CN208678773U - A kind of heating plant purifying manufacture of semiconductor exhaust gas - Google Patents
A kind of heating plant purifying manufacture of semiconductor exhaust gas Download PDFInfo
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- CN208678773U CN208678773U CN201821089569.XU CN201821089569U CN208678773U CN 208678773 U CN208678773 U CN 208678773U CN 201821089569 U CN201821089569 U CN 201821089569U CN 208678773 U CN208678773 U CN 208678773U
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- fixedly installed
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- thermal reaction
- exhaust gas
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Abstract
The utility model provides a kind of heating plant for purifying manufacture of semiconductor exhaust gas, is related to heating plant technical field.The heating plant of the purification manufacture of semiconductor exhaust gas, including thermal reaction chamber, the inside of the thermal reaction chamber is fixedly installed with inner cavity, the upper end outer surface of the thermal reaction chamber is fixedly installed with exhaust gas entrance, the right side outer surface of the thermal reaction chamber is fixedly installed with waste gas outlet, the interior surface of the thermal reaction chamber is provided with filter plate, and the inner wall of the thermal reaction chamber is fixedly installed with reflux line, the first water pump is fixedly installed on the left of the exhaust gas entrance.The heating plant of the purification manufacture of semiconductor exhaust gas, water resource is allowed to be recycled, be conducive to sustainable development, vapor is cooperated to purify the harmful substance in exhaust gas simultaneously, improve the purification efficiency to harmful substance, it prevents from influencing the running of the heating plant in the excessive dust of thermal reaction chamber inner accumulation and impurity.
Description
Technical field
The utility model relates to heating plant technical field, specially a kind of purification manufacture of semiconductor exhaust gas for hot charging
It sets.
Background technique
During semiconductor production, a large amount of industrial waste gas can be generated, these exhaust gas are divided into acid, alkaline, organic
And poisonous fume, it is general using the methods of washing, oxidation, burning, absorption, dissociation and condensation, if without good processing
It is discharged, serious problem will be caused, not only endanger the health of people, deteriorated atmospheric environment, cause environmental pollution.
And the mode of hot-air purification exhaust gas is usually used in traditional manufacture of semiconductor exhaust gas heating plant, draws from the external world
Enter high-temperature hot air, allow high-temperature hot air and exhaust gas to generate and react, wherein harmful substance is purified, without recycling
Effect, certain waste is caused to resource.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of heating plant for purifying manufacture of semiconductor exhaust gas,
It solves the problems, such as that the hot-air purification exhaust gas of above-mentioned background technique proposition does not have and recycles effect.
Technical solution
In order to achieve the above object, the utility model is achieved by the following technical programs: a kind of purification manufacture of semiconductor
The heating plant of exhaust gas, including thermal reaction chamber, the inside of the thermal reaction chamber are fixedly installed with inner cavity, the thermal reaction chamber it is upper
End outer surface is fixedly installed with exhaust gas entrance, and the right side outer surface of the thermal reaction chamber is fixedly installed with waste gas outlet, the heat
The interior surface of reaction chamber is provided with filter plate, and the inner wall of the thermal reaction chamber is fixedly installed with reflux line, the exhaust gas entrance
Left side be fixedly installed with the first water pump, heat source room, the inside of the heat source room are fixedly installed on the right side of the thermal reaction chamber
Bottom end is fixedly installed with heating machine, and water cavity is fixedly installed with above the heating machine, and the top of the heat source room is fixedly mounted
There is exhaust fan, the lower end outer surface of the exhaust fan is fixedly installed with air intake duct, the fixed peace in the inner wall top of the thermal reaction chamber
Equipped with escape pipe, the inside left position of the heat source room is fixedly installed with water outlet, and the left outer surface of the heat source room is solid
Dingan County is equipped with the second water pump, and a side external surface of the filter plate is fixedly installed with sliding block, the fixed peace of the inner wall of the thermal reaction chamber
Equipped with sliding slot, the leading exterior surface of the filter plate is fixedly installed with handle, and the outer surface of the thermal reaction chamber is movably installed with peace
The right side outer surface of air cock, the safety door is movably installed with lock.
Further, be fixedly connected between first water pump and reflux line, the reflux line and the second water pump it
Between be fixedly connected, and be fixedly connected between reflux line and heat source room, be fixedly connected between the water outlet and reflux line.
Further, the upper end outer surface of the water cavity is communicated with water inlet, and is fixedly mounted between water cavity and heating machine
There is heat-conducting layer.
Further, it is fixedly connected between the escape pipe and exhaust fan, the rear end of the exhaust fan is fixedly installed with electricity
Machine.
Further, it is flexibly connected between the sliding block and sliding slot, the outer surface of the filter plate offers filter hole, filtering
The quantity in hole is several groups.
Further, sealing ring, the lock and thermal reaction chamber are fixedly installed at the inner surface edge of the safety door
Between be flexibly connected.
Further, the left outer surface of the thermal reaction chamber is fixedly installed with controller, and the inside of the heat source room is solid
Dingan County is equipped with temperature sensor, and the output end of controller and the input terminal of temperature sensor are electrically connected.
Beneficial effect
Compare the prior art:
1, the heating plant of the purification manufacture of semiconductor exhaust gas passes through inner cavity, reflux line, the first water pump, heating machine, water
The cooperation of chamber, exhaust fan, air intake duct, escape pipe and the second water pump, heating machine heat water cavity, then set when temperature reaches
After definite value, temperature sensor senses simultaneously send a signal to controller, and vapor is then generated inside water cavity, and controller controls exhausting
Machine is opened, and steam is then extracted into thermal reaction chamber, while delivery is entered reflux line by the second water pump, in thermal reaction chamber
At wall after one circle of circulation, by the first water pump by delivery backwater cavity, continues to heat, so recycle, to thermal reaction chamber inside
Temperature improved, allow water resource to be recycled, be conducive to sustainable development, while cooperating vapor to exhaust gas
In harmful substance purified, improve the purification efficiency to harmful substance.
2, the heating plant of the purification manufacture of semiconductor exhaust gas, passes through matching for filter plate, sliding block, sliding slot, safety door and lock
It closes, the solid residue of solid dust and harmful substance can be generated during to waste gas purification, filter plate is collected it, so
While maintenance personnel carries out periodic maintenance to the heating plant afterwards, safety door is opened by filter plate and pulls out sliding slot, filter plate is carried out
Cleaning, prevents from influencing the running of the heating plant in the excessive dust of thermal reaction chamber inner accumulation and impurity.
Detailed description of the invention
Fig. 1 is the utility model overall structure diagram；
Fig. 2 is the thermal reaction chamber main view of the utility model；
Fig. 3 is the filter-plate structure figure of the utility model.
In figure: 1 thermal reaction chamber, 2 inner cavities, 3 exhaust gas entrances, 4 waste gas outlets, 5 filter plates, 6 reflux lines, 7 first water pumps, 8
Heat source room, 9 heating machines, 10 water cavities, 11 exhaust fans, 12 air intake ducts, 13 escape pipes, 14 water outlets, 15 second water pumps, 16 sliding blocks,
17 sliding slots, 18 handles, 19 safety doors, 20 locks.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
As shown in Figure 1-3, the utility model embodiment provides a kind of heating plant for purifying manufacture of semiconductor exhaust gas, including
Thermal reaction chamber 1, the left outer surface of thermal reaction chamber 1 are fixedly installed with controller, and the inside of heat source room 8 is fixedly installed with temperature biography
Sensor, the output end of controller and the input terminal of temperature sensor are electrically connected, and the inside of thermal reaction chamber 1 is fixedly installed with inner cavity
2, the upper end outer surface of thermal reaction chamber 1 is fixedly installed with exhaust gas entrance 3, and the right side outer surface of thermal reaction chamber 1 is fixedly installed with useless
Gas outlet 4, the interior surface of thermal reaction chamber 1 is provided with filter plate 5, and the inner wall of thermal reaction chamber 1 is fixedly installed with reflux line 6, gives up
The left side of gas entrance 3 is fixedly installed with the first water pump 7, is fixedly connected between the first water pump 7 and reflux line 6, reflux line 6 with
Be fixedly connected between second water pump 15, and be fixedly connected between reflux line 6 and heat source room 8, water outlet 14 and reflux line 6 it
Between be fixedly connected, the right side of thermal reaction chamber 1 is fixedly installed with heat source room 8, and the inner bottom of heat source room 8 is fixedly installed with heating machine
9, the top of heating machine 9 is fixedly installed with water cavity 10, and the upper end outer surface of water cavity 10 is communicated with water inlet, and water cavity 10 and heating
Heat-conducting layer is fixedly installed between machine 9, the top of heat source room 8 is fixedly installed with exhaust fan 11, the lower end outer surface of exhaust fan 11
Be fixedly installed with air intake duct 12, the inner wall top of thermal reaction chamber 1 is fixedly installed with escape pipe 13, escape pipe 13 and exhaust fan 11 it
Between be fixedly connected, the rear end of exhaust fan 11 is fixedly installed with motor, is fixedly connected between escape pipe 13 and exhaust fan 11, exhaust fan
11 rear end is fixedly installed with motor, and the inside left position of heat source room 8 is fixedly installed with water outlet 14, the left side of heat source room 8
Outer surface is fixedly installed with the second water pump 15, passes through inner cavity 2, reflux line 6, the first water pump 7, heating machine 9, water cavity 10, exhausting
The cooperation of machine 11, air intake duct 12, escape pipe 13 and the second water pump 15, exhaust gas enter in inner cavity 2 from exhaust gas entrance 3, and heating machine 9 is right
Water cavity 10 is heated, and then after temperature reaches setting value, temperature sensor senses simultaneously send a signal to controller, then water
Vapor is generated inside chamber 10, controller controls exhaust fan 11 and opens, and steam is then extracted into thermal reaction chamber 1, while the second water
Delivery 15 is entered reflux line 6 by pump, after one circle of circulation at 1 inner wall of thermal reaction chamber, by the first water pump 7 by delivery
In backwater cavity 10, continue to heat, so recycles, the temperature inside thermal reaction chamber 1 is improved, water resource is allowed to be followed
Ring utilizes, and is conducive to sustainable development, while vapor being cooperated to purify the harmful substance in exhaust gas, improves to nocuousness
The purification efficiency of substance, a side external surface of filter plate 5 are fixedly installed with sliding block 16, are flexibly connected between sliding block 16 and sliding slot 17,
The outer surface of filter plate 5 offers filter hole, and the quantity of filter hole is several groups, and the inner wall of thermal reaction chamber 1 is fixedly installed with sliding slot
17, the leading exterior surface of filter plate 5 is fixedly installed with handle 18, and the outer surface of thermal reaction chamber 1 is movably installed with safety door 19, safety
It is fixedly installed with sealing ring at the inner surface edge of door 19, is flexibly connected between lock 20 and thermal reaction chamber 1, the right side of safety door 19
Side external surface is movably installed with lock 20, by filter plate 5, sliding block 16, sliding slot 17, safety door 19 and the cooperation for latching 20, right
The solid residue of solid dust and harmful substance can be generated during waste gas purification, filter plate 5 is collected it, then safeguards
While personnel carry out periodic maintenance to the heating plant, safety door 19 is opened by filter plate 5 and pulls out sliding slot 17, filter plate 5 is carried out
Cleaning, prevents from influencing the running of the heating plant in the excessive dust of 1 inner accumulation of thermal reaction chamber and impurity, after the completion of purification, reaching
To after discharge standard, opens waste gas outlet 4 and exhaust gas is discharged.
Working principle: heating machine 9 is internally heated water cavity 10 first, after water reaches suitable temperature, temperature sensing
Device senses signal and is sent to controller, and then controller control exhaust fan is opened, by the vapor that hot water generates convey into
Enter in inner cavity 2, while exhaust gas enters in inner cavity 2 from exhaust gas entrance 3, vapor and exhaust gas interreaction, to the nocuousness in exhaust gas
Substance is purified, while hot water is pumped into reflux line 6 by the second water pump 15 from water cavity 10, and then the first water pump 7 again will be warm
Water extraction reflux line 6, which is poured into again in water cavity 10, to be heated, and is so recycled, hot water is in cyclic process to thermal reaction chamber 1
Internal temperature is further heated, and accelerates the purification efficiency of exhaust gas, water resource is allowed to be recycled, and is conducive to hold
Supervention exhibition, can generate many solid-state harmful substance residuals during waste gas purification and dust, filter plate 5 are collected it, tie up
Shield personnel are while periodically safeguarding the heating plant, by opening safety door 19, the sealing ring of 19 inside of safety door
To having good leakproofness inside thermal reaction chamber 1, filter plate 5 is extracted out from sliding slot 17, it is cleared up, prevented hot anti-
It answers chamber interior to accumulate excessive dust and impurity, influences the purification efficiency of exhaust gas and influence the running of the heating plant, purified
Cheng Hou after reaching discharge standard, opens waste gas outlet 4 and exhaust gas is discharged.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (7)
1. a kind of heating plant for purifying manufacture of semiconductor exhaust gas, including thermal reaction chamber (1), it is characterised in that: the thermal response
The inside of room (1) is fixedly installed with inner cavity (2), and the upper end outer surface of the thermal reaction chamber (1) is fixedly installed with exhaust gas entrance
(3), the right side outer surface of the thermal reaction chamber (1) is fixedly installed with waste gas outlet (4), the inside table of the thermal reaction chamber (1)
Face is provided with filter plate (5), and the inner wall of the thermal reaction chamber (1) is fixedly installed with reflux line (6), the exhaust gas entrance (3)
Left side is fixedly installed with the first water pump (7), is fixedly installed with heat source room (8), the heat source room on the right side of the thermal reaction chamber (1)
(8) inner bottom is fixedly installed with heating machine (9), is fixedly installed with water cavity (10), the heat above the heating machine (9)
It is fixedly installed at the top of source chamber (8) exhaust fan (11), the lower end outer surface of the exhaust fan (11) is fixedly installed with air intake duct
(12), the inner wall top of the thermal reaction chamber (1) is fixedly installed with escape pipe (13), the inside left position of the heat source room (8)
It sets and is fixedly installed with water outlet (14), the left outer surface of the heat source room (8) is fixedly installed with the second water pump (15), the filter
One side external surface of plate (5) is fixedly installed with sliding block (16), and the inner wall of the thermal reaction chamber (1) is fixedly installed with sliding slot (17),
The leading exterior surface of the filter plate (5) is fixedly installed with handle (18), and the outer surface of the thermal reaction chamber (1) is movably installed with peace
The right side outer surface of air cock (19), the safety door (19) is movably installed with lock (20).
2. a kind of heating plant for purifying manufacture of semiconductor exhaust gas according to claim 1, it is characterised in that: described first
It is fixedly connected between water pump (7) and reflux line (6), is fixedly connected between the reflux line (6) and the second water pump (15), and
It is fixedly connected between reflux line (6) and heat source room (8), is fixedly connected between the water outlet (14) and reflux line (6).
3. a kind of heating plant for purifying manufacture of semiconductor exhaust gas according to claim 1, it is characterised in that: the water cavity
(10) upper end outer surface is communicated with water inlet, and is fixedly installed with heat-conducting layer between water cavity (10) and heating machine (9).
4. a kind of heating plant for purifying manufacture of semiconductor exhaust gas according to claim 1, it is characterised in that: the outlet
It is fixedly connected between pipe (13) and exhaust fan (11), the rear end of the exhaust fan (11) is fixedly installed with motor.
5. a kind of heating plant for purifying manufacture of semiconductor exhaust gas according to claim 1, it is characterised in that: the sliding block
(16) it is flexibly connected between sliding slot (17), the outer surface of the filter plate (5) offers filter hole, and the quantity of filter hole is several
Group.
6. a kind of heating plant for purifying manufacture of semiconductor exhaust gas according to claim 1, it is characterised in that: the safety
It is fixedly installed with sealing ring at the inner surface edge of door (19), is flexibly connected between lock (20) and thermal reaction chamber (1).
7. a kind of heating plant for purifying manufacture of semiconductor exhaust gas according to claim 1, it is characterised in that: the heat is anti-
The left outer surface of room (1) is answered to be fixedly installed with controller, the inside of the heat source room (8) is fixedly installed with temperature sensor,
The output end of controller and the input terminal of temperature sensor are electrically connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821089569.XU CN208678773U (en) | 2018-07-11 | 2018-07-11 | A kind of heating plant purifying manufacture of semiconductor exhaust gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821089569.XU CN208678773U (en) | 2018-07-11 | 2018-07-11 | A kind of heating plant purifying manufacture of semiconductor exhaust gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208678773U true CN208678773U (en) | 2019-04-02 |
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ID=65880229
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821089569.XU Active CN208678773U (en) | 2018-07-11 | 2018-07-11 | A kind of heating plant purifying manufacture of semiconductor exhaust gas |
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| Country | Link |
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| CN (1) | CN208678773U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108636086A (en) * | 2018-07-11 | 2018-10-12 | 安徽京仪自动化装备技术有限公司 | A kind of heating plant of purification manufacture of semiconductor exhaust gas |
-
2018
- 2018-07-11 CN CN201821089569.XU patent/CN208678773U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108636086A (en) * | 2018-07-11 | 2018-10-12 | 安徽京仪自动化装备技术有限公司 | A kind of heating plant of purification manufacture of semiconductor exhaust gas |
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