CN208685052U - A kind of efficient optical vacuum coating machine - Google Patents
A kind of efficient optical vacuum coating machine Download PDFInfo
- Publication number
- CN208685052U CN208685052U CN201821522349.1U CN201821522349U CN208685052U CN 208685052 U CN208685052 U CN 208685052U CN 201821522349 U CN201821522349 U CN 201821522349U CN 208685052 U CN208685052 U CN 208685052U
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- China
- Prior art keywords
- fixedly connected
- seal box
- vacuum coating
- bevel gear
- communicated
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Abstract
The utility model discloses a kind of efficient optical vacuum coating machines, including seal box, the inner wall of the seal box is fixedly connected with support plate compatible with seal box, the upper surface of the support plate offers the through-hole being spaced substantially equidistant, the inner wall of the seal box is fixedly connected with partition compatible with seal box, and partition is located at the top of support plate, the bottom surface fixation of the partition is inlaid with bearing, and the inner ring of the bearing is fixedly connected with the first conduit.The efficient optical vacuum coating machine, the motor being fixedly connected by support base upper surface, and it is matched between the fluid dividing cover of the fixed connection in support bottom face, plated film target can be made rapidly and uniformly to be covered on the upper surface of coating material, plated film target is effectively reduced and is uniformly covered on the time used in coating material upper surface, it is effectively lifted at efficiency when carrying out plated film to coating material, effectively improves the using effect of vacuum coating equipment entirety.
Description
Technical field
The utility model relates to optical processing technology field, specially a kind of efficient optical vacuum coating machine.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
Include that vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxy and PLD pulsed laser deposition etc. are a variety of, and main thought is divided into
Two kinds of evaporation and sputtering.
It will use vacuum coating equipment during to coating material plated film, but existing vacuum coating equipment is to plated film
There is no shunting measure after target progress is heated, the plated film target lighter in weight after evaporation, when plated film target uniform fold is plating
When film base material upper surface, the time used is longer, in turn results in the low of vacuum coating engine efficiency, therefore now releases a kind of efficient
Optical vacuum coating machine.
Utility model content
(1) the technical issues of solving
In view of the deficiencies of the prior art, the utility model provides a kind of efficient optical vacuum coating machine, solves existing
There is the problem of vacuum coating equipment inefficiency.
(2) technical solution
To achieve the above object, the utility model provides the following technical solutions: a kind of efficient optical vacuum coating machine, packet
Seal box is included, the inner wall of the seal box is fixedly connected with support plate compatible with seal box, the upper surface of the support plate
The through-hole being spaced substantially equidistant is offered, the inner wall of the seal box is fixedly connected with partition compatible with seal box, and partition
Positioned at the top of support plate, the bottom surface fixation of the partition is inlaid with bearing, and the inner ring of the bearing is fixedly connected with first and leads
Pipe, the bottom surface of first conduit is fixed to be communicated with support case, and the bottom surface of the support case is fixed to be communicated with and be spaced substantially equidistant
Fluid dividing cover, the upper surface of first conduit is fixed to be communicated with pod, and the outer surface of first conduit is fixedly connected with the
One bevel gear, the upper surface of the partition are fixedly connected with support base, and the upper surface of the support base is fixedly connected with motor, institute
The output end for stating motor is fixedly connected with second bevel gear, the outer surface of the second bevel gear and the outer surface of first bevel gear
It is meshed, the upper surface of the motor is fixedly connected with electric machine controller, and the inner roof wall of the seal box is fixedly connected with storing
The bottom surface fixation of case, the material storing box is communicated with the second conduit, and second conduit extends to water conservancy diversion far from one end of material storing box
The inside of cover, the inner roof wall of the material storing box are fixedly connected with having heaters, and the upper surface fixation of the material storing box is communicated with charging
The top of pipe, the charge pipe runs through seal box and extends to the top of seal box, the one end of the charge pipe far from seal box
Be arranged with sealing cover, the inner wall of the sealing cover and the outer surface of charge pipe offer screw thread, and the inner wall of sealing cover with plus
The outer surface thread of expects pipe connects, and the bottom of the seal box left side is fixedly connected with protective cover, the inside of the protective cover
Wall is fixedly connected with vacuum pump, and the input terminal fixation of the vacuum pump is communicated with exhaust tube, and the exhaust tube is far from vacuum pump
One end runs through seal box and extends to the inside of seal box, and exhaust tube is located at the lower section of support plate, the output of the vacuum pump
End is fixed to be communicated with exhaust pipe, and the exhaust pipe runs through protective cover far from one end of vacuum pump and extends to the lower section of protective cover.
Preferably, the bottom surface of the seal box is fixedly connected there are two symmetrical pedestal, the bottom surface of each pedestal
It is fixedly connected to non-slip mat.
Preferably, the teeth quantity of the first bevel gear is greater than the teeth quantity of second bevel gear, and first bevel gear
Teeth gap it is equal with the teeth gap of second bevel gear.
Preferably, the upper surface of the protective cover offers ventilation hole, and ventilation hole is located at the middle part of protective cover upper surface.
Preferably, the lower section of the support plate is equipped with check valve, the left side of the check valve and the right side of exhaust tube
Fixed connection.
Preferably, the inner roof wall of the sealing cover is fixedly connected with gasket, the bottom surface of the gasket and charge pipe
Upper surface is in contact.
(3) beneficial effect
The utility model provides a kind of efficient optical vacuum coating machine, have it is following the utility model has the advantages that
(1) the efficient optical vacuum coating machine, is fixedly connected with non-slip mat by the bottom surface of pedestal, can effectively enhance
The antiskid effect of vacuum coating equipment entirety effectively avoids vacuum coating equipment during carrying out plated film to coating material from integrally sending out
The case where raw sliding, occurs, and effectively improves the coating quality to coating material, is greater than the by the teeth quantity of first bevel gear
The teeth quantity of two bevel gears, can be realized and play the role of reduction of speed torque increase to the rotary force of motor, and the rotation of motor is effectively reduced
Turn load, effectively avoid because rotary load it is excessive caused by motor burn out the case where appearance, offered by the upper surface of protective cover
Ventilation hole can effectively enhance the circulation of protective cover inner air, effectively improve the heat dissipation effect to vacuum pump, can make true
Sky pump is worked always with best efficiency.
(2) the efficient optical vacuum coating machine can make gas that can only carry out in the same direction by being equipped with check valve
Flowing, effectively avoids gas there is a situation where flowing backward appearance, by being equipped with gasket, can effectively enhance sealing cover and charge pipe
Between sealing effect, gap of the gas between sealing cover and charge pipe is effectively reduced and flows into probability inside seal box, leads to
It crosses between the motor that support base upper surface is fixedly connected, and the fluid dividing cover of the fixed connection in support bottom face and matches, can make
Plated film target is rapidly and uniformly covered on the upper surface of coating material, and plated film target is effectively reduced and is uniformly covered on coating material
Time used in upper surface is effectively lifted at efficiency when carrying out plated film to coating material, effectively improves vacuum coating equipment entirety
Using effect.
Detailed description of the invention
Fig. 1 is the utility model structure sectional view；
Fig. 2 is schematic enlarged-scale view at A in the utility model Fig. 1；
Fig. 3 is schematic enlarged-scale view at B in the utility model Fig. 2.
In figure: 1 seal box, 2 pedestals, 3 non-slip mats, 4 support plates, 5 through-holes, 6 partitions, 7 bearings, 8 first conduits, 9 supports
Case, 10 fluid dividing covers, 11 pods, 12 first bevel gears, 13 support bases, 14 motors, 15 second bevel gears, 16 material storing box, 17
Two conduits, 18 heaters, 19 protective covers, 20 ventilation openings, 21 vacuum pumps, 22 exhaust tubes, 23 check valves, 24 exhaust pipes, 25 motors
Controller, 26 charge pipes, 27 sealing covers, 28 gaskets.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-3 is please referred to, the utility model provides a kind of technical solution: a kind of efficient optical vacuum coating machine, including
Seal box 1, the bottom surface of seal box 1 are fixedly connected there are two symmetrical pedestal 2, and the bottom surface of each pedestal 2 is fixedly connected to
Non-slip mat 3 is fixedly connected with non-slip mat 3 by the bottom surface of pedestal 2, can effectively enhance the anti-skidding effect of vacuum coating equipment entirety
Fruit, effectively avoid to coating material carry out plated film during vacuum coating equipment integrally there is a situation where sliding appearance, effectively
The coating quality to coating material is improved, the inner wall of seal box 1 is fixedly connected with support plate 4 compatible with seal box 1, supports
The upper surface of plate 4 offers the through-hole 5 being spaced substantially equidistant, the inner wall of seal box 1 be fixedly connected with it is compatible with seal box 1 every
Plate 6, and partition 6 is located at the top of support plate 4, the bottom surface fixation of partition 6 is inlaid with bearing 7, and the inner ring of bearing 7 is fixedly connected with
First conduit 8, the bottom surface of the first conduit 8 is fixed to be communicated with support case 9, and fixed be communicated in the bottom surface of support case 9 is spaced substantially equidistant
Fluid dividing cover 10, the upper surface of the first conduit 8 is fixed to be communicated with pod 11, and the outer surface of the first conduit 8 is fixedly connected with the
One bevel gear 12, the upper surface of partition 6 are fixedly connected with support base 13, and the upper surface of support base 13 is fixedly connected with motor 14,
Motor 14 refers to that a kind of calutron that electric energy conversion or transmitting are realized according to the law of electromagnetic induction, motor 14 are to use in circuit
Alphabetical M indicates that its main function is to generate driving torque, as electrical appliance or the power source of various machinery, the type of motor 14
It number is 6IK180RGU-CFM, the output end of motor 14 is fixedly connected with second bevel gear 15, the teeth quantity of first bevel gear 12
Greater than the teeth quantity of second bevel gear 15, and the teeth gap phase in the teeth gap of first bevel gear 12 and second bevel gear 15
Deng being greater than the teeth quantity of second bevel gear 15 by the teeth quantity of first bevel gear 12, can be realized the rotation to motor 14
Turn power and play the role of reduction of speed torque increase, the rotary load of motor 14 is effectively reduced, effectively avoid because rotary load it is excessive caused by electricity
The outer surface of the case where machine 14 is burnt out appearance, second bevel gear 15 is meshed with the outer surface of first bevel gear 12, motor 14
Upper surface is fixedly connected with electric machine controller 25, electric machine controller 25 be controlled by the active of integrated circuit motor by
It working according to the direction of setting, speed, angle and response time, electric machine controller 25 is equipment well known to the prior art,
The inner roof wall of seal box 1 is fixedly connected with material storing box 16, and the bottom surface fixation of material storing box 16 is communicated with the second conduit 17, the second conduit
17 one end far from material storing box 16 extend to the inside of pod 11, and the inner roof wall of material storing box 16 is fixedly connected with having heaters 18,
Heater 18 refers to the equipment for reaching heating effect using electric energy, and the upper surface fixation of material storing box 16 is communicated with charge pipe 26, adds
The top of expects pipe 26 runs through seal box 1 and extends to the top of seal box 1, and charge pipe 26 is arranged with far from one end of seal box 1
Sealing cover 27, the inner roof wall of sealing cover 27 are fixedly connected with gasket 28, the bottom surface of gasket 28 and the upper surface of charge pipe 26
It is in contact, by being equipped with gasket 28, can effectively enhance the sealing effect between sealing cover 27 and charge pipe 26, be effectively reduced
Gap of the gas between sealing cover 27 and charge pipe 26 flows into the probability inside seal box 1, the inner wall of sealing cover 27 and charging
The outer surface of pipe 26 offers screw thread, and the inner wall of sealing cover 27 is connect with the outer surface thread of charge pipe 26, and seal box 1 is left
The bottom of side is fixedly connected with protective cover 19, and the upper surface of protective cover 19 offers ventilation hole 20, and ventilation hole 20 is located at guarantor
The middle part of 19 upper surface of shield offers ventilation hole 20 by the upper surface of protective cover 19, can effectively enhance in protective cover 19
The circulation of portion's air effectively improves the heat dissipation effect to vacuum pump 21, and vacuum pump 21 can be made to carry out always with best efficiency
Work, the inner sidewall of protective cover 19 are fixedly connected with vacuum pump 21, and vacuum pump 21, which refers to, utilizes machinery, physics, chemically and physically
The method of chemistry is to the device or equipment for being evacuated and being obtained vacuum by pumping container, the model 2XZ-4 of vacuum pump 21, vacuum
The input terminal of pump 21 is fixed to be communicated with exhaust tube 22, and the lower section of support plate 4 is equipped with check valve 23, the left side of check valve 23 and pumping
The fixed connection in the right side of tracheae 22 can make gas that can only be flowed in the same direction, effectively by being equipped with check valve 23
Avoiding gas there is a situation where flowing backward appearance, check valve 23 is that fluid can only be flowed along inlet port, and outlet medium can not but flow back,
Exhaust tube 22 runs through seal box 1 far from one end of vacuum pump 21 and extends to the inside of seal box 1, and exhaust tube 22 is located at support
The lower section of plate 4, the output end of vacuum pump 21 is fixed to be communicated with exhaust pipe 24, and the one end of exhaust pipe 24 far from vacuum pump 21 is through guarantor
Shield 19 and the lower section for extending to protective cover 19.
Coating material: being placed on the upper surface of support plate 4 by working principle, is connected by vacuum pump 21 with municipal power supply
Logical, vacuum pump 21 is powered on the gas extraction inside seal box 1, to make to reach vacuum state inside seal box 1, is passed through
Heater 18 is connected with municipal power supply, and the energization of heater 18 generates heat and adds to the plated film target inside material storing box 16
Heat evaporates plated film target, and plated film target can lead to because gravitational effect is moved downward to the inside for supporting case 9 later
It crosses electric machine controller 25 to be connected with municipal power supply, motor 14 is powered drives the first conduit 8 to rotate forward by first bevel gear 12, branch
Support case 9 will drive fluid dividing cover 10 to rotate, so that plated film target is made rapidly and uniformly to diffuse to the upper surface of coating material, thus
The plated film operation to coating material is completed, plated film target can be made rapidly and uniformly to be covered on the upper surface of coating material, effectively
It reduces plated film target and is uniformly covered on the time used in coating material upper surface, be effectively lifted at and plated film is carried out to coating material
When efficiency, effectively improve the using effect of vacuum coating equipment entirety.
In conclusion the efficient optical vacuum coating machine, is fixedly connected with non-slip mat 3 by the bottom surface of pedestal 2, it can
The effectively antiskid effect of enhancing vacuum coating equipment entirety, effectively avoids vacuum coating during carrying out plated film to coating material
Machine integrally there is a situation where sliding appearance, effectively improves the coating quality to coating material, passes through the teeth of first bevel gear 12
Quantity is greater than the teeth quantity of second bevel gear 15, can be realized and plays the role of reduction of speed torque increase to the rotary force of motor 14, has
Effect reduce motor 14 rotary load, effectively avoid because rotary load it is excessive caused by motor 14 burn out the case where appearance, pass through guarantor
The upper surface of shield 19 offers ventilation hole 20, can effectively enhance the circulation of 19 inner air of protective cover, effectively improves pair
The heat dissipation effect of vacuum pump 21 can make vacuum pump 21 work always with best efficiency, can by being equipped with check valve 23
Flow gas can only in the same direction, effectively avoid gas there is a situation where flowing backward appearance, check valve 23 be fluid only
It can be flowed along inlet port, outlet medium can not but flow back, and by being equipped with gasket 28, can effectively enhance sealing cover 27 and charging
Sealing effect between pipe 26 is effectively reduced gap of the gas between sealing cover 27 and charge pipe 26 and flows into inside seal box 1
Probability, the motor 14 being fixedly connected by 13 upper surface of support base, and the fixed connection in support 9 bottom surface of case fluid dividing cover 10 it
Between match, plated film target can be made rapidly and uniformly to be covered on the upper surface of coating material, it is uniform that plated film target is effectively reduced
Be covered on the time used in coating material upper surface, be effectively lifted to coating material carry out plated film when efficiency, effectively mention
The using effect of high vacuum coating unit entirety solves the problems, such as existing vacuum coating equipment inefficiency.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of efficient optical vacuum coating machine, including seal box (1), it is characterised in that: the inner wall of the seal box (1) is solid
Surely be connected with seal box (1) compatible support plate (4), the upper surface of the support plate (4), which offers, to be spaced substantially equidistant
Through-hole (5), the inner wall of the seal box (1) is fixedly connected with and seal box (1) compatible partition (6), and partition (6) is located at
The bottom surface fixation of the top of support plate (4), the partition (6) is inlaid with bearing (7), and the inner ring of the bearing (7) is fixedly connected
Have the first conduit (8), the bottom surface of first conduit (8) is fixed to be communicated with support case (9), and the bottom surface of support case (9) is solid
Surely it is communicated with the fluid dividing cover (10) being spaced substantially equidistant, the upper surface fixation of first conduit (8) is communicated with pod (11), institute
The outer surface for stating the first conduit (8) is fixedly connected with first bevel gear (12), and the upper surface of the partition (6) is fixedly connected with branch
It supports seat (13), the upper surface of the support base (13) is fixedly connected with motor (14), and the output end of the motor (14) is fixed to be connected
It being connected to second bevel gear (15), the outer surface of the second bevel gear (15) is meshed with the outer surface of first bevel gear (12),
The upper surface of the motor (14) is fixedly connected with electric machine controller (25), and the inner roof wall of the seal box (1) is fixedly connected with
The bottom surface fixation of material storing box (16), the material storing box (16) is communicated with the second conduit (17), and second conduit (17) is far from storage
One end of hopper (16) extends to the inside of pod (11), and the inner roof wall of the material storing box (16) is fixedly connected with having heaters
(18), the upper surface fixation of the material storing box (16) is communicated with charge pipe (26), and the top of the charge pipe (26) is through sealing
Case (1) and the top for extending to seal box (1), the charge pipe (26) are arranged with sealing cover far from the one end of seal box (1)
(27), the inner wall of the sealing cover (27) and the outer surface of charge pipe (26) offer screw thread, and the inner wall of sealing cover (27)
It is connect with the outer surface thread of charge pipe (26), the bottom of seal box (1) left side is fixedly connected with protective cover (19), institute
The inner sidewall for stating protective cover (19) is fixedly connected with vacuum pump (21), and the input terminal fixation of the vacuum pump (21) is communicated with pumping
It manages (22), the one end of the exhaust tube (22) far from vacuum pump (21) is through seal box (1) and extends to the interior of seal box (1)
Portion, and exhaust tube (22) is located at the lower section of support plate (4), the output end fixation of the vacuum pump (21) is communicated with exhaust pipe
(24), the one end of the exhaust pipe (24) far from vacuum pump (21) through protective cover (19) and extends under protective cover (19)
Side.
2. a kind of efficient optical vacuum coating machine according to claim 1, it is characterised in that: the seal box (1)
Bottom surface is fixedly connected there are two symmetrical pedestal (2), and the bottom surface of each pedestal (2) is fixedly connected to non-slip mat (3).
3. a kind of efficient optical vacuum coating machine according to claim 1, it is characterised in that: the first bevel gear
(12) teeth quantity is greater than the teeth quantity of second bevel gear (15), and the teeth gap of first bevel gear (12) and the second cone
The teeth gap of gear (15) is equal.
4. a kind of efficient optical vacuum coating machine according to claim 1, it is characterised in that: the protective cover (19)
Upper surface offers ventilation hole (20), and ventilation hole (20) is located at the middle part of protective cover (19) upper surface.
5. a kind of efficient optical vacuum coating machine according to claim 1, it is characterised in that: the support plate (4)
Lower section is equipped with check valve (23), and the left side of the check valve (23) is connected to the fixation of the right side of exhaust tube (22).
6. a kind of efficient optical vacuum coating machine according to claim 1, it is characterised in that: the sealing cover (27)
Inner roof wall is fixedly connected with gasket (28), and the bottom surface of the gasket (28) is in contact with the upper surface of charge pipe (26).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821522349.1U CN208685052U (en) | 2018-09-18 | 2018-09-18 | A kind of efficient optical vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821522349.1U CN208685052U (en) | 2018-09-18 | 2018-09-18 | A kind of efficient optical vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208685052U true CN208685052U (en) | 2019-04-02 |
Family
ID=65889436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821522349.1U Expired - Fee Related CN208685052U (en) | 2018-09-18 | 2018-09-18 | A kind of efficient optical vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208685052U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725757A (en) * | 2020-11-23 | 2021-04-30 | 苏州鼎利涂层有限公司 | Novel film coating device and film coating method capable of improving surface hardness |
| CN115369360A (en) * | 2022-08-30 | 2022-11-22 | 武汉麦韦光学科技有限公司 | Substrate vacuum coating device and coating method thereof |
-
2018
- 2018-09-18 CN CN201821522349.1U patent/CN208685052U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725757A (en) * | 2020-11-23 | 2021-04-30 | 苏州鼎利涂层有限公司 | Novel film coating device and film coating method capable of improving surface hardness |
| CN115369360A (en) * | 2022-08-30 | 2022-11-22 | 武汉麦韦光学科技有限公司 | Substrate vacuum coating device and coating method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190402 Termination date: 20200918 |
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| CF01 | Termination of patent right due to non-payment of annual fee |