CN208723757U - A kind of magnetic coupling drive and its stressed member - Google Patents

A kind of magnetic coupling drive and its stressed member Download PDF

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Publication number
CN208723757U
CN208723757U CN201821613822.7U CN201821613822U CN208723757U CN 208723757 U CN208723757 U CN 208723757U CN 201821613822 U CN201821613822 U CN 201821613822U CN 208723757 U CN208723757 U CN 208723757U
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China
Prior art keywords
stressed member
installing pipe
cylindrical body
transmission shaft
magnetic coupling
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CN201821613822.7U
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Chinese (zh)
Inventor
白红帅
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Henan Jingkeli Vacuum Technology Co., Ltd.
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Zhengzhou Cree Vacuum Equipment Co Ltd
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Priority to CN201821613822.7U priority Critical patent/CN208723757U/en
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Abstract

The utility model relates to a kind of magnetic coupling drive and its stressed members, stressed member includes cylindrical body, cylindrical body has the centre bore installed for transmission shaft, the outer peripheral surface of cylindrical body formed and the compatible mating surface of inner wall of installing pipe so that stressed member can by realized between the mating surface and the inner wall of installing pipe rotate in a circumferential direction cooperation and it is axially directed it is mobile cooperate, the through slot of the circumferentially spaced axial direction extension along stressed member that is provided with multiple length in the mating surface.Stressed member experiences the magnetic force of magnet, it is big without integrally doing drive rod, and the outer peripheral surface of cylindrical body is adapted with the inner wall of installing pipe, so that the distance between stressed member and strong card case become smaller, stressed member cracking can react and rotation axis is driven to do corresponding sports when strong card case movement, the setting of through slot can be such that the installation lumen at stressed member both ends in installing pipe is connected to simultaneously, and the movement that vacuum area hinders transmission shaft is formed when stressed member being avoided to be moved forward and backward.

Description

A kind of magnetic coupling drive and its stressed member
Technical field
The utility model relates to the drivers on vacuum equipment, are specifically related to a kind of magnetic coupling drive and its stress Part.
Background technique
Vacuum equipment can be used in vacuum coating, semiconductor and aerospace field, vacuum equipment generally comprises very Cavity body and the driver being set on vacuum cavity, traditional driver are generally mechanical driver, using motor or The mode of driving cylinder is as power output, but which leads to driver that volume is larger, and weight is larger, and electric at work The vibration that machine or driving cylinder generate will lead to the problems such as poorly sealed between driver and vacuum cavity.And using motor or Driving cylinder causes the volume of entire driver larger, and installation is inconvenient, particularly with the place of some narrow spaces.
Authorization Notice No. is that the Chinese utility model patent of 204546080 U of CN discloses a kind of magnetic coupling vacuum linear Rotating driver, including handle, strong card case, external main line, internal mobile pipeline, that is, transmission shaft and angle demodulator, handle It is set on strong card case, structure is simple, can drive internal mobile pipeline by the mobile strong card case of handle in operation It is mobile, it solves the above problem and entire driver is completed to be tightly connected by vacuum flange and vacuum cavity.But the drive Dynamic device carries out movement by the magnetic coupling force between internal mobile pipeline and the magnet being mounted in strong card case at work, Internal movement pipeline serves as stressed member at this time, but in movement strong card case, mobile pipeline reaction is slow inside discovery, to make interior Portion's swift words of mobile pipeline need to increase its caliber so that internal mobile the distance between pipeline and magnet diminution, leads at this time Cause internal mobile pipeline caliber larger, at high cost and equipment is heavy.
Utility model content
The purpose of the utility model is to provide the magnetic couplings that one kind can allow transmission shaft fast with the mobile response of strong card case Driver stressed member;Meanwhile the purpose of this utility model also resides in and provides a kind of magnetic coupling drive using the stressed member.
To achieve the above object, a kind of magnetic coupling drive stressed member of the utility model adopts the following technical scheme that one Kind magnetic coupling drive stressed member, including cylindrical body, cylindrical body have the centre bore installed for transmission shaft, cylindrical body Outer peripheral surface forms compatible with the inner wall of installing pipe mating surface so that stressed member can rely on the mating surface and installing pipe Realize that rotate in a circumferential direction cooperation and axially directed movement cooperate between inner wall, it is circumferentially spaced in the mating surface to be provided with multiple length Spend the through slot extended along the axial direction of stressed member.
The slot bottom of at least one through slot is equipped with screw hole, and holds out against screw is equipped in screw hole and realizes stressed member and transmission The connection of axis.
The through slot is arc groove.
The cylindrical body uses electromagnetic pure iron material.
A kind of magnetic coupling drive of the utility model adopts the following technical scheme that a kind of magnetic coupling drive, including peace Tubulature, the end of installing pipe are provided with the mounting flange for being tightly connected with vacuum cavity, are provided with strong magnetic on the outside of installing pipe Cutting ferrule, the installing pipe are internally provided with transmission shaft, and the end of transmission shaft is provided with collet, corresponding with strong card case on transmission shaft Be provided with stressed member, stressed member includes cylindrical body, and cylindrical body has a centre bore installed for transmission shaft, cylindrical body it is outer Circumferential surface forms compatible with the inner wall of installing pipe mating surface so that stressed member can rely on the interior of the mating surface and installing pipe Realize that rotate in a circumferential direction cooperation and axially directed movement cooperate between wall surface, it is circumferentially spaced in the mating surface to be provided with multiple length The through slot extended along the axial direction of stressed member.
The slot bottom of at least one through slot is equipped with screw hole, and holds out against screw is equipped in screw hole and realizes stressed member and transmission The connection of axis.
The through slot is arc groove.
The cylindrical body uses electromagnetic pure iron material.
The utility model has the beneficial effects that the setting of stressed member can make stressed member experience the magnetic coupling force of magnet, do not have to It is larger that drive rod is integrally made into caliber, and the outer peripheral surface of cylindrical body is adapted with the inner wall of installing pipe, so that stressed member The distance between strong card case becomes smaller, and stressed member cracking can react and rotation axis is driven to do accordingly when strong card case moves Movement, while the setting of through slot can be such that the installation lumen at stressed member both ends in installing pipe is connected to, and stressed member is avoided to be moved forward and backward When form the movement that vacuum area hinders transmission shaft, and the setting of through slot can also play the role of loss of weight.
Further, the baking temperature of equipment can be increased to 150 DEG C using electromagnetic pure iron, the strong magnetic temperature of existing use It may not exceed 80 DEG C, otherwise magnetism will appear decaying.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of one embodiment of magnetic coupling drive of the utility model;
Fig. 2 is the schematic diagram of internal structure of magnetic coupling drive;
Fig. 3 is partial enlarged view of the Fig. 2 at A;
Fig. 4 is the mounting structure schematic diagram of collet and guide sleeve and shaft;
Fig. 5 is the structural schematic diagram of mounting plate;
Fig. 6 is the structural schematic diagram of stressed member;
Fig. 7 is the structural schematic diagram of rotational structure.
Specific embodiment
A kind of embodiment of the magnetic coupling drive of the utility model, as shown in Fig. 1-Fig. 7, including installing pipe 1, installing pipe 1 end is provided with the mounting flange 3 for being tightly connected with vacuum cavity, close by mounting flange 3 and vacuum cavity completion Envelope connection.Installing pipe 1 is internally provided with transmission shaft 2, and the end of transmission shaft 2 is provided with collet 4, is provided with and is used in installing pipe 1 It drives transmission shaft 2 and collet 4 forward motion and to open and close the first magnetic coupling driving structure of collet 4 together, is also set up in installing pipe 1 Have for drive transmission shaft 2 and collet 4 together backward movement and rotary chuck 4 the second coupling driving structure.
Transmission shaft 2 includes the transmission shaft first part 10 set gradually along the longitudinal direction and transmission shaft second part 9, transmission The first stressed member 24 of magnetic conduction is provided in axis first part 10, the first magnetic coupling driving structure includes being sheathed on the outside of installing pipe The last the first card case 6 corresponding with the first stressed member 24.The second stressed member of magnetic conduction is provided on transmission shaft second part 9 23, the second magnetic coupling driving structure includes the last the second card case corresponding with the second stressed member 23 for being sheathed on 1 outside of installing pipe 5, each strong card case is internally provided with magnet.First stressed member and the second stressed member are all made of electromagnetic pure iron material, and structure is simple, And can be with high temperature resistant, middle stressed member uses strong magnetic material compared with the prior art, when temperature reaches 180 DEG C or more in installing pipe Demagnetization phenomenon is had, product is not available.On the outside of installing pipe 1 between the last the first card case 6 and the last the second card case 5 Separation sleeve 7 is provided with to guarantee the last the first card case 6 and 24 position of the first stressed member correspondence and the last the second card case 5 and second 23 position of stressed member is corresponding.When the last the first card case 6 moves forward and transmission shaft is driven to go ahead, while the can be pushed forward The last two card case forward motion drives the second stressed member to move forward, increases transmission shaft by forward by the last the second card case Mobile power, and if being not provided with separation sleeve, when the last the first card case moves forward and transmission shaft is driven to go ahead, the second stress Part, which moves forward, will receive the resistance of magnet in the last the second card case.
Transmission shaft second part 9 is hollow shaft structure, and the first magnetic coupling driving structure further includes being set to transmission shaft second The shaft 8 of partial interior is connected between transmission shaft first part 10 and transmission shaft second part 9 by connector sleeve 16, transmission shaft First part 10 is rotatably dispose in connector sleeve 16, and transmission shaft second part 9 links together with connector sleeve 16, to realize front and back The transmitting of power on direction.Both transmission shaft first part 10 and transmission shaft second part 9 can independently rotate, non-interference.Turn Axis 8 is connected in transmission shaft first part 10 to rotate together with transmission shaft first part 10.
The end of transmission shaft second part 9 is connected with collet casing 13, axially directed moves inside collet casing 13 along its It is provided with guide sleeve 14, guide sleeve 14 is threadedly engaged with shaft 8 connect i.e. shaft 8 with the screw thread being threadedly coupled with guide sleeve 14 Section 81.Collet 4 includes first collet segment 12 and second collet segment hinged by pin shaft, on each collet segment It is provided with first hinge hole hinged with collet casing, is provided with the second hinge hole 21 corresponding with above-mentioned pin shaft on guide sleeve 14 So that the first collet segment 12, the second collet segment and 14 three of guide sleeve are hinged by a logical pin shaft.Collet sleeve Collet casing hinge hole 22 is correspondingly arranged on each first hinge hole on pipe 13.When the last the first card case rotates, transmission shaft first Part drives shaft to rotate together, and shaft and being threadedly engaged for guide sleeve drive guide sleeve to be moved forward and backward, final to drive two folders Head divides relative motion with closure or openness collet.The rotation of the last the second card case can drive transmission shaft first part to rotate, And then drive the rotation of collet.Collet can realize that collet can when retreating by the promotion forward of the last the first card case when advancing To be realized by the rear in-migration of the last the second card case.Two sets of drivings work independently from each other, non-interference and cooperate with each other, from And realize product function.
Each strong card case includes annular outer cover 17 and the mounting plate 18 that is set to inside annular outer cover 17,18 edge of mounting plate Multiple mounting holes 19 for magnet installation are provided at circumferentially spaced, the rear and front end of annular outer cover 17 is provided with shell baffle ring 20. The quantity of mounting plate 18 is two and is set to the both ends of annular outer cover along time interval, the quantity of shell baffle ring and mounting plate Quantity is corresponding, and shell baffle ring is connect with installation plate bolt.The quantity of mounting hole 19 in the present embodiment on each mounting plate is 6 And circumferentially uniform intervals are arranged.It is circumferentially arranged on shell baffle ring to have scale strip 26, it can accurately control the rotation angle of collet Degree and Forward or the distance retreated.Anti-skidding slot structure 27 is provided on 17 lateral surface of annular outer cover, shifting that can be more convenient It moves or rotates strong card case, the quantity of anti-skidding slot structure 27 is also two and is set on annular outer cover along time interval.Respectively by Power part is column structure, and each stressed member includes cylindrical body, and cylindrical body has the centre bore 28 installed for transmission shaft, column The outer peripheral surface of shape ontology form mating surface compatible with the inner wall of installing pipe so that stressed member can by the mating surface and Rotate in a circumferential direction cooperation and axially directed mobile cooperation, circumferentially spaced setting in the mating surface are realized between the inner wall of installing pipe The through slot 25 for having multiple length to extend along the axial direction of stressed member, the present embodiment middle groove 25 are the number of arc groove and through slot 25 Amount is 6.The slot bottom of through slot 25 is equipped with screw hole 29, and holds out against screw is equipped in screw hole 29 and realizes stressed member and transmission shaft Connection.
Transmission shaft first part and transmission shaft second part are by rotational structure rotational installation inside installing pipe, rotation Structure includes bearing block 11 and the bearing that is set in bearing block, and the outer diameter of bearing block 11 is less than the internal diameter of installing pipe, bearing block It is circumferentially arranged on 11 to have multiple axis perpendicular to idler wheel 15 drive shaft axis and for cooperating with the inner wall of installing pipe, rolling The setting of wheel is more convenient when can transmission shaft be moved forward and backward to save labour, and the quantity of idler wheel is 4 in the present embodiment.
In the other embodiments of the utility model, stressed member can also use the ferroalloy of magnetic conduction;The quantity of mounting plate It may be one or three or more;The quantity of each mounting plate upper installing hole can be adjusted according to actual needs;It is annular outer The quantity of anti-skidding slot structure may be one on shell.
In a kind of embodiment of magnetic coupling drive stressed member and a kind of above-mentioned each embodiment of magnetic coupling drive by The structure of power part is identical, and details are not described herein again.

Claims (8)

1. a kind of magnetic coupling drive stressed member, it is characterised in that: including cylindrical body, cylindrical body has to be installed for transmission shaft Centre bore, the outer peripheral surface of cylindrical body forms mating surface compatible with the inner wall of installing pipe so that stressed member can rely on Realized between the mating surface and the inner wall of installing pipe rotate in a circumferential direction cooperation and it is axially directed it is mobile cooperate, along week in the mating surface To the through slot for being arranged at intervals with axial direction extension of multiple length along stressed member.
2. magnetic coupling drive stressed member according to claim 1, it is characterised in that: set on the slot bottom of at least one through slot There is screw hole, the connection that holds out against screw realizes stressed member and transmission shaft is installed in screw hole.
3. magnetic coupling drive stressed member according to claim 1 or 2, it is characterised in that: the through slot is arc groove.
4. magnetic coupling drive stressed member according to claim 1, it is characterised in that: the cylindrical body is pure using electromagnetism Iron material matter.
5. a kind of magnetic coupling drive, including installing pipe, the end of installing pipe is provided with for being tightly connected with vacuum cavity Mounting flange, installing pipe outside are provided with strong card case, it is characterised in that: the installing pipe is internally provided with transmission shaft, transmission The end of axis is provided with collet, is correspondingly arranged on stressed member with strong card case on transmission shaft, stressed member includes cylindrical body, column Ontology has the centre bore installed for transmission shaft, and the outer peripheral surface of cylindrical body forms cooperation compatible with the inner wall of installing pipe Face cooperation and axially directed shifting so that stressed member can rotate in a circumferential direction by realization between the mating surface and the inner wall of installing pipe It is dynamic to cooperate, the circumferentially spaced through slot for being provided with multiple length and extending along the axial direction of stressed member in the mating surface.
6. magnetic coupling drive according to claim 5, it is characterised in that: the slot bottom of at least one through slot is equipped with screw Hole is equipped with the connection that holds out against screw realizes stressed member and transmission shaft in screw hole.
7. magnetic coupling drive according to claim 5 or 6, it is characterised in that: the through slot is arc groove.
8. magnetic coupling drive according to claim 5, it is characterised in that: the cylindrical body uses electromagnetic pure iron material Matter.
CN201821613822.7U 2018-09-30 2018-09-30 A kind of magnetic coupling drive and its stressed member Active CN208723757U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821613822.7U CN208723757U (en) 2018-09-30 2018-09-30 A kind of magnetic coupling drive and its stressed member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821613822.7U CN208723757U (en) 2018-09-30 2018-09-30 A kind of magnetic coupling drive and its stressed member

Publications (1)

Publication Number Publication Date
CN208723757U true CN208723757U (en) 2019-04-09

Family

ID=65983162

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821613822.7U Active CN208723757U (en) 2018-09-30 2018-09-30 A kind of magnetic coupling drive and its stressed member

Country Status (1)

Country Link
CN (1) CN208723757U (en)

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GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20190814

Address after: 454000 Jiaozuo City Demonstration Zone, Henan Province, Jiaozuo High-tech Entrepreneurship Service Center 1 Floor

Patentee after: Henan Jingkeli Vacuum Technology Co., Ltd.

Address before: No. 301, Building 3, No. 3169, Lianhua Street, Zhengzhou High-tech Industrial Development Zone, 450000 Henan Province

Patentee before: Zhengzhou CREE Vacuum Equipment Co., Ltd.