CN109238550A - Capacitive baroceptor - Google Patents
Capacitive baroceptor Download PDFInfo
- Publication number
- CN109238550A CN109238550A CN201811265396.7A CN201811265396A CN109238550A CN 109238550 A CN109238550 A CN 109238550A CN 201811265396 A CN201811265396 A CN 201811265396A CN 109238550 A CN109238550 A CN 109238550A
- Authority
- CN
- China
- Prior art keywords
- convex surface
- dimple
- sensitive membrane
- dimple convex
- capacitive baroceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Abstract
The present invention discloses a kind of capacitive baroceptor, and the capacitive baroceptor includes in the first pole plate and the second pole plate being oppositely arranged, and first pole plate is set as the sensitive membrane contacted with outside air, and second pole plate is used to install with goods support;An at least surface for the sensitive membrane is at least partly set as dimple convex surface.Capacitive baroceptor of the present invention; dimple convex surface is at least partly set by an at least surface for sensitive membrane; the concaveconvex structure on dimple convex surface can buffer the stress that sensitive membrane generates when deformation occurs; so that sensitive membrane is not susceptible to permanent deformation or fragmentation; so as to protect sensitive membrane; and then the damage-resistant ability of sensitive membrane and capacitive baroceptor can be improved, enhance reliable, the stability of sensitive membrane and capacitive baroceptor.
Description
Technical field
The present invention relates to sensor technical field, in particular to a kind of capacitive baroceptor.
Background technique
The second pole plate that capacitive baroceptor generally comprises the first pole plate as sensitive membrane, forms in substrate, the
One pole plate and the second polar plate interval are oppositely arranged, and capacitor C is formed between the first pole plate and the second pole plate.When gas pressure loads P occurs
When variation, the first pole plate can deformation occurs, so as to cause the spacing d variation between the first pole plate and the second pole plate, and then can draw
The variation of capacitor C is played, therefore, according to the variation of capacitor C, the changing value Δ P of air pressure can be measured.
For conventional condenser baroceptor, at least have the disadvantage in that
1) in wet environment or when difference variation is larger, the first polar board surface is easy accumulation hydrone, accumulation
The weight of hydrone will affect the sensitivity of sensor.
2) it is limited to the elastic property of the first pole plate, when the first pole plate is clashed or instantaneous super-atmospheric pressure etc. is special
When service condition, deformation occurs immediately generates stress, even broken for the first pole plate, thus will lead to transducer sensitivity decline,
Even fail.
Summary of the invention
The main object of the present invention is to propose a kind of capacitive baroceptor, it is intended to solve skill existing in the prior art
One of art problem.
To achieve the above object, the present invention proposes a kind of capacitive baroceptor, the capacitive baroceptor packet
It includes in the first pole plate and the second pole plate being oppositely arranged, first pole plate is set as the sensitive membrane contacted with outside air, institute
The second pole plate is stated for installing with goods support;An at least surface for the sensitive membrane is at least partly set as dimple convex surface.
Optionally, the dimple convex surface is set as the concaveconvex shape that convex peak successively connects with trench.
Optionally, the dimple convex surface is set as section indention or wavy face.
Optionally, the convex peak on the dimple convex surface is identical as valley shapes.
Optionally, the dimple convex surface is set as the concaveconvex shape that convex peak successively connects with Pinggu, alternatively, the dimple is convex
Face is set as the concaveconvex shape that flat peak successively connects with trench.
Optionally, the Z-Correct bump mapping Z-correct on the dimple convex surface is set as strip.
Optionally, micron order or nanoscale are divided between the adjacent convex peak or adjacent trench on the dimple convex surface.
Optionally, the surfaces externally and internally of the sensitive membrane is at least partly set as dimple convex surface, and the dimple convex surface includes
The second dimple for forming in the first dimple convex surface of the outer surface of the sensitive membrane and forming in the inner surface of the sensitive membrane is convex
Face;
The high spot on first dimple convex surface and the recess on second dimple convex surface are correspondingly arranged, and described first
The recess on dimple convex surface and the high spot on second dimple convex surface are correspondingly arranged.
Optionally, an at least entire surface for the sensitive membrane is set as dimple convex surface.
Optionally, the capacitive baroceptor is set as MEMS sensor.
An at least surface for sensitive membrane is at least partly set dimple convex surface by capacitive baroceptor of the present invention,
The concaveconvex structure on dimple convex surface can buffer the stress that sensitive membrane generates when deformation occurs, so that sensitive membrane is not susceptible to permanent shape
Change or fragmentation, so as to protect sensitive membrane, and then can be improved the damage-resistant ability of sensitive membrane and capacitive baroceptor, increase
Reliable, the stability of strong sensitive membrane and capacitive baroceptor.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the structural schematic diagram of one embodiment of capacitive baroceptor of the present invention;
Fig. 2 is the partial enlarged view in Fig. 1 at A;
Fig. 3 is the structural schematic diagram of the first embodiment on dimple convex surface in Fig. 1;
Fig. 4 is the structural schematic diagram of the second embodiment on dimple convex surface in Fig. 1;
Fig. 5 is the structural schematic diagram of the 3rd embodiment on dimple convex surface in Fig. 1;
Fig. 6 is the structural schematic diagram of another embodiment of capacitive baroceptor of the present invention;
Fig. 7 is the structural schematic diagram of the another embodiment of capacitive baroceptor of the present invention.
Drawing reference numeral explanation:
Label | Title | Label | Title |
100 | Capacitive baroceptor | 13 | Closed containing cavity |
10 | First sensitive membrane | 14 | Insulating layer |
11 | First dimple convex surface | 20 | Second pole plate |
12 | Second dimple convex surface | 200 | Goods support |
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
It is to be appreciated that if relating to directionality instruction (such as up, down, left, right, before and after ...) in the embodiment of the present invention,
Then directionality instruction be only used for explain under a certain particular pose (as shown in the picture) between each component relative positional relationship,
Motion conditions etc., if the particular pose changes, directionality instruction is also correspondingly changed correspondingly.
In addition, being somebody's turn to do " first ", " second " etc. if relating to the description of " first ", " second " etc. in the embodiment of the present invention
Description be used for description purposes only, be not understood to indicate or imply its relative importance or implicitly indicate indicated skill
The quantity of art feature." first " is defined as a result, the feature of " second " can explicitly or implicitly include at least one spy
Sign.In addition, the meaning of the "and/or" occurred in full text is, and including three schemes arranged side by side, by taking " A and/or B " as an example, including A
The scheme that scheme or B scheme or A and B meet simultaneously.In addition, the technical solution between each embodiment can be combined with each other,
It but must be based on can be realized by those of ordinary skill in the art, when conflicting or nothing occurs in the combination of technical solution
Method realize when will be understood that the combination of this technical solution is not present, also not the present invention claims protection scope within.
The present invention proposes a kind of capacitive baroceptor.
In an embodiment of the present invention, as shown in Fig. 1, Fig. 6 and Fig. 7, the capacitive baroceptor 100 includes opposite
The first pole plate and the second pole plate 20 being arranged, first pole plate are set as the sensitive membrane 10 contacted with outside air, to be used for
Incude the variation of ambient pressure, second pole plate 20 is used to install with goods support 200.
Specifically, forming a capacitance structure, sensitive membrane 10 and the second pole plate 20 between sensitive membrane 10 and the second pole plate 20
Between the relational expression of capacitor C that is formed are as follows: C=ε0A/d, in formula, ε0, A, d be respectively interelectrode permittivity of vacuum, effectively
Area and pole plate spacing.It is apparent from: Δ P ∝ Δ d, that is, air pressure change value Δ P, which is mainly changed by the separation delta d between two-plate, to be surveyed
Out.
The course of work of capacitive baroceptor 100 is substantially are as follows: sensitive membrane 10 be revealed in ambient pressure environment, with it is outer
The contact of portion's air, when ambient pressure environment changes, i.e., when gas pressure loads P changes, deformation occurs for sensitive membrane 10, this
The capacitor C formed between sensitive membrane 10 and the second pole plate 20 is caused to change, just so as to survey according to the changing value of capacitor C
The changing value Δ d of pole plate spacing out, and then measure the changing value Δ P of air pressure.
As shown in Figures 1 to 5, the sensitive membrane 10 has towards the inner surface of the second pole plate 20 and away from the second pole plate
20 outer surface.
Further, as shown in Figures 1 to 7, at least surface of the sensitive membrane 10 is at least partly set as dimple
Convex surface, it may be assumed that the inner surface of the sensitive membrane 10 is at least partly set as dimple convex surface, and/or, the outer surface of the sensitive membrane 10
It is at least partly set as dimple convex surface, it is illustrated respectively below.
It is appreciated that capacitive baroceptor 100 of the present invention, at least partly sets micro- for the outer surface of sensitive membrane 10
Male and fomale(M&F), the concaveconvex structure on the dimple convex surface can reduce the surface energy of the dimple convex portions of the outer surface of sensitive membrane 10, make
It is low-energy surface.
When capacitive baroceptor 100 is in the more wet environment of the hydrones such as aqueous vapor, fog, or work as ring
When border temperature difference variation is larger, the hydrone in environment can condense in the outer surface of sensitive membrane 10 and form droplet, and sensitive
The low-surface-energy that the concaveconvex structure on dimple convex surface has on 10 outer surface of film, avoidable droplet are laid in the dimple convex surface;And
When droplet slides from the dimple convex surface, the dirty or impurity on the outer surface of sensitive membrane 10 can also be taken away by droplet.I other words
Due to the concaveconvex structure on the dimple convex surface of 10 outer surface of sensitive membrane, its special surface energy and wellability can be assigned, has it
Hydrophobic function, when capacitive baroceptor 100 works under high humidity environment, the droplet of condensation is not easy in 10 appearance of sensitive membrane
The dimple convex surface in face is tiled, and by the rolling of droplet, and can take away the foreign matter or impurity on 10 outer surface of sensitive membrane.
In addition, at least partly setting dimple convex surface for the outer surface of sensitive membrane 10, the concaveconvex structure on the dimple convex surface can
The stress that buffering sensitive membrane 10 generates when deformation occurs, so that sensitive membrane 10 is not susceptible to permanent deformation or fragmentation, thus
Sensitive membrane 10 can be protected, and then the damage-resistant ability of sensitive membrane 10 and capacitive baroceptor 100 can be improved, enhances sensitive membrane
10 and capacitive baroceptor 100 reliable, stability.
It is appreciated that capacitive baroceptor 100 of the present invention, at least partly sets micro- for the inner surface of sensitive membrane 10
Male and fomale(M&F), the concaveconvex structure on the dimple convex surface can buffer the stress that sensitive membrane 10 generates when deformation occurs, so that sensitive membrane 10 is not
Permanent deformation or fragmentation easily occurs, so as to protect sensitive membrane 10, and then sensitive membrane 10 and condenser type air pressure transmission can be improved
The damage-resistant ability of sensor 100 enhances reliable, the stability of sensitive membrane 10 and capacitive baroceptor 100.
It is important to note that by least partly setting dimple convex surface for the surfaces externally and internally of sensitive membrane 10, it can
The concaveconvex structure for greatly increasing the male and fomale(M&F) in sensitive membrane 10 buffers the ability for the stress that sensitive membrane 10 generates when deformation occurs,
So as to greatly improve the damage-resistant ability of sensitive membrane 10 and capacitive baroceptor 100.
In addition, by least partly setting dimple convex surface for the inner surface of sensitive membrane 10, so that the interior table of sensitive membrane 10
Face has laterally expansible characteristic, so as to increase sensitive membrane 10 inner surface polar plate area, so as to increase sensitive membrane
The 10 and second effectively contact area A between pole plate 20, so as to increase the maximum charge that the inner surface of sensitive membrane 10 can adsorb
Amount, so as to increase testing range and the sensitivity of capacitive baroceptor 100.
In the present embodiment, the surfaces externally and internally of the sensitive membrane 10 is at least partly set as dimple convex surface.
100 range of capacitive baroceptor of the present invention is big, high sensitivity, performance it is stable and durable, it can be achieved that waterproof, from
Cleaning etc..
Specifically, the periphery of part is equipped between the sensitive membrane 10 and the second pole plate 20 as shown in Fig. 1, Fig. 6 and Fig. 7
Insulating layer 14, the insulating layer 14 is to connect sensitive membrane 10 and the second pole plate 20;It is limited on the inside of the insulating layer 14 closed
Cavity 13 influences the capacitance variations between sensitive membrane 10 and the second pole plate 20 to avoid external environment.
In a particular embodiment, as shown in Figures 2 to 5, the dimple convex surface have multiple structural forms, the present invention only with
Following embodiment is illustrated, it should be noted that the structure type on dimple convex surface includes but is not limited to following form.
In the first embodiment on the dimple convex surface, as shown in Figure 1 to Figure 3, the dimple convex surface be set as convex peak with
The concaveconvex shape that trench successively connects.
Specifically, the dimple convex surface convex peak or trench shape can for triangle, (circle is special arc to arc
Shape), rectangle (square is special rectangle) or other polygons etc..
In the present embodiment, as shown in Figure 1 to Figure 3, the dimple convex surface is set as section indention or wavy
Face.In this way, the structure on dimple convex surface can be simplified, convenient for production.
Further, the convex peak on the dimple convex surface is identical as valley shapes.In this way, it is convex to be not only further simplified dimple
The structure in face is convenient for production, can also improve the performance on dimple convex surface.
As shown in figure 4, in the second embodiment on dimple convex surface, the dimple convex surface is set as convex peak and Pinggu successively phase
The concaveconvex shape connect.Specifically, the shape of the convex peak on the dimple convex surface can be triangle, (circle is special arc to arc
Shape), rectangle (square is special rectangle) or other polygons etc.;The shape of the trench on the dimple convex surface is straight line.
As shown in figure 5, in the 3rd embodiment on dimple convex surface, the dimple convex surface is set as flat peak and trench successively phase
The concaveconvex shape connect.Specifically, the shape of the convex peak on the dimple convex surface is straight line;The shape of the trench on the dimple convex surface can
Think triangle, arc (circle is special arc), rectangle (square is special rectangle) or other polygons etc..
Further, the Z-Correct bump mapping Z-correct on the dimple convex surface is set as strip, i other words, the convex peak on the dimple convex surface
Arrangement is unidirectionally sequentially connected with trench.For example, the Z-Correct bump mapping Z-correct on the dimple convex surface can be along the length direction or width of sensitive membrane 10
It spends direction or diagonal bumps extends.In this way, making the Z-Correct bump mapping Z-correct regularization on dimple convex surface, to be not only convenient for adding
Work, and also advantageously improve the performance on dimple convex surface.
Specifically, being divided into micron order or nanoscale between the adjacent convex peak or adjacent trench on the dimple convex surface.In this way,
It can guarantee hydrophobic performance, the buffering stress characteristics etc. on dimple convex surface.
In the present embodiment, the adjacent convex peak on the dimple convex surface or adjacent trench are preferably spaced nanoscale.
Further, as shown in Figures 1 to 5, it is convex to be at least partly set as dimple for the surfaces externally and internally of the sensitive membrane 10
Face, the dimple convex surface include forming in the first dimple convex surface 11 of the outer surface of sensitive membrane 10 and forming in sensitive membrane 10
Second dimple convex surface 12 of inner surface;And the recess pair of the high spot on first dimple convex surface 11 and the second dimple convex surface 12
It should be arranged, the recess on first dimple convex surface 11 and the high spot on the second dimple convex surface 12 are correspondingly arranged.That is, described quick
In the same section for feeling film 10, the variation tendency phase of the variation tendency on first dimple convex surface 11 and the second dimple convex surface 12
Together.So, on the one hand, so that 10 thickness of sensitive membrane is more uniform, 10 structure of sensitive membrane can be simplified, keep its easy to make;Another party
Face can improve the performance of sensitive membrane 10 comprehensively: its outer surface being made to have waterproof, self-cleaning ability, improve its damage-resistant ability, mention
Its high adsorption charge ability.
Certainly, in the other embodiments of sensitive membrane 10, the high spot on first dimple convex surface 11 can also with it is second micro-
The recess of male and fomale(M&F) 12 shifts to install.For example, the high spot on first dimple convex surface 11 and the second dimple convex surface 12 is convex
It is correspondingly arranged at rising, the recess on first dimple convex surface 11 and the recess on the second dimple convex surface 12 are correspondingly arranged;Etc.,
It need not repeat one by one herein.
Specifically, the structure type of first male and fomale(M&F) can be identical as the structure type of second male and fomale(M&F), in order to add
Work sensitive membrane 10.Certainly, the structure type of first male and fomale(M&F) can also be different from the structure type of second male and fomale(M&F).
Further, as shown in Figures 1 to 5, an at least entire surface for the sensitive membrane 10 is set as dimple convex surface,
That is: the inner surface whole installation of the described sensitive membrane 10 is dimple convex surface, and/or, the outer surface whole installation of the sensitive membrane 10
For dimple convex surface.In this way, can not only simplify the structure of sensitive membrane 10 so that sensitive membrane 10 make it is simple, conveniently;Moreover, may be used also
Further improve the performance of sensitive membrane 10.
In this embodiment, it is preferred that the surfaces externally and internally of the sensitive membrane 10 is integrally disposed as dimple convex surface.In this way,
The mass production of sensitive membrane 10 can be achieved.
It is important to note that in the present embodiment, the capacitive baroceptor 100 at least has following excellent
Point:
1) outer surface of sensitive membrane 10 has excellent hydrophobic performance, it can be achieved that the function such as waterproof, automatically cleaning of sensitive membrane 10
Can, so as to reduce the failure risk of capacitive baroceptor 100.
2) 10 inner surface whole installation of sensitive membrane is dimple convex surface, can be increased between sensitive membrane 10 and the second pole plate 20 effectively
Contact area A, so as to increase testing range and the sensitivity of capacitive baroceptor 100.
3) concaveconvex structure on dimple convex surface can buffer the stress that sensitive membrane 10 generates when deformation occurs, to can avoid first
Pole plate is failed by extraneous strong impact, so as to enhance the unfailing performance and stability of capacitive baroceptor 100
Energy.
In another embodiment of the invention, as shown in fig. 6, the outer surface of the sensitive membrane 10 is at least partly set as micro-
The inner surface of male and fomale(M&F), sensitive membrane 10 is set as plane.In this embodiment, the structure type of the outer surface of the sensitive membrane 10
It can refer to above-described embodiment, need not repeat one by one herein.
In another embodiment of the present invention, as shown in fig. 7, the inner surface of the sensitive membrane 10 is at least partly set as micro-
The outer surface of male and fomale(M&F), sensitive membrane 10 is set as plane.In this embodiment, the structure type of the inner surface of the sensitive membrane 10
It can refer to above-described embodiment, need not repeat one by one herein.
Specifically, the closed containing cavity 13 both can be set to vacuum cavity, elasticity can also be filled in closed containing cavity 13
Medium.
In a particular embodiment, the capacitive baroceptor 100 may be configured as MEMS sensor.
Specifically, capacitive baroceptor 100 of the present invention can be applied in some detection devices, to detect air pressure change
Change.Such as detecting tire pressure.Certainly, capacitive baroceptor 100 of the present invention applies also in some electronic equipments, with
According to air pressure change come reaction height variation.For example, can be used in mobile phone, to detect the height etc. of user's stair climbing;Compare again
Such as, can be used in the aircraft such as unmanned plane, to monitor the flying height of the aircraft such as unmanned plane.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (10)
1. a kind of capacitive baroceptor, which is characterized in that the capacitive baroceptor includes in the be oppositely arranged
One pole plate and the second pole plate, first pole plate are set as the sensitive membrane contacted with outside air, second pole plate be used for
Goods support installation;An at least surface for the sensitive membrane is at least partly set as dimple convex surface.
2. capacitive baroceptor as described in claim 1, which is characterized in that the dimple convex surface be set as convex peak with it is recessed
The concaveconvex shape that paddy successively connects.
3. capacitive baroceptor as claimed in claim 2, which is characterized in that the dimple convex surface is set as section in saw
Tooth form or wavy face.
4. capacitive baroceptor as claimed in claim 2, which is characterized in that the convex peak and trench shape on the dimple convex surface
Shape is identical.
5. capacitive baroceptor as described in claim 1, which is characterized in that the dimple convex surface is set as convex peak and puts down
The concaveconvex shape that paddy successively connects, alternatively, the dimple convex surface is set as the concaveconvex shape that flat peak successively connects with trench.
6. capacitive baroceptor as described in claim 1, which is characterized in that the Z-Correct bump mapping Z-correct on the dimple convex surface is arranged
For strip.
7. capacitive baroceptor as described in claim 1, which is characterized in that the adjacent convex peak or phase on the dimple convex surface
Micron order or nanoscale are divided between adjacent trench.
8. capacitive baroceptor as claimed in any of claims 1 to 7 in one of claims, which is characterized in that the sensitive membrane
Surfaces externally and internally is at least partly set as dimple convex surface, the dimple convex surface include form in the sensitive membrane outer surface
One dimple convex surface and form in the sensitive membrane inner surface the second dimple convex surface;
The high spot on first dimple convex surface and the recess on second dimple convex surface are correspondingly arranged, and first dimple
The recess on convex surface and the high spot on second dimple convex surface are correspondingly arranged.
9. capacitive baroceptor as claimed in any of claims 1 to 7 in one of claims, which is characterized in that the sensitive membrane
At least an entire surface is set as dimple convex surface.
10. capacitive baroceptor as claimed in any of claims 1 to 7 in one of claims, which is characterized in that the condenser type gas
Pressure sensor is set as MEMS sensor.
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