CN208662759U - Between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power - Google Patents
Between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power Download PDFInfo
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- CN208662759U CN208662759U CN201821066056.7U CN201821066056U CN208662759U CN 208662759 U CN208662759 U CN 208662759U CN 201821066056 U CN201821066056 U CN 201821066056U CN 208662759 U CN208662759 U CN 208662759U
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- 210000001367 artery Anatomy 0.000 title claims abstract description 44
- 210000003462 vein Anatomy 0.000 title claims abstract description 44
- 238000001514 detection method Methods 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 claims abstract description 18
- 230000003321 amplification Effects 0.000 claims abstract description 17
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 17
- 238000007599 discharging Methods 0.000 claims abstract description 14
- 230000008569 process Effects 0.000 claims abstract description 13
- 238000012545 processing Methods 0.000 claims description 20
- 238000005070 sampling Methods 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 9
- 238000009763 wire-cut EDM Methods 0.000 abstract description 3
- 239000003990 capacitor Substances 0.000 description 8
- 238000010892 electric spark Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000002679 ablation Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The utility model discloses between a kind of Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power, belongs to Wire-cut Electrical Discharge Machining technical field.It includes that DC power supply, driving circuit, power amplification circuit, discharging gap, Hall current sensor, electric current Probability Detection module and control module, DC power supply are connected with driving circuit；Driving circuit, power amplification circuit, discharging gap, Hall current sensor, electric current Probability Detection module and control module are sequentially connected to form a circuit；Electric current Probability Detection module is compared for detecting size of current in discharge process with standard value；Control module calculates the size of electric current probability after receiving comparison signal, and on this basis using the control method of increment type PID between arteries and veins/pulsewidth size controls, to control real-time current probability size.The power supply is especially suitable for cutting semiconductor material, can improve cutting efficiency, and that realizes semiconductor material stablizes automation cutting.
Description
Technical field
The utility model belongs to Wire-cut Electrical Discharge Machining technical field, is related to electric current probability in a kind of Wire EDM
Control method, between especially a kind of Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power.
Background technique
The basic functional principle of Electric Discharge Wire-cutting Technology is made using the fine wire (referred to as wire electrode) of continuous moving
Electrode carries out pulse spark electric discharge removal metal, excision forming to workpiece.Its characteristics are as follows:
(1) significant machine cut power is not present in processing, regardless of workpiece hardness and rigidity, as long as conduction or half
Conductive material can be processed.But it can not machining of non-metallic conductive material.
(2) can be with machining small and complicated shape part, but it can not processing blind hole.
(3) electronic wire loss is small, and machining accuracy is high.
(4) joint-cutting generated when processing is narrow, and metal ablation amount is few, is conducive to the recycling of material.
Semiconductor material enbrittles height, and the low property of fracture toughness, tradition machinery processing technology is to silicon materials difficult processing
It spends bigger, is easy to happen phenomena such as crumbling, being broken.Wire EDM has many advantages, such as energy height, no macro-stress, processing
Wire electrode is contacted with workpiece without practical macroscopic view in the process, therefore silicon crystal is not susceptible to phenomena such as crumbling, being broken in process.
In order to normally be cut, workpiece and wire electrode need to keep in process certain reasonable discharging gap.
Traditional control servo method is by the average voltage size between detection workpiece and wire electrode come the big of indirect reaction gap
It is small, mainly there are average voltage method and crest voltage detection method.
Semiconductor has bulk resistor and contact berrier in process, and silicon crystal is empty when carrying out Wire EDM
Voltage waveform view under load, regular picture, short-circuit three kinds of states is as shown in figure 5, voltage swing changes not under short-circuit condition
Greatly, traditional servo detection method can not accurately and effectively detect interpolar discharge state, lead to traditional servo control system
It almost fails, adds man-hour requirement that artificially feed speed is adjusted, form accuracy and surface quality are poor, cannot achieve
The automation of processing.
Application No. is 201210441231.7 patent, discloses a kind of electric spark based on current impulse Probability Detection and watch
Control method is taken, this method can substitute detection voltage swing by detecting the size of electric current probability to react discharging gap
Size, semiconductor may be implemented stablizes automation processing.
It is experimentally confirmed that in the case of identical feed speed, with the relationship of electric current probability to be positively correlated between arteries and veins, pulsewidth and electric current
The relationship of probability is negative correlation.
Utility model content
To solve the problems, such as that general wire cutting machine tool cannot achieve the stable processing of automation of semiconductor, the utility model is mentioned
For between a kind of Wire EDM arteries and veins based on electric current Probability Detection applied to Wire-cut Electrical Discharge Machining or pulsewidth PID control
The constant current probability pulse power may be implemented the processing of constant current probability using the power supply, improve processing stability.
To achieve the above object, the utility model adopts the following technical solutions:
Between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power, it includes DC power supply, driving electricity
Road, power amplification circuit, discharging gap, Hall current sensor, electric current Probability Detection module and control module, DC power supply with
Driving circuit is connected；Driving circuit, power amplification circuit, discharging gap, Hall current sensor, electric current Probability Detection module and
Control module is sequentially connected to form a circuit；Electric current Probability Detection module for detecting size of current in discharge process, and with
Standard value is compared；Control module calculates the size of electric current probability after receiving comparison signal, and uses increase on this basis
The control method of amount formula PID between arteries and veins/pulsewidth size controls, to control real-time current probability size.
Further, the pulse signal that control module issues is input to after driving circuit and power amplification circuit amplification
Discharging gap is to carry out processing electric discharge；Hall current sensor detects the size of processing on real-time electric current, and the signal is input to electricity
Flow Probability Detection module；Electric current Probability Detection module compares real-time current with standard value to judge machining state, and will sentence
Disconnected value output takes this as a foundation into control module and calculates the size of electric current probability, and according to the big minor adjustment of electric current probability
Between arteries and veins/pulsewidth size.
Further, after electric current Probability Detection module carries out Phototube Coupling by 6N137 chip, pass through Lm319 comparator
It samples to obtain current signal to Hall current sensor and is compared type to judge pulse.
Further, control module is ARM control module, completes sampling and the electric current of current signal by programming in it
Between the calculating and arteries and veins of probability/PID control of pulsewidth.
Further, in control module between the pulsewidth of setting power supply, arteries and veins, metal-oxide-semiconductor quantity and discharge target probability is big
It is small；
Control module receives the signal of sample circuit, and calculates the electric current probability size in a sampling period, according to
The deviation of real-time current probability and target current probability, between arteries and veins/pulsewidth carry out PID control.
The utility model has the advantages that
1. the utility model is based on electric current Probability Detection technology, overcoming traditional electric spark linear cutting machine can not be automated
The difficulty of cutting semiconductor.
2. the constant current probability pulse power of the utility model, output waveform is stablized, between pulsewidth, arteries and veins (duty ratio) and
Metal-oxide-semiconductor quantity is adjustable, and will test the output of circuit and power supply and combine together, and/real-time the adjusting of pulsewidth may be implemented between arteries and veins.
3. the constant current probability pulse power of the utility model, may be directly applied to traditional electric spark linear cutting machine simultaneously
Servo-control system for cutting semiconductor without influencing lathe itself is able to achieve semiconductor material and stablizes automation cutting,
The workpiece surface quality being cut into is good, without curved strand line.
4. the utility model is applied widely, it is applicable not only to semiconductor material, for metal and contains conductive materials
The heterogeneous material that meets stand good.
Detailed description of the invention
Fig. 1 is the Wire EDM pulsewidth PID control constant current probability pulse power of an embodiment of the present invention
Functional block diagram；
Fig. 2 is the driving circuit of an embodiment of the present invention and the circuit diagram of power amplification circuit；
Fig. 3 is the electric current probability control flow chart of an embodiment of the present invention；
Fig. 4 is the circuit diagram of the electric current Probability Detection module of an embodiment of the present invention；
Fig. 5 is the voltage waveform view under silicon materials zero load, regular picture, short-circuit three kinds of states；
In figure: 1- DC power supply；2- driving circuit；3- power amplification circuit；4- discharging gap；5- Hall current sensing
Device；6- electric current Probability Detection module；7- control module.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
The present embodiment proposes between a kind of Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power, with
Current signal is sampled signal, is acquired calculating to current impulse during the sampling period by sample circuit and obtains electric current probability
Size, wherein the size of electric current probability refers to that the pulse number for generating electric current accounts for the percentage of overall pulse number；Using
ARM or FPGA microprocessor is stored and is calculated to electric current probability, by the target current probability of sample rate current probability and setting
Be compared, both calculate deviation as between control arteries and veins/foundation of pulsewidth size, control method is using incremental timestamp arteries and veins
Between size, wherein increment type PID is a kind of algorithm of stepping type.By front and back, controlled variable makes the difference the control method twice, with difference
Value controls the output quantity of next step.After the control amount at two moment is made difference, integral operation, which is simplified, becomes accumulating operation, micro-
Partite transport, which is calculated to simplify, becomes calculus of differences, and only and recently sampled value three times has the size of the increment Delta u [n] of controlled variable
It closes.
Deviation can acquire according to the following formula:
Deviation=sample rate current probability-setting electric current probability
Control amount formula are as follows: Δ u [n]=Kp{e[n]-e[n-1]}+Kie[n]+Kd{e[n]- 2e[n-1]+e[n-2]}
In formula, e [n] indicates deviation.By relational expression to Kp、Ki、KdThree parameters are adjusted with regulation and control system
Response characteristic, KpValue range be 0.2 to 0.6, KiValue range be 0.02 to 0.1, KdValue range be 0.1 to arrive
0.3。
It is experimentally confirmed that at the uniform velocity cut in the case where, between arteries and veins with the relationship of electric current probability be positively correlated: when sample rate current probability
Greater than the electric current probability of setting, control amount is negative value, reduces size between arteries and veins；When the electric current that sample rate current probability is less than setting is general
Rate, control amount are positive value, increase size between arteries and veins；Reach control electric current probability and maintains mesh near the target current probability of setting
's.In the case where at the uniform velocity cutting, the relationship of pulsewidth and electric current probability is negative correlation: when sample rate current probability is greater than the electric current of setting
Probability, control amount are positive value, improve pulsewidth size；When sample rate current probability is less than the electric current probability of setting, control amount is negative value,
Reduce pulsewidth size；Achieve the purpose that controlling electric current probability maintains near the target current probability of setting；Generate the arteries and veins of electric current
Punching, includes regular picture pulse and short circuit pulse when processing semiconductor.
As shown in Figure 1, the PID control constant current probability pulse power includes DC power supply 1, driving between Wire EDM arteries and veins
Circuit 2, power amplification circuit 3, discharging gap 4, Hall current sensor 5, electric current Probability Detection module 6 and control module 7, directly
The anode in galvanic electricity source 1 is connected with driving circuit 2；Driving circuit 2, power amplification circuit 3, discharging gap 4, Hall current sensor
5, electric current Probability Detection module 6 and control module 7 are sequentially connected to form a circuit；Power amplification circuit 3 meets+5V and+12V
Two DC power supplies, electric current Probability Detection module 6 connect+5V DC power supply, and control module 7 connects+5V DC power supply；Control module 7
Four road pulse signals are exported into driving circuit 2, driving circuit 2 exports pulse signal progress Phototube Coupling to power amplification electricity
In road 3, the pulse signal that the output peak value of power amplification circuit 3 is 150V to discharging gap 4, process by 5 detection of Hall current sensing
Real-time current in the process, and be translated into pulse voltage signal and export to electric current Probability Detection module 6, the signal is in electric current
It being compared after Phototube Coupling with 0 voltage of standard in Probability Detection module 6, comparison signal is then exported into control module 7,
It completes in control module 7 to the sampling of pulse signal and the calculating of electric current probability size, and with the size and mesh of electric current probability
Marking the deviation between the size of probability is foundation, carry out between arteries and veins/PID of pulsewidth adjusts, it is achieved in the processing of constant current probability.
As shown in figure 3, electric current probability control flow are as follows: (1) start, set initial parameter；(2) step-by-step counting；(3) electric current
Probability calculation；(4) whether it is greater than preset value；(5a) controls pulsewidth size: it is to increase pulsewidth, otherwise reduces pulsewidth,
In Fig. 3 shown in (a)；(5b) controls size arteries and veins: be, between reducing arteries and veins, between otherwise increasing arteries and veins, (b) institute in Fig. 3
Show；(6) final pulse signal is obtained.
As shown in Fig. 2, driving circuit 2 receives the pulse signal for coming from control module 7 (ARM), pulse signal inputs 6N137
2 ends of photo-coupler (P3), the 8 ends ground connection of 6N137 photo-coupler, 5 termination -5V power supplys, the indirect third capacitor at 8 ends and 5 ends
C3,6 ends connect the pole B of third transistor Q3 by the 5th resistance R5.Power amplification circuit 3 receives the signal from 2 driving circuits,
The pole C of third transistor Q3 connects one end of first resistor R1 and one end of the second capacitor C2, the pole E and meets -5V, first resistor R1's
Another termination+9V.The pole B of the first triode of another termination Q1 of second capacitor C2 and the pole B of the 4th triode Q4.4th
The pole C of triode Q4 meets -5V, and the pole E meets the one of the pole E of the first triode Q1, one end of the 4th resistance R4 and the 4th capacitor C4
End, anode, the 6th resistance of the second zener diode of another termination D2 of the other end and the 4th resistance R4 of third capacitor C4
The cathode of one end of R6 and the pole G of field-effect tube Q2, the second zener diode D2 connects the cathode of third zener diode D3, the
The anode of three zener diode D3 connect the other end of the 6th resistance R6, the pole S of field-effect tube Q2, first capacitor C1 cathode and
Ground connection, the pole D of field-effect tube Q2 connect the anode of supper-fast diode D1, and the cathode of supper-fast diode D1 connects DC power supply
The anode of anode and first capacitor C1, amplified pulse signal are exported by 224 ends.
As shown in figure 4, electric current Probability Detection module 6 includes Lm319 comparator, and 4 foot of Lm319 chip receives Hall electricity
The current signal that flow sensor 5 is sent, 5 feet connect+5V DC power supply, 3 feet ground connection, and 11 feet meet+5V, and 12 feet connect the 2 of 6N137 chip
Foot.3 feet of 6N137 are grounded, and 8 feet meet+5V, while being connected in parallel with a capacitor between 6 feet and 8 feet and a resistance.
In the process of semiconductor, short circuit pulse and regular picture pulse have ablation effect, therefore electric current probability
The ratio for being calculated as short circuit pulse and placing the overall pulse of electric pulse station.According to the cutting experience of Wire EDM it is found that partly leading
The optimal process electric current probability of body is 70% to 80%, and within the scope of this, the surface quality of semiconductor is preferable, and surface is without curved
Strand line.
It is verified by experiments, under the premise of feed speed is certain, electric current probability increases with the increase between arteries and veins, therefore logical
Overregulating the size between arteries and veins can achieve the purpose for adjusting electric current probability, wherein increase between arteries and veins, electric current probability increases.Between arteries and veins
Fluctuation range should not be too large, and duty ratio is advisable with 1:2 to 1:8.Under the premise of feed speed is certain, electric current probability is with pulsewidth
Increase and reduce, therefore by the size of adjusting pulsewidth can achieve adjust electric current probability purpose, wherein pulsewidth increase,
Electric current probability reduces.The fluctuation range of pulsewidth should not be too large, and is advisable with 15 μ s to 65 μ s.
The material of the Wire EDM of the utility model for metal and contains conduction generally based on semiconductor
The heterogeneous material that meets of substance stands good.
(duty ratio), metal-oxide-semiconductor quantity and discharge target probability between the pulsewidth of power supply, arteries and veins can be set in control module 7
Size, in actual processing, the size of electric current probability is usually set to 70% to 80%.
Electric current Probability Detection module 6 carries out Phototube Coupling by 6N137 chip, is sensed by Lm319 comparator to Hall current
Device 5, which samples, to be obtained current signal and is compared type to judge pulse.
Control module 7 receives the signal of sample circuit, to calculate the electric current probability size in a sampling period, root
According to the deviation of real-time current probability and target current probability, between arteries and veins/pulsewidth carries out PID control.
Example:
Single crystal silicon material is cut using traditional electric spark linear cutting machine and power supply, servo-system is lost in process
Effect, so can only at the uniform velocity be cut, using machined parameters shown in the following table 1, cutting speed is set as 60 μm/s, due to partly leading
The bulk resistor and processing potential barrier of body, still at the uniform velocity feed when short-circuit, so cause the curved silk of workpiece serious, processing quality and shape
Precision is very poor.
Lathe power supply is changed to the constant current probability pulse power of the utility model design, it is same to use adding in the following table 1
Work parameter is cut, and sets discharge target probability as 75%.In process, feed speed is still that 60 μm/s is at the uniform velocity fed,
At this time power supply can by the calculating of real-time discharge probability and discharge target probability difference is adjusted between arteries and veins/size of pulsewidth with
Electric current probability is kept to maintain 75% or so, finally realize monocrystalline silicon stablizes automation cutting, the workpiece surface after cutting
Quality is preferable, and without curved strand line, form accuracy is good.
1 technological parameter of table
The parts not involved in the utility model is the same as those in the prior art or can be realized by using the prior art.
Limitation to scope of protection of the utility model, those skilled in the art should understand that, in the skill of the utility model
On the basis of art scheme, the various modifications or variations that can be made by those skilled in the art with little creative work still exists
Within the protection scope of the utility model.
Claims (5)
1. between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power, it includes DC power supply (1), driving
Circuit (2), power amplification circuit (3), discharging gap (4), Hall current sensor (5), electric current Probability Detection module (6) and control
Molding block (7), it is characterised in that: the DC power supply (1) is connected with the driving circuit (2)；The driving circuit (2), institute
State power amplification circuit (3), the discharging gap (4), the Hall current sensor (5), the electric current Probability Detection module
(6) and the control module (7) is sequentially connected to form a circuit；The electric current Probability Detection module (6) is for detecting electric discharge
Size of current in the process, and be compared with standard value；The control module (7) calculates electric current probability after receiving comparison signal
Size, and on this basis using the control method of increment type PID between arteries and veins/pulsewidth size controls, to control reality
When electric current probability size.
2. special between Wire EDM arteries and veins according to claim 1 or the pulsewidth PID control constant current probability pulse power
Sign is: the pulse signal that the control module (7) issues is put through the driving circuit (2) and the power amplification circuit (3)
After big, the discharging gap (4) is input to carry out processing electric discharge；Hall current sensor (5) the detection processing on real-time electricity
The size of stream, and the signal is input to the electric current Probability Detection modules (6)；The electric current Probability Detection module (6) will be real-time
Electric current judges machining state compared with standard value, and judgment value is exported into the control module (7), takes this as a foundation
Calculate the size of electric current probability, and according between the big minor adjustment arteries and veins of electric current probability/pulsewidth size.
3. between Wire EDM arteries and veins according to claim 1 or 2 or the pulsewidth PID control constant current probability pulse power,
It is characterized by: passing through Lm319 comparator after the electric current Probability Detection module (6) carries out Phototube Coupling by 6N137 chip
Current signal is obtained to the Hall current sensor (5) sampling and is compared type to judge pulse.
4. between Wire EDM arteries and veins according to claim 1 or 2 or the pulsewidth PID control constant current probability pulse power,
It is characterized by: the control module (7) is ARM control module, sampling and the electricity of current signal are completed by programming in it
/ the PID control of pulsewidth is flowed between the calculating and arteries and veins of probability.
5. special between Wire EDM arteries and veins according to claim 4 or the pulsewidth PID control constant current probability pulse power
Sign is: in the control module (7) between the pulsewidth of setting power supply, arteries and veins, the size of metal-oxide-semiconductor quantity and discharge target probability；
The control module (7) receives the signal of sample circuit, and calculates the electric current probability size in a sampling period, root
According to the deviation of real-time current probability and target current probability, between arteries and veins/pulsewidth carries out PID control.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821066056.7U CN208662759U (en) | 2018-07-06 | 2018-07-06 | Between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power |
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| CN201821066056.7U CN208662759U (en) | 2018-07-06 | 2018-07-06 | Between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108723531A (en) * | 2018-07-06 | 2018-11-02 | 南京航空航天大学 | Between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power |
| CN112620843A (en) * | 2020-12-25 | 2021-04-09 | 江苏塞维斯数控科技有限公司 | Medium-speed wire pure oil cutting high-frequency energy-saving power supply with negative pressure |
-
2018
- 2018-07-06 CN CN201821066056.7U patent/CN208662759U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108723531A (en) * | 2018-07-06 | 2018-11-02 | 南京航空航天大学 | Between Wire EDM arteries and veins or the pulsewidth PID control constant current probability pulse power |
| CN108723531B (en) * | 2018-07-06 | 2024-03-22 | 南京航空航天大学 | Constant current probability pulse power supply controlled by spark wire cutting pulse-to-pulse or pulse width PID |
| CN112620843A (en) * | 2020-12-25 | 2021-04-09 | 江苏塞维斯数控科技有限公司 | Medium-speed wire pure oil cutting high-frequency energy-saving power supply with negative pressure |
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