CN208655607U - A kind of Wafer Cleaning feed device - Google Patents
A kind of Wafer Cleaning feed device Download PDFInfo
- Publication number
- CN208655607U CN208655607U CN201821628505.2U CN201821628505U CN208655607U CN 208655607 U CN208655607 U CN 208655607U CN 201821628505 U CN201821628505 U CN 201821628505U CN 208655607 U CN208655607 U CN 208655607U
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- feeding arm
- rod
- cylinder
- sliding block
- push rod
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Abstract
The utility model discloses a kind of Wafer Cleaning feed devices, including cleaning machine and connecting rod, the connecting rod is connect with motion bar, connecting rod outer wall is arranged with sliding block, the second push rod is connected on the sliding block, the first cylinder is connected on second push rod, and sliding block two sides are provided with spring, spring one end is connected with the first push rod, first push rod side is set in the outer wall of feeding arm, and the second cylinder is connected on the feeding arm, is connected below feeding arm with hanging rod, through-hole is offered on feeding arm, and the second cylinder is connected on hanging rod.The Wafer Cleaning feed device can push sliding block by the first cylinder, allow sliding block squeeze the first push rod and spring push feeding arm adjust it is mutual apart from while fit closely feeding arm with the pressure pin on washing basket basket always, hanging rod inclination is driven by the second cylinder again after feeding arm is connect with pressure pin, thus existing feeding arm is avoided to be easy the phenomenon that being detached from washing basket basket, washing basket basket is caused to damage.
Description
Technical field
The utility model relates to Wafer Cleaning feeder equipment technical field, specially a kind of Wafer Cleaning feed device.
Background technique
Silicon wafer must be cleaned strictly in semiconductor devices production；Micropollution also results in component failure；The purpose of cleaning
It is to remove surface contamination impurity, including organic matter and inorganic matter；These impurity some have with state of atom or ionic condition
In the form of a film or particle form is present in silicon chip surface；It will lead to various defects；Remove pollution method have physical cleaning and
Two kinds of chemical cleaning.
Silicon wafer can be put into washing basket basket by silicon wafer cleaner in cleaning silicon chip, then by the feeding arm of L shape by its
Be moved in service sink, the connection type of the feeding arm of existing L shape and washing basket basket it be usually directly to hold in the palm on washing basket basket
Pressure pin on, and such connection type is unstable, is easy to that washing basket basket is made to fall off with feeding arm, in turn results in the loss of cost.
Utility model content
The purpose of this utility model is to provide a kind of Wafer Cleaning feed devices, to solve to mention in above-mentioned background technique
Washing basket basket out is easy the problem of falling.
To achieve the above object, the utility model provides the following technical solutions, a kind of Wafer Cleaning feed device, including
Cleaning machine and connecting rod, the connecting rod are connect with motion bar, and connecting rod outer wall is arranged with sliding block, and is connected on the sliding block
Two push rods are connected with the first cylinder on the second push rod, and sliding block two sides are provided with spring, and spring one end is connected with the first push rod
It connects, the first push rod side is set in the outer wall of feeding arm, and the second cylinder, feeding arm lower section and hanging rod are connected on the feeding arm
It is connected, through-hole is offered on feeding arm, and is connected with the second cylinder on hanging rod.
Preferably, service sink, fixed link, driving motor and screw rod are provided on the cleaning machine, and screw rod side connects
There is driving motor, sleeve is threaded on screw rod, and sleeve is connected by welding with hydraulic telescopic rod, hydraulic telescopic rod
On offer through-hole.
Preferably, the left and right ends of the motion bar are respectively arranged with a hydraulic telescopic rod, and hydraulic telescopic rod is distinguished
It is connect with sleeve and fixed link, hydraulic telescopic rod is set in the outer wall of fixed link.
Preferably, axial line symmetrical distribution of the feeding arm about connecting rod, and feeding arm and the first push rod
It is perpendicular.
Preferably, feeding arm lower end is hinged with hanging rod, and the outer wall of motion bar is set at the top of feeding arm.
Compared with prior art, the utility model has the beneficial effects that the Wafer Cleaning feed device can pass through
One cylinder pushes sliding block, make sliding block squeeze the first push rod and spring push feeding arm adjust it is mutual apart from while make
Feeding arm can be fitted closely with the pressure pin on washing basket basket always, be driven again by the second cylinder after feeding arm is connect with pressure pin
Hanging rod inclination, thus avoids existing feeding arm from being easy the phenomenon that being detached from washing basket basket, washing basket basket is caused to damage.
Detailed description of the invention
Fig. 1 is that a kind of Wafer Cleaning of the utility model is faced with feed device；
Fig. 2 is enlarged structure schematic diagram at A in a kind of Wafer Cleaning feed device Fig. 1 of the utility model；
Fig. 3 is enlarged structure schematic diagram at B in a kind of Wafer Cleaning feed device Fig. 1 of the utility model.
In figure: 1, driving motor, 2, hydraulic telescopic rod, 3, sleeve, the 4, first cylinder, 5, screw rod, 6, fixed link, 7, cleaning
Machine, 8, service sink, 9, motion bar, 10, feeding arm, the 11, first push rod, 12, spring, the 13, second push rod, 14, sliding block, 15, company
Extension bar, the 16, second cylinder, 17, hanging rod.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-3 is please referred to, the utility model provides a kind of technical solution: a kind of Wafer Cleaning feed device, including it is clear
Washing machine 7 and connecting rod 15, connecting rod 15 are connect with motion bar 9, and the top of connecting rod 15 is welded on the bottom of motion bar 9, connection
15 outer wall of bar is arranged with sliding block 14, and sliding block 14 can slide in connecting rod 15, consequently facilitating pushing the first push rod 11 and feeding
Arm 10 slides, and is provided with service sink 8, fixed link 6, driving motor 1 and screw rod 5 on cleaning machine 7, and 5 side of screw rod is connected with drive
Dynamic motor 1, driving motor 1 are fixedly mounted on the left side of screw rod 5, sleeve 3 are threaded on screw rod 5,3 housing of sleeve is in screw rod
5 outer wall, and sleeve 3 is connected by welding with hydraulic telescopic rod 2, offers through-hole in hydraulic telescopic rod 2, under sleeve 3
End is connect with hydraulic telescopic rod 2, and the left and right ends of motion bar 9 are respectively arranged with a hydraulic telescopic rod 2, herein hydraulic telescopic rod
2 be 2, and then just what a has connect 2 hydraulic telescopic rods 2 with sleeve 3, and one connect with fixed link 6, so as to so that activity
Multiple groups hanging rod 17 on bar 9 can such as have more a hydraulic telescopic rod 2 at work with even running, then can be to feeding arm 10
Movement affects, and hydraulic telescopic rod 2 is the technology that those skilled in the art can realize easily, therefore does not do retouch in detail herein
It states；And hydraulic telescopic rod 2 is connect with sleeve 3 and fixed link 6 respectively, hydraulic telescopic rod 2 is set in the outer wall of fixed link 6, sleeve 3
Motion bar 9 can be driven movable to the right by the hydraulic telescopic rod 2 in 9 left side of motion bar, and the hydraulic telescopic rod in fixed link 6
2, then the both ends of motion bar 9 can be made to keep balance, while 3 normal movement of sleeve can also be made, thus lifted convenient for hanging rod 17
The washing basket basket for holding silicon wafer is put into the inside of service sink 8；The second push rod 13 is connected on sliding block 14, the second push rod 13 is welded on
The top of sliding block 14 is connected with the first cylinder 4 on second push rod 13, the first cylinder 4, and sliding block 14 is equipped on the second push rod 13
Two sides are provided with spring 12, and spring 12 is fixed by welding in the left and right sides of 14 lower end of sliding block, and 12 one end of spring is pushed away with first
Bar 11 is connected, and 12 lower end of spring is welded on the top of the first push rod 11, and 11 side of the first push rod is set in the outer of feeding arm 10
Wall offers through-hole on the left of the first push rod 11, and through-hole is set in the outer wall of feeding arm 10, it is possible thereby to send the first push rod 11
Expect the outer wall sliding of arm 10, axial line symmetrical distribution of the feeding arm 10 about connecting rod 15, and feeding arm 10 and first
Push rod 11 is perpendicular, can hold up washing basket basket by feeding arm 10, thus be convenient for cleaning；It is connected on feeding arm 10
There is the second cylinder 16,10 rear end of feeding arm is equipped with the second cylinder 16, and 10 lower section of feeding arm is connected with hanging rod 17, feeding arm 10
On offer through-hole, and the second cylinder 16 is connected on hanging rod 17, feeding arm 10, then can be by being set on motion bar 9
When sliding block 14 pushes the first push rod 11, the first push rod 11 pushes feeding arm 10 to change mutual spacing, is thus convenient for feeding
Pressure pin on arm 10 and washing basket basket fits closely together, and 10 lower end of feeding arm is hinged with hanging rod 17, is arranged at the top of feeding arm 10
In the outer wall of motion bar 9, during using the device, hanging rod 17 is pushed by the second cylinder 16 on feeding arm 10, it can
So that hanging rod 17 is in a horizontal state by hinge or heeling condition, and when hanging rod 17 is heeling condition, then can be pushed away with first
The supporting role of bar 11 matches, and the pressure pin on hanging rod 17 and washing basket basket is avoided to be detached from；And by the way that multiple groups are arranged on motion bar 9
Hanging rod 17, then can be improved the feeding efficiency of hanging rod 17, and then improve the whole work efficiency of cleaning machine 7；The Wafer Cleaning
Sliding block 14 can be pushed by the first cylinder 4 with feed device, send sliding block 14 in the first push rod 11 of extruding and the promotion of spring 12
Material arm 10 adjust it is mutual apart from while fit closely feeding arm 10 with the pressure pin on washing basket basket always, when sending
Material arm 10 drives hanging rod 17 to tilt by the second cylinder 16 again after connect with pressure pin, thus avoid existing feeding arm 10 easy and
The phenomenon that washing basket basket is detached from, and washing basket basket is caused to damage.
Working principle: when using the Wafer Cleaning feed device, first simply understanding the present apparatus, understands
Later be again to check to the important part portion of the present apparatus, check after there is no problem again it is formal enter use, when use first
The washing basket basket for placing silicon wafer is moved to the inside of cleaning machine 7, the lower section of hanging rod 17, and makes the pressure pin on hanging rod 17 and washing basket basket
Position is corresponding, then starts hydraulic telescopic rod 2, and hydraulic telescopic rod 2 will drive motion bar 9 after starting and move down, and send
Material arm 10 declines together also with the decline of motion bar 9, when the transversely and horizontally line of the hanging rod 17 of 10 lower section of feeding arm is located at washing basket
When the lower section of basket pressure pin, start the first cylinder 4, after the starting of the first cylinder 4, the first cylinder 4 can push down on the second push rod 13, make
Second push rod 13 pushes the slide downward in connecting rod 15 of sliding block 14, and sliding block 14 is during slide downward, 14 meeting of sliding block
The first push rod 11 is pushed to two sides by spring 12, and the first push rod 11 then will push feeding arm 10 on motion bar 9 with sliding block
It is mobile to two sides centered on 14, and feeding arm 10 can then make the hanging rod 17 of 10 lower section of feeding arm during mobile to two sides
The lower section of washing basket basket pressure pin can be then located at, at this moment start the second cylinder 16, the second cylinder 16 drives hanging rod 17 upward by hinge
Lift, constitute incline structure, hanging rod 17 then fits closely with pressure pin, at this moment restarts hydraulic telescopic rod 2, make hydraulic telescopic rod 2
Motion bar 9 is driven slowly to move up, then screw rod 5 is slowly moved to the top of service sink 8 with moving sleeve 3 to the right, then
Decline hydraulic telescopic rod 2 again, washing basket basket is made to be located at the inside of service sink 8, then makes the reset of the second cylinder 16, make the hanging rod 17 be in
Horizontality, then the first cylinder 4 is resetted, and the first cylinder 4 can make sliding block 14 upward by connecting rod 15 in reseting procedure
Sliding, the spacing for making the spring 12 of 14 two sides of sliding block pull feeding arm 10 mutual slowly reduces, to make hanging rod 17 and wash
Basketry pressure pin, which completely disengages, can be completed feeding work, and here it is the working principles of the Wafer Cleaning feed device.
Although the utility model is described in detail with reference to the foregoing embodiments, come for those skilled in the art
Say, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic into
Row equivalent replacement, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all
It is included within the scope of protection of this utility model.
Claims (5)
1. a kind of Wafer Cleaning feed device, it is characterised in that: including cleaning machine (7) and connecting rod (15), the connecting rod
(15) it is connect with motion bar (9), connecting rod (15) outer wall is arranged with sliding block (14), is connected with the second push rod on the sliding block (14)
(13), it is connected with the first cylinder (4) on the second push rod (13), and sliding block (14) two sides are provided with spring (12), spring (12) one
End is connected with the first push rod (11), and the first push rod (11) side is set in the outer wall of feeding arm (10), the feeding arm (10)
On be connected with the second cylinder (16), be connected below feeding arm (10) with hanging rod (17), feeding arm offers through-hole on (10), and
The second cylinder (16) are connected on hanging rod (17).
2. a kind of Wafer Cleaning feed device according to claim 1, it is characterised in that: set on the cleaning machine (7)
It is equipped with service sink (8), fixed link (6), driving motor (1) and screw rod (5), and screw rod (5) side is connected with driving motor (1),
It is threaded on screw rod (5) sleeve (3), and sleeve (3) is connected by welding with hydraulic telescopic rod (2), hydraulically extensible
Bar offers through-hole on (2).
3. a kind of Wafer Cleaning feed device according to claim 1, it is characterised in that: a left side for the motion bar (9)
Right both ends are respectively arranged with a hydraulic telescopic rod (2), and hydraulic telescopic rod (2) connects with sleeve (3) and fixed link (6) respectively
It connects, hydraulic telescopic rod (2) is set in the outer wall of fixed link (6).
4. a kind of Wafer Cleaning feed device according to claim 1, it is characterised in that: the feeding arm (10) about
The symmetrical distribution of axial line of connecting rod (15), and feeding arm (10) and the first push rod (11) are perpendicular.
5. a kind of Wafer Cleaning feed device according to claim 1, it is characterised in that: feeding arm (10) lower end
It is hinged with hanging rod (17), the outer wall of motion bar (9) is set at the top of feeding arm (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821628505.2U CN208655607U (en) | 2018-10-09 | 2018-10-09 | A kind of Wafer Cleaning feed device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821628505.2U CN208655607U (en) | 2018-10-09 | 2018-10-09 | A kind of Wafer Cleaning feed device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208655607U true CN208655607U (en) | 2019-03-26 |
Family
ID=65774841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821628505.2U Active CN208655607U (en) | 2018-10-09 | 2018-10-09 | A kind of Wafer Cleaning feed device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208655607U (en) |
-
2018
- 2018-10-09 CN CN201821628505.2U patent/CN208655607U/en active Active
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