CN208644378U - A kind of ultraviolet laser micro Process platform - Google Patents

A kind of ultraviolet laser micro Process platform Download PDF

Info

Publication number
CN208644378U
CN208644378U CN201820747773.XU CN201820747773U CN208644378U CN 208644378 U CN208644378 U CN 208644378U CN 201820747773 U CN201820747773 U CN 201820747773U CN 208644378 U CN208644378 U CN 208644378U
Authority
CN
China
Prior art keywords
galvanometer
machine table
coaxial
ultraviolet laser
support column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820747773.XU
Other languages
Chinese (zh)
Inventor
阳政
吴杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huo Yan Laser Science And Technology Ltd Of Shenzhen
Original Assignee
Huo Yan Laser Science And Technology Ltd Of Shenzhen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huo Yan Laser Science And Technology Ltd Of Shenzhen filed Critical Huo Yan Laser Science And Technology Ltd Of Shenzhen
Priority to CN201820747773.XU priority Critical patent/CN208644378U/en
Application granted granted Critical
Publication of CN208644378U publication Critical patent/CN208644378U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

The utility model is suitable for technical field of mechanical processing, provide a kind of ultraviolet laser micro Process platform, including platform assembly and laser module, the platform assembly includes feet, machine table, telescopic rod, workbench, support column and rubber stopper, the machine table is fixedly connected on the feet, the machine table is located at the upper surface of the feet, and the telescopic rod is fixedly connected on the machine table, and the telescopic rod is located at the upper surface of the machine table;The integrally formed support column and the rubber stopper, and the rubber stopper is housed in the inside of the cylindrical cavity, to which the rubber stopper can slide above and below in the inside of the cavity, and then drive the height of the support column of top different, to adapt to irregular workpiece, ensure that irregular workpiece processing when it is smooth and steady, so as to avoid staff hold, to reduce whole danger coefficient.

Description

A kind of ultraviolet laser micro Process platform
Technical field
The utility model belongs to technical field of mechanical processing more particularly to a kind of ultraviolet laser micro Process platform.
Background technique
Micro Process is often referred to the creation and modification of realizing feature by removing material on fine workpiece, laser processing technology It is a kind of common laser assisted microprocessing technology, laser assisted microprocessing has many advantages, including good flexible light beam scanning rail The controllability in mark path, noncontact procession laser beam is most important process tool, and is not contacted with workpiece, high-resolution Less than 10 microns, therefore, there are many existing and potential application fields for laser assisted microprocessing, including but not limited to such as: doctor Treat equipment, solar battery and the micro- texture of machinery part surface for improving frictional behaviour.
The work top of micro Process platform is set as smooth currently on the market, on the one hand convenient for users to putting to workpiece Set, on the other hand can keep the steady of workpiece, but this smooth table top can not place it is irregular or irregular Workpiece is unfavorable for whole processing so that this workpiece is adding man-hour requirement just to can be carried out operation by staff is hand-held, And increase danger coefficient.
Utility model content
The utility model provides a kind of ultraviolet laser micro Process platform, it is intended to solve the work top setting of micro Process platform To be smooth, on the one hand convenient for users to the placement to workpiece, the steady of workpiece on the other hand can be kept, but it is this flat Whole table top can not place irregular or irregular workpiece so that this workpiece add man-hour requirement by staff It is hand-held just to can be carried out operation, it is unfavorable for whole processing, and increase danger coefficient.
The utility model is realized in this way a kind of ultraviolet laser micro Process platform, including platform assembly and laser module, The platform assembly includes feet, machine table, telescopic rod, workbench, support column and rubber stopper, and the machine table is fixedly connected on The feet, the machine table are located at the upper surface of the feet, and the telescopic rod is fixedly connected on the machine table, described to stretch Contracting bar is located at the upper surface of the machine table, and the workbench is rotationally connected with the telescopic rod, and the workbench is located at described The lateral wall of telescopic rod, the support column are slidably connected to the machine table by the rubber stopper, and the support column is located at institute State the inside of machine table, the inside of the machine table offers cavity, the laser module include ultraviolet laser, beam expanding lens, Light splitting piece, galvanometer X, galvanometer Y, condenser lens and the micro- monitoring system of coaxial CCD, the ultraviolet laser, the beam expanding lens, institute Light splitting piece, the galvanometer X, the galvanometer Y, the coaxial micro- monitoring system of CCD is stated to be fixedly connected in the workbench, institute State the upper surface that ultraviolet laser, the beam expanding lens, the light splitting piece and the galvanometer X are respectively positioned on the workbench, the vibration The inside of mirror Y and the micro- monitoring system of coaxial CCD, the ultraviolet laser, the beam expanding lens, the light splitting piece and described Galvanometer X is laterally successively arranged in order, and the coaxial micro- monitoring system of CCD is located at the left side of the galvanometer Y, described to focus thoroughly Mirror is rotationally connected with the galvanometer Y, and the condenser lens is located at the lower section of the galvanometer Y, and the coaxial light source is slidably connected to The telescopic rod, the coaxial light source are located at the lateral wall of the telescopic rod, and the ultraviolet laser, the coaxial CCD are micro- Monitoring system and the coaxial light source are electrically connected at external power supply.
Preferably, the support column is provided with 25, and is divided into the five-element five and arranges the upper table for being arranged in the machine table Face.
Preferably, the cavity is set as cylindrical type, and the bottom end of the cavity is there are venthole, the venthole and outer Portion's environment communicates.
Preferably, the support column and the rubber stopper are integrally formed, and the rubber stopper is located under the support column End, the outer diameter of the rubber stopper are identical in the internal diameter of the cavity.
Preferably, the condenser lens is located at the surface of the support column.
Preferably, the micro- monitoring system of coaxial CCD includes coaxial ccd detector and monitor.
Compared with prior art, the utility model has the beneficial effects that a kind of ultraviolet laser micro Process of the utility model Platform, by the way that the integrally formed support column and the rubber stopper is arranged, and the rubber stopper is housed in the cylindrical sky The inside of chamber so that the rubber stopper can slide above and below in the inside of the cavity, and then drives the support column of top Height it is different, to adapt to irregular workpiece, multiple support columns form a new machined surface, facilitate work people Various workpieces of different shapes are placed processing by member, ensure that it is smooth and steady when irregular workpiece is processed, thus It is hand-held to avoid staff, to reduce whole danger coefficient.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model;
Fig. 2 is laser module flowage structure schematic diagram in the utility model;
Fig. 3 is machine table overlooking structure diagram in the utility model;
Fig. 4 is that workbench has an X-rayed figure structure schematic representation in the utility model;
In figure: 1- platform assembly, 11- feet, 12- machine table, 13- telescopic rod, 14- workbench, 15- support column, 16- rubber Leather plug, 17- cavity, 2- laser module, 21- ultraviolet laser, 22- beam expanding lens, 23- light splitting piece, 24- galvanometer X, 25- galvanometer Y, The micro- monitoring system of the coaxial CCD of 26- condenser lens, 27-, 28- coaxial light source.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain The utility model is not used to limit the utility model.
Fig. 1-4 is please referred to, the utility model provides a kind of technical solution: a kind of ultraviolet laser micro Process platform, including it is flat Platform component 1 and laser module 2, platform assembly 1 include feet 11, machine table 12, telescopic rod 13, workbench 14,15 and of support column Rubber stopper 16, machine table 12 are fixedly connected on feet 11, and machine table 12 is located at the upper surface of feet 11, and telescopic rod 13 is fixed to be connected It is connected to machine table 12, telescopic rod 13 is located at the upper surface of machine table 12, and workbench 14 is rotationally connected with telescopic rod 13, workbench 14 Positioned at the lateral wall of telescopic rod 13, support column 15 is slidably connected to machine table 12 by rubber stopper 16, and support column 15 is located at processing The inside of platform 12, the inside of machine table 12 offer cavity 17, and laser module 2 includes ultraviolet laser 21, beam expanding lens 22, light splitting Piece 23, galvanometer X24, galvanometer Y25, condenser lens 26 and the micro- monitoring system 27 of coaxial CCD, the ultraviolet laser 21 expand The micro- monitoring system 27 of mirror 22, light splitting piece 23, galvanometer X24, galvanometer Y25, coaxial CCD is fixedly connected in workbench 14, ultraviolet Laser 21, beam expanding lens 22, light splitting piece 23 and galvanometer X24 are respectively positioned on the upper surface of workbench 14, galvanometer Y25 and coaxial CCD The inside of micro- monitoring system 27, ultraviolet laser 21, beam expanding lens 22, light splitting piece 23 and galvanometer X24 are laterally successively arranged in order It opens, the coaxial micro- monitoring system 27 of CCD is located at the left side of galvanometer Y25, and condenser lens 26 is rotationally connected with galvanometer Y25, focuses saturating Mirror 26 is located at the lower section of galvanometer Y25, and coaxial light source 28 is slidably connected to telescopic rod 13, and coaxial light source 28 is located at telescopic rod 13 Lateral wall, the micro- monitoring system 27 of ultraviolet laser 21, coaxial CCD and coaxial light source 28 are electrically connected at external power supply.
In the present embodiment, workpiece is supported in such a way that accumulation is at face by the way that multiple support columns 15 are arranged, On the one hand reduce the area that single support column 15 accounts for workpiece, prevent the contact in processing with laser beam, on the other hand Multiple support columns 15 increases the bearing area of entire workpiece, to share the weight of single support column 15, and then drops Pressure of the bottom to rubber stopper 16.
It in the present embodiment, include coaxial ccd detector and monitoring by the way that the coaxial micro- monitoring system 27 of CCD is arranged Device adjusts optical module in the micro- detector 13 of coaxial CCD and obtains the light reflected from work piece surface, and on a monitor into Row is clearly imaged, and when in use, external power supply is successfully connected, and the laser beam that ultraviolet laser 21 issues first passes through beam expanding lens Glancing incidence is transmitted into light splitting piece 23 through light splitting piece 23 after 22, on the galvanometer X24 being incident on support frame, and through reflecting It obtains ground laser beam and is incident on galvanometer Y25, then focused a laser beam into using condenser lens 26 and be placed on 15 groups of support column At on the workpiece above table top, in the light projection to workpiece that then coaxial light source issues, reflected light is formed on workpiece, The reflected light of workpiece successively becomes directional light after the total reflection of the refraction of condenser lens 26, galvanometer X24 and galvanometer Y25 Be again incident on light splitting piece 23, using after the total reflection of light splitting piece 23 by the coaxial CCD in the micro- monitoring system 27 of coaxial CCD Detector captures imaging, so as to capture the imaging data of workpiece in the micro- monitoring system 27 of coaxial CCD, and can With by check in monitor workpiece clearly as imaging data is sent industry by the coaxial micro- monitoring system 27 of CCD Computer is controlled, the calibration software of image is installed in industrial control computer, signature analysis, position are carried out to the imaging data Capture, the location data than exporting laser after peer processes arrives galvanometer system, galvanometer system is according to the location data, adjustment galvanometer The deviation angle of X24 and galvanometer Y25;To which the coordinate position value for realizing that laser is indicated by industrial control computer is mobile, meet The high requirement of machining accuracy can carry out accurate mark and cutting to irregular workpiece.
Further, support column 15 is provided with 25, and is divided into the five-element five and arranges the upper table for being arranged in machine table 12 Face.
In the present embodiment, by the way that multiple support columns 15 is arranged, so as to which entire bearing area is become larger, into And thering is more supporting point to be supported entire workpiece on workpiece, the convenient support to entire workpiece increases The stability that device supports workpiece.
Further, cavity 17 is set as cylindrical type, and there are venthole, venthole and external environments for the bottom end of cavity 17 It communicates;Support column 15 and rubber stopper 16 are integrally formed, and rubber stopper 16 is located at the lower end of support column 15, the outer diameter of rubber stopper 16 It is identical in the internal diameter of cavity 17.
In the present embodiment, by the way that the venthole that communicates with external environment is arranged, it is ensured that rubber stopper 16 can under Pressure, and then change the variation of upper support column 15, the integrated molding of support column 15 and rubber stopper 16 prevents from promoting support column 15 When rubber stopper 16 be left in place, lead to set the variation that can not be supported column 15, the inside of 16 outer diameter of rubber stopper and cavity it is interior Diameter is identical, ensure that the tightness mobile in cavity inside of rubber stopper 16.
Further, condenser lens 26 is located at the surface of support column 15.
In the present embodiment, by setting condenser lens 26 in the surface of 15 plane of support column, thus ultraviolet laser Accurate cutting processing can be carried out to workpiece, and can guarantee the entrance condenser lens 26 of the reflected light of coaxial light source.
Further, the micro- monitoring system 27 of coaxial CCD includes coaxial ccd detector and monitor.
It in the present embodiment, is 5~200 times by the amplification factor that the coaxial micro- detector of CCD is arranged, coaxial CCD Micro- detector is in the surface of galvanometer Y25, can make by adjusting the optical module in the micro- detector 13 of coaxial CCD The light reflected from work piece surface is obtained, is finally received by the micro- detector of coaxial CCD by condenser lens 26 and galvanometer Y25, and Obtain on a monitor clearly as.
The working principle and process for using of the utility model: after the utility model installs, equipment is accessed into external electrical Glancing incidence is into light splitting piece 23 after beam expanding lens 22 for the laser beam that source, first ultraviolet laser 21 issue, through light splitting piece 23 Transmission, on the galvanometer X24 being incident on support frame, and through reflection obtain ground laser beam be incident on galvanometer Y25, then using Condenser lens 26, which focuses a laser beam into, to be placed on the workpiece that support column 15 forms above table top, and then coaxial light source issues Light projection to workpiece on, reflected light is formed on workpiece, the reflected light of workpiece successively passes through the folding of condenser lens 26 It penetrates, become directional light after the total reflection of galvanometer X24 and galvanometer Y25 and be again incident on light splitting piece 23, using the complete of light splitting piece 23 Imaging is captured by the coaxial ccd detector in the micro- monitoring system 27 of coaxial CCD after reflection, so as to micro- in coaxial CCD The imaging data of workpiece is captured in monitoring system 27, and the clear of workpiece can be checked by the graphical display of monitor Picture, the coaxial micro- monitoring system 27 of CCD sends industrial control computer for imaging data, installs in industrial control computer There is the calibration software of image, signature analysis, position capture, the positioning than exporting laser after peer processes are carried out to the imaging data Data are to galvanometer system, and galvanometer system is according to the location data, the deviation angle of adjustment galvanometer X24 and galvanometer Y25, to realize Laser is mobile by the coordinate position value of industrial control computer instruction, meets the high requirement of machining accuracy, can add to irregular Workpiece carries out accurate mark and cutting.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model Protection scope within.

Claims (6)

1. a kind of ultraviolet laser micro Process platform, it is characterised in that: including platform assembly (1) and laser module (2), the platform Component (1) includes feet (11), machine table (12), telescopic rod (13), workbench (14), support column (15) and rubber stopper (16), The machine table (12) is fixedly connected on the feet (11), and the machine table (12) is located at the upper surface of the feet (11), The telescopic rod (13) is fixedly connected on the machine table (12), and the telescopic rod (13) is located at the upper table of the machine table (12) Face, the workbench (14) are rotationally connected with the telescopic rod (13), and the workbench (14) is located at the telescopic rod (13) Lateral wall, the support column (15) are slidably connected to the machine table (12), the support column by the rubber stopper (16) (15) it is located at the inside of the machine table (12), the inside of the machine table (12) offers cavity (17),
The laser module (2) includes ultraviolet laser (21), beam expanding lens (22), light splitting piece (23), galvanometer X (24), galvanometer Y (25), condenser lens (26) and the micro- monitoring system of coaxial CCD (27), the ultraviolet laser (21), the beam expanding lens (22), The light splitting piece (23), the galvanometer X (24), the galvanometer Y (25), the coaxial micro- monitoring system of CCD (27) are fixed It is connected to the workbench (14), the ultraviolet laser (21), the beam expanding lens (22), the light splitting piece (23) and the vibration Mirror X (24) is respectively positioned on the upper surface of the workbench (14), the galvanometer Y (25) and the micro- monitoring system of coaxial CCD (27) inside, the ultraviolet laser (21), the beam expanding lens (22), the light splitting piece (23) and the galvanometer X (24) are pressed Sequential lateral successively arranges, and the coaxial micro- monitoring system of CCD (27) is located at the left side of the galvanometer Y (25), the focusing Lens (26) are rotationally connected with the galvanometer Y (25), and the condenser lens (26) is located at the lower section of the galvanometer Y (25), described Coaxial light source (28) is slidably connected to the telescopic rod (13), and the coaxial light source (28) is located at the outside of the telescopic rod (13) Wall, the ultraviolet laser (21), the coaxial micro- monitoring system of CCD (27) and the coaxial light source (28) are electrically connected In external power supply.
2. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the support column (15) is provided with 25, and be divided into the five-element five and arrange the upper surface for being arranged in the machine table (12).
3. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the cavity (17) is set as round Column type, and the bottom end of the cavity (17), there are venthole, the venthole is communicated with external environment.
4. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the support column (15) with it is described Rubber stopper (16) is integrally formed, and the rubber stopper (16) is located at the lower end of the support column (15), the rubber stopper (16) Internal diameter of the outer diameter in the cavity (17) is identical.
5. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the condenser lens (26) is located at The surface of the support column (15).
6. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the coaxial micro- monitoring of CCD System (27) includes coaxial ccd detector and monitor.
CN201820747773.XU 2018-05-19 2018-05-19 A kind of ultraviolet laser micro Process platform Expired - Fee Related CN208644378U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820747773.XU CN208644378U (en) 2018-05-19 2018-05-19 A kind of ultraviolet laser micro Process platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820747773.XU CN208644378U (en) 2018-05-19 2018-05-19 A kind of ultraviolet laser micro Process platform

Publications (1)

Publication Number Publication Date
CN208644378U true CN208644378U (en) 2019-03-26

Family

ID=65778921

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820747773.XU Expired - Fee Related CN208644378U (en) 2018-05-19 2018-05-19 A kind of ultraviolet laser micro Process platform

Country Status (1)

Country Link
CN (1) CN208644378U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111496395A (en) * 2020-04-17 2020-08-07 中国电子科技集团公司第十一研究所 Machining tool and machining method for throttle hole of J-T refrigerator
CN111958562A (en) * 2020-07-20 2020-11-20 苏州紫光伟业激光科技有限公司 Novel ultraviolet laser micro-processing platform

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111496395A (en) * 2020-04-17 2020-08-07 中国电子科技集团公司第十一研究所 Machining tool and machining method for throttle hole of J-T refrigerator
CN111958562A (en) * 2020-07-20 2020-11-20 苏州紫光伟业激光科技有限公司 Novel ultraviolet laser micro-processing platform

Similar Documents

Publication Publication Date Title
JP4509790B2 (en) Method and system for determining the position and alignment of an object surface relative to a laser beam
US8520066B2 (en) Automated optical inspection system for the runout tolerance of circular saw blades
CN107607059B (en) One-key type 3D contour measurement equipment and measurement calculation method thereof
CN208644378U (en) A kind of ultraviolet laser micro Process platform
CN207779916U (en) A kind of cover board test device
CN101856773A (en) Focusing positioning method based on initial laser processing position and laser processing device
CN210306244U (en) Laser focus automated inspection and monitoring device
CN107589123B (en) Device for appearance detection of protective cover plate of intelligent equipment
CN110954024A (en) Connecting piece vision measuring device and measuring method thereof
CN103862166B (en) A kind of defining method of laser beam focal plane
CN204353654U (en) The laser aid of cone of nulls degree and back taper groove processing can be realized
CN107096928A (en) Centering car lens barrel processing unit (plant) and its method based on optical decentration system
CN207816184U (en) A kind of external dimensions detection device of part or exemplar
CN208033917U (en) Real-time dynamic focusing three-dimensional marking system
CN103801826A (en) Laser processing focusing device, focusing method and laser processing equipment
CN110836641A (en) Detection method and detection equipment for three-dimensional size of part special-shaped surface microstructure
CN104061881A (en) Optical device and optical measuring method for observing and analyzing actual contact area of contact points
CN216541470U (en) Laser cutting equipment with horizontal positioning function
CN203853681U (en) Ultraviolet laser-beam drilling machine
CN205448980U (en) Lens test system
CN202562436U (en) Optical measuring instrument
CN103801824B (en) A kind of auto-focusing high-precision large-stroke precise positioning work table
CN112945133A (en) Three-dimensional size measuring instrument and measuring method thereof
CN206311209U (en) A kind of micro fiber spectrometer slit alignment device
JP2012211842A (en) Shape measuring apparatus

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190326

Termination date: 20210519