CN208637397U - Transmit the work station of semiconductor substrate - Google Patents
Transmit the work station of semiconductor substrate Download PDFInfo
- Publication number
- CN208637397U CN208637397U CN201821204817.0U CN201821204817U CN208637397U CN 208637397 U CN208637397 U CN 208637397U CN 201821204817 U CN201821204817 U CN 201821204817U CN 208637397 U CN208637397 U CN 208637397U
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- China
- Prior art keywords
- substrate
- work station
- feeder
- semiconductor substrate
- management device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
The utility model discloses a kind of work station for transmitting semiconductor substrate, including warehousing management device, base board delivery device and reprinting platform.Warehousing management device allows to input, exports and store multiple substrate feeders, and can carry multiple substrate feeder of storage.Base board delivery device is located in warehousing management device, and multiple substrates to carry multiple substrate feeder storages to Working position and reprint position.Working position corresponds to process equipment.It reprints platform position and is reprinting position, and accept the substrate of base board delivery device conveying.The work station of the transmission semiconductor substrate of the utility model can efficiently conveying substrate feeder and substrate, to improve production capacity and avoid substrate contaminated.
Description
Technical field
It is related that the utility model relates to semiconductor manufacturing equipments, in particular to a kind of work station for transmitting semiconductor substrate.
Background technique
With the expansion of semiconductor plant area or product line adjustment, original process configuration will need to comply with current needs to change
Become, but the substrate feeder of semiconductor is usually transported by aerial conveyer and automatic guided vehicle at present, and this
Two kinds of conveying modes are usually to be directed to the transmission of middle and long distance, so being unable to satisfy short-range mode of movement.
Furthermore substrate self-reference substrate feeder be not suitable for carrying out after taking out remote, across technique conveying or wait it is to be conveyed because
The ingress of air time is longer, and the contaminated probability of substrate is higher, therefore, how efficiently efficiently defeated for conveying demand
It send substrate feeder and substrate has been semiconductor technology urgent problem to be solved.
Utility model content
In view of the above-mentioned deficiency, the work station of the transmission semiconductor substrate of the utility model is designed to provide a kind of effective
Rate transmission base plate feeder and substrate mode, to shorten the time that processing (technique) equipment waits.
In order to achieve the above object, the utility model provides a kind of work station for transmitting semiconductor substrate comprising:
One warehousing management device allows to input, exports and store multiple substrate feeders, and can carry the multiple of storage
Substrate feeder；
One base board delivery device is located in the warehousing management device, and to carry multiple substrate feeder storage
Multiple substrates a to Working position and one reprints position, the corresponding process equipment of the Working position；And
One reprints platform, and the substrate of base board delivery device conveying is accepted in the reprinting position in position.
The work station of above-mentioned transmission semiconductor substrate, wherein the base board delivery device includes a platform body, Duo Gecheng
Microscope carrier and a board carrying unit, multiple plummer connect the platform body, and to accept warehousing management device conveying
The multiple substrate feeder come, the board carrying unit can be movably attached the platform body, and multiple to convey
The substrate is delivered to the reprinting platform by the substrate of multiple substrate feeder storage, the board carrying unit on plummer.
The work station of above-mentioned transmission semiconductor substrate, wherein the substrate is delivered to a processing and set by the board carrying unit
It is standby.
The work station of above-mentioned transmission semiconductor substrate, wherein the board carrying unit includes that a track and a multiaxis are mobile
Clamping jaw, the track are fixedly connected with the platform body, and the mobile clamping jaw of the multiaxis connects the track, and can move along the track, should
The mobile clamping jaw of multiaxis is to carry the substrate.
The work station of above-mentioned transmission semiconductor substrate, wherein multiple plummer is to accept and open multiple substrate
Feeder.
The work station of above-mentioned transmission semiconductor substrate, wherein the warehousing management device includes that multiple storage locations and one remove
Transportation unit, multiple storage location store multiple substrate feeder, which carries the multiple substrate being stored and pass
Send box to multiple plummer.
In this way, warehousing management device efficiently can exchange and transport inside it substrate feeder, without etc.
To aerial conveyer and automatic guided vehicle.Substrate efficiently can be sent to process equipment by base board delivery device, to shorten
The time that process equipment waits, certainly, the processing that Working position can also correspond to two or more identical or different techniques is set
It is standby.Reprint platform then can efficiently conveying substrate to next technique.Therefore, the work of the transmission semiconductor substrate of the utility model
Make station be can efficiently conveying substrate feeder and substrate, to improve production capacity and substrate avoided to be contaminated.
The detailed configuration of the work station of the transmission semiconductor substrate provided in relation to the utility model, assembles or makes feature
With mode, will be described by the detailed description of subsequent embodiment.
The utility model is described in detail below in conjunction with the drawings and specific embodiments, but not as to the utility model
Restriction.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of the embodiment of the work station of the utility model transmission semiconductor substrate；
Fig. 2 is the front-view schematic diagram of Fig. 1；
Fig. 3 is to omit the hollow middle conveyer of Fig. 1 and storage location, and connect the upper view of processing (semiconductor technology) equipment
Schematic diagram；
Fig. 4 is the front-view schematic diagram of the work station of two the utility model transmission semiconductor substrates of series connection；
Fig. 5 is to omit the hollow middle conveyer of Fig. 4 and storage location, and connect the upper view of processing (semiconductor technology) equipment
Schematic diagram.
Wherein, appended drawing reference
The 11 warehousing management device of work station of 10 transmission semiconductor substrates
111 storage location, 113 handling unit
13 base board delivery device, 131 platform body
133 plummer, 1331 mechanism
135 board carrying unit, 1351 track
The mobile clamping jaw 15 of 1353 multiaxises reprints platform
30 aerial 40 automatic guided vehicles of conveyer
50 substrate feeder, 60 process equipment
The operating position A B reprints position
The work station 10b second that 10a first transmits semiconductor substrate transmits the work station of semiconductor substrate
11a, 11b warehousing management device 13a, 13b base board delivery device
135a, 135b board carrying unit 15a, 15b reprint platform
60a, 60b process equipment
Specific embodiment
Hereinafter, hereby cooperating each attached drawing to enumerate corresponding preferred embodiment carrys out transmission semiconductor substrate to the utility model
The composition component of work station and reach effect to explain.Component, the ruler of the work station of semiconductor substrate are transmitted in right each attached drawing
Very little and appearance is only used to illustrate the technical characteristics of the utility model, rather than is construed as limiting to the utility model.
As shown in Figure 1 to Figure 3, Fig. 1 is the stereoscopic schematic diagram of the work station of the transmission semiconductor substrate of the utility model, figure
2 be the front-view schematic diagram of Fig. 1, and Fig. 3 is to omit the hollow middle conveyer of Fig. 1 and storage location, and connect processing (semiconductor work
Skill) equipment upper schematic diagram.
The work station 10 of the transmission semiconductor substrate of the utility model includes warehousing management device 11, base board delivery device 13
And reprint platform 15.Wherein, the work station 10 of semiconductor substrate is transmitted in combination with aerial conveyer (OHT) 30 and automatic guided vehicle
(AGV) it 40 carries out Collaboration, is then described in detail.
Warehousing management device 11 can be by its outer framework confining spectrum, and outer framework uses enclosed knot in the present embodiment
Structure, and allow input, output and storage substrate feeder (FOUP) 50, and substrate feeder 50 can be transported in warehousing management device
11 inside are mobile.
Warehousing management device 11 has multiple storage locations 111 and handling unit 113.Multiple storage locations 111 are more to store
A substrate feeder 50, minimum number are one, more can be two or more certainly, and the present embodiment configures two layers
Share ten storage locations 111.Handling unit 113 can be mobile by six axis robot arm, XYZ axis mechanism composition or other multiaxises
Mechanism carry out handling substrate feeder 50, to exchange or position of the handling substrate feeder 50 in warehousing management device.
Input and output substrate feeder 50 can be carried by aerial conveyer 30 and automatic guided vehicle 40,
Substrate feeder 50 to be placed on corresponding storage location 111 and substrate feeder 50 is moved out warehousing management device 11.
In this way, substrate feeder 50 can be transported by handling unit 113, aerial conveyer 30 and automatic guided vehicle 40, to mention
Height conveying efficiency and shortening process time, process time include that conveying time and equipment is waited to wait process time.
Base board delivery device 13 is located in warehousing management device 11, and the substrate stored to handling substrate feeder 50,
In this way, substrate efficient can convey and avoid being contaminated.
In the present embodiment Fig. 3, base board delivery device 13 includes platform body 131, multiple plummers 133 and board carrying list
Member 135.Multiple plummers 133 connect platform body 131, and to accept and open substrate feeder 50.Plummer 133 in addition to
Further include the mechanism 1331 for unlatching and closing substrate feeder 50 outside the platform for accepting substrate feeder 50, is opened with automating
And close substrate feeder 50.
Board carrying unit 135 is movably coupled to platform body 131, and energy conveying substrate, and conveying includes that self-reference substrate passes
It send and swaps substrate, conveying substrate to Working position A or reprinting position B in box 50.Exchanging substrate includes from substrate feeder
Substrate is taken out in 50 and substrate is put into substrate feeder 50.
135 handling substrate of board carrying unit is to Working position A and reprints position B.Wherein, the corresponding processing of Working position A
(semiconductor technology) equipment 60, therefore, process equipment can be processed, be tested to substrate, examined or other movements.Wherein, add
Station, which sets A, can correspond to one or more process equipments 60.It reprints after position holds and illustrates.
Board carrying unit 135 includes the mobile clamping jaw 1353 of track 1351 and multiaxis, and track 1351 is permanently connected board
Ontology 131.The mobile clamping jaw 1353 of multiaxis connects track 1351, and can move along track 1351.The mobile clamping jaw 1353 of multiaxis is at least
It is horizontally moveable, to transport substrate to corresponding position.It moves horizontally including horizontal rotation, horizontal extension and contraction.It is empty in figure
Line indicates the position stopped after the mobile movement of clamping jaw 1353 of multiaxis, these positions are only to facilitate understanding, not as position
Limitation.In other embodiments, the mobile clamping jaw 1353 of multiaxis can also be with elevation base plate.
In other embodiments, board carrying unit 135 can also be made up of multiaxis substrate conveying system other mechanisms,
Therefore, the composition of board carrying unit 135 described in the present embodiment not to be limited.
It reprints platform 15 and is reprinting position, and the substrate to accept the conveying of base board delivery device 13, it is exposed to reprint platform 15
In outside warehousing management device 11.Exposed expression reprinting platform 15 is exposed in whole or in part outside warehousing management device.Reprint platform 15
Substrate can be sent out and hand to next technique, such as the work station or another process equipment of next transmission semiconductor substrate.
Wherein, double-dotted chain lines indicate that the movement of the mobile clamping jaw 1353 of multiaxis and direction change, with the mobile clamping jaw 1353 of multiaxis
Clamping jaw rest on Working position A and reprint position B on, in fact, Working position A and reprint position B on there is no dotted line clamping jaw
Profile.
Because substrate is to be sent to semiconductor manufacturing equipment in warehousing management device 11 by base board delivery device 13
60, therefore, base board delivery device 13 can reduce 60 waiting time of semiconductor manufacturing equipment and efficiently increase and produce per hour
Energy (UPH).Furthermore the technique of substrate can be completed in warehousing management device 11, and can be effectively suppressed across different semiconductor works
The transmission pollution that skill equipment 60 is occurred.
In addition, substrate feeder 50 not only can carry out short-range transmission by handling unit 113, also allow partly to lead at present
Aerial conveyer (OHT) 30 or automatic guided vehicle (AGV) 40 (as shown in Figure 1) Lai Jinhang middle and long distance in body factory are carried,
To increase the selection of conveying substrate feeder 50, and then improves handling efficiency and reduce the waiting time.Aerial conveyer 30 can
Substrate feeder is directly transported from the top of warehousing management device.Automatic guided vehicle can accept the substrate of the conveying of handling unit 113
Feeder.
Fig. 4 is the front-view schematic diagram of the work station of two the utility model transmission semiconductor substrates of series connection, and Fig. 5 is province's sketch map
4 hollow middle conveyers and storage location, and connect the upper schematic diagram of processing (semiconductor technology) equipment.
As shown in Figures 4 and 5, in the present embodiment by taking two are transmitted the work station series connection of semiconductor substrate as an example, in this way, respectively
The work station of transmission semiconductor substrate can allow processing (semiconductor technology) equipment of similar and different property, to carry out to substrate
Corresponding technique, and then the conveying efficiency of transmission of substrate is promoted again.
In other embodiments, the quantity of the work station of the transmission semiconductor substrate of the utility model of connecting can be more, example
Such as three or three or more.Its running is then described in detail, understands distinguish the work station that two are transmitted semiconductor substrate for convenience
The work station 10b of the transmission semiconductor substrate of work station 10a and second of referred to as first transmission semiconductor substrate.
Wherein, the storehouse of the work station 10b of the transmission semiconductor substrate of work station 10a and second of the first transmission semiconductor substrate
Store up managing device 11a, 11b, base board delivery device 13a, 13b and structure, composition and the running and above-mentioned reality of reprinting platform 15a, 15b
It is identical to apply example, therefore same section repeats no more.Illustrate that reprinting platform can send out substrate and hand to down in the above-described embodiments
One technique, this indicates that reprinting platform 15a goes forward side by side to bearing substrate so that the work station 10b of the second transmission semiconductor substrate takes
Another process operation of row, that is, carried out in the work station 10b of the second transmission semiconductor substrate, in this way, substrate can it is efficient and
It is quickly transferred to next technique, to reduce the waiting time and avoid being contaminated.
In addition, the work station 10b of the transmission semiconductor substrate of work station 10a and second of the first transmission semiconductor substrate can be with
Independent work, for example, board carrying unit 135a and 135b can respectively independently execute the operation of conveying substrate, for example,
Board carrying unit 135a, which is delivered the substrate to, reprints platform 15a, and then, substrate is transported to the second biography by board carrying unit 135b
It send in the work station 10b of semiconductor substrate.Board carrying unit 135b, which can also be delivered the substrate to, reprints platform 15b, and gives
Another technique.
In this way, the work station of the transmission semiconductor substrate of the utility model can effectively pass through base board delivery device for base
Plate carries out short distance conveying and processing (technique) conversion, improves production capacity to reduce the equipment waiting time.
Certainly, the utility model can also have other various embodiments, without departing substantially from the spirit of the present invention and its essence
In the case of, those skilled in the art work as can make various corresponding changes and modifications, but these according to the utility model
Corresponding changes and modifications all should belong to the protection scope of the utility model the attached claims.
Claims (6)
1. it is a kind of transmit semiconductor substrate work station, feature in, comprising:
One warehousing management device allows to input, exports and store multiple substrate feeders, and can carry multiple substrate of storage
Feeder；
One base board delivery device is located in the warehousing management device, and to carry the multiple of multiple substrate feeder storage
Substrate a to Working position and one reprints position, the corresponding process equipment of the Working position；And
One reprints platform, and the substrate of base board delivery device conveying is accepted in the reprinting position in position.
2. the work station of transmission semiconductor substrate according to claim 1, which is characterized in that the base board delivery device includes
One platform body, multiple plummers and a board carrying unit, multiple plummer connect the platform body, and to accept this
Multiple substrate feeder that warehousing management device moves, the board carrying unit can be movably attached the platform body,
And the substrate to convey multiple substrate feeder storage on multiple plummer, the board carrying unit convey the substrate
To the reprinting platform.
3. the work station of transmission semiconductor substrate according to claim 2, which is characterized in that the board carrying unit should
Substrate is delivered to a process equipment.
4. the work station of transmission semiconductor substrate according to claim 2 or 3, which is characterized in that the board carrying unit
It is fixedly connected with the platform body including a track and the mobile clamping jaw of a multiaxis, the track, the mobile clamping jaw of the multiaxis connects the track,
And can be moved along the track, the mobile clamping jaw of the multiaxis is to carry the substrate.
5. the work station of transmission semiconductor substrate according to claim 2, which is characterized in that multiple plummer is to hold
Connect and open multiple substrate feeder.
6. the work station of transmission semiconductor substrate according to claim 2, which is characterized in that the warehousing management device includes
Multiple storage locations and a handling unit, multiple storage location store multiple substrate feeder, which carries quilt
Multiple substrate feeder of storage is to multiple plummer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821204817.0U CN208637397U (en) | 2018-07-27 | 2018-07-27 | Transmit the work station of semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821204817.0U CN208637397U (en) | 2018-07-27 | 2018-07-27 | Transmit the work station of semiconductor substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208637397U true CN208637397U (en) | 2019-03-22 |
Family
ID=65739603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821204817.0U Expired - Fee Related CN208637397U (en) | 2018-07-27 | 2018-07-27 | Transmit the work station of semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208637397U (en) |
-
2018
- 2018-07-27 CN CN201821204817.0U patent/CN208637397U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190322 Termination date: 20210727 |