CN208637383U - A kind of silicon wafer cleans film threading equipment automatically - Google Patents
A kind of silicon wafer cleans film threading equipment automatically Download PDFInfo
- Publication number
- CN208637383U CN208637383U CN201820635661.5U CN201820635661U CN208637383U CN 208637383 U CN208637383 U CN 208637383U CN 201820635661 U CN201820635661 U CN 201820635661U CN 208637383 U CN208637383 U CN 208637383U
- Authority
- CN
- China
- Prior art keywords
- column
- inserted sheet
- rotating wheel
- splicing
- turn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a kind of silicon wafers to clean film threading equipment, including lower hopper, rinse bath, splicing washer, turn-over washer, transhipment inserted sheet device, inserted sheet frame automatically.The utility model can be such that the inserted sheet of silicon wafer carries out automatically, reduce artificial participation, improve inserted sheet quality and efficiency, while can also carry out turn-over cleaning to silicon wafer, guarantee neat and tidy, facilitate subsequent production.
Description
[technical field]
The utility model relates to the technical field of silicon wafer production, the technology necks of especially a kind of automatic film threading equipment of silicon wafer
Domain.
[background technique]
Since 21 century, global Energy Consumption sharply rises, and traditional fossil energy is increasingly depleted, and energy problem and environment are asked
Topic is increasingly becoming two big Important Problems of global concern.Under the pressure of the pressure of sustainable development, each major country is one after another by solar energy
Photovoltaic industry is included in the emphasis of renewable energy development and utilization.Silicon wafer is that silicon rod is formed by cutting, degumming, after the completion of degumming
It needs to carry out fragment to silicon wafer, then fragment is inserted into the gaily decorated basket, then carry out the techniques such as subsequent cleaning again；The prior art
In, silicon wafer is subjected to fragment and the step being inserted into the gaily decorated basket and is realized essentially by artificial, therefore operator is operating
During efficiency it is lower, and operator is easy to come to harm, and silicon wafer is easy to be damaged, while silicon wafer is easy by dirt
Dye.
[utility model content]
The purpose of this utility model is exactly to solve the problems of the prior art, proposes that a kind of silicon wafer cleans inserted sheet automatically and sets
It is standby, the inserted sheet of silicon wafer can be made to carry out automatically, reduce artificial participation, improve inserted sheet quality and efficiency, while can also be right
Silicon wafer carries out turn-over cleaning, guarantees neat and tidy, facilitates subsequent production.
To achieve the above object, film threading equipment is cleaned automatically the utility model proposes a kind of silicon wafer, including lower hopper, clear
Washing trough, splicing washer, turn-over washer, transhipment inserted sheet device, inserted sheet frame, the lower hopper are arranged right above rinse bath, institute
It states and is provided with splicing washer immediately below lower hopper, the splicing washer includes the first rotating wheel, splicing column, the first suction
Leather cup, the first vacuum valve, first material inductor, first rotating wheel is arranged in rinse bath, in first rotating wheel
Several splicing columns are uniformly surrounded with, the outermost end of the splicing column is provided with the first vacuum valve, first vacuum valve top
End is equipped with the first suction leather cup, and the bottom of the first suction leather cup is provided with first material inductor, the turn-over cleaning
Device is arranged in the left side of splicing washer, and the turn-over washer includes the second rotating wheel, turn-over column, the second suction leather cup, the
Two vacuum valves, second material inductor, second rotating wheel are arranged in rinse bath, in second rotating wheel uniform ring around
Several turn-over columns are provided with, the outermost end of the turn-over column is provided with the second vacuum valve, and second vacuum valve top is equipped with
Second suction leather cup, the bottom of the second suction leather cup are provided with second material inductor, and the transhipment inserted sheet device setting exists
The left side of turn-over washer, the transhipment inserted sheet device include lifting column, lifting slider, indexable lantern ring, flexible inserted sheet column, third suction
Expect that leather cup, third vacuum valve, third material inductor, the lifting column are vertically arranged in rinse bath, the lifting slider set
Be located on lifting column, the flexible inserted sheet column is mounted on lifting slider by indexable lantern ring, the flexible inserted sheet column it is outermost
End is provided with third vacuum valve, and third vacuum valve top is equipped with third suction leather cup, the bottom of the third suction leather cup
Portion is provided with third material inductor, and the inserted sheet frame is arranged in the left side of transhipment inserted sheet device, the inserted sheet frame include inserted sheet platform,
Inserted sheet basket, the inserted sheet platform are arranged on the left of rinse bath, are equipped with inserted sheet basket at the top of the inserted sheet platform.
Preferably, the quantity of the splicing column at least eight, the outermost end of splicing column is provided with stabilizing ring and mutually interconnects
It connects, the multiple that the quantity of the splicing column is four, the splicing column is radially arranged in the first rotating wheel, first rotating wheel
Swirling helical paddle is provided between adjacent splicing column.
Preferably, the splicing column is identical with the quantity of turn-over column, the first rotating wheel and the second rotating wheel center of circle are located at
In same level, first rotating wheel and the second rotating wheel are rotated in a clockwise direction, the splicing column of the first rotating wheel
It is in left and right one-to-one relationship with the turn-over column in the second rotating wheel, the bottom end of the first suction leather cup is provided with flexible buffering
Pipe.
Preferably, the turn-over column is radially arranged in the second rotating wheel, second rotating wheel is in adjacent turn-over
Swirling helical paddle is provided between column.
Preferably, the flexible inserted sheet column is horizontal gas cylinder arm, the indexing lantern ring can 180 degree of rotations in the horizontal direction
Turn, homogeneous vertical is provided with the inserted slot of multiple opening upwards in the inserted sheet basket, and the inserted sheet trench bottom is provided with the 4th object
Expect inductor, the top of the inserted sheet basket is higher than the overhead height of rinse bath.
The utility model has the beneficial effects that the utility model pass through lower hopper, rinse bath, splicing washer, turn-over is clear
It washes device, transhipment inserted sheet device, inserted sheet frame to be combined together, the inserted sheet of silicon wafer can be made to carry out automatically by assay optimization, reduced
It is artificial to participate in, inserted sheet quality and efficiency are improved, while turn-over cleaning can also be carried out to silicon wafer, guarantees neat and tidy, it is convenient
Subsequent production.
The feature and advantage of the utility model will be described in detail by embodiment combination attached drawing.
[Detailed description of the invention]
Fig. 1 is the structural schematic diagram that a kind of silicon wafer of the utility model cleans film threading equipment automatically.
In figure: 1- lower hopper, 2- rinse bath, 3- splicing washer, 4- turn-over washer, 5- transport inserted sheet device, 6- inserted sheet
Frame, the first rotating wheel of 7-, 8- splicing column, the first suction of 9- leather cup, the first vacuum valve of 10-, 11- first material inductor, 12-
Turn-over column, 13- lifting column, 14- lifting slider, 15- indexing lantern ring, 16- stretch inserted sheet column, 17- inserted sheet platform, 18- inserted sheet basket,
19- stabilizing ring, 20- swirling helical paddle, 21- inserted slot, 22- flexible separator tube, the second rotating wheel of 23-, 24- the second suction skin
Bowl, the second vacuum valve of 25-, 26- second material inductor, 27- third suction leather cup, 28- third vacuum valve, 29- third material
Inductor, 30- 4 materials inductor.
[specific embodiment]
Refering to fig. 1, a kind of silicon wafer of the utility model cleans film threading equipment, including lower hopper 1, rinse bath 2, splicing automatically
Washer 3, turn-over washer 4, transhipment inserted sheet device 5, inserted sheet frame 6, the setting of lower hopper 1 is right above rinse bath 2, under described
The underface of hopper 1 is provided with splicing washer 3, and the splicing washer 3 includes the first rotating wheel 7, the suction of splicing column 8, first
Expect leather cup 9, the first vacuum valve 10, first material inductor 11, first rotating wheel 7 is arranged in rinse bath 2, and described first
Several splicing columns 8 are uniformly surrounded in rotating wheel 7, the outermost end of the splicing column 8 is provided with the first vacuum valve 10, described
First vacuum valve, 10 top is equipped with the first suction leather cup 9, and the bottom of the first suction leather cup 9 is provided with first material induction
Device 11, the turn-over washer 4 are arranged in the left side of splicing washer 3, the turn-over washer 4 include the second rotating wheel 23,
Turn-over column 12, the second suction leather cup 24, the second vacuum valve 25, second material inductor 26, the setting of the second rotating wheel 23 exist
In rinse bath 2, several turn-over columns 12, the outermost end of the turn-over column 12 are uniformly surrounded in second rotating wheel 23
It is provided with the second vacuum valve 25,25 top of the second vacuum valve is equipped with the second suction leather cup 24, the second suction leather cup
24 bottom is provided with second material inductor 26, and the transhipment inserted sheet device 5 is arranged in the left side of turn-over washer 4, and described turn
Transporting inserted sheet device 5 includes lifting column 13, lifting slider 14, indexable lantern ring 15, flexible inserted sheet column 16, third suction leather cup 27, third
Vacuum valve 28, third material inductor 29, the lifting column 13 are vertically arranged in rinse bath 2, and the lifting slider 14 is arranged
On lifting column 13, the flexible inserted sheet column 16 passes through indexable lantern ring 15 and is mounted on lifting slider 14, the flexible inserted sheet column
16 outermost end is provided with third vacuum valve 28, and 23 top of third vacuum valve is equipped with third suction leather cup 27, and described
The bottom of three suction leather cups 27 is provided with third material inductor 29, and the left side of transhipment inserted sheet device 5 is arranged in the inserted sheet frame 6,
The inserted sheet frame 6 includes inserted sheet platform 17, inserted sheet basket 18, and the setting of inserted sheet platform 17 is in 2 left side of rinse bath, the inserted sheet platform 17
Top is equipped with inserted sheet basket 18, and the quantity of the splicing column 8 at least eight, the outermost end of splicing column 8 is provided with stabilizing ring 19
It is connected with each other, the multiple that the quantity of the splicing column 8 is four, the splicing column 8 is radially arranged in the first rotating wheel 7, described
First rotating wheel 7 is provided with swirling helical paddle 20, the quantity of the splicing column 8 and turn-over column 12 between adjacent splicing column 8
Identical, the center of circle of first rotating wheel 7 and the second rotating wheel 23 is located in same level, first rotating wheel 7 and
Two rotating wheels 23 are rotated in a clockwise direction, the turn-over column 12 on splicing column 8 and the second rotating wheel 23 in the first rotating wheel 7
In left and right one-to-one relationship, the bottom end of the first suction leather cup 9 is provided with flexible separator tube 22, and the turn-over column 12 is radial
It is arranged in the second rotating wheel 23, second rotating wheel 23 is provided with swirling helical paddle 20 between adjacent turn-over column 12,
The flexible inserted sheet column 16 is horizontal gas cylinder arm, and the indexing lantern ring 15 180 degree can rotate in the horizontal direction, the inserted sheet basket 18
Interior homogeneous vertical is provided with the inserted slot 21 of multiple opening upwards, and 21 bottom of inserted slot is provided with 4 materials inductor
30, the top of the inserted sheet basket 18 is higher than the overhead height of rinse bath 2.
The utility model by by lower hopper 1, rinse bath 2, splicing washer 3, turn-over washer 4, transhipment inserted sheet device 5,
Inserted sheet frame 6 is combined together, and the inserted sheet of silicon wafer can be made to carry out automatically by assay optimization, be reduced artificial participation, improve
Inserted sheet quality and efficiency, while turn-over cleaning can also be carried out to silicon wafer, guarantee neat and tidy, facilitates subsequent production.
Above-described embodiment is the explanation to the utility model, is not the restriction to the utility model, and any pair of sheet is practical new
Scheme after type simple transformation belongs to the protection scope of the utility model.
Claims (5)
1. a kind of silicon wafer cleans film threading equipment automatically, it is characterised in that: including lower hopper (1), rinse bath (2), splicing washer
(3), turn-over washer (4), transhipment inserted sheet device (5), inserted sheet frame (6), the lower hopper (1) are arranged right above rinse bath (2),
Be provided with splicing washer (3) immediately below the lower hopper (1), the splicing washer (3) include the first rotating wheel (7),
Splicing column (8), the first suction leather cup (9), the first vacuum valve (10), first material inductor (11), first rotating wheel (7)
Setting is uniformly surrounded with several splicing columns (8), the splicing column in rinse bath (2) on first rotating wheel (7)
(8) outermost end is provided with the first vacuum valve (10), and the first vacuum valve (10) top is equipped with the first suction leather cup (9),
The bottom of the first suction leather cup (9) is provided with first material inductor (11), and the turn-over washer (4) is arranged in splicing
The left side of washer (3), the turn-over washer (4) include the second rotating wheel (23), turn-over column (12), the second suction leather cup
(24), the second vacuum valve (25), second material inductor (26), the second rotating wheel (23) setting is in rinse bath (2), institute
It states and is uniformly surrounded with several turn-over columns (12) on the second rotating wheel (23), the outermost end of the turn-over column (12) is provided with
Two vacuum valves (25), the second vacuum valve (25) top are equipped with the second suction leather cup (24), the second suction leather cup
(24) bottom is provided with second material inductor (26), a left side of transhipment inserted sheet device (5) setting in turn-over washer (4)
Side, the transhipment inserted sheet device (5) include lifting column (13), lifting slider (14), indexable lantern ring (15), flexible inserted sheet column (16),
Third suction leather cup (27), third vacuum valve (28), third material inductor (29), the lifting column (13) are vertically arranged in clearly
In washing trough (2), the lifting slider (14) is set on lifting column (13), and the flexible inserted sheet column (16) passes through indexable lantern ring
(15) it is mounted on lifting slider (14), the outermost end of the flexible inserted sheet column (16) is provided with third vacuum valve (28), described
Third vacuum valve (28) top is equipped with third suction leather cup (27), and the bottom of the third suction leather cup (27) is provided with third
Material inductor (29), in the left side of transhipment inserted sheet device (5), the inserted sheet frame (6) includes inserted sheet platform for inserted sheet frame (6) setting
(17), inserted sheet basket (18), inserted sheet platform (17) setting are equipped with slotting on the left of rinse bath (2) at the top of the inserted sheet platform (17)
Piece basket (18).
2. a kind of silicon wafer as described in claim 1 cleans film threading equipment automatically, it is characterised in that: the number of the splicing column (8)
Amount at least eight, the outermost end of splicing column (8) are provided with stabilizing ring (19) interconnection, and the quantity of the splicing column (8) is
Four multiple, the splicing column (8) are radially arranged on the first rotating wheel (7), and first rotating wheel (7) is in adjacent splicing
Swirling helical paddle (20) are provided between column (8).
3. a kind of silicon wafer as described in claim 1 cleans film threading equipment automatically, it is characterised in that: the splicing column (8) and turn over
The quantity of face column (12) is identical, and the center of circle of first rotating wheel (7) and the second rotating wheel (23) is located in same level, institute
It states the first rotating wheel (7) and the second rotating wheel (23) is rotated in a clockwise direction, the splicing column (8) in the first rotating wheel (7)
It is in left and right one-to-one relationship with the turn-over column (12) on the second rotating wheel (23), the bottom end of the first suction leather cup (9) is set
It is equipped with flexible separator tube (22).
4. a kind of silicon wafer as described in claim 1 cleans film threading equipment automatically, it is characterised in that: the turn-over column (12) is radial
It is arranged on the second rotating wheel (23), second rotating wheel (23) is provided with swirling helical between adjacent turn-over column (12)
Paddle (20).
5. a kind of silicon wafer as described in claim 1 cleans film threading equipment automatically, it is characterised in that: the flexible inserted sheet column (16)
For horizontal gas cylinder arm, the indexing lantern ring (15) 180 degree can rotate in the horizontal direction, and the interior homogeneous vertical of the inserted sheet basket (18) is set
It is equipped with the inserted slot (21) of multiple opening upwards, inserted slot (21) bottom is provided with 4 materials inductor (30), described
The top of inserted sheet basket (18) is higher than the overhead height of rinse bath (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820635661.5U CN208637383U (en) | 2018-04-28 | 2018-04-28 | A kind of silicon wafer cleans film threading equipment automatically |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820635661.5U CN208637383U (en) | 2018-04-28 | 2018-04-28 | A kind of silicon wafer cleans film threading equipment automatically |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208637383U true CN208637383U (en) | 2019-03-22 |
Family
ID=65732202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820635661.5U Active CN208637383U (en) | 2018-04-28 | 2018-04-28 | A kind of silicon wafer cleans film threading equipment automatically |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208637383U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112570365A (en) * | 2021-03-01 | 2021-03-30 | 常州江苏大学工程技术研究院 | Intelligent automatic silicon wafer cleaning system |
-
2018
- 2018-04-28 CN CN201820635661.5U patent/CN208637383U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112570365A (en) * | 2021-03-01 | 2021-03-30 | 常州江苏大学工程技术研究院 | Intelligent automatic silicon wafer cleaning system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206435531U (en) | A kind of repetend ability of swimming solar silicon wafers prerinse equipment | |
| CN214184472U (en) | Beverage bottle cleaning device for beverage production | |
| CN208637383U (en) | A kind of silicon wafer cleans film threading equipment automatically | |
| CN206184878U (en) | Beverage bottle self - cleaning device | |
| CN206296288U (en) | Washout mechanism is used in a kind of bucket outer barrel cleaning | |
| CN108389816A (en) | A kind of silicon chip cleans film threading equipment automatically | |
| CN206083332U (en) | Dairy products workshop bottle cleaning machine washing unit | |
| CN208450056U (en) | A kind of pharmacy station-service medicine-washing machine | |
| CN206384816U (en) | A kind of beverage bottle cleans bulking system automatically | |
| CN109174873A (en) | A kind of two-tube dislocation lift can handstand inner-outer circulation cleaning equipment | |
| CN204620452U (en) | The not breakable washing facility of tableware | |
| CN209452395U (en) | A kind of soft capsule cleaner | |
| CN209205897U (en) | Gallium arsenide wafer film magazine cleaning device | |
| CN208450156U (en) | A kind of body for dairy produce production line goes powder unit | |
| CN207170399U (en) | A kind of copper scrap iron removaling dedusting device | |
| CN109174875A (en) | A kind of two-tube lift can handstand Rapid Circulation cleaning device with pressure head | |
| CN206676788U (en) | A kind of abrasive disk type Soybean washing machine | |
| CN219923899U (en) | Circulation type photovoltaic semiconductor cleaning device | |
| CN206076206U (en) | A kind of silicon chip cleaning device | |
| CN210697563U (en) | Household bowl and basin cleaner | |
| CN205701763U (en) | A kind of high cleanliness is from rinsing cleaning case | |
| CN204620449U (en) | Warewashing equipment | |
| CN205831019U (en) | A kind of cartridge type blue berry cleans device | |
| CN209318278U (en) | Slot device is washed with water in a kind of automatic trimming machine | |
| CN208909956U (en) | A kind of draining vegetable dish of efficient draining |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |