CN208690744U - The highly reliable modularization grid bias power supply system of vacuum plating - Google Patents
The highly reliable modularization grid bias power supply system of vacuum plating Download PDFInfo
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- CN208690744U CN208690744U CN201821284654.1U CN201821284654U CN208690744U CN 208690744 U CN208690744 U CN 208690744U CN 201821284654 U CN201821284654 U CN 201821284654U CN 208690744 U CN208690744 U CN 208690744U
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Abstract
A kind of highly reliable modularization grid bias power supply system of vacuum plating of the utility model, include organism outer framework (101), the left and right sides of body outer framework (101) is vertically provided with two pieces of vertical mounting plates (102) respectively, and multiple groups guidance set (103) are arranged in parallel on the inner wall of vertical mounting plate (102), the two sides of power module (104) are slidably mounted on guidance set (103), bridge rectifier (201) and air switch (205) are installed on shell (1) panel that power module (104) includes, input terminal (3) is connected to the end of incoming cables of air switch (205) through power supply line, the leading-out terminal of air switch (205) is connected to the end of incoming cables of bridge rectifier (201), water cooling component (2) is installed in shell (1).The utility model can cascade extension, and by water-cooling pattern, substantially increase heat dissipation performance, guarantee the stability of output.
Description
Technical field
The utility model relates to a kind of grid bias power supply systems, more particularly, to a kind of tool applied on vacuum plating process
There is the grid bias power supply system of higher reliability, belongs to power technique fields.
Background technique
Currently, in vacuum plating process, in alumina operational sequence and the techniques such as CVD chemical vapors cvd furnace and
It is required in device in the powerful heating power supply used, especially vacuum plating technique, due to the requirement of craft precision,
It not only requires power big, and requires it that can provide reliable and stable Current Voltage output；And conventional high-power heating
Power supply, due to that can generate a large amount of heat in use, conventional air-cooled structure can not effectively radiate, therefore electricity
The temperature of each electrical part will be substantially increased inside source, and especially for semiconductor devices such as IGBT, temperature rise will be inevitable
Causing it that temperature drift occurs leads to the unstable of performance to influence precision；For this purpose, needing a kind of with high efficiency and heat radiation ability
Power supply；Meanwhile conventional high-power heating power supply improves the volume of the devices such as transformer to increase power nothing more than, so that
It obtains it to be able to bear bigger voltage and reach bigger power, still, it is more huge that such mode will lead to power-supply system volume
Greatly, installation occupied area is larger, for limited plant area, often without enough installation spaces, so as to cause it
Use scope；In addition, watt level needed for different enterprises, different producing lines, production capacity is complete for such heating power supply
It is complete different, therefore power supply of today is mostly customized product, needs to be designed and produced according to customer demand, so,
The production cost for not only increasing power supply manufacturing enterprise is unfavorable for improving the competitiveness of product in market, and power supply product is whole
A manufacturing cycle is longer and different batches of product between consistency it is poor, lack compatibility, when the later period needs replacing, safeguards
When be more troublesome and with high costs；For this purpose, needing a kind of while there is high efficiency and heat radiation ability and compact, the electricity convenient for extension
Source.
Summary of the invention
Purpose of the utility model is to overcome the above-mentioned shortcomings and provide a kind of highly reliable modularization bias plasmas of vacuum plating
Source system can carry out arbitrarily cascade extension according to customer demand, so that effectively reducing it manufactures and designs difficulty and production
Cost, while convenient for miniaturization layout, and by water-cooling pattern, heat dissipation performance is substantially increased, ensure that semiconductor devices
It always works in linear range, ensure that the stability of output.
Purpose of the utility model is realized as follows:
A kind of highly reliable modularization grid bias power supply system of vacuum plating, the system includes organism outer framework, described
The left and right sides of body outer framework is vertically provided with two pieces of vertical mounting plates respectively, and on the inner wall of vertical mounting plate from lower to upper
It is arranged in parallel with multiple groups guidance set, each guidance set includes two horizontally disposed guide rails, two sideslips of power module
It is dynamic to be installed on the guide rail of guidance set, and the bottom of body outer framework is equipped with total air switch, total air switch position
In the lower section of power module, long cable section of ingoing line is connected to the inlet wire of total air switch after the entrance hole of body outer framework bottom enters
End, the leading-out terminal of total air switch are connected to the total copper bar of vertically arranged inlet wire, and the total copper bar of inlet wire is through multiple connection sheets point
It is not connected on the input terminal of multiple power modules, the outlet copper bar of power module is connected to the total copper of vertically arranged outlet
Row, and is provided with water cooling component in power module, be vertically provided with water inlet pipe and outlet pipe in the body outer framework, it is described into
The water supply connector of water pipe is installed on the lower part of body outer framework, and the water inlet pipe is connected to power module through multiple branch's water inlet pipes
On the water inlet terminal of interior water cooling component, the water outlet connector of the outlet pipe is installed on the top of body outer framework, and power supply mould
The water outlet terminal of the water cooling component of block is connected to outlet pipe through branch's outlet pipe；
The power module includes shell, is equipped with bridge rectifier and air switch on the panel of the shell,
Input terminal is connected to the end of incoming cables of air switch through power supply line, and the leading-out terminal of the air switch is connected to bridge rectifier
End of incoming cables, water cooling component is installed in shell；It is provided on the backboard of the shell into water terminal mounting hole and water outlet terminal
Mounting hole is provided on two pieces of side plate inner walls of the shell and shelves item, and one shelves and is provided with locating piece on item；The water cooling
Component includes water cooling aluminium sheet, is provided with cooling water channel in the water cooling aluminium sheet, on two open ends of the cooling water channel respectively
It is plugged with into water terminal and water outlet terminal, and intake terminal and water outlet terminal are embedded at water inlet terminal mounting hole and water outlet respectively
It in sub- mounting hole, is recessed inwardly in a side of the water cooling aluminium sheet and is formed with positioning gap, the two sides of the water cooling aluminium sheet are put
It sets on shelving item, and above-mentioned locating piece is provided with fixation hole on four angles of the water cooling aluminium sheet in positioning gap,
Fixing bolt is spun on after fixation hole and shelves in item, and multiple mounting holes, IGBT inversion electricity are provided on the water cooling aluminium sheet
Road is installed on the front of water cooling aluminium sheet by mounting hole, and the leading-out terminal of bridge rectifier is connected to the input of IGBT inverter circuit
End, transformer and filter circuit are installed on the back side of water cooling aluminium sheet by mounting hole, and the output end of IGBT inverter circuit is connected to
The primary coil input terminal of transformer, the secondary coil output end of the transformer is connected to the input terminal of filter circuit, described
The output end of filter circuit is connected to outlet copper bar, and control panel is installed on the back side of water cooling aluminium sheet, and control panel by mounting hole
On driving circuit be connected with the control signal of IGBT inverter circuit；Above-mentioned input terminal and outlet copper bar are connected to shell
Backboard on.
A kind of vacuum plating of the utility model highly reliable modularization grid bias power supply system is equipped on the shell a plurality of
Walk lines, it is described walk lines top surface on be provided with cabling channel along its length, on the two sides cell wall of the cabling channel respectively
It is provided with multiple binding grooves.
A kind of vacuum plating of the utility model highly reliable modularization grid bias power supply system is arranged on the water inlet terminal
Guiding tube is inserted into cooling water channel by tube expansion technique；The guiding tube being arranged on the water outlet terminal is inserted into cold by tube expansion technique
But in water channel.
Compared with prior art, the utility model has the beneficial effects that
The utility model greatly reduces design cost by modular mentality of designing, can be easily according to client's
Demand carries out cascade extension to obtain required power output；And modularized design makes each power module big without being equipped with
Type transformer is conducive to integral layout design, reduces its volume, and multiple so that it uses the transformer that routinizes
Power module, using layout type from lower to upper, greatly reduces its occupied area in cascade process, convenient for narrow
Space in install and use；Meanwhile being radiated by water-cooling pattern, the heat that can quickly and effectively distribute each device
It is effectively excluded, to greatly reduce its operating temperature, guarantees electronic device (especially semiconductor devices) always
Work guarantees the stability of output Current Voltage in optimum temperature interval range.
Detailed description of the invention
Fig. 1 is that a kind of stereoscopic effect of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model is illustrated
Figure.
Fig. 2 is a kind of solid at vacuum plating of the utility model another visual angle of highly reliable modularization grid bias power supply system
Effect diagram.
Fig. 3 is a kind of front view of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model.
Fig. 4 is a kind of left view of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model.
Fig. 5 is a kind of right view of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model.
Fig. 6 is a kind of solid of vacuum plating of the utility model power module of highly reliable modularization grid bias power supply system
Effect diagram.
Fig. 7 is a kind of the another of the power module of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model
The stereoscopic effect schematic diagram at visual angle.
Fig. 8 is a kind of the another of the power module of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model
The stereoscopic effect schematic diagram at visual angle.
Fig. 9 is a kind of looking up for the power module of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model
Figure.
Figure 10 is a kind of shell of vacuum plating of the utility model power module of highly reliable modularization grid bias power supply system
The partial schematic diagram of internal side wall.
Figure 11 is a kind of water of vacuum plating of the utility model power module of highly reliable modularization grid bias power supply system
The structural schematic diagram of cold component.
Figure 12 is a kind of power module water cooling of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model
The structural schematic diagram of component.
Figure 13 is a kind of circuit block diagram of the highly reliable modularization grid bias power supply system of vacuum plating of the utility model.
Wherein:
Body outer framework 101, vertical mounting plate 102, guidance set 103, power module 104, total air switch 105, into
The total copper bar 108 of water pipe 106, outlet pipe 107, inlet wire, the total copper bar 109 of outlet, isolation board 110；
Bridge rectifier 201, IGBT inverter circuit 202, transformer 203, filter circuit 204, air switch 205；
Shell 1, input terminal 3, outlet copper bar 4, walks lines 5, control panel 6 at water cooling component 2；
Water inlet terminal mounting hole 1.1, shelves item 1.3, locating piece 1.4 at water outlet terminal mounting hole 1.2；
Water cooling aluminium sheet 2.1, water inlet terminal 2.2, water outlet terminal 2.3；
Position gap 2.1.1, fixation hole 2.1.2, mounting hole 2.1.3.
Specific embodiment
Referring to Fig. 1~13, the utility model relates to a kind of vacuum plating highly reliable modularization grid bias power supply system, institute
Stating system includes organism outer framework 101, and the left and right sides of the body outer framework 101 is vertically provided with two pieces of vertical peaces respectively
Loading board 102, and it is arranged in parallel with multiple groups guidance set 103, each guidance set from lower to upper on the inner wall of vertical mounting plate 102
103 include two horizontally disposed guide rails, and the two sides of power module 104 are slidably mounted on the guide rail of guidance set 103, and
The bottom of body outer framework 101 is equipped with total air switch 105, and total air switch 105 is located under power module 104
Side, long cable section of ingoing line is connected to the end of incoming cables of total air switch 105 after the entrance hole of 101 bottom of body outer framework enters, described
The leading-out terminal of total air switch 105 is connected to the total copper bar 108 of vertically arranged inlet wire, and the total copper bar 108 of inlet wire is through multiple connection sheets
It is respectively connected on the input terminal 3 of multiple power modules 104, the outlet copper bar 4 of power module 104 is connected to vertically arranged
The total copper bar 109 of outlet, and water cooling component 2 is provided in power module 104, be vertically provided in the body outer framework 101 into
The water supply connector of water pipe 106 and outlet pipe 107, the water inlet pipe 106 is installed on the lower part of body outer framework 101, the water inlet
Pipe 106 is connected on the water inlet terminal 2.2 of the water cooling component 2 in power module 104 through multiple branch's water inlet pipes, the outlet pipe
107 water outlet connector is installed on the top of body outer framework 101, and the water outlet terminal 2.3 of the water cooling component 2 of power module 104
Outlet pipe 107 is connected to through branch's outlet pipe；The total copper bar 108 of the water inlet pipe 106, outlet pipe 107, inlet wire and the total copper bar of outlet
109 are close to 101 backboard of body outer framework, and the back of body outer framework 101 is vertically equipped with an isolation board 110, it is described into
Water pipe 106 and outlet pipe 107 are located at the side of isolation board 110, the total copper bar 108 of the inlet wire and the total copper bar 109 of outlet be located at every
The other side from plate 110；
The power module 104 includes shell 1, is equipped with bridge rectifier 201 and sky on the panel of the shell 1
Air cock 205, input terminal 3 are connected to the end of incoming cables of air switch 205, the leading-out terminal of the air switch 205 through power supply line
It is connected to the end of incoming cables of bridge rectifier 201, water cooling component 2 is installed in shell 1；It is provided on the backboard of the shell 1
It intakes terminal mounting hole 1.1 and water outlet terminal mounting hole 1.2, is provided on two pieces of side plate inner walls of the shell 1 and shelves item
1.3, one shelves and is provided with locating piece 1.4 on item 1.3；The water cooling component 2 includes water cooling aluminium sheet 2.1, the water cooling aluminium sheet
It is provided with cooling water channel in 2.1, is plugged with respectively on two open ends of the cooling water channel into water terminal 2.2 and water outlet terminal
2.3 (concretely, the guiding tube that is arranged passes through in tube expansion technique insertion cooling water channel on the water inlet terminal 2.2；Likewise,
The guiding tube being arranged on the water outlet terminal 2.3 is equally inserted into cooling water channel by tube expansion technique；), and 2.2 He of terminal of intaking
Terminal 2.3 is discharged respectively in water inlet terminal mounting hole 1.1 and water outlet terminal mounting hole 1.2, the water cooling aluminium sheet 2.1
It being recessed inwardly in a side and is formed with positioning gap 2.1.1, the two sides of the water cooling aluminium sheet 2.1, which are shelved on, shelves on item 1.3, and
Above-mentioned locating piece 1.4 is provided with fixation hole on four angles of the water cooling aluminium sheet 2.1 in positioning gap 2.1.1
2.1.2, fixing bolt is spun on after fixation hole 2.1.2 and shelves in item 1.3, is provided on the water cooling aluminium sheet 2.1 multiple
Mounting hole 2.1.3, IGBT inverter circuit 202 is installed on the front of water cooling aluminium sheet 2.1, bridge rectifier electricity by mounting hole 2.1.3
The leading-out terminal on road 201 is connected to the input terminal of IGBT inverter circuit 202, and transformer 203 and filter circuit 204 pass through mounting hole
2.1.3 it is installed on the back side of water cooling aluminium sheet 2.1, the output end of IGBT inverter circuit 202 is connected to the primary coil of transformer 203
Input terminal, the secondary coil output end of the transformer 203 are connected to the input terminal of filter circuit 204, the filter circuit 204
Output end be connected to outlet copper bar 4, control panel 6 is installed on the back side of water cooling aluminium sheet 2.1 by mounting hole 2.1.3, and controls
Driving circuit on plate 6 is connected with the control signal of IGBT inverter circuit 202；Consequently facilitating IGBT inverter circuit 202, change
The heat generated when the work such as depressor 203 and filter circuit 204 is absorbed；Above-mentioned input terminal 3 and outlet copper bar 4 are connected to
On the backboard of shell 1；
Further, be equipped on the shell 1 it is a plurality of walk lines 5, it is described walk lines 5 top surface on along its length
It is provided with cabling channel, is respectively arranged with multiple binding grooves on the two sides cell wall of the cabling channel, so that in use, can facilitate
Conducting wire is placed in cabling channel, conducting wire is fixed using the strapping being wound on binding groove, so that in shell 1
Wiring it is more succinct and beautiful, while helping to prevent it because the factors such as knot lead to line fault, to be further ensured that
Its reliability；
In addition: it should be noted that above-mentioned specific embodiment is only a prioritization scheme of this patent, the skill of this field
Any change or improvement that art personnel are done according to above-mentioned design, within the protection domain of this patent..
Claims (3)
1. a kind of highly reliable modularization grid bias power supply system of vacuum plating, it is characterised in that: the system includes outside organism
Frame (101), the left and right sides of the body outer framework (101) are vertically provided with two pieces of vertical mounting plates (102) respectively, and perpendicular
It is arranged in parallel with from lower to upper on the inner wall of mounting plate (102) multiple groups guidance set (103), each guidance set (103) packet
Containing two horizontally disposed guide rails, the two sides of power module (104) are slidably mounted on the guide rail of guidance set (103), and
The bottom of body outer framework (101) is equipped with total air switch (105), and total air switch (105) is located at power module
(104) lower section, long cable section of ingoing line are connected to total air switch (105) after the entrance hole of body outer framework (101) bottom enters
End of incoming cables, the leading-out terminal of total air switch (105) is connected to the total copper bar of vertically arranged inlet wire (108), the total copper of inlet wire
Row (108) is respectively connected on the input terminal (3) of multiple power modules (104) through multiple connection sheets, power module (104)
Outlet copper bar (4) is connected to the total copper bar of vertically arranged outlet (109), and is provided with water cooling component in power module (104)
(2), it is vertically provided with water inlet pipe (106) and outlet pipe (107) in the body outer framework (101), the water inlet pipe (106)
Water supply connector is installed on the lower part of body outer framework (101), and the water inlet pipe (106) is connected to power supply through multiple branch's water inlet pipes
On the water inlet terminal (2.2) of water cooling component (2) in module (104), the water outlet connector of the outlet pipe (107) is installed on body
The top of outer framework (101), and the water outlet terminal (2.3) of the water cooling component (2) of power module (104) is connected to through branch's outlet pipe
To outlet pipe (107)；
The power module (104) includes shell (1), is equipped with bridge rectifier (201) on the panel of the shell (1)
With air switch (205), input terminal (3) is connected to the end of incoming cables of air switch (205), the air switch through power supply line
(205) leading-out terminal is connected to the end of incoming cables of bridge rectifier (201), and water cooling component (2) is installed in shell (1)；It is described
It is provided on the backboard of shell (1) into water terminal mounting hole (1.1) and is discharged terminal mounting hole (1.2), the two of the shell (1)
It is provided with and shelves item (1.3) on block side plate inner wall, one shelves and is provided with locating piece (1.4) on item (1.3)；The water cooling component
(2) include water cooling aluminium sheet (2.1), be provided with cooling water channel in the water cooling aluminium sheet (2.1), two openings of the cooling water channel
It is plugged with respectively on end into water terminal (2.2) and water outlet terminal (2.3), and intakes terminal (2.2) and be discharged terminal (2.3) respectively
In water inlet terminal mounting hole (1.1) and water outlet terminal mounting hole (1.2), in a side of the water cooling aluminium sheet (2.1)
It being recessed inwardly and is formed with positioning gap (2.1.1), the two sides of the water cooling aluminium sheet (2.1), which are shelved on, shelves on item (1.3), and on
Locating piece (1.4) are stated in positioning gap (2.1.1), are provided with fixation hole on four angles of the water cooling aluminium sheet (2.1)
(2.1.2), fixing bolt is spun on after fixation hole (2.1.2) to be shelved in item (1.3), is set on the water cooling aluminium sheet (2.1)
It is equipped with multiple mounting holes (2.1.3), IGBT inverter circuit (202) is installed on water cooling aluminium sheet (2.1) by mounting hole (2.1.3)
Front, the leading-out terminal of bridge rectifier (201) are connected to the input terminal of IGBT inverter circuit (202), transformer (203) and filter
Wave circuit (204) is installed on the back side of water cooling aluminium sheet (2.1), the output of IGBT inverter circuit (202) by mounting hole (2.1.3)
End is connected to the primary coil input terminal of transformer (203), and the secondary coil output end of the transformer (203) is connected to filtering
The output end of the input terminal of circuit (204), the filter circuit (204) is connected to outlet copper bar (4), and control panel (6) passes through peace
Dress hole (2.1.3) is installed on the back side of water cooling aluminium sheet (2.1), and the driving circuit on control panel (6) and IGBT inverter circuit
(202) control signal is connected；Above-mentioned input terminal (3) and outlet copper bar (4) are connected on the backboard of shell (1).
2. a kind of highly reliable modularization grid bias power supply system of vacuum plating as described in claim 1, it is characterised in that: the shell
Be equipped on body (1) it is a plurality of walk lines (5), it is described walk lines (5) top surface on be provided with cabling channel along its length, it is described
Multiple binding grooves are respectively arranged on the two sides cell wall of cabling channel.
3. the highly reliable modularization grid bias power supply system of a kind of vacuum plating as described in claim 1, it is characterised in that: it is described into
The guiding tube being arranged on water end (W.E.) (2.2) is inserted into cooling water channel by tube expansion technique；It is arranged on water outlet terminal (2.3)
Guiding tube is inserted into cooling water channel by tube expansion technique.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821284654.1U CN208690744U (en) | 2018-08-09 | 2018-08-09 | The highly reliable modularization grid bias power supply system of vacuum plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821284654.1U CN208690744U (en) | 2018-08-09 | 2018-08-09 | The highly reliable modularization grid bias power supply system of vacuum plating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208690744U true CN208690744U (en) | 2019-04-02 |
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ID=65884673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821284654.1U Active CN208690744U (en) | 2018-08-09 | 2018-08-09 | The highly reliable modularization grid bias power supply system of vacuum plating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208690744U (en) |
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2018
- 2018-08-09 CN CN201821284654.1U patent/CN208690744U/en active Active
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