CN208723757U - A kind of magnetic coupling drive and its stressed member - Google Patents
A kind of magnetic coupling drive and its stressed member Download PDFInfo
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- CN208723757U CN208723757U CN201821613822.7U CN201821613822U CN208723757U CN 208723757 U CN208723757 U CN 208723757U CN 201821613822 U CN201821613822 U CN 201821613822U CN 208723757 U CN208723757 U CN 208723757U
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- stressed member
- installing pipe
- cylindrical body
- transmission shaft
- magnetic coupling
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Abstract
The utility model relates to a kind of magnetic coupling drive and its stressed members, stressed member includes cylindrical body, cylindrical body has the centre bore installed for transmission shaft, the outer peripheral surface of cylindrical body formed and the compatible mating surface of inner wall of installing pipe so that stressed member can by realized between the mating surface and the inner wall of installing pipe rotate in a circumferential direction cooperation and it is axially directed it is mobile cooperate, the through slot of the circumferentially spaced axial direction extension along stressed member that is provided with multiple length in the mating surface.Stressed member experiences the magnetic force of magnet, it is big without integrally doing drive rod, and the outer peripheral surface of cylindrical body is adapted with the inner wall of installing pipe, so that the distance between stressed member and strong card case become smaller, stressed member cracking can react and rotation axis is driven to do corresponding sports when strong card case movement, the setting of through slot can be such that the installation lumen at stressed member both ends in installing pipe is connected to simultaneously, and the movement that vacuum area hinders transmission shaft is formed when stressed member being avoided to be moved forward and backward.
Description
Technical field
The utility model relates to the drivers on vacuum equipment, are specifically related to a kind of magnetic coupling drive and its stress
Part.
Background technique
Vacuum equipment can be used in vacuum coating, semiconductor and aerospace field, vacuum equipment generally comprises very
Cavity body and the driver being set on vacuum cavity, traditional driver are generally mechanical driver, using motor or
The mode of driving cylinder is as power output, but which leads to driver that volume is larger, and weight is larger, and electric at work
The vibration that machine or driving cylinder generate will lead to the problems such as poorly sealed between driver and vacuum cavity.And using motor or
Driving cylinder causes the volume of entire driver larger, and installation is inconvenient, particularly with the place of some narrow spaces.
Authorization Notice No. is that the Chinese utility model patent of 204546080 U of CN discloses a kind of magnetic coupling vacuum linear
Rotating driver, including handle, strong card case, external main line, internal mobile pipeline, that is, transmission shaft and angle demodulator, handle
It is set on strong card case, structure is simple, can drive internal mobile pipeline by the mobile strong card case of handle in operation
It is mobile, it solves the above problem and entire driver is completed to be tightly connected by vacuum flange and vacuum cavity.But the drive
Dynamic device carries out movement by the magnetic coupling force between internal mobile pipeline and the magnet being mounted in strong card case at work,
Internal movement pipeline serves as stressed member at this time, but in movement strong card case, mobile pipeline reaction is slow inside discovery, to make interior
Portion's swift words of mobile pipeline need to increase its caliber so that internal mobile the distance between pipeline and magnet diminution, leads at this time
Cause internal mobile pipeline caliber larger, at high cost and equipment is heavy.
Utility model content
The purpose of the utility model is to provide the magnetic couplings that one kind can allow transmission shaft fast with the mobile response of strong card case
Driver stressed member；Meanwhile the purpose of this utility model also resides in and provides a kind of magnetic coupling drive using the stressed member.
To achieve the above object, a kind of magnetic coupling drive stressed member of the utility model adopts the following technical scheme that one
Kind magnetic coupling drive stressed member, including cylindrical body, cylindrical body have the centre bore installed for transmission shaft, cylindrical body
Outer peripheral surface forms compatible with the inner wall of installing pipe mating surface so that stressed member can rely on the mating surface and installing pipe
Realize that rotate in a circumferential direction cooperation and axially directed movement cooperate between inner wall, it is circumferentially spaced in the mating surface to be provided with multiple length
Spend the through slot extended along the axial direction of stressed member.
The slot bottom of at least one through slot is equipped with screw hole, and holds out against screw is equipped in screw hole and realizes stressed member and transmission
The connection of axis.
The through slot is arc groove.
The cylindrical body uses electromagnetic pure iron material.
A kind of magnetic coupling drive of the utility model adopts the following technical scheme that a kind of magnetic coupling drive, including peace
Tubulature, the end of installing pipe are provided with the mounting flange for being tightly connected with vacuum cavity, are provided with strong magnetic on the outside of installing pipe
Cutting ferrule, the installing pipe are internally provided with transmission shaft, and the end of transmission shaft is provided with collet, corresponding with strong card case on transmission shaft
Be provided with stressed member, stressed member includes cylindrical body, and cylindrical body has a centre bore installed for transmission shaft, cylindrical body it is outer
Circumferential surface forms compatible with the inner wall of installing pipe mating surface so that stressed member can rely on the interior of the mating surface and installing pipe
Realize that rotate in a circumferential direction cooperation and axially directed movement cooperate between wall surface, it is circumferentially spaced in the mating surface to be provided with multiple length
The through slot extended along the axial direction of stressed member.
The slot bottom of at least one through slot is equipped with screw hole, and holds out against screw is equipped in screw hole and realizes stressed member and transmission
The connection of axis.
The through slot is arc groove.
The cylindrical body uses electromagnetic pure iron material.
The utility model has the beneficial effects that the setting of stressed member can make stressed member experience the magnetic coupling force of magnet, do not have to
It is larger that drive rod is integrally made into caliber, and the outer peripheral surface of cylindrical body is adapted with the inner wall of installing pipe, so that stressed member
The distance between strong card case becomes smaller, and stressed member cracking can react and rotation axis is driven to do accordingly when strong card case moves
Movement, while the setting of through slot can be such that the installation lumen at stressed member both ends in installing pipe is connected to, and stressed member is avoided to be moved forward and backward
When form the movement that vacuum area hinders transmission shaft, and the setting of through slot can also play the role of loss of weight.
Further, the baking temperature of equipment can be increased to 150 DEG C using electromagnetic pure iron, the strong magnetic temperature of existing use
It may not exceed 80 DEG C, otherwise magnetism will appear decaying.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of one embodiment of magnetic coupling drive of the utility model；
Fig. 2 is the schematic diagram of internal structure of magnetic coupling drive；
Fig. 3 is partial enlarged view of the Fig. 2 at A；
Fig. 4 is the mounting structure schematic diagram of collet and guide sleeve and shaft；
Fig. 5 is the structural schematic diagram of mounting plate；
Fig. 6 is the structural schematic diagram of stressed member；
Fig. 7 is the structural schematic diagram of rotational structure.
Specific embodiment
A kind of embodiment of the magnetic coupling drive of the utility model, as shown in Fig. 1-Fig. 7, including installing pipe 1, installing pipe
1 end is provided with the mounting flange 3 for being tightly connected with vacuum cavity, close by mounting flange 3 and vacuum cavity completion
Envelope connection.Installing pipe 1 is internally provided with transmission shaft 2, and the end of transmission shaft 2 is provided with collet 4, is provided with and is used in installing pipe 1
It drives transmission shaft 2 and collet 4 forward motion and to open and close the first magnetic coupling driving structure of collet 4 together, is also set up in installing pipe 1
Have for drive transmission shaft 2 and collet 4 together backward movement and rotary chuck 4 the second coupling driving structure.
Transmission shaft 2 includes the transmission shaft first part 10 set gradually along the longitudinal direction and transmission shaft second part 9, transmission
The first stressed member 24 of magnetic conduction is provided in axis first part 10, the first magnetic coupling driving structure includes being sheathed on the outside of installing pipe
The last the first card case 6 corresponding with the first stressed member 24.The second stressed member of magnetic conduction is provided on transmission shaft second part 9
23, the second magnetic coupling driving structure includes the last the second card case corresponding with the second stressed member 23 for being sheathed on 1 outside of installing pipe
5, each strong card case is internally provided with magnet.First stressed member and the second stressed member are all made of electromagnetic pure iron material, and structure is simple,
And can be with high temperature resistant, middle stressed member uses strong magnetic material compared with the prior art, when temperature reaches 180 DEG C or more in installing pipe
Demagnetization phenomenon is had, product is not available.On the outside of installing pipe 1 between the last the first card case 6 and the last the second card case 5
Separation sleeve 7 is provided with to guarantee the last the first card case 6 and 24 position of the first stressed member correspondence and the last the second card case 5 and second
23 position of stressed member is corresponding.When the last the first card case 6 moves forward and transmission shaft is driven to go ahead, while the can be pushed forward
The last two card case forward motion drives the second stressed member to move forward, increases transmission shaft by forward by the last the second card case
Mobile power, and if being not provided with separation sleeve, when the last the first card case moves forward and transmission shaft is driven to go ahead, the second stress
Part, which moves forward, will receive the resistance of magnet in the last the second card case.
Transmission shaft second part 9 is hollow shaft structure, and the first magnetic coupling driving structure further includes being set to transmission shaft second
The shaft 8 of partial interior is connected between transmission shaft first part 10 and transmission shaft second part 9 by connector sleeve 16, transmission shaft
First part 10 is rotatably dispose in connector sleeve 16, and transmission shaft second part 9 links together with connector sleeve 16, to realize front and back
The transmitting of power on direction.Both transmission shaft first part 10 and transmission shaft second part 9 can independently rotate, non-interference.Turn
Axis 8 is connected in transmission shaft first part 10 to rotate together with transmission shaft first part 10.
The end of transmission shaft second part 9 is connected with collet casing 13, axially directed moves inside collet casing 13 along its
It is provided with guide sleeve 14, guide sleeve 14 is threadedly engaged with shaft 8 connect i.e. shaft 8 with the screw thread being threadedly coupled with guide sleeve 14
Section 81.Collet 4 includes first collet segment 12 and second collet segment hinged by pin shaft, on each collet segment
It is provided with first hinge hole hinged with collet casing, is provided with the second hinge hole 21 corresponding with above-mentioned pin shaft on guide sleeve 14
So that the first collet segment 12, the second collet segment and 14 three of guide sleeve are hinged by a logical pin shaft.Collet sleeve
Collet casing hinge hole 22 is correspondingly arranged on each first hinge hole on pipe 13.When the last the first card case rotates, transmission shaft first
Part drives shaft to rotate together, and shaft and being threadedly engaged for guide sleeve drive guide sleeve to be moved forward and backward, final to drive two folders
Head divides relative motion with closure or openness collet.The rotation of the last the second card case can drive transmission shaft first part to rotate,
And then drive the rotation of collet.Collet can realize that collet can when retreating by the promotion forward of the last the first card case when advancing
To be realized by the rear in-migration of the last the second card case.Two sets of drivings work independently from each other, non-interference and cooperate with each other, from
And realize product function.
Each strong card case includes annular outer cover 17 and the mounting plate 18 that is set to inside annular outer cover 17,18 edge of mounting plate
Multiple mounting holes 19 for magnet installation are provided at circumferentially spaced, the rear and front end of annular outer cover 17 is provided with shell baffle ring 20.
The quantity of mounting plate 18 is two and is set to the both ends of annular outer cover along time interval, the quantity of shell baffle ring and mounting plate
Quantity is corresponding, and shell baffle ring is connect with installation plate bolt.The quantity of mounting hole 19 in the present embodiment on each mounting plate is 6
And circumferentially uniform intervals are arranged.It is circumferentially arranged on shell baffle ring to have scale strip 26, it can accurately control the rotation angle of collet
Degree and Forward or the distance retreated.Anti-skidding slot structure 27 is provided on 17 lateral surface of annular outer cover, shifting that can be more convenient
It moves or rotates strong card case, the quantity of anti-skidding slot structure 27 is also two and is set on annular outer cover along time interval.Respectively by
Power part is column structure, and each stressed member includes cylindrical body, and cylindrical body has the centre bore 28 installed for transmission shaft, column
The outer peripheral surface of shape ontology form mating surface compatible with the inner wall of installing pipe so that stressed member can by the mating surface and
Rotate in a circumferential direction cooperation and axially directed mobile cooperation, circumferentially spaced setting in the mating surface are realized between the inner wall of installing pipe
The through slot 25 for having multiple length to extend along the axial direction of stressed member, the present embodiment middle groove 25 are the number of arc groove and through slot 25
Amount is 6.The slot bottom of through slot 25 is equipped with screw hole 29, and holds out against screw is equipped in screw hole 29 and realizes stressed member and transmission shaft
Connection.
Transmission shaft first part and transmission shaft second part are by rotational structure rotational installation inside installing pipe, rotation
Structure includes bearing block 11 and the bearing that is set in bearing block, and the outer diameter of bearing block 11 is less than the internal diameter of installing pipe, bearing block
It is circumferentially arranged on 11 to have multiple axis perpendicular to idler wheel 15 drive shaft axis and for cooperating with the inner wall of installing pipe, rolling
The setting of wheel is more convenient when can transmission shaft be moved forward and backward to save labour, and the quantity of idler wheel is 4 in the present embodiment.
In the other embodiments of the utility model, stressed member can also use the ferroalloy of magnetic conduction；The quantity of mounting plate
It may be one or three or more；The quantity of each mounting plate upper installing hole can be adjusted according to actual needs；It is annular outer
The quantity of anti-skidding slot structure may be one on shell.
In a kind of embodiment of magnetic coupling drive stressed member and a kind of above-mentioned each embodiment of magnetic coupling drive by
The structure of power part is identical, and details are not described herein again.
Claims (8)
1. a kind of magnetic coupling drive stressed member, it is characterised in that: including cylindrical body, cylindrical body has to be installed for transmission shaft
Centre bore, the outer peripheral surface of cylindrical body forms mating surface compatible with the inner wall of installing pipe so that stressed member can rely on
Realized between the mating surface and the inner wall of installing pipe rotate in a circumferential direction cooperation and it is axially directed it is mobile cooperate, along week in the mating surface
To the through slot for being arranged at intervals with axial direction extension of multiple length along stressed member.
2. magnetic coupling drive stressed member according to claim 1, it is characterised in that: set on the slot bottom of at least one through slot
There is screw hole, the connection that holds out against screw realizes stressed member and transmission shaft is installed in screw hole.
3. magnetic coupling drive stressed member according to claim 1 or 2, it is characterised in that: the through slot is arc groove.
4. magnetic coupling drive stressed member according to claim 1, it is characterised in that: the cylindrical body is pure using electromagnetism
Iron material matter.
5. a kind of magnetic coupling drive, including installing pipe, the end of installing pipe is provided with for being tightly connected with vacuum cavity
Mounting flange, installing pipe outside are provided with strong card case, it is characterised in that: the installing pipe is internally provided with transmission shaft, transmission
The end of axis is provided with collet, is correspondingly arranged on stressed member with strong card case on transmission shaft, stressed member includes cylindrical body, column
Ontology has the centre bore installed for transmission shaft, and the outer peripheral surface of cylindrical body forms cooperation compatible with the inner wall of installing pipe
Face cooperation and axially directed shifting so that stressed member can rotate in a circumferential direction by realization between the mating surface and the inner wall of installing pipe
It is dynamic to cooperate, the circumferentially spaced through slot for being provided with multiple length and extending along the axial direction of stressed member in the mating surface.
6. magnetic coupling drive according to claim 5, it is characterised in that: the slot bottom of at least one through slot is equipped with screw
Hole is equipped with the connection that holds out against screw realizes stressed member and transmission shaft in screw hole.
7. magnetic coupling drive according to claim 5 or 6, it is characterised in that: the through slot is arc groove.
8. magnetic coupling drive according to claim 5, it is characterised in that: the cylindrical body uses electromagnetic pure iron material
Matter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821613822.7U CN208723757U (en) | 2018-09-30 | 2018-09-30 | A kind of magnetic coupling drive and its stressed member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821613822.7U CN208723757U (en) | 2018-09-30 | 2018-09-30 | A kind of magnetic coupling drive and its stressed member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208723757U true CN208723757U (en) | 2019-04-09 |
Family
ID=65983162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821613822.7U Active CN208723757U (en) | 2018-09-30 | 2018-09-30 | A kind of magnetic coupling drive and its stressed member |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208723757U (en) |
-
2018
- 2018-09-30 CN CN201821613822.7U patent/CN208723757U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190814 Address after: 454000 Jiaozuo City Demonstration Zone, Henan Province, Jiaozuo High-tech Entrepreneurship Service Center 1 Floor Patentee after: Henan Jingkeli Vacuum Technology Co., Ltd. Address before: No. 301, Building 3, No. 3169, Lianhua Street, Zhengzhou High-tech Industrial Development Zone, 450000 Henan Province Patentee before: Zhengzhou CREE Vacuum Equipment Co., Ltd. |