CN107186295A - A kind of energy control methods such as constant frequency of the fine electric spark pulse power - Google Patents
A kind of energy control methods such as constant frequency of the fine electric spark pulse power Download PDFInfo
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- CN107186295A CN107186295A CN201710387648.2A CN201710387648A CN107186295A CN 107186295 A CN107186295 A CN 107186295A CN 201710387648 A CN201710387648 A CN 201710387648A CN 107186295 A CN107186295 A CN 107186295A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/02—Electric circuits specially adapted therefor, e.g. power supply, control, preventing short circuits or other abnormal discharges
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Abstract
The invention discloses energy control methods such as a kind of constant frequencies of the fine electric spark pulse power, according to processing occasion and gap load characteristic, pulse power source control parameter is set, it is determined that applying burst length and deionization time;Applying stage pulse, sampling gap voltage signal and current signal, summed after amplifying respectively, then closed-loop control is carried out to summed result, making it consistent with reference signal;After gap is breakdown, into the current discharge stage, corresponding breakdown time is recorded, and reference signal is updated according to breakdown time, the result to addition carries out closed-loop control, makes it consistent with the reference signal after renewal;After the completion of current discharge, deionization is carried out, next process-cycle is carried out afterwards.The inventive method is using unique controlled quentity controlled variable that is gap voltage and gap current and controlling as feedback closed loop, on gap is maintained while voltage pulse frequency-invariant, it is ensured that impulse discharge energy coincidence.
Description
Technical field
The invention belongs to micro EDM high frequency pulse power supply control field, more particularly to a kind of fine electricity fire
The energy control methods such as the constant frequency of the flower pulse power.
Background technology
Electrical discharge machining is to remove the non-of machined material in electrode and Tool Room formation spark discharge with controllable electric energy
Conventional machining techniques.The existing electrical discharge machining pulse power typically has the dependent formula pulse power and independent pulse generator.
The dependent formula pulse power is by adjusting the size of discharge capacity and being added in charging voltage value thereon, and control impulse discharge is most
Big energy.When using small discharge capacity and low charging voltage, the dependent pulse power can provide extremely low discharge energy, now still
It is widely used in micro EDM, but it has that processing efficiency is low, discharge energy uniformity.Free-standing pulse
Power supply can preferably control the discharge pulse parameter such as burst length, pulse frequency, discharge current, so control discharge energy and
Process velocity, high-power electrical discharge machining in now mainly applying to.
For micro EDM, in order to improve machining accuracy and workpiece surface quality, it need to as far as possible reduce and accurately control
Single spark discharge energy processed;Meanwhile, in order to improve process velocity and material removing rate, in the relatively low feelings of single material removal amount
Under condition, need to improve the frequency of spark discharge again.And requirements above is difficult to realize in the existing pulse power simultaneously.Tradition is micro-
The control of thin spark pulse power single pulse discharge process and discharge energy, typically has constant pulse frequency control and constant
Discharge energy controls two kinds of typical control methods, as shown in Figure 3 and Figure 4.The former applies burst length T in gaponAnd deionization
Time ToffInside keep fixed pulse voltage vp, its pulse voltage width and discharge frequency 1/TsIt is fixed, similar opened loop control,
But because the situation of discharging gap in actual processing is changeable, punctures time delay difference, cause real discharge time tonIt is not solid
Fixed, i.e. the uniformity of impulse discharge energy is difficult to ensure that.The latter control discharging gap puncture after discharge time TonAnd deionization
Time ToffKeep fixing, realize the control to impulse discharge energy, electric discharge uniformity is preferable, but this control strategy needs inspection
Slowdown monitoring circuit recognizes the state of discharging gap, and the moment that punctures in actual discharge gap do not fix, therefore actual discharge arteries and veins
Rush vpFrequency 1/tsIt will be continually changing.
The content of the invention
Technical problem solved by the invention is to provide a kind of energy such as constant frequency of the new fine electric spark pulse power
Control method, on gap is maintained while voltage pulse frequency-invariant, it is ensured that impulse discharge energy coincidence.
The technical solution for realizing the object of the invention is:A kind of energy holes such as constant frequency of the fine electric spark pulse power
Method, using unique controlled quentity controlled variable that is gap voltage and gap current and controlling as feedback closed loop, the voltage arteries and veins on gap is maintained
While rushing frequency-invariant, it is ensured that impulse discharge energy coincidence, following steps are specifically included:
Step 1:According to processing occasion and gap load characteristic, the processing frequency f of the pulse power is setm, dutycycle D, electricity
Pressure sampling multiplying power kv, current sample multiplying power ki, impulse discharge energy w1, pid control parameter, reference signal vref, gap breakdown electricity
Press threshold value VgapWith gap breakdown current threshold Igap;
Step 2:According to processing frequency fmDetermine to apply burst length T with dutycycle DonWith deionization time Toff;
Step 3:Applying stage pulse, the voltage signal and current signal of sampling gap are AD converted obtain respectively
The data signal of gap voltage and gap current, k is amplified by gap voltage data signalvTimes, gap current data signal is put
Big kiTimes, the voltage and current signal after amplification is added;
Step 4:Judge whether gap is breakdown, gap voltage after amplification is less than breakdown voltage threshold Vgap, and amplification
Gap current afterwards is more than breakdown current threshold value IgapWhen, gap is breakdown, afterwards into the current discharge stage, record correspondence
Breakdown time t, update reference signal v further according to gap breakdown time tref, closed-loop control is carried out to the result of addition, makes it
With the reference signal v after renewalrefUnanimously;Otherwise, reference signal v is not updatedref, closed-loop control is carried out to the result of addition, made
Itself and the reference signal v not updatedrefUnanimously;
Step 5:After the completion of current discharge, deionization is carried out, afterwards return to step 3, into the next pulse process-cycle
Carry out the energy holes such as constant frequency.
Compared with prior art, its remarkable advantage is the present invention:1) control method of the present invention is electric by gap voltage and gap
Stream and as unique controlled quentity controlled variable, carry out voltage control in the striking stage, current control automatically switched in discharge regime.2)
Control method of the present invention can adjust pulse voltage amplitude, discharge current size, discharge period and deionization time in real time,
In the case of keeping discharge frequency certain, impulse discharge energy coincidence is maintained, high speed, uniform microfabrication is realized.3) this hair
Bright control circuit realizes that using numerically controlled method, control accuracy is high, control parameter is adjustable, control using DSP+FPGA frameworks
Algorithm processed flexibly, had both met certain system control and calculating requirement, and had ensured preferable multi signal logic processing capability and drive again
Dynamic speed.4) full-bridge circuit of the present invention is as main circuit topology, and its bus input direct voltage continuously adjustabe adapts to various processing
Occasion, can not only provide positive and negative electric energy fan-out capability, realize that machining tool is processed to the positive and negative electric energy of workpiece, improve material and go
Except rate, the charging resistor and current-limiting resistance in traditional pulse power supply are also eliminated, the efficiency of pulse power system is improved.
Brief description of the drawings
Fig. 1 is fine electric spark pulse power system framework of the invention.
Fig. 2 is fine electric spark main circuit of pulsed power supply of the invention.
Fig. 3 is fine electric spark pulse power constant pulse time control schematic diagram of the invention.
Fig. 4 is fine electric spark pulse power constant discharge energy hole schematic diagram of the invention.
Fig. 5 is the energy hole schematic diagrames such as the fine electric spark pulse power constant frequency of the present invention.
Embodiment
The present invention program is described in further detail below in conjunction with the accompanying drawings.
The energy control methods such as the constant frequency of the fine electric spark pulse power of the present invention, set up the base in high-speed hardware circuit
On plinth, if the hardware bandwidth selected is too low, it is too slow to respond, it is oversize to postpone, this method can not be realized, is first introduced below specific
Hardware circuit selection is required.
In order to reduce the interference between spark-erosion machine tool system components, the general pulse power individually takes from exchange input
Electricity.More than traditional pulse power using low-frequency transformer and bridge rectifier power-up hold by the way of rectification, the volume of power supply it is larger and
Input power factor is low.In order to reduce influence of the parasitic parameter to processing, reduce the volume of power supply, improve input power factor and
Power-efficient, the present invention uses APFC (Power Factor Correction, PFC) converter.Rectified current
Road output voltage is general higher, and the amplitude of the pulse voltage of actual pulse power supply wishes continuously adjustabe, therefore cascades one-level again
DC/DC converters, exporting for DC/DC converters is powered to main circuit.Early stage uses linear power supply more, and the present invention is using switch electricity
Source, to meet the requirement of efficiency and volume.
Main circuit is as shown in Fig. 2 using by four switching tube Q1、Q2、Q3、Q4The full-bridge circuit of composition is as new fine
The basic topology of spark pulse power, Q1And Q3For the upper down tube of a bridge arm, Q2And Q4For the upper down tube of another bridge arm,
Two bridge arms are parallel with one another.The bus input of full-bridge circuit is the output voltage V of DC/DC convertersp, it is made up of instrument and workpiece
Discharging gap directly with energy storage inductor LlimitThe midpoint of two bridge arms of full-bridge circuit, switching tube Q are connected to after series connectionoffWith
Gap is in parallel, switching tube QpIt is connected on dc bus.Switching tube selects metal oxide semiconductor field effect transistor in main circuit
Manage (MOSFET).Based on different semi-conducting materials, current industrial quarters has different pressure-resistant, different operating frequencies, suitable for different work(
The power MOSFET of rate occasion is available.The compatible a variety of parts selections of the present invention, are applicable not only to traditional silicon substrate MOSFET,
The new broad stopband device based on carborundum, gallium nitride semiconductor material can also be selected.Semiconductor material with wide forbidden band is referred to as
Third generation semi-conducting material, it has energy gap big, and electronics drift saturated velocity is high, dielectric constant is small, conduct electricity very well
Feature, it is adaptable to radioresistance, high frequency, high-power and High Density Integration occasion.Traditional silicon substrate MOSFET selects Texas
The model CSD19536KCS of Instruments (TI) company 100V, N channel power MOSFET, its maximum allowed to flow through
Pulse current amplitude is up to 400A, can be used in high-power, precision in new fine electric spark pulse voltage low-voltage, high-current and want
Ask in not high electrical discharge machining.600V, 12A gallium nitride chip LMG3410 that TI companies release, working frequency are up to 1MHz,
In the small-power fine electric spark finishing that high-frequency, high withstand voltage can be used in.
Realize the normal work of main circuit, it is necessary to there is corresponding detection circuit, control circuit and drive circuit to coordinate, such as
Shown in Fig. 1.Detect that circuit mainly includes gap voltage detection circuit, discharge current testing circuit.Gap voltage detection circuit is adopted
Difference sample circuit is used, sampling precision is high, and real-time is good.Gap current detection circuit uses current sensor, Allegro
The model ACS758LCB-100B-PFF-T sensors of MicroSystems companies can complete p- 100A~100A electric currents
High precision test, exemplary operation bandwidth 120kHz.Voltage detecting value and current detection value carry out digital-to-analogue by high speed A/D chip and turned
Change, the state of current clearance can be calculated according to real-time voltage value and real-time current value in the controller.Discharged with positive pulse
Exemplified by processing:When detection current value is zero, and detect magnitude of voltage be on the occasion of when, be the gap positive striking stage;When detection electric current
Value is just begun to ramp up, and is the gap breakdown moment when detection magnitude of voltage is just begun to decline;When detection current value persistently rises or reached
Steady-state value, detection voltage value stabilization, in maintenance voltage, is gap forward current discharge regime.Equally, negative pulse discharge is processed
When:When detection current value be zero, and detect magnitude of voltage be negative value when, be the gap reverse striking stage;When detection current value has just been opened
Begin reversely to rise, be the gap reverse breakdown moment when detection magnitude of voltage has just started reverse decline;When detection current value continues reversely
Rise or reach reverse steady-state value, detection voltage value stabilization, in reverse maintenance voltage, is gap reverse current discharge regime.
It is the control framework collectively formed by DSP and FPFA to control circuit.Pass through gap detection circuit, current detection circuit
Etc. the correlation behavior of real-time detector gap, and DSP+FPGA controllers will be sent after detected value digital-to-analogue conversion to, controller according to
Current clearance state and impulse discharge energy size, the discharge current pulsewidth of setting etc. calculate discharge current in signal period
Amplitude size, and the dutycycle of respective switch pipe is generated, then drive main circuit switch pipe to work by drive circuit.DSP is also referred to as
Digital signal processor, is a kind of microprocessor for being particularly suitable for carrying out Digital Signal Processing computing, it is real that it, which is mainly applied,
When quickly realize various digital signal processing algorithms.FPGA is also referred to as field programmable gate array, and it is in PAL, GAL, CPLD
Deng the product further developed on the basis of programming device.It is as a kind of half in application specific integrated circuit (ASIC) field
Custom circuit and occur, both solved the deficiency of custom circuit, original programming device gate circuit number overcome again limited
Shortcoming.DSP is master control chip in the present invention, and model TMS320F28335 is that a high-performance 32-bit of TI companies is floated
Point DSP Processor, is equipped with the output that low speed AD and DA all the way is used to control prime pfc converter, and high-speed AD all the way
It is used to control DC-DC converter to export with DA.FPGA is high speed actuator, and model EP4CE15F23C8 is altera corp
The high speed processor of Cyclone IV series, its clock frequency is up to 472MHz, is equipped with high speed, high-precision AD and six tunnels all the way
PWM is exported.Integrated real-time communication agreement between DSP and fpga chip.
Drive circuit is six road PWM type drive circuits.PWM is also referred to as pulse width modulating technology, is to utilize microprocessor
Numeral output is widely used in from measurement, communicated to power come a kind of very effective technology being controlled to analog circuit
Control in many fields with conversion, it is controlled, and simple, flexible, dynamic response is good, and referred to as Power Electronic Technique is most widely used
Control mode.Six road drive signals are directly exported by FPGA is followed by PWM driving chips, and switching tube Q is corresponded to respectivelyp、Qoff、Q1、
Q2、Q3、Q4。
On the basis of above-mentioned high-speed hardware circuit, the present invention is by adjusting input direct voltage V in Fig. 2pTo adjust just
Reverse pulse voltage amplitude;By the down tube (Q for controlling different bridge arms3And Q4) come realize pulse direction adjust;It is same by control
Two switching tube (Q of one bridge arm1And Q3, Q2And Q4) control to flow through inductance LlimitDischarge current id, and then control forward and reverse
Discharge energy.By taking a positive negative pulse stuffing discharge cycle as an example, Q is switched in converterpAnd Q4Be held on, Q2It is held off, VpIt is logical
Cross the voltage-controlled Buck circuits of a use with discharging gap to be connected, certain voltage is added on discharging gap.Work as gap
After breakdown, gap discharge voltage is held essentially constant, and Buck converters are changed into current control, realizes the uniformity of discharge energy
Regulation;The similar positive pulse situation of negative pulse discharge, QpAnd Q3Be held on, Q1It is held off, the pulse power passes through Q2And Q4Realize
Discharge current is controlled.QoffFor accelerating releasing and deionization process for discharging gap electric charge, to improve pulse frequency.
Based on the main circuit in Fig. 2, the energy control strategy of the fine electric spark pulse power typically has constant pulse frequency
Control and constant discharge energy hole.Fig. 3 show constant pulse frequency control, i.e., apply burst length T on gaponWith disappear
Ionization time ToffKeep fixed pulse voltage vp.Its pulse voltage width and discharge frequency 1/TsIt is fixed, similar opened loop control.
But because the situation of discharging gap in actual processing is changeable, punctures time delay difference, cause real discharge time tonIt is not solid
Fixed, i.e. the uniformity of impulse discharge energy is difficult to ensure that;Fig. 4 show constant discharge energy hole, i.e., by controlling between discharging
Gap puncture after discharge time TonWith deionization time ToffKeep fixing, realize the control to impulse discharge energy, electric discharge is consistent
Property preferably, this control strategy needs detection circuit to recognize the state of discharging gap, and actual discharge gap punctures the moment
Do not fix, therefore actual discharge pulse vpFrequency 1/tsIt will be continually changing.
The present invention combines the advantage of constant pulse frequency control and constant discharge energy hole, proposes perseverance as shown in Figure 5
The energy control methods such as frequency, apply constant burst length T on gaponWith deionization time Toff, pulse voltage vpAlso keep
It is fixed, the stable maintenance voltage V again of gap voltage after puncturingh, impulse discharge energy w is selected according to different load characteristics1, root
The time t that can be utilized for current discharge is calculated according to the breakdown time t of each discharge cycleon=Ton- t, due to gap breakdown
Gap voltage and discharge current afterwards is basicly stable, then can be according to discharge energy formula w1=Vhid(Ton- t) calculate the cycle
Interior discharge current average value id.In order to realize in the case of constant discharge frequency, the uniformity of impulse discharge energy is maintained,
The new fine electric spark pulse power will carry out feedback closed loop control in the striking stage to the voltage at gap two ends, in discharge regime
Feedback closed loop control is carried out to the discharge current in gap.The controlling difficulties of this method are that voltage control and current control are cut
Problem is changed, handoff procedure should be as far as possible short, dynamic response is tried one's best and good could ensure the uniformity and electrical discharge machining of energy discharge
Quality.
In view of gap before breakdown almost without discharge current, and discharge voltage is stable in maintenance voltage after puncturing,
The present invention regard gap voltage and gap current summation as controlled quentity controlled variable.Control thinking can use formula kvvd+kiid=vrefRepresent, its
Middle kvFor voltage sample multiple, kiFor current sample multiple, vdAnd idRespectively gap voltage and gap current, vrefFor what is given
Reference quantity.Before gap does not puncture, the electric current i flowed through on gapdAbout 0, then gap voltage vdExisted according to control formula stabilization
vref/kv;After gap breakdown, gap voltage vdStabilization is in maintenance voltage Vh, then according to controlling, formula is stable to exist gap current
(vref-kvVh)/ki.Therefore, certain voltage sample ratio k is being chosenvWith current sample ratio kiAfterwards, then can be by journey
V is adjusted in sequencerefTo control the gap voltage before gap breakdown and the discharge current after gap breakdown.Further, single processing
Discharge energy in cycle is the maintenance voltage V after gap breakdownhWith gap discharge electric current idProduct to the integration of discharge time,
And if it is considered to good enough using the stable state and dynamic property of the fine electric spark pulse power of closed-loop control, then in current discharge
Maintenance voltage V in stagehWith gap discharge electric current idSteady-state value it is almost unchanged, then single process-cycle discharge energy is represented by
(vref-kvVh)(D/fm-t)Vh/kiIf according to gap breakdown time t, adjusting vrefSo that (vref-kvVh)(D/fm-t)Vh/ki
=w1(w1For the impulse discharge energy value that can be set), as long as updating v at the gap breakdown momentref=w1ki/[Vh(D/fm-t)]
+kvVhIt can then ensure that single process-cycle discharge energy keeps constant.
In summary, the energy control method such as constant frequency of the fine electric spark pulse power proposed by the present invention, by gap electricity
Pressure and unique controlled quentity controlled variable that is gap current and being controlled as feedback closed loop, voltage pulse frequency-invariant is same on gap is maintained
When, it is ensured that impulse discharge energy coincidence.
The fine electric spark pulse power includes pfc converter, DC/DC converters, main circuit, detection circuit, control
Circuit and drive circuit, alternating voltage export adjustable dc voltage by pfc converter and DC/DC converters and supplied to main circuit
Electricity, main circuit provides positive-negative polarity voltage, the voltage and current feeding control circuit in detection electric circuit inspection gap, control to gap
Circuit output control signal, control signal produces drive signal driving main circuit and opened the light the logical of pipe after amplifying through overdrive circuit
Disconnected, the loop of power circuit includes 6 switching tube Qp、Q1、Q2、Q3、Q4、QoffWith 1 energy storage inductor Llimit, wherein 4 switching tubes
Q1、Q2、Q3、Q4It is connected with bridge architecture, switching tube QpConnect the input of the outlet side and full-bridge converter of DC/DC converters
Side, switching tube QoffAfter in parallel with gap, one end passes through energy storage inductor LlimitIt is connected to the midpoint of one of bridge arm, the other end
It is directly connected to the midpoint of another bridge arm.The control circuit uses the control framework that DSP and FPFA are collectively formed.It is described
Switching tube selects the power MOS pipe of tri- kinds of different materials of Si, SiC or GaN in loop of power circuit, is respectively applied to roughing, half essence
Processing and three kinds of electrical discharge machining occasions of microfabrication.
The control method specifically includes following steps:
Step 1:According to processing occasion and gap load characteristic, the processing frequency f of the pulse power is setm, dutycycle D, electricity
Pressure sampling multiplying power kv, current sample multiplying power ki, impulse discharge energy w1, pid control parameter, reference signal vref, gap breakdown electricity
Press threshold value VgapWith gap breakdown current threshold Igap;
Step 2:According to processing frequency fmDetermine to apply burst length T with dutycycle DonWith deionization time Toff;
Step 3:Applying stage pulse, the voltage signal and current signal of sampling gap are AD converted obtain respectively
The data signal of gap voltage and gap current, k is amplified by gap voltage data signalvTimes, gap current data signal is put
Big kiTimes, the voltage and current signal after amplification is added;
Step 4:Judge whether gap is breakdown, gap voltage after amplification is less than breakdown voltage threshold Vgap, and amplification
Gap current afterwards is more than breakdown current threshold value IgapWhen, gap is breakdown, afterwards into the current discharge stage, record correspondence
Breakdown time t, update reference signal v further according to gap breakdown time tref, closed-loop control is carried out to the result of addition, makes it
With the reference signal v after renewalrefUnanimously;Otherwise, reference signal v is not updatedref, closed-loop control is carried out to the result of addition, made
Itself and the reference signal v not updatedrefUnanimously;
The reference signal vrefThe specific method of renewal is:
vref=w1ki/[Vh(D/fm-t)]+kvVh
In formula, VhRepresent the gap maintenance voltage after puncturing;
The closed loop control method includes pid algorithm, one circle control algorithm, Adaptive voltage position algorithm, Fuzzy Control
Algorithm processed, neural network algorithm.
Step 5:After the completion of current discharge, deionization is carried out, afterwards return to step 3, into the next pulse process-cycle
Carry out the energy holes such as constant frequency.
Claims (6)
1. the energy control methods such as a kind of constant frequency of the fine electric spark pulse power, it is characterised in that by gap voltage and gap
Unique controlled quentity controlled variable that is electric current and being controlled as feedback closed loop, on gap is maintained while voltage pulse frequency-invariant, it is ensured that
Impulse discharge energy coincidence, specifically includes following steps:
Step 1:According to processing occasion and gap load characteristic, the processing frequency f of the pulse power is setm, dutycycle D, voltage sample
Multiplying power kv, current sample multiplying power ki, impulse discharge energy w1, pid control parameter, reference signal vref, gap breakdown voltage threshold
VgapWith gap breakdown current threshold Igap;
Step 2:According to processing frequency fmDetermine to apply burst length T with dutycycle DonWith deionization time Toff;
Step 3:Applying stage pulse, the voltage signal and current signal of sampling gap are AD converted obtain gap respectively
The data signal of voltage and gap current, k is amplified by gap voltage data signalvTimes, gap current data signal is amplified into ki
Times, the voltage and current signal after amplification is added;
Step 4:Judge whether gap is breakdown, gap voltage after amplification is less than breakdown voltage threshold Vgap, and after amplification
Gap current is more than breakdown current threshold value IgapWhen, gap is breakdown, afterwards into the current discharge stage, records corresponding hit
Time t is worn, reference signal v is updated further according to gap breakdown time tref, closed-loop control is carried out to the result of addition, make its with more
Reference signal v after newrefUnanimously;Otherwise, reference signal v is not updatedref, closed-loop control is carried out to the result of addition, make its with
The reference signal v not updatedrefUnanimously;
Step 5:After the completion of current discharge, deionization is carried out, afterwards return to step 3, carried out into the next pulse process-cycle
The energy holes such as constant frequency.
2. the energy control methods such as the constant frequency of the fine electric spark pulse power according to claim 1, it is characterised in that step
Reference signal v in rapid 4refThe specific method of renewal is:
vref=w1ki/[Vh(D/fm-t)]+kvVh
In formula, VhRepresent the gap maintenance voltage after puncturing.
3. the energy control methods such as the constant frequency of the fine electric spark pulse power according to claim 1, it is characterised in that step
In rapid 4 closed loop control method include pid algorithm, one circle control algorithm, Adaptive voltage position algorithm, FUZZY ALGORITHMS FOR CONTROL,
Neural network algorithm.
4. the energy control methods such as the constant frequency of the fine electric spark pulse power according to claim 1, it is characterised in that micro-
Thin spark pulse power includes pfc converter, DC/DC converters, main circuit, detection circuit, control circuit and drive circuit,
Alternating voltage exports adjustable dc voltage and powered to main circuit by pfc converter and DC/DC converters, and main circuit is carried to gap
For positive-negative polarity voltage, the voltage and current in detection electric circuit inspection gap, which is sent into, controls circuit, control circuit output control signal,
Control signal produces drive signal driving main circuit and opened the light the break-make of pipe after amplifying through overdrive circuit, the loop of power circuit includes
6 switching tube Qp、Q1、Q2、Q3、Q4、QoffWith 1 energy storage inductor Llimit, wherein 4 switching tube Q1、Q2、Q3、Q4With bridge architecture
It is connected, switching tube QpConnect the outlet side of DC/DC converters and the input side of full-bridge converter, switching tube QoffWith gap simultaneously
After connection, one end passes through energy storage inductor LlimitThe midpoint of one of bridge arm is connected to, the other end is directly connected to another bridge
The midpoint of arm.
5. the fine electric spark pulse power according to claim 4, it is characterised in that the control circuit using DSP and
The control framework that FPFA is collectively formed.
6. the fine electric spark pulse power according to claim 4, it is characterised in that switching tube is selected in the main circuit
The power MOS pipe of tri- kinds of different materials of Si, SiC or GaN, is respectively applied to roughing, three kinds of electricity of semifinishing and microfabrication
Spark processes occasion.
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