CN208672282U - A kind of optical element aberration detecting and system - Google Patents
A kind of optical element aberration detecting and system Download PDFInfo
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- CN208672282U CN208672282U CN201821451255.XU CN201821451255U CN208672282U CN 208672282 U CN208672282 U CN 208672282U CN 201821451255 U CN201821451255 U CN 201821451255U CN 208672282 U CN208672282 U CN 208672282U
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Abstract
The utility model provides a kind of optical element aberration detecting and system, the validity test of the aberration state for solving the problems, such as optical element.Described device includes: light source emitter, modulation component and spot detection analyzer, and the modulation component includes optical element to be measured, the light source emitter, for emitting aberrationless directional light；The modulation component has aberration light to focus on the spot detection analyzer for receiving the aberrationless directional light, and by the aberrationless directional light by what is obtained after the optical element to be measured；The spot detection analyzer has aberration light for receive that the modulation component focuses, and has aberration light to focus the facula information generated to obtain the aberration of the optical element to be measured according to described.
Description
Technical field
The utility model relates to technical field of optical detection, specially a kind of optical element aberration detecting and system.
Background technique
Laser processing is to reach very high energy density in focus after over-focusing using laser, is widely used in material
Processing, such as punching, cutting, scribing, welding, heat treatment, and each optical element in laser-processing system, including focus
The common optical element such as mirror, beam expanding lens, galvanometer and field lens, existing aberration imitate the technological effect of laser processing and processing
Rate generates large effect with laser processing, and there is no the pictures individually for optical element in existing laser-processing system
Difference is detected.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of optical element aberration detecting and system, with solution
Certainly the prior art is difficult to the problem of testing the aberration state of optical element.
In order to solve the above-mentioned technical problem, the utility model provides following technical scheme:
First aspect:
The application provides a kind of optical element aberration detecting, described device include: light source emitter, modulation component with
And spot detection analyzer, the modulation component include optical element to be measured,
The light source emitter, for emitting aberrationless directional light；
The modulation component passes through institute for receiving the aberrationless directional light, and by the aberrationless directional light
State obtain after optical element to be measured there is aberration light to focus on the spot detection analyzer；
The spot detection analyzer has aberration light for receive that the modulation component focuses, and has picture according to described
Poor light focuses the facula information generated and obtains the aberration of the optical element to be measured.
The optical element aberration detecting of above scheme design, by spot detection analyzer to by photometry member
The aberration light that has formed after part is focused spot detection analysis, effective solution optical element aberration test problems, so that
The aberration of optical element to be measured, the optical property of the optical element in strong improving laser system of processing can be effectively tested
Consistency, while can be used for optical element performance assessment new in laser-processing system, laser processing is improved from source
Stability, consistency and the fining of system.
In the optional embodiment of first aspect, the optical element to be measured includes the optics member with focus features
Part,
The optical element with focus features, for receiving the aberrationless parallel of the light source emitter transmitting
Light, and there is aberration light to focus on by what is generated after the optical element with focus features the aberrationless directional light
The spot detection analyzer.
Above scheme design optical element aberration detecting, enable with focus features optical element aberration
It is enough detected, so that the system of processing of the optical element with focus features has the consistency of optical property, while can also
To carry out Performance Evaluation to the new optical element with focus features, judge its aberration whether in the reasonable scope.
In the optional embodiment of first aspect, the modulation component further includes focus lamp, the optical element to be measured
Optical element including no focus features,
The optical element of the no focus features, for receiving the aberrationless directional light of the light source emitter transmitting,
And there is aberration optical transport to described for what is generated after optical element of the aberrationless directional light by the no focus features
Focus lamp；
The focus lamp, for receive it is described have aberration light, and there is aberration light to focus on the spot detection instrument for described.
The optical element aberration detecting of above scheme design, so that the optical element without focus features can also detect it
Aberration state, so that the element of detection, which is more than to detect, has focus features, the range of detecting element is more extensive, versatility
It is stronger.
In the optional embodiment of first aspect, the modulation component further includes reflecting mirror, the optical element to be measured
Including the optical element with scanning focused feature,
The reflecting mirror, for receiving the aberrationless directional light of light source emitter transmitting, and by the aberrationless
Directional light transmission and reflection to the optical element with scanning focused feature；
The optical element with scanning focused feature receives the aberrationless directional light of the reflecting mirror reflection, and
By the aberrationless directional light by generated after the optical element with focus features to have aberration light to focus on described
Spot detection analyzer.
In the optional embodiment of first aspect, the optical element with scanning focused feature includes field lens or vibration
Mirror.
In the optional embodiment of first aspect, the light source emitter includes laser light source, optical fiber and collimating mirror,
The laser light source gives the optical fiber for generating laser, and by the Laser emission；
The laser for receiving the laser of the laser light source transmitting, and is transferred to the collimating mirror by the optical fiber；
The collimating mirror, for receiving the laser of the optical fiber transmission, and by the laser alignment at aberrationless parallel
Light, and the aberrationless directional light is transferred to the modulation component.
The optical element aberration detecting of above scheme design, so that forming nothing before entering optical element to be measured
The directional light of aberration, so that detection is more accurate.
In the optional embodiment of first aspect, the light source emitter further includes fibre-optical fixator,
The fibre-optical fixator enables optical fiber accurately to receive the laser light for fixing the both ends of the optical fiber
The laser of source transmitting, and the laser accurately can be transferred to the collimating mirror.
The optical element aberration detecting of above scheme design, enables optical fiber accurately by laser pick-off and biography
It is defeated.
In the optional embodiment of first aspect, the laser light source includes the laser light source of length switchable.
In the optional embodiment of first aspect, the spot detection analyzer is arranged on precision three-dimensional adjusting bracket.
The optical element aberration detecting of above scheme design, enables the more accurate quilt of facula information focused
Spot detection analyzer is captured, is detected, and the final aberration for obtaining detection is more accurate.
Second aspect:
The utility model also provides a kind of optical element aberration detection system, including optical element as described in relation to the first aspect
The all technical features of aberration detecting.
The optical element aberration detection system of above scheme design, by spot detection analyzer to by photometry member
The aberration light that has formed after part is focused spot detection analysis, effective solution optical element aberration test problems, so that
The aberration of optical element to be measured, the optical property of the optical element in strong improving laser system of processing can be effectively tested
Consistency, while can be used for optical element performance assessment new in laser-processing system, laser processing is improved from source
Stability, consistency and the fining of system.
The utility model provides a kind of optical element aberration detecting and system, has following the utility model has the advantages that this reality
There is aberration light to be focused spot detection point to by what is formed after optical element to be measured by spot detection analyzer with novel
Analysis, effective solution optical element aberration test problems, makes it possible to be effectively tested the aberration of optical element to be measured, effectively
Improving laser system of processing in optical element optical property consistency, while can be used in laser-processing system new
Optical element performance assessment, from source improve laser-processing system stability, consistency and fining.
Detailed description of the invention
It, below will be to required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
The attached drawing used is briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore not
It should be considered as the restriction to range, for those of ordinary skill in the art, without creative efforts,
It can also be obtained according to these attached drawings other relevant attached drawings.
Fig. 1 is the first schematic diagram of optical element aberration detecting that the utility model first embodiment provides；
Fig. 2 is the second schematic diagram of optical element aberration detecting that the utility model first embodiment provides；
Fig. 3 is the optical element aberration detecting third schematic diagram that the utility model first embodiment provides；
Fig. 4 is the 4th schematic diagram of optical element aberration detecting that the utility model first embodiment provides；
Fig. 5 is the 5th schematic diagram of optical element aberration detecting that the utility model first embodiment provides.
Icon: 10- light source emitter；101- laser light source；102- optical fiber；103- collimating mirror；104- fibre-optical fixator；
20- modulation component；201- optical element to be measured；202- focus lamp；203- reflecting mirror；2011- has the optics member of focus features
Part；Optical element of the 2012- without focus features；2013- has the optical element of scanning focused feature；The analysis of 30- spot detection
Instrument.
Specific embodiment
It is practical below in conjunction with this to keep the purposes, technical schemes and advantages of the utility model embodiment clearer
The technical solution in the utility model embodiment is clearly and completely described in attached drawing in novel embodiment, shows
So, described embodiment is a part of embodiment of the utility model, rather than whole embodiments.It is practical based on this
Embodiment in novel, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment is fallen within the protection scope of the utility model.Therefore, the implementation to the utility model provided in the accompanying drawings below
The detailed description of mode is not intended to limit the range of claimed invention, but is merely representative of the utility model
Selected embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative labor
Every other embodiment obtained under the premise of dynamic, fall within the protection scope of the utility model.
In the description of the present invention, it should be understood that term " center ", " length ", " width ", " thickness ",
The orientation or positional relationship of the instructions such as "upper", "lower", "front", "rear", "left", "right", "inner", "outside" is based on the figure
Orientation or positional relationship is merely for convenience of describing the present invention and simplifying the description, rather than indication or suggestion is signified sets
Standby or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to the utility model
Limitation.
In addition, term " first ", " second " etc. are used for description purposes only, it is not understood to indicate or imply relatively important
Property or implicitly indicate the quantity of indicated technical characteristic.The feature for defining " first ", " second " etc. as a result, can be expressed
Or implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or
Two or more, unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be
It is connected directly, the mutual of connection inside two elements or two elements can also be can be indirectly connected through an intermediary
Interactively.For the ordinary skill in the art, it can understand that above-mentioned term is practical new at this as the case may be
Concrete meaning in type.
In the present invention unless specifically defined or limited otherwise, fisrt feature the "upper" of second feature or it
"lower" may include that the first and second features directly contact, and also may include that the first and second features are not direct contacts but lead to
Cross the other characterisation contact between them.Moreover, fisrt feature includes above the second feature " above ", " above " and " above "
One feature is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.First is special
Sign is directly below and diagonally below the second feature including fisrt feature under the second feature " below ", " below " and " below ", or only
Indicate that first feature horizontal height is less than second feature.
First embodiment
It is different by the resulting result of far-off axle light rays trace and the resulting result of paraxial rays trace in actual optical system
It causes, the deviation of the ideal state of these and first-order theory (first-order theory or paraxial rays) is called aberration.
In addition, it is necessary to explanation, described optical element, optical element to be measured 201 can be but not only in the application
It is only limited to laser optical element.
As shown in Figure 1, the application provides a kind of optical element aberration detecting, comprising: light source emitter 10, modulation group
Part 20 and spot detection analyzer 30, modulation component 20 include optical element 201 to be measured,
Light source emitter 10, for emitting aberrationless directional light；
Modulation component 20 passes through optical element to be measured for receiving aberrationless directional light, and by aberrationless directional light
What is obtained after 201 has aberration light to focus on spot detection analyzer；
Spot detection analyzer 30 has aberration light for receive the focusing of modulation component 20, and according to there is the focusing of aberration light
The facula information of generation obtains the aberration of optical element 201 to be measured.
Wherein, what needs to be explained here is that, modulation component can only include optical element to be detected or including to be detected
Optical element and other elements.
For above scheme, specifically, light source emitter 10 is generated and transmitted by out aberrationless directional light, generation without picture
Poor directional light is transferred to modulation component 20, and the parallel of aberration is formed with after the optical element to be detected in modulation component 20
Light, then focuses on spot detection analyzer 30 by modulation component 20, and spot detection analyzer 30 records focal beam spot and coke
Nearby for hot spot as a result, obtaining the information of focal beam spot, which includes the diameter of focal beam spot, circularity parameter, light spot energy to point
Distribution, obtains the aberration of optical element 201 to be measured by the information of focal beam spot.
The optical element aberration detecting of above scheme design, by spot detection analyzer to by photometry member
The aberration light that has formed after part is focused spot detection analysis, effective solution optical element aberration test problems, so that
The aberration of optical element to be measured, the optical property of the optical element in strong improving laser system of processing can be effectively tested
Consistency, while can be used for optical element performance assessment new in laser-processing system, laser processing is improved from source
Stability, consistency and the fining of system.
In the optional embodiment of the present embodiment, as shown in Fig. 2, optical element to be measured 201 includes having focus features
Optical element 2011,
Optical element 2011 with focus features, for receiving the aberrationless directional light of the transmitting of light source emitter 10,
And there is aberration light to focus on hot spot inspection by what is generated after the optical element 2011 with focus features aberrationless directional light
Survey analyzer 30.
Above scheme, here it is worth noting that optical element to be measured 201 includes the optical element with focus features
When 2011, modulation component 20 at this time is also just only with the optical element 2011 of focus features, the optics with focus features
After element 2011 receives the aberrationless light of light source emitter transmitting, pass through shape after this optical element 2011 with focus features
At there is aberration light, and the optical element 2011 of this focus features has focussing force, so that is formed has aberration light to focus on
Spot detection analyzer 30, is detected.
Optionally, the optical element 2011 with focus features can be but be not limited to focus lamp.
Above scheme design optical element aberration detecting, enable with focus features optical element aberration
It is enough detected, so that the system of processing of the optical element with focus features has the consistency of optical property, while can also
To carry out Performance Evaluation to the new optical element 2011 with focus features, judge its aberration whether in the reasonable scope.
In the optional embodiment of the present embodiment, as shown in figure 3, modulation component 20 further includes focus lamp 202, light to be measured
The optical element 2012 that element 201 includes no focus features is learned,
Optical element 2012 without focus features, the aberrationless directional light emitted for receiving quasi- light source emitter 10,
And there is aberration optical transport to focus lamp for what is generated after optical element 2012 that aberrationless directional light passes through no focus features
202；
Focus lamp 202 has aberration light for receiving, and will have aberration light to focus on spot detection instrument 30.
Above scheme, specifically, aberrationless parallel light emitting is transferred to the light of no focus features by light source emitter 10
Element 2012 is learned, there is the directional light of aberration after the optical element 2012 by no focus features, has the directional light of aberration to pass
It is defeated by focus lamp 202, spot detection analyzer is focused on by focus lamp 202.
Optionally, the optical element 2012 of no focus features includes but is not limited to beam expanding lens or turning mirror etc..
The optical element aberration detecting of above scheme design, so that the optical element 2012 without focus features can also be examined
Its aberration state is surveyed, so that the element of detection, which is more than to detect, has focus features, the range of detecting element is more extensive, leads to
It is stronger with property.
In the optional embodiment of the present embodiment, as shown in figure 4, modulation component 20 further includes reflecting mirror 203, light to be measured
Learning element 201 includes the optical element 2013 with scanning focused feature,
Reflecting mirror 203, for receiving the aberrationless directional light of the transmitting of light source emitter 10, and by aberrationless directional light
The optical element 2013 with scanning focused feature is given in transmission and reflection；
Optical element 2013 with scanning focused feature receives the aberrationless directional light that reflecting mirror 203 reflects, and will
Aberrationless directional light has aberration light to focus on spot detection point by what is generated after the optical element 2013 with focus features
Analyzer.
For above scheme, specifically, the aberrationless directional light that light source emitter 10 emits is transferred to reflecting mirror 203,
Reflecting mirror 203 reflects aberrationless directional light, and aberrationless directional light is transferred to the optical element with scanning focused feature
2013, by the optical element 2013 with scanning focused feature, it is formed with aberration light, and there will be aberration light to focus on hot spot inspection
Analyzer is surveyed, aberration detection is carried out.
Optionally, the optical element 2013 with focus features can be but be not limited to the one of which of field lens and galvanometer.
Optionally, reflecting mirror 203 is rotatable mirror, and successively rotating mirror is at different angles, by adjusting light
Spot detection analysis instrument 30, successively the facula information of recording laser focal position under different angle, obtains with scanning focused spy
The curvature of field and coma of the optical element 2013 of sign further obtain the aberration with the optical element 2013 of focus features.
In the optional embodiment of the present embodiment, the optical element 2013 with scanning focused feature includes field lens or vibration
Mirror.
In the optional embodiment of the present embodiment, as shown in figure 5, light source emitter 10 includes laser light source 101, optical fiber
102 and collimating mirror 103,
Laser light source 101, for generating laser, and by Laser emission to optical fiber 102；
Laser for receiving the laser of the transmitting of laser light source 101, and is transferred to collimating mirror 103 by optical fiber 102；
Collimating mirror 103, for the laser that reception optical fiber 102 is transmitted, and by laser alignment at aberrationless directional light, and will
Aberrationless directional light is transferred to modulation component 20.
For above scheme, laser light source 101 generates and shoot laser, by being coupled to optical fiber 102 or being directly entered light
Fibre 102 in, from 102 other end of optical fiber project, from 102 other end of optical fiber project laser after collimating mirror 103 is collimated,
Aberrationless directional light is formed, modulation component 20 is transmitted to.
The optical element aberration detecting of above scheme design, so that forming nothing before entering optical element to be measured
The directional light of aberration, so that detection is more accurate.
In the optional embodiment of the present embodiment, light source emitter 10 further includes fibre-optical fixator 104,
Fibre-optical fixator 104 enables optical fiber 102 accurately to receive laser light source 10 for fixing the both ends of optical fiber 102
The laser of transmitting, and laser accurately can be transferred to collimating mirror 103.
The optical element aberration detecting of above scheme design, fibre-optical fixator 104 can fix the outgoing of optical fiber 102
End, can also fix two ports of optical fiber, enable optical fiber 102 accurately by laser pick-off and transmission.
In the optional embodiment of the present embodiment, laser light source 101 includes the laser light source of length switchable.
For above scheme, it is worth noting that, the laser light source of length switchable is common laser processing wave here
Long, specially 266nm, 355nm, 532nm, 650nm, 850nm, 950nm, 1064nm etc. can be according to optical element to be measured
Carry out selection switching.
In the optional embodiment of the present embodiment, spot detection analyzer 30 is arranged on precision three-dimensional adjusting bracket.
For above scheme, spot detection analyzer 30 is arranged on precision three-dimensional adjusting bracket, so that the hot spot letter focused
Breath can be captured more accurately by spot detection analyzer, be detected, and the final aberration for obtaining detection is more accurate.
Second embodiment
The application also provides a kind of optical element aberration detection system, including the optical element as described in first embodiment
All features of aberration detecting.
The optical element aberration detection system of above scheme design, by spot detection analyzer to by photometry member
The aberration light that has formed after part is focused spot detection analysis, effective solution optical element aberration test problems, so that
The aberration of optical element to be measured, the optical property of the optical element in strong improving laser system of processing can be effectively tested
Consistency, while can be used for optical element performance assessment new in laser-processing system, laser processing is improved from source
Stability, consistency and the fining of system.
Above description is merely a prefered embodiment of the utility model, is not intended to limit the utility model, for
For those skilled in the art, various modifications and changes may be made to the present invention.All spirit and original in the utility model
Within then, any modification, equivalent replacement, improvement and so on be should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of optical element aberration detecting, which is characterized in that described device include: light source emitter, modulation component with
And spot detection analyzer, the modulation component include optical element to be measured,
The light source emitter, for emitting aberrationless directional light；
The modulation component, for receiving the aberrationless directional light, and by the aberrationless directional light by it is described to
What is obtained after photometry element has aberration light to focus on the spot detection analyzer；
The spot detection analyzer has aberration light for receive that the modulation component focuses, and has aberration light according to described
It focuses the facula information generated and obtains the aberration of the optical element to be measured.
2. device according to claim 1, which is characterized in that the optical element to be measured includes the optics with focus features
Element,
The optical element with focus features, for receiving the aberrationless directional light of the light source emitter transmitting, and
By the aberrationless directional light by generated after the optical element with focus features to have aberration light to focus on described
Spot detection analyzer.
3. device according to claim 1, which is characterized in that the modulation component further includes focus lamp, described to photometry
Element includes the optical element of no focus features,
The optical element of the no focus features, for receiving the aberrationless directional light of the light source emitter transmitting, and will
What the aberrationless directional light generated after the optical element by the no focus features has aberration optical transport to the focusing
Mirror；
The focus lamp, for receive it is described have aberration light, and there is aberration light to focus on the spot detection analyzer for described.
4. device according to claim 1, which is characterized in that the modulation component further includes reflecting mirror, described to photometry
Element includes the optical element with scanning focused feature,
The reflecting mirror, for receiving the aberrationless directional light of the light source emitter transmitting, and will be described aberrationless flat
Row light transmission and reflection is to the optical element with scanning focused feature；
The optical element with scanning focused feature, receives the aberrationless directional light of reflecting mirror reflection, and by institute
State aberrationless directional light has aberration light to focus on the hot spot by what is generated after the optical element with focus features
Detection analysis instrument.
5. device according to claim 4, which is characterized in that the optical element with scanning focused feature includes field lens
Or galvanometer.
6. device according to claim 1, which is characterized in that the light source emitter includes laser light source, optical fiber and standard
Straight mirror,
The laser light source gives the optical fiber for generating laser, and by the Laser emission；
The laser for receiving the laser of the laser light source transmitting, and is transferred to the collimating mirror by the optical fiber；
The collimating mirror, for receiving the laser of the optical fiber transmission, and by the laser alignment at aberrationless directional light, and
The aberrationless directional light is transferred to the modulation component.
7. device according to claim 6, which is characterized in that the light source emitter further includes fibre-optical fixator,
The fibre-optical fixator enables optical fiber accurately to receive the laser light source hair for fixing the both ends of the optical fiber
The laser penetrated, and the laser accurately can be transferred to the collimating mirror.
8. device according to claim 6, which is characterized in that the laser light source includes the laser light source of length switchable.
9. device according to claim 1, which is characterized in that the spot detection analyzer is arranged in precision three-dimensional adjusting bracket
On.
10. a kind of optical element aberration detection system, which is characterized in that the system comprises any one in such as claim 1-9
Optical element aberration detecting described in.
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| CN201821451255.XU CN208672282U (en) | 2018-09-05 | 2018-09-05 | A kind of optical element aberration detecting and system |
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| CN201821451255.XU CN208672282U (en) | 2018-09-05 | 2018-09-05 | A kind of optical element aberration detecting and system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108776005A (en) * | 2018-09-05 | 2018-11-09 | 武汉华工激光工程有限责任公司 | A kind of optical element aberration detecting and system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108776005A (en) * | 2018-09-05 | 2018-11-09 | 武汉华工激光工程有限责任公司 | A kind of optical element aberration detecting and system |
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