CN208644378U - A kind of ultraviolet laser micro Process platform - Google Patents
A kind of ultraviolet laser micro Process platform Download PDFInfo
- Publication number
- CN208644378U CN208644378U CN201820747773.XU CN201820747773U CN208644378U CN 208644378 U CN208644378 U CN 208644378U CN 201820747773 U CN201820747773 U CN 201820747773U CN 208644378 U CN208644378 U CN 208644378U
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- China
- Prior art keywords
- galvanometer
- machine table
- coaxial
- ultraviolet laser
- support column
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Abstract
The utility model is suitable for technical field of mechanical processing, provide a kind of ultraviolet laser micro Process platform, including platform assembly and laser module, the platform assembly includes feet, machine table, telescopic rod, workbench, support column and rubber stopper, the machine table is fixedly connected on the feet, the machine table is located at the upper surface of the feet, and the telescopic rod is fixedly connected on the machine table, and the telescopic rod is located at the upper surface of the machine table;The integrally formed support column and the rubber stopper, and the rubber stopper is housed in the inside of the cylindrical cavity, to which the rubber stopper can slide above and below in the inside of the cavity, and then drive the height of the support column of top different, to adapt to irregular workpiece, ensure that irregular workpiece processing when it is smooth and steady, so as to avoid staff hold, to reduce whole danger coefficient.
Description
Technical field
The utility model belongs to technical field of mechanical processing more particularly to a kind of ultraviolet laser micro Process platform.
Background technique
Micro Process is often referred to the creation and modification of realizing feature by removing material on fine workpiece, laser processing technology
It is a kind of common laser assisted microprocessing technology, laser assisted microprocessing has many advantages, including good flexible light beam scanning rail
The controllability in mark path, noncontact procession laser beam is most important process tool, and is not contacted with workpiece, high-resolution
Less than 10 microns, therefore, there are many existing and potential application fields for laser assisted microprocessing, including but not limited to such as: doctor
Treat equipment, solar battery and the micro- texture of machinery part surface for improving frictional behaviour.
The work top of micro Process platform is set as smooth currently on the market, on the one hand convenient for users to putting to workpiece
Set, on the other hand can keep the steady of workpiece, but this smooth table top can not place it is irregular or irregular
Workpiece is unfavorable for whole processing so that this workpiece is adding man-hour requirement just to can be carried out operation by staff is hand-held,
And increase danger coefficient.
Utility model content
The utility model provides a kind of ultraviolet laser micro Process platform, it is intended to solve the work top setting of micro Process platform
To be smooth, on the one hand convenient for users to the placement to workpiece, the steady of workpiece on the other hand can be kept, but it is this flat
Whole table top can not place irregular or irregular workpiece so that this workpiece add man-hour requirement by staff
It is hand-held just to can be carried out operation, it is unfavorable for whole processing, and increase danger coefficient.
The utility model is realized in this way a kind of ultraviolet laser micro Process platform, including platform assembly and laser module,
The platform assembly includes feet, machine table, telescopic rod, workbench, support column and rubber stopper, and the machine table is fixedly connected on
The feet, the machine table are located at the upper surface of the feet, and the telescopic rod is fixedly connected on the machine table, described to stretch
Contracting bar is located at the upper surface of the machine table, and the workbench is rotationally connected with the telescopic rod, and the workbench is located at described
The lateral wall of telescopic rod, the support column are slidably connected to the machine table by the rubber stopper, and the support column is located at institute
State the inside of machine table, the inside of the machine table offers cavity, the laser module include ultraviolet laser, beam expanding lens,
Light splitting piece, galvanometer X, galvanometer Y, condenser lens and the micro- monitoring system of coaxial CCD, the ultraviolet laser, the beam expanding lens, institute
Light splitting piece, the galvanometer X, the galvanometer Y, the coaxial micro- monitoring system of CCD is stated to be fixedly connected in the workbench, institute
State the upper surface that ultraviolet laser, the beam expanding lens, the light splitting piece and the galvanometer X are respectively positioned on the workbench, the vibration
The inside of mirror Y and the micro- monitoring system of coaxial CCD, the ultraviolet laser, the beam expanding lens, the light splitting piece and described
Galvanometer X is laterally successively arranged in order, and the coaxial micro- monitoring system of CCD is located at the left side of the galvanometer Y, described to focus thoroughly
Mirror is rotationally connected with the galvanometer Y, and the condenser lens is located at the lower section of the galvanometer Y, and the coaxial light source is slidably connected to
The telescopic rod, the coaxial light source are located at the lateral wall of the telescopic rod, and the ultraviolet laser, the coaxial CCD are micro-
Monitoring system and the coaxial light source are electrically connected at external power supply.
Preferably, the support column is provided with 25, and is divided into the five-element five and arranges the upper table for being arranged in the machine table
Face.
Preferably, the cavity is set as cylindrical type, and the bottom end of the cavity is there are venthole, the venthole and outer
Portion's environment communicates.
Preferably, the support column and the rubber stopper are integrally formed, and the rubber stopper is located under the support column
End, the outer diameter of the rubber stopper are identical in the internal diameter of the cavity.
Preferably, the condenser lens is located at the surface of the support column.
Preferably, the micro- monitoring system of coaxial CCD includes coaxial ccd detector and monitor.
Compared with prior art, the utility model has the beneficial effects that a kind of ultraviolet laser micro Process of the utility model
Platform, by the way that the integrally formed support column and the rubber stopper is arranged, and the rubber stopper is housed in the cylindrical sky
The inside of chamber so that the rubber stopper can slide above and below in the inside of the cavity, and then drives the support column of top
Height it is different, to adapt to irregular workpiece, multiple support columns form a new machined surface, facilitate work people
Various workpieces of different shapes are placed processing by member, ensure that it is smooth and steady when irregular workpiece is processed, thus
It is hand-held to avoid staff, to reduce whole danger coefficient.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model;
Fig. 2 is laser module flowage structure schematic diagram in the utility model;
Fig. 3 is machine table overlooking structure diagram in the utility model;
Fig. 4 is that workbench has an X-rayed figure structure schematic representation in the utility model;
In figure: 1- platform assembly, 11- feet, 12- machine table, 13- telescopic rod, 14- workbench, 15- support column, 16- rubber
Leather plug, 17- cavity, 2- laser module, 21- ultraviolet laser, 22- beam expanding lens, 23- light splitting piece, 24- galvanometer X, 25- galvanometer Y,
The micro- monitoring system of the coaxial CCD of 26- condenser lens, 27-, 28- coaxial light source.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
Fig. 1-4 is please referred to, the utility model provides a kind of technical solution: a kind of ultraviolet laser micro Process platform, including it is flat
Platform component 1 and laser module 2, platform assembly 1 include feet 11, machine table 12, telescopic rod 13, workbench 14,15 and of support column
Rubber stopper 16, machine table 12 are fixedly connected on feet 11, and machine table 12 is located at the upper surface of feet 11, and telescopic rod 13 is fixed to be connected
It is connected to machine table 12, telescopic rod 13 is located at the upper surface of machine table 12, and workbench 14 is rotationally connected with telescopic rod 13, workbench 14
Positioned at the lateral wall of telescopic rod 13, support column 15 is slidably connected to machine table 12 by rubber stopper 16, and support column 15 is located at processing
The inside of platform 12, the inside of machine table 12 offer cavity 17, and laser module 2 includes ultraviolet laser 21, beam expanding lens 22, light splitting
Piece 23, galvanometer X24, galvanometer Y25, condenser lens 26 and the micro- monitoring system 27 of coaxial CCD, the ultraviolet laser 21 expand
The micro- monitoring system 27 of mirror 22, light splitting piece 23, galvanometer X24, galvanometer Y25, coaxial CCD is fixedly connected in workbench 14, ultraviolet
Laser 21, beam expanding lens 22, light splitting piece 23 and galvanometer X24 are respectively positioned on the upper surface of workbench 14, galvanometer Y25 and coaxial CCD
The inside of micro- monitoring system 27, ultraviolet laser 21, beam expanding lens 22, light splitting piece 23 and galvanometer X24 are laterally successively arranged in order
It opens, the coaxial micro- monitoring system 27 of CCD is located at the left side of galvanometer Y25, and condenser lens 26 is rotationally connected with galvanometer Y25, focuses saturating
Mirror 26 is located at the lower section of galvanometer Y25, and coaxial light source 28 is slidably connected to telescopic rod 13, and coaxial light source 28 is located at telescopic rod 13
Lateral wall, the micro- monitoring system 27 of ultraviolet laser 21, coaxial CCD and coaxial light source 28 are electrically connected at external power supply.
In the present embodiment, workpiece is supported in such a way that accumulation is at face by the way that multiple support columns 15 are arranged,
On the one hand reduce the area that single support column 15 accounts for workpiece, prevent the contact in processing with laser beam, on the other hand
Multiple support columns 15 increases the bearing area of entire workpiece, to share the weight of single support column 15, and then drops
Pressure of the bottom to rubber stopper 16.
It in the present embodiment, include coaxial ccd detector and monitoring by the way that the coaxial micro- monitoring system 27 of CCD is arranged
Device adjusts optical module in the micro- detector 13 of coaxial CCD and obtains the light reflected from work piece surface, and on a monitor into
Row is clearly imaged, and when in use, external power supply is successfully connected, and the laser beam that ultraviolet laser 21 issues first passes through beam expanding lens
Glancing incidence is transmitted into light splitting piece 23 through light splitting piece 23 after 22, on the galvanometer X24 being incident on support frame, and through reflecting
It obtains ground laser beam and is incident on galvanometer Y25, then focused a laser beam into using condenser lens 26 and be placed on 15 groups of support column
At on the workpiece above table top, in the light projection to workpiece that then coaxial light source issues, reflected light is formed on workpiece,
The reflected light of workpiece successively becomes directional light after the total reflection of the refraction of condenser lens 26, galvanometer X24 and galvanometer Y25
Be again incident on light splitting piece 23, using after the total reflection of light splitting piece 23 by the coaxial CCD in the micro- monitoring system 27 of coaxial CCD
Detector captures imaging, so as to capture the imaging data of workpiece in the micro- monitoring system 27 of coaxial CCD, and can
With by check in monitor workpiece clearly as imaging data is sent industry by the coaxial micro- monitoring system 27 of CCD
Computer is controlled, the calibration software of image is installed in industrial control computer, signature analysis, position are carried out to the imaging data
Capture, the location data than exporting laser after peer processes arrives galvanometer system, galvanometer system is according to the location data, adjustment galvanometer
The deviation angle of X24 and galvanometer Y25;To which the coordinate position value for realizing that laser is indicated by industrial control computer is mobile, meet
The high requirement of machining accuracy can carry out accurate mark and cutting to irregular workpiece.
Further, support column 15 is provided with 25, and is divided into the five-element five and arranges the upper table for being arranged in machine table 12
Face.
In the present embodiment, by the way that multiple support columns 15 is arranged, so as to which entire bearing area is become larger, into
And thering is more supporting point to be supported entire workpiece on workpiece, the convenient support to entire workpiece increases
The stability that device supports workpiece.
Further, cavity 17 is set as cylindrical type, and there are venthole, venthole and external environments for the bottom end of cavity 17
It communicates;Support column 15 and rubber stopper 16 are integrally formed, and rubber stopper 16 is located at the lower end of support column 15, the outer diameter of rubber stopper 16
It is identical in the internal diameter of cavity 17.
In the present embodiment, by the way that the venthole that communicates with external environment is arranged, it is ensured that rubber stopper 16 can under
Pressure, and then change the variation of upper support column 15, the integrated molding of support column 15 and rubber stopper 16 prevents from promoting support column 15
When rubber stopper 16 be left in place, lead to set the variation that can not be supported column 15, the inside of 16 outer diameter of rubber stopper and cavity it is interior
Diameter is identical, ensure that the tightness mobile in cavity inside of rubber stopper 16.
Further, condenser lens 26 is located at the surface of support column 15.
In the present embodiment, by setting condenser lens 26 in the surface of 15 plane of support column, thus ultraviolet laser
Accurate cutting processing can be carried out to workpiece, and can guarantee the entrance condenser lens 26 of the reflected light of coaxial light source.
Further, the micro- monitoring system 27 of coaxial CCD includes coaxial ccd detector and monitor.
It in the present embodiment, is 5~200 times by the amplification factor that the coaxial micro- detector of CCD is arranged, coaxial CCD
Micro- detector is in the surface of galvanometer Y25, can make by adjusting the optical module in the micro- detector 13 of coaxial CCD
The light reflected from work piece surface is obtained, is finally received by the micro- detector of coaxial CCD by condenser lens 26 and galvanometer Y25, and
Obtain on a monitor clearly as.
The working principle and process for using of the utility model: after the utility model installs, equipment is accessed into external electrical
Glancing incidence is into light splitting piece 23 after beam expanding lens 22 for the laser beam that source, first ultraviolet laser 21 issue, through light splitting piece 23
Transmission, on the galvanometer X24 being incident on support frame, and through reflection obtain ground laser beam be incident on galvanometer Y25, then using
Condenser lens 26, which focuses a laser beam into, to be placed on the workpiece that support column 15 forms above table top, and then coaxial light source issues
Light projection to workpiece on, reflected light is formed on workpiece, the reflected light of workpiece successively passes through the folding of condenser lens 26
It penetrates, become directional light after the total reflection of galvanometer X24 and galvanometer Y25 and be again incident on light splitting piece 23, using the complete of light splitting piece 23
Imaging is captured by the coaxial ccd detector in the micro- monitoring system 27 of coaxial CCD after reflection, so as to micro- in coaxial CCD
The imaging data of workpiece is captured in monitoring system 27, and the clear of workpiece can be checked by the graphical display of monitor
Picture, the coaxial micro- monitoring system 27 of CCD sends industrial control computer for imaging data, installs in industrial control computer
There is the calibration software of image, signature analysis, position capture, the positioning than exporting laser after peer processes are carried out to the imaging data
Data are to galvanometer system, and galvanometer system is according to the location data, the deviation angle of adjustment galvanometer X24 and galvanometer Y25, to realize
Laser is mobile by the coordinate position value of industrial control computer instruction, meets the high requirement of machining accuracy, can add to irregular
Workpiece carries out accurate mark and cutting.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (6)
1. a kind of ultraviolet laser micro Process platform, it is characterised in that: including platform assembly (1) and laser module (2), the platform
Component (1) includes feet (11), machine table (12), telescopic rod (13), workbench (14), support column (15) and rubber stopper (16),
The machine table (12) is fixedly connected on the feet (11), and the machine table (12) is located at the upper surface of the feet (11),
The telescopic rod (13) is fixedly connected on the machine table (12), and the telescopic rod (13) is located at the upper table of the machine table (12)
Face, the workbench (14) are rotationally connected with the telescopic rod (13), and the workbench (14) is located at the telescopic rod (13)
Lateral wall, the support column (15) are slidably connected to the machine table (12), the support column by the rubber stopper (16)
(15) it is located at the inside of the machine table (12), the inside of the machine table (12) offers cavity (17),
The laser module (2) includes ultraviolet laser (21), beam expanding lens (22), light splitting piece (23), galvanometer X (24), galvanometer Y
(25), condenser lens (26) and the micro- monitoring system of coaxial CCD (27), the ultraviolet laser (21), the beam expanding lens (22),
The light splitting piece (23), the galvanometer X (24), the galvanometer Y (25), the coaxial micro- monitoring system of CCD (27) are fixed
It is connected to the workbench (14), the ultraviolet laser (21), the beam expanding lens (22), the light splitting piece (23) and the vibration
Mirror X (24) is respectively positioned on the upper surface of the workbench (14), the galvanometer Y (25) and the micro- monitoring system of coaxial CCD
(27) inside, the ultraviolet laser (21), the beam expanding lens (22), the light splitting piece (23) and the galvanometer X (24) are pressed
Sequential lateral successively arranges, and the coaxial micro- monitoring system of CCD (27) is located at the left side of the galvanometer Y (25), the focusing
Lens (26) are rotationally connected with the galvanometer Y (25), and the condenser lens (26) is located at the lower section of the galvanometer Y (25), described
Coaxial light source (28) is slidably connected to the telescopic rod (13), and the coaxial light source (28) is located at the outside of the telescopic rod (13)
Wall, the ultraviolet laser (21), the coaxial micro- monitoring system of CCD (27) and the coaxial light source (28) are electrically connected
In external power supply.
2. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the support column (15) is provided with
25, and be divided into the five-element five and arrange the upper surface for being arranged in the machine table (12).
3. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the cavity (17) is set as round
Column type, and the bottom end of the cavity (17), there are venthole, the venthole is communicated with external environment.
4. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the support column (15) with it is described
Rubber stopper (16) is integrally formed, and the rubber stopper (16) is located at the lower end of the support column (15), the rubber stopper (16)
Internal diameter of the outer diameter in the cavity (17) is identical.
5. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the condenser lens (26) is located at
The surface of the support column (15).
6. a kind of ultraviolet laser micro Process platform as described in claim 1, it is characterised in that: the coaxial micro- monitoring of CCD
System (27) includes coaxial ccd detector and monitor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201820747773.XU CN208644378U (en) | 2018-05-19 | 2018-05-19 | A kind of ultraviolet laser micro Process platform |
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Application Number | Priority Date | Filing Date | Title |
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CN201820747773.XU CN208644378U (en) | 2018-05-19 | 2018-05-19 | A kind of ultraviolet laser micro Process platform |
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CN208644378U true CN208644378U (en) | 2019-03-26 |
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CN201820747773.XU Expired - Fee Related CN208644378U (en) | 2018-05-19 | 2018-05-19 | A kind of ultraviolet laser micro Process platform |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111496395A (en) * | 2020-04-17 | 2020-08-07 | 中国电子科技集团公司第十一研究所 | Machining tool and machining method for throttle hole of J-T refrigerator |
CN111958562A (en) * | 2020-07-20 | 2020-11-20 | 苏州紫光伟业激光科技有限公司 | Novel ultraviolet laser micro-processing platform |
-
2018
- 2018-05-19 CN CN201820747773.XU patent/CN208644378U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111496395A (en) * | 2020-04-17 | 2020-08-07 | 中国电子科技集团公司第十一研究所 | Machining tool and machining method for throttle hole of J-T refrigerator |
CN111958562A (en) * | 2020-07-20 | 2020-11-20 | 苏州紫光伟业激光科技有限公司 | Novel ultraviolet laser micro-processing platform |
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Legal Events
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190326 Termination date: 20210519 |