope of the utility model.
It is to be appreciated that if related in the utility model embodiment directionality instruction (such as upper and lower, left and right, it is preceding,
Afterwards ...), then directionality instruction is only used for explaining opposite between each component under a certain particular pose (as shown in the picture)
Positional relationship, motion conditions etc., if the particular pose changes, directionality instruction is also correspondingly changed correspondingly.
In addition, if relating to the description of " first ", " second " etc. in the utility model embodiment, " first ", " the
Two " etc. description is used for description purposes only, and is not understood to indicate or imply its relative importance or is implicitly indicated meaning
The quantity of the technical characteristic shown." first " is defined as a result, the feature of " second " can explicitly or implicitly include at least one
A this feature.In addition, the meaning of the "and/or" occurred in full text is, and including three schemes arranged side by side, by taking " A and/or B " as an example,
The scheme met simultaneously including A scheme or B scheme or A and B.In addition, the technical solution between each embodiment can be mutual
In conjunction with, but must be based on can be realized by those of ordinary skill in the art, when mutual lance occurs in the combination of technical solution
Shield or cannot achieve when, will be understood that the combination of this technical solution is not present, also not in the protection scope of the requires of the utility model
Within.
The utility model proposes a kind of capacitive baroceptors.
In an embodiment of the utility model, as shown in Fig. 1, Fig. 6 to Fig. 9, the capacitive baroceptor 100 includes
The first pole plate and the second pole plate being oppositely arranged, first pole plate are set as the first sensitive membrane 10 contacted with outside air,
Second pole plate is set as the second sensitive membrane 20 contacted with outside air.
First sensitive membrane 10 and the second sensitive membrane 20 are revealed in ambient pressure environment, are used equally for incuding extraneous gas
The variation of pressure, i other words, ambient pressure load acts on the first sensitive membrane 10 and the second sensitive membrane 20 simultaneously, when ambient pressure is sent out
When changing, deformation occurs simultaneously for the first sensitive membrane 10 and the second sensitive membrane 20.
Specifically, the relational expression of the capacitor C formed between first sensitive membrane 10 and the second sensitive membrane 20 are as follows: C=ε0A/d, in formula, ε0, A, d be interelectrode permittivity of vacuum, effective area and pole plate spacing respectively.It is apparent from: Δ P ∝ Δ d,
That is, air pressure change value Δ P is mainly measured by upper bottom crown separation delta d variation.
In the utility model, the course of work of capacitive baroceptor 100 is substantially are as follows: the first sensitive membrane 10 and second quick
Sense film 20 is revealed in ambient pressure environment, and when ambient pressure environment changes, i.e. gas pressure loads P changes, and first
Deformation occurs simultaneously for sensitive membrane 10 and the second sensitive membrane 20, this just causes to be formed between the first sensitive membrane 10 and the second sensitive membrane 20
Capacitor C change, so as to measure the changing value Δ d of pole plate spacing according to the changing value of capacitor C, and then measure air pressure
Changing value Δ P.
Compared in existing design, single pole plate is set as sensitive membrane, the utility model capacitive baroceptor 100,
By the way that the first pole plate and the second pole plate are revealed in ambient pressure environment, to be set as sensitive membrane；In identical gas pressure loads
Under variation, in the utility model, the deformation quantity of the first sensitive membrane 10 and the second sensitive membrane 20 just corresponds to or is approximately equivalent to existing
There is the half of the deformation quantity of single sensitive membrane in technology, i other words, the deformation quantity of the first sensitive membrane 10 and the second sensitive membrane 20 is big
It reduces greatly.In this way, the requirement to the performance of sensitive membrane can be greatly reduced, the first sensitive membrane 10 and second can be substantially reduced
Sensitive membrane 20 is risk of damage to；The testing range of capacitive baroceptor 100 can substantially be increased conversely speaking,.
It is appreciated that first pole plate can both refer to top crown, it can also refer to bottom crown；And when the first pole plate refers to upper pole
When plate, second pole plate refers to bottom crown, and when the first pole plate refers to bottom crown, second pole plate refers to top crown；Wherein,
"upper" refers to the direction away from goods support, under refer to close to the direction of goods support.In the present embodiment, for the ease of
Explain that the utility model, first pole plate refer to that top crown, second pole plate refer to bottom crown, i.e., described first sensitive membrane 10 is
Upper sensitive membrane, the second sensitive membrane 20 of drive are lower sensitive membrane.
As shown in Fig. 1, Fig. 6 to Fig. 9, first sensitive membrane 10 has the inner surface and back towards the second sensitive membrane 20
Outer surface from the second sensitive membrane 20；Second sensitive membrane 20 has towards the inner surface of the first sensitive membrane 10 and away from the
The outer surface of one pole plate.Specifically, the inner surface of first sensitive membrane 10 and the inner surface of the second sensitive membrane 20 are oppositely arranged.
Further, as shown in Figures 1 to 9, at least surface of first sensitive membrane 10 is at least partly set as
Dimple convex surface, and/or, an at least surface for second sensitive membrane 20 is at least partly set as dimple convex surface；That is: described
The inner surface of one sensitive membrane 10 is at least partly set as dimple convex surface, and/or, the outer surface at least portion of first sensitive membrane 10
Set up separately and is set to dimple convex surface, and/or, the inner surface of second sensitive membrane 20 is at least partly set as dimple convex surface, and/or,
The outer surface of second sensitive membrane 20 is at least partly set as dimple convex surface；It is illustrated respectively below.
For the first sensitive membrane 10:
It is appreciated that the utility model capacitive baroceptor 100, at least partly by the outer surface of the first sensitive membrane 10
It is set as dimple convex surface, the concaveconvex structure on the dimple convex surface can reduce the dimple convex portions of the outer surface of the first sensitive membrane 10
Surface can, make its low-energy surface.
When capacitive baroceptor 100 is in the more wet environment of the hydrones such as aqueous vapor, fog, or work as ring
When border temperature difference variation is larger, the hydrone in environment can condense in the outer surface of the first sensitive membrane 10 and form droplet, and
The low-surface-energy that the concaveconvex structure on the dimple convex surface on 10 outer surface of the first sensitive membrane has, avoidable droplet are laid in the dimple
Convex surface；And droplet, when sliding from the dimple convex surface, the dirty or impurity on the outer surface of the first sensitive membrane 10 also can be by water
Pearl takes away.I other words the concaveconvex structure on the dimple convex surface due to 10 outer surface of the first sensitive membrane, can assign its special surface energy
And wellability, so that it is had hydrophobic function, when capacitive baroceptor 100 works under high humidity environment, the droplet of condensation
It is not easy to tile on the dimple convex surface of 10 outer surface of the first sensitive membrane, and by the rolling of droplet, and sensitive membrane appearance can be taken away
Foreign matter or impurity on face.
In addition, dimple convex surface is at least partly set by the outer surface of the first sensitive membrane 10, the concave-convex knot on the dimple convex surface
Structure can buffer the stress that the first sensitive membrane 10 generates when deformation occurs so that the first sensitive membrane 10 be not susceptible to permanent deformation or
So as to protect the first sensitive membrane 10, and then the resistance to of the first sensitive membrane 10 and capacitive baroceptor 100 can be improved in person's fragmentation
Damage capability enhances reliable, the stability of the first sensitive membrane 10 and capacitive baroceptor 100.
It is appreciated that the utility model capacitive baroceptor 100, at least partly by the inner surface of the first sensitive membrane 10
It is set as dimple convex surface, the concaveconvex structure on the dimple convex surface can buffer the stress that the first sensitive membrane 10 generates when deformation occurs, make
The first sensitive membrane 10 is not susceptible to permanent deformation or fragmentation, so as to protect the first sensitive membrane 10, and then can be improved the
The damage-resistant ability of one sensitive membrane 10 and capacitive baroceptor 100 enhances the first sensitive membrane 10 and condenser type air pressure sensing
Reliable, the stability of device 100.
It is important to note that convex by least partly setting dimple for the surfaces externally and internally of the first sensitive membrane 10
Face, the concaveconvex structure that can greatly increase the male and fomale(M&F) in the first sensitive membrane 10 buffer generation when deformation occurs of the first sensitive membrane 10
Stress ability, so as to greatly improve the damage-resistant ability of the first sensitive membrane 10 and capacitive baroceptor 100.
In addition, by least partly setting dimple convex surface for the inner surface of the first sensitive membrane 10, so that the first sensitive membrane
10 inner surface has laterally expansible characteristic, so as to increase the first sensitive membrane 10 inner surface polar plate area, thus
Effective contact area A between the first sensitive membrane 10 and the second sensitive membrane 20 can be increased, so as to increase in the first sensitive membrane 10
The maximum amount of charge that surface can be adsorbed, so as to increase testing range and the sensitivity of capacitive baroceptor 100.
For the second sensitive membrane 20:
Similarly, dimple convex surface is at least partly set by the outer surface of the second sensitive membrane 20, the concave-convex knot on the dimple convex surface
Structure can reduce the surface energy of the dimple convex portions of the outer surface of the second sensitive membrane 20, make its low-energy surface
When capacitive baroceptor 100 is in the more wet environment of the hydrones such as aqueous vapor, fog, or work as ring
When border temperature difference variation is larger, the hydrone in environment can condense in the outer surface of the second sensitive membrane 20 and form droplet, and
The low-surface-energy that the concaveconvex structure on the dimple convex surface on 20 outer surface of the second sensitive membrane has, avoidable droplet are laid in the dimple
Convex surface；And droplet, when sliding from the dimple convex surface, the dirty or impurity on the outer surface of the second sensitive membrane 20 also can be by water
Pearl takes away.I other words the concaveconvex structure on the dimple convex surface due to 20 outer surface of the second sensitive membrane, can assign its special surface energy
And wellability, so that it is had hydrophobic function, when capacitive baroceptor 100 works under high humidity environment, the droplet of condensation
It is not easy to tile on the dimple convex surface of 20 outer surface of the second sensitive membrane, and by the rolling of droplet, and the second sensitive membrane can be taken away
Foreign matter or impurity on 20 outer surfaces.
Similarly, dimple convex surface is at least partly set by the outer surface of the second sensitive membrane 20, the concave-convex knot on the dimple convex surface
Structure can buffer the stress that the second sensitive membrane 20 generates when deformation occurs so that the second sensitive membrane 20 be not susceptible to permanent deformation or
So as to protect the second sensitive membrane 20, and then the resistance to of the second sensitive membrane 20 and capacitive baroceptor 100 can be improved in person's fragmentation
Damage capability enhances reliable, the stability of the second sensitive membrane 20 and capacitive baroceptor 100.
Similarly, the inner surface of the second sensitive membrane 20 is at least partly arranged the utility model capacitive baroceptor 100
For dimple convex surface, the concaveconvex structure on the dimple convex surface can buffer the stress that the second sensitive membrane 20 generates when deformation occurs, so that the
Two sensitive membranes 20 are not susceptible to permanent deformation or fragmentation, and so as to protect the second sensitive membrane 20, and then it is quick to can be improved second
Feel the damage-resistant ability of film 20 and capacitive baroceptor 100, enhances the second sensitive membrane 20 and capacitive baroceptor 100
Reliable, stability.
It is important to note that convex by least partly setting dimple for the surfaces externally and internally of the second sensitive membrane 20
Face, the concaveconvex structure that can greatly increase the male and fomale(M&F) in the second sensitive membrane 20 buffer generation when deformation occurs of the second sensitive membrane 20
Stress ability, so as to greatly improve the damage-resistant ability of the second sensitive membrane 20 and capacitive baroceptor 100.
Similarly, by least partly setting dimple convex surface for the inner surface of the second sensitive membrane 20, so that the second sensitive membrane
20 inner surface has laterally expansible characteristic, so as to increase the second sensitive membrane 20 inner surface polar plate area, thus
Effective contact area A between the first sensitive membrane 10 and the second sensitive membrane 20 can be increased, so as to increase in the second sensitive membrane 20
The maximum amount of charge that surface can be adsorbed, so as to increase testing range and the sensitivity of capacitive baroceptor 100.
It is important to note that by by the outer surface of the first sensitive membrane 10 and the outer surface of the second sensitive membrane 20 extremely
Small part is set as dimple convex surface, can greatly improve the hydrophobic property of the sensitive membrane of capacitive baroceptor 100, so as to
The functions such as waterproof, the automatically cleaning of sensitive membrane of capacitive baroceptor 100 are realized, so as to reduce capacitive baroceptor
100 failure risk.
It is important to note that by by the inner surface of the first sensitive membrane 10 and the inner surface of the second sensitive membrane 20 extremely
Small part is set as dimple convex surface, can further increase effective contact area A between the first sensitive membrane 10 and the second sensitive membrane 20,
So as to further increase the maximum amount of charge that the inner surface of two sensitive membranes can adsorb, so as to further increase condenser type gas
The testing range of pressure sensor 100 and sensitivity.
Further, as shown in Figures 1 to 9, the surfaces externally and internally of first sensitive membrane 10 is at least partly set as micro-
Male and fomale(M&F).Specifically, the dimple convex surface includes the first dimple convex surface 11 and the forming for forming in the outer surface of the first sensitive membrane 10
In the second dimple convex surface 12 of the inner surface of the first sensitive membrane 10；The high spot and the second dimple on first dimple convex surface 11 are convex
The recess in face 12 is correspondingly arranged, and the recess on first dimple convex surface 11 is corresponding with the high spot on the second dimple convex surface 12
Setting.That is, in the same section of first sensitive membrane 10, the variation tendency and the second dimple on first dimple convex surface 11
The variation tendency on convex surface 12 is identical.
So, on the one hand, so that 10 thickness of the first sensitive membrane is more uniform, 10 structure of the first sensitive membrane can be simplified, make its system
Facilitate；On the other hand, the performance of the first sensitive membrane 10 can be improved comprehensively: making its outer surface that there is waterproof, self-cleaning ability, mention
Its high damage-resistant ability improves its adsorption charge ability.
Further, as shown in Figures 1 to 9, the surfaces externally and internally of second sensitive membrane 20 is at least partly set as micro-
Male and fomale(M&F).Specifically, the dimple convex surface includes third dimple convex surface 21 and the forming for forming in the outer surface of the second sensitive membrane 20
In the 4th dimple convex surface 22 of the inner surface of the second sensitive membrane 20；The high spot and the 4th dimple on third dimple convex surface 21 are convex
The recess in face 22 is correspondingly arranged, and the recess on third dimple convex surface 21 is corresponding with the high spot on the 4th dimple convex surface 22
Setting.That is, in the same section of second sensitive membrane 20, the variation tendency and the 4th dimple on third dimple convex surface 21
The variation tendency on convex surface 22 is identical.
So, on the one hand, so that 20 thickness of the second sensitive membrane is more uniform, 20 structure of the second sensitive membrane can be simplified, make its system
Facilitate；On the other hand, the performance of the second sensitive membrane 20 can be improved comprehensively: making its outer surface that there is waterproof, self-cleaning ability, mention
Its high damage-resistant ability improves its adsorption charge ability.
Certainly, in the other embodiments of the first sensitive membrane 10, the high spot on first dimple convex surface 11 can also be with
The recess on two dimple convex surfaces 12 shifts to install.For example, the high spot on first dimple convex surface 11 and the second dimple convex surface 12
High spot be correspondingly arranged, the recess on first dimple convex surface 11 and the recess on the second dimple convex surface 12 are correspondingly arranged；
Etc., it need not repeat one by one herein.
Further, as shown in Figures 1 to 9, it is convex to be set as dimple for an at least entire surface for first sensitive membrane 10
Face, i.e., the inner surface whole installation of described first sensitive membrane 10 are dimple convex surface, and/or, the appearance of first sensitive membrane 10
Face whole installation is dimple convex surface.It is appreciated that the difficulty of processing of the first sensitive membrane 10 can not only be reduced by above-mentioned setting,
The performance of the first sensitive membrane 10 can also be further improved.
In this embodiment, it is preferred that the surfaces externally and internally of first sensitive membrane 10 is integrally set as dimple convex surface.
Further, as shown in Figures 1 to 9, it is convex to be set as dimple for an at least entire surface for second sensitive membrane 20
Face, i.e., the inner surface whole installation of described second sensitive membrane 20 are dimple convex surface, and/or, the appearance of second sensitive membrane 20
Face whole installation is dimple convex surface.It is appreciated that the difficulty of processing of the second sensitive membrane 20 can not only be reduced by above-mentioned setting,
The performance of the second sensitive membrane 20 can also be further improved.
In this embodiment, it is preferred that the surfaces externally and internally of second sensitive membrane 20 is integrally set as dimple convex surface.
100 range of the utility model capacitive baroceptor is big, high sensitivity, and performance is stable and durable, it can be achieved that anti-
Water, automatically cleaning etc..
In a particular embodiment, as shown in Figures 1 to 9, the dimple convex surface has multiple structural forms, the utility model
It is only illustrated with following embodiment, it should be noted that the structure type on dimple convex surface includes but is not limited to following form.
In the first embodiment on the dimple convex surface, as shown in Figure 1 to Figure 3, the dimple convex surface be set as convex peak with
The concaveconvex shape that trench successively connects.
Specifically, the dimple convex surface convex peak or trench shape can for triangle, (circle is special arc to arc
Shape), rectangle (square is special rectangle) or other polygons etc..
In the present embodiment, as shown in Figure 1 to Figure 3, the dimple convex surface is set as section indention or wavy
Face.In this way, the structure on dimple convex surface can be simplified, convenient for production.
Further, the convex peak on the dimple convex surface is identical as valley shapes.In this way, it is convex to be not only further simplified dimple
The structure in face is convenient for production, can also improve the performance on dimple convex surface.
Referring to the first dimple convex surface 11 in Fig. 4, in the second embodiment on dimple convex surface, the dimple convex surface is set as
The concaveconvex shape that convex peak successively connects with Pinggu.Specifically, the shape of the convex peak on the dimple convex surface can be triangle, arc
(circle is special arc), rectangle (square is special rectangle) or other polygons etc.；The trench on the dimple convex surface
Shape be straight line.
Referring to the first dimple convex surface 11 in Fig. 5, in the 3rd embodiment on dimple convex surface, the dimple convex surface is set as
The concaveconvex shape that flat peak successively connects with trench.Specifically, the shape of the convex peak on the dimple convex surface is straight line；The dimple is convex
The shape of the trench in face can for triangle, arc (circle is special arc), rectangle (square is special rectangle) or
Other polygons etc..
Further, the Z-Correct bump mapping Z-correct on the dimple convex surface is set as strip, i other words, the convex peak on the dimple convex surface
Arrangement is unidirectionally sequentially connected with trench.For example, the Z-Correct bump mapping Z-correct on the dimple convex surface can be along the length direction or width of sensitive membrane
Direction or diagonal bumps extend.In this way, make the Z-Correct bump mapping Z-correct regularization on dimple convex surface, thus be not only convenient for processing,
And also advantageously improve the performance on dimple convex surface.
Specifically, being divided into micron order or nanoscale between the adjacent convex peak or adjacent trench on the dimple convex surface.In this way,
It can guarantee hydrophobic performance, the buffering stress characteristics etc. on dimple convex surface.
In the present embodiment, the adjacent convex peak on the dimple convex surface or adjacent trench are preferably spaced nanoscale.
Need herein especially set out, for the first sensitive membrane 10, the structure type on the first dimple convex surface 2211 can be with
The structure type on the second dimple convex surface 2212 is identical, in order to process sensitive membrane.Certainly, the structure shape on the first dimple convex surface 2211
Formula can also be different from the structure type on the second dimple convex surface 2212.Similarly, for the second sensitive membrane 20, third dimple convex surface 2221
Structure type can be identical as the structure type on the 4th dimple convex surface 2222, can also be with the structure type on the 4th dimple convex surface 2222
It is different.
Further, as shown in Fig. 1, Fig. 6 to Fig. 9, part between first sensitive membrane 10 and the second sensitive membrane 20
Periphery is equipped with insulating layer 14, and the insulating layer 14 is to connect the first sensitive membrane 10 and the second sensitive membrane 20；The insulating layer 14
Inside limits closed containing cavity 13, influences the capacitor between the first sensitive membrane 10 and the second sensitive membrane 20 to avoid external environment and becomes
Change.
Specifically, the closed containing cavity 13 both can be set to vacuum cavity, elasticity can also be filled in closed containing cavity 13
Medium.
In a particular embodiment, as shown in figure, Fig. 6 to Fig. 9, the capacitive baroceptor 100 has and the first pole
The substrate 30 that plate is oppositely arranged, the substrate 30 are used to install with goods support；The middle section of the substrate 30 is to close to the
The direction of one pole plate makees that setting is thinned, to form the second sensitive membrane 20, and in the side away from the first pole plate of the substrate 30
Form the intercommunicating pore 31 for being connected to outside air.
Specifically, the substrate 30 is mounted on goods support, 31 side of intercommunicating pore is connected to outside air, with reality
The outer surface of existing second sensitive membrane 20 is contacted with outside air.
In this way, can both be formed by making the middle section of substrate 30 to the direction close to the first pole plate setting is thinned
Second sensitive membrane 20 can reduce assembling process, improve production efficiency, again so that the second sensitive membrane 20 is wholely set with substrate 30
The intercommunicating pore 31 for realizing that the outer surface of the second sensitive membrane 20 is contacted with outside air can be formed.
It is important to note that in the present embodiment, the capacitive baroceptor 100 at least has following excellent
Point:
1) testing range and the sensitivity of capacitive baroceptor 100 are increased.
2) shatter-resistant and voltage endurance of capacitive baroceptor 100 are enhanced, capacitive baroceptor 100 is improved
Unfailing performance and stability.
3) functions such as waterproof, the automatically cleaning of the first sensitive membrane 10 and the second sensitive membrane 20 are realized, to reduce capacitor
The failure risk of formula baroceptor 100.
In a particular embodiment, as shown in Figures 6 to 9, also have between first sensitive membrane 10 and the second sensitive membrane 20
There are many different combinations, and the utility model is only illustrated with following embodiment, it should be noted that the first sensitive membrane 10
Combination between the second sensitive membrane 20 includes but is not limited to following form.
In another embodiment of the utility model, as shown in fig. 6, the outer surface of first sensitive membrane 10 is at least partly
It is set as dimple convex surface, inner surface is set as plane；And the outer surface of second sensitive membrane 20 is at least partly set as dimple
Convex surface, inner surface are set as plane.In this way, improving waterproof, the automatically cleaning characteristic of capacitive baroceptor 100 emphatically.
In the another embodiment of the utility model, as shown in fig. 7, the inner surface of first sensitive membrane 10 is at least partly
It is set as dimple convex surface, outer surface is set as plane；And the inner surface of second sensitive membrane 20 is at least partly set as dimple
Convex surface, outer surface are set as plane.In this way, focusing on increasing testing range and the sensitivity of capacitive baroceptor 100.
In the another embodiment of the utility model, as shown in figure 8, the surfaces externally and internally of first sensitive membrane 10 is at least
Part is set as dimple convex surface, and the surfaces externally and internally of second sensitive membrane 20 is disposed as plane.
In the another embodiment again of the utility model, as shown in figure 9, the surfaces externally and internally of first sensitive membrane 10 is all provided with
It is set to plane, the surfaces externally and internally of second sensitive membrane 20 is at least partly set as dimple convex surface.
In a particular embodiment, the capacitive baroceptor 100 may be configured as MEMS sensor.
Specifically, the utility model capacitive baroceptor 100 can be applied in some detection devices, with detection
Air pressure change.Such as detecting tire pressure.Certainly, the utility model capacitive baroceptor 100 applies also for some electricity
In sub- equipment, to be changed according to air pressure change come reaction height.For example, can be used in mobile phone, to detect user's stair climbing
Height etc.；For another example, can be used in the aircraft such as unmanned plane, to monitor the flying height of the aircraft such as unmanned plane.
The above is only the preferred embodiment of the present invention, and therefore it does not limit the scope of the patent of the utility model,
It is all under the inventive concept of the utility model, equivalent structure made based on the specification and figures of the utility model becomes
It changes, or directly/be used in other related technical areas indirectly and be included in the scope of patent protection of the utility model.
Claims (10)
1. a kind of capacitive baroceptor, which is characterized in that the capacitive baroceptor includes first be oppositely arranged
Pole plate and the second pole plate, first pole plate are set as the first sensitive membrane contacted with outside air, the second pole plate setting
For the second sensitive membrane contacted with outside air；
An at least surface for first sensitive membrane is at least partly set as dimple convex surface, and/or, second sensitive membrane
An at least surface is at least partly set as dimple convex surface.
2. capacitive baroceptor as described in claim 1, which is characterized in that the surfaces externally and internally of first sensitive membrane is equal
It is at least partly set as dimple convex surface, the dimple convex surface includes the first dimple for forming in the outer surface of first sensitive membrane
Convex surface and form in first sensitive membrane inner surface the second dimple convex surface；
The high spot on first dimple convex surface and the recess on second dimple convex surface are correspondingly arranged, and first dimple
The recess on convex surface and the high spot on second dimple convex surface are correspondingly arranged.
3. capacitive baroceptor as described in claim 1, which is characterized in that the surfaces externally and internally of second sensitive membrane is equal
It is at least partly set as dimple convex surface, the dimple convex surface includes the third dimple for forming in the outer surface of second sensitive membrane
Convex surface and form in second sensitive membrane inner surface the 4th dimple convex surface；
The high spot on third dimple convex surface and the recess on the 4th dimple convex surface are correspondingly arranged, and the third dimple
The recess on convex surface and the high spot on the 4th dimple convex surface are correspondingly arranged.
4. capacitive baroceptor as described in claim 1, which is characterized in that the dimple convex surface be set as convex peak with it is recessed
The concaveconvex shape that paddy successively connects；Or
The dimple convex surface is set as the concaveconvex shape that convex peak successively connects with Pinggu, alternatively, the dimple convex surface is set as flat
The concaveconvex shape that peak successively connects with trench.
5. capacitive baroceptor as described in claim 1, which is characterized in that the Z-Correct bump mapping Z-correct on the dimple convex surface is arranged
For strip.
6. capacitive baroceptor as described in claim 1, which is characterized in that the adjacent convex peak or phase on the dimple convex surface
Micron order or nanoscale are divided between adjacent trench.
7. the capacitive baroceptor as described in any one of claim 1 to 6, which is characterized in that described first is sensitive
An at least entire surface for film is set as dimple convex surface；And/or an at least entire surface for second sensitive membrane is set as micro-
Male and fomale(M&F).
8. the capacitive baroceptor as described in any one of claim 1 to 6, which is characterized in that the condenser type gas
Pressure sensor has the substrate being oppositely arranged with first pole plate, and the substrate is used to install with goods support；
The middle section of the substrate makees that setting is thinned to the direction close to first pole plate, sensitive to form described second
Film, and the intercommunicating pore for being connected to outside air is formed in the side away from first pole plate of the substrate.
9. the capacitive baroceptor as described in any one of claim 1 to 6, which is characterized in that described first is sensitive
The periphery of part is equipped with insulating layer between film and the second sensitive membrane, limits closed containing cavity on the inside of the insulating layer.
10. the capacitive baroceptor as described in any one of claim 1 to 6, which is characterized in that the condenser type gas
Pressure sensor is set as MEMS sensor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821750407.6U CN208736600U (en) | 2018-10-26 | 2018-10-26 | Capacitive baroceptor |
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| CN201821750407.6U CN208736600U (en) | 2018-10-26 | 2018-10-26 | Capacitive baroceptor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964417A (en) * | 2021-04-09 | 2021-06-15 | 揣荣岩 | Capacitive pressure sensitive chip with double movable polar plates |
| CN113340517A (en) * | 2021-06-15 | 2021-09-03 | 中国电子科技集团公司第三研究所 | MEMS (micro-electromechanical system) capacitor pressure chip, preparation method thereof and capacitor pressure sensor |
| CN113899489A (en) * | 2021-12-13 | 2022-01-07 | 南京高华科技股份有限公司 | MEMS pressure sensor and preparation method thereof |
-
2018
- 2018-10-26 CN CN201821750407.6U patent/CN208736600U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112964417A (en) * | 2021-04-09 | 2021-06-15 | 揣荣岩 | Capacitive pressure sensitive chip with double movable polar plates |
| CN113340517A (en) * | 2021-06-15 | 2021-09-03 | 中国电子科技集团公司第三研究所 | MEMS (micro-electromechanical system) capacitor pressure chip, preparation method thereof and capacitor pressure sensor |
| CN113340517B (en) * | 2021-06-15 | 2023-02-21 | 中国电子科技集团公司第三研究所 | MEMS (micro-electromechanical system) capacitor pressure chip, preparation method thereof and capacitor pressure sensor |
| CN113899489A (en) * | 2021-12-13 | 2022-01-07 | 南京高华科技股份有限公司 | MEMS pressure sensor and preparation method thereof |
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