CN208636211U - A kind of fibre optical sensor and its sensor-based system based on nanogold hole array - Google Patents
A kind of fibre optical sensor and its sensor-based system based on nanogold hole array Download PDFInfo
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- CN208636211U CN208636211U CN201821200722.1U CN201821200722U CN208636211U CN 208636211 U CN208636211 U CN 208636211U CN 201821200722 U CN201821200722 U CN 201821200722U CN 208636211 U CN208636211 U CN 208636211U
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- optical fiber
- nanogold
- transition zone
- hole array
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Abstract
The utility model provides a kind of fibre optical sensor and its sensor-based system based on nanogold hole array, which is characterized in that the fibre optical sensor includes: optical fiber ontology, and the optical fiber ontology includes two free ends, the first optical fiber free end and the second optical fiber free end；Transition zone, the transition zone is set to the first optical fiber free end of the optical fiber ontology, and is fixedly connected with first optical fiber free end；And nano metal array, the nano metal array is uniformly distributed on the transition zone, and is fixedly connected with the transition zone.The utility model is by introducing the transition zone in the optical fiber ontology, under the premise of not influencing sensor self character, so that the sensor realizes batch machining, in addition nanogold hole array is set on the transition zone, using the local surface plasma resonance characteristic of nanogold hole array on the PDMS layer, the refractive index of fiber end face can be accurately measured by the spectral peak offset of spectrum.
Description
Technical field
The utility model relates to sensor technical fields, and in particular to a kind of Fibre Optical Sensor based on nanogold hole array
Device.
Background technique
Biochemical sensitive technology be widely applied to basis statement science, medicine, admire the beauty of flowers, the fields such as environment and video detection,
Traditional biosensor technique is difficult to realize the real-time online detection of bioanalysis interaction, such as x-ray photoelectron spectroscopy
(XPS) write electron spectrum (AES) etc., expensive, equipment is huge, and style condition is harsh (high vacuum), in addition it is some often
With immunoassay techniques, such as fluorescence immunoassay, label is generally required, and test process is complicated, the testing time is longer.With
The development of measuring technology, more stringent requirements are proposed for precision and diversity of the people to detection.
What is be recently introduced uses in fibre optical sensor, needs to carry out micro-nano technology in fiber end face, although optical fiber and micro-nano
The combination of processing technology has very important significance, but its technical realization is also faced with certain challenge.Optical fiber
Structure determines that its end face is the unique entrance of light, therefore also becomes the preferred platform of micro-nano technology.However fiber end face
The technical difficulty for the micro-nano technology that narrow space greatly improves.
Utility model content
In view of this, the present invention provides a kind of fibre optical sensor and its sensor-based system based on nanogold hole array,
By processing nanogold hole array in fiber end face, using surface plasma resonance characteristic, the detection to solution to be measured is realized, and
And by introducing a transition zone, the batch machining of fibre optical sensor may be implemented.
The one side of the utility model provides a kind of fibre optical sensor based on nanogold hole array, which is characterized in that institute
Stating fibre optical sensor includes: optical fiber ontology, and the optical fiber ontology includes two free ends, the first optical fiber free end and the second optical fiber
Free end；
Transition zone, the transition zone are set to the first optical fiber free end of the optical fiber ontology, and with first light
Fine free end is fixedly connected；And
Metallic film, the metallic film are set on the transition zone, and are fixedly connected with the transition zone, described
Multiple nano-pores are evenly distributed on metallic film.
Preferably, the transition zone is PDMS layer.
Preferably, the PDMS layer is glued by the first optical fiber free end of plasma treatment and the optical fiber ontology
Knot.
Preferably, the metallic film is one layer of gold thin film, is evenly distributed with multiple nano-pores in the gold thin film, is formed
Nanogold hole array.
The another aspect of the utility model provides a kind of optical fiber sensing system based on nanogold hole array, and feature exists
It include issuing incident light wideband light source, fiber optic splitter, into quilt in: the optical fiber sensing system based on nanogold hole array
The spectrometer of the fibre optical sensor and detection resonant wavelength based on nanogold hole array in analytical solution；
The incident light wideband light source is connect with the first input end of the fiber optic splitter, the spectrometer and the light
Second input terminal of fine beam splitter connects, and the fibre optical sensor is connect with the output end of the fiber optic splitter；
The fibre optical sensor includes optical fiber ontology, and the optical fiber ontology includes two free ends, the first optical fiber free end
With the second optical fiber free end；
Transition zone, the transition zone are set to the first optical fiber free end of the optical fiber ontology, and with first light
Fine free end is fixedly connected；And
Metallic film, the metallic film are set on the transition zone, and are fixedly connected with the transition zone, described
Multiple nano-pores are evenly distributed on metallic film.
The utility model has the advantages and positive effects of: the utility model by the optical fiber ontology introduce described in
Transition zone, under the premise of not influencing sensor self character, so that the sensor realizes batch machining, in addition described
Nanogold hole array is set on transition zone, and the local surface plasma resonance using nanogold hole array on the PDMS layer is special
Property, the refractive index of fiber end face can be accurately measured by the spectral peak offset of spectrum.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the fibre optical sensor based on nanogold hole array of the utility model；
Fig. 2 is the fibre optical sensor process schematic diagram based on nanogold hole array of the utility model；
Fig. 3 is the structural schematic diagram of the optical fiber sensing system based on nanogold hole array of the utility model；
Fig. 4 is that the structure that the fibre optical sensor based on nanogold hole array of the utility model immerses in solution to be analyzed is shown
It is intended to.
Specific embodiment
In order to better understand the utility model, the utility model is carried out into one with attached drawing combined with specific embodiments below
The description of step.
Referring to Fig. 1, the utility model provides a kind of fibre optical sensor based on nanogold hole array, which is characterized in that
The fibre optical sensor 10 includes: optical fiber ontology 11, transition zone 12, metallic film 13 and is formed on the metallic film 13
Nanogold hole array 14.
The optical fiber ontology 11 includes two free ends, the first optical fiber free end 111 and the second optical fiber free end 112；Institute
The first optical fiber free end 111 for stating optical fiber ontology 11 is formed with transition zone 12, the separate optical fiber ontology on the transition zone 12
Metallic film 13, the first light of the transition zone 12 and the optical fiber ontology 11 are formed on 11 the first optical fiber free end 111
Fine free end 111 is fixedly connected, one end of the first optical fiber free end 111 on the transition zone 12 far from the optical fiber ontology 11
It is fixedly connected with the metallic film 13, forms nanogold hole array 14 on the metallic film 13.
In one embodiment of the utility model, the transition zone 12 is that (Polydimethylsioxane gathers PDMS
Dimethyl siloxane) layer, the nano metal array is nanogold hole array.
PDMS is a kind of siloxy polymer, and chemical property is close with glass, with most photoresists, developer solution, remove photoresist
Liquid, mordant are mutually compatible with, and therefore, in existing processing technology, a variety of micro-nano structures can be completed in PDMS substrate
Processing.PDMS is a kind of the macromolecule organic silicon compound, has optical clear, optical characteristics, low-surface-energy, highly-breathable and very
Good elasticity.PDMS is a kind of thick liquid, referred to as silicone oil in liquid；In solid-state Shi Zewei inertia silica gel, have it is nontoxic,
Hydrophobicity, the feature of transparent elastic.
PDMS layer is introduced in the utility model, since it is similar to the chemical property of glass, has no effect on optical fiber ontology 11
The transmission characteristic of itself, and by introducing the PDMS layer, so that the micro-nano knot that the narrow end face of script fiber end face carries out
The processing of structure is transferred on the PDMS layer, then, then will be cut to the PDMS layer.
It is specifically shown in attached drawing 2 and Fig. 3, micro-nano structure is directly processed on the end face of the optical fiber ontology 11, is typically due to institute
The narrow end face of optical fiber ontology 11 is stated, so that process is restricted, simple optical fiber ontology 11 can only be individually carried out and be added
Work.
And in the present invention, introduce the transition zone 12, it usually needs form the transition zone in a substrate 20
12, it will usually after evenly mixing with certain proportion by host agent and curing agent, recycling, which vacuumizes, is discharged the air in mixed liquor,
Finally baking certain time can be such that PDMS solidifies at a certain temperature.
Specifically, the PDMS layer can select 184Sylgard silicon rubber in one embodiment of the utility model,
Its base fluid and solidify liquid are mixed and are sufficiently stirred with the ratio of 10:1 at room temperature, mixed liquor is then removed in vacuum environment
Bubble in body；Then mixed liquor is spun on a substrate surface, the substrate can be silicon substrate, and the silicon substrate can be adopted
It is modified with silane gas, makes its surface that there is non-stick nature, spin coating uses 4000RPM revolving speed, 60s spin-coating time, spin coating
PDMS thickness afterwards is about 20um；Then the silicon substrate for being coated with PDMS is solidified, solidification temperature is 120 DEG C, curing time
For 5min.
Then the processing of micro-nano structure is carried out far from one end end face of the substrate 20 in the PDMS layer, and described
The processing that micro-nano structure is carried out on PDMS layer already belongs to well known content in this field, and details are not described herein.
In the present invention, nanogold hole array is carried out far from one end end face of the substrate 20 in the PDMS layer
Processing, then removes the substrate PDMS layer that will be machined with nanogold hole array from 20 surface of substrate, then by the PDMS
One end that layer does not form the nanogold hole array is combined with fiber optic bundle.
Specifically, then the PDMS layer will not be formed to one end and the optical fiber ontology 11 of the nanogold hole array
The surface of first free end 111 is handled in oxygen plasma, processing power 100W, and the processing time is 30s, this time
111 surface of the first free end of fine ontology 11 and PDMS are modified by OH base, by the plane of the first free end 111 of optical fiber ontology 11
The surface PDMS is pressed on, then heating is bonded, and the first free end 111 and PDMS of optical fiber ontology 11 is formed permanently after bonding
Covalent bond.
Finally, carrying out cutting processing to the PDMS layer and the nanogold hole array being formed on the PDMS layer, most
End form at the utility model the fibre optical sensor based on nanogold hole array.
The utility model is by introducing the transition zone 12, so that the finished surface for forming the nanogold hole array is unlimited
The expansion of system, then being bonded for batch is carried out with the fiber optic bundle, so that the sensor of the utility model is able to carry out on a large scale
Batch production.
Further, the sensor of the utility model is provided with nanogold hole array on the surface of the transition zone 12, when
When illumination is incident upon the interface of the transition zone 12 and nanogold gold disk array, it may occur that surface plasma body resonant vibration (Surface
Plasmon Resonance, SPR).
Surface plasma body resonant vibration (Surface Plasmon Resonance, SPR) is light at glass and metal interface
The free electron that the evanescent wave generated when being totally reflected can cause metal surface generates surface plasma, works as surface plasma
With the frequency of evanescent wave it is identical with wave number when, will generate surface plasma body resonant vibration (SPR), resonant wavelength is main and metal
The parameters such as the dielectric constant of film, the concentration of solution to be measured, refractive index are closely related, therefore are only changing solution to be measured and other are joined
Under conditions of number is constant, there are corresponding relationships between the resonant wavelength of optical fiber SPR sensor and solution refractive index to be measured.SPR skill
Art have determinand without purifying, sample without label, the dynamic process of real-time monitoring reaction, high sensitivity, background interference it is small,
The advantages that fast response time, short detection time, has obtained extensive attention and rapid development at present.
In the present invention, the nanogold hole array on PDMS layer has local surface plasma resonance characteristic, can root
The wavelength for absorbing and reflecting according to the refraction index changing on its surface.It is when fibre optical sensor works, wide-spectrum white-light is not micro- from optical fiber
One end of micro-nano structure is coupled into fibre optical sensor, and in the spectrum of the same end real time monitoring reflected light, passes through the spectral peak of spectrum
Offset can accurately measure the refractive index of fiber end face.
The utility model is not influencing sensor self character by introducing the transition zone 12 in the optical fiber ontology 11
Under the premise of, so that the sensor realizes batch machining, in addition nanogold hole array, benefit are set on the transition zone 12
It, can be accurate by the spectral peak offset of spectrum with the local surface plasma resonance characteristic of nanogold hole array on the PDMS layer
Measure the refractive index of fiber end face.
Referring to Fig. 3, the another aspect of the utility model provides a kind of optical fiber sensing system based on nanogold hole array,
It is characterized by: the optical fiber sensing system based on nanogold hole array includes issuing incident light wideband light source 30, optical fiber point
Beam device 40 into the fibre optical sensor 10 in analyzed solution based on nanogold hole array and detects the wave spectrum of resonant wavelength
Instrument 50；The incident light wideband light source 30 is connect with the first input end 401 of the fiber optic splitter 40, the spectrometer 50 with
Second input terminal 402 of the fiber optic splitter 40 connects, the output of the fibre optical sensor 10 and the fiber optic splitter 40
403 connection of end；The fibre optical sensor 10 includes: optical fiber ontology 11, transition zone 12 and nano metal array 13.The optical fiber
Ontology 11 includes two free ends, the first optical fiber free end 111 and the second optical fiber free end 112；The of the optical fiber ontology 11
One optical fiber free end 111 is formed with transition zone 12, and the first optical fiber far from the optical fiber ontology 11 is free on the transition zone 12
Nano metal array 13 is formed on end 111, the first optical fiber free end 111 of the transition zone 12 and the optical fiber ontology 11 is solid
It is fixed to connect, one end of the first optical fiber free end 111 on the transition zone 12 far from the optical fiber ontology 11 and the nanogold
Belong to array 13 to be fixedly connected.
Further, the fiber optic splitter 40 is 2 × 1 fiber optic splitters.
Further, " connection " of the utility model refers to the connection for optical path, such as the incident light broadband
Light source 30 is connect with the first input end 401 of the fiber optic splitter 40, that is, is interpreted as the incident light wideband light source 30 and is issued
Optical signal be input to the first input end 401 of the fiber optic splitter 40, be elsewhere also all to understand.
In the utility model use process, the first free end 111 of the light sensor 10 is formed with transition zone
12 and one end of nanogold hole array stretch in solution to be detected, the optical signal that the incident light wideband light source 30 issues is defeated
Enter the first input end 401 to the fiber optic splitter 40, and through the fiber optic splitter 40, passes through the optical fiber ontology 11
The second light free end 112 enter inside the optical fiber ontology 11, by the transmission of the optical fiber ontology 11, expose to described
Then the contact surface of transition zone 12 and the nanogold hole array observes it in the second free end 112 of the optical fiber ontology 11
The spectrum of reflected light.
The light sensor 10 enters in analyzed solution, and real-time detection is analyzed the variation of solution refractive index, to divide
Analyse the analyzed solution, stability and favorable reproducibility.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
Finally, it should be noted that obviously, above-described embodiment is merely examples for clearly illustrating the present invention,
And it does not limit the embodiments.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.And thus
Changes and variations that derived from still in the protection scope of the utility model among.
Claims (5)
1. a kind of fibre optical sensor based on nanogold hole array, which is characterized in that the fibre optical sensor includes: optical fiber sheet
Body, the optical fiber ontology include two free ends, the first optical fiber free end and the second optical fiber free end；
Transition zone, the transition zone are set to the first optical fiber free end of the optical fiber ontology, and certainly with first optical fiber
It is fixedly connected by end；And
Metallic film, the metallic film are set on the transition zone, and are fixedly connected with the transition zone, the metal
Multiple nano-pores are evenly distributed on film.
2. the fibre optical sensor according to claim 1 based on nanogold hole array, it is characterised in that: the transition zone is
PDMS layer.
3. the fibre optical sensor according to claim 2 based on nanogold hole array, it is characterised in that: the PDMS layer is logical
The first optical fiber free end for crossing plasma treatment and the optical fiber ontology is bonded.
4. the fibre optical sensor according to claim 1 based on nanogold hole array, it is characterised in that: the metallic film
For one layer of gold thin film, it is evenly distributed with multiple nano-pores in the gold thin film, forms nanogold hole array.
5. a kind of optical fiber sensing system based on nanogold hole array, it is characterised in that: the light based on nanogold hole array
Fiber sensor system include issue incident light wideband light source, fiber optic splitter, into analyzed solution based on nanogold hole battle array
The fibre optical sensor of column and the spectrometer for detecting resonant wavelength；
The incident light wideband light source is connect with the first input end of the fiber optic splitter, the spectrometer and the optical fiber point
Second input terminal of beam device connects, and the fibre optical sensor is connect with the output end of the fiber optic splitter；
The fibre optical sensor includes optical fiber ontology, and the optical fiber ontology includes two free ends, the first optical fiber free end and the
Two optical fiber free ends；
Transition zone, the transition zone are set to the first optical fiber free end of the optical fiber ontology, and certainly with first optical fiber
It is fixedly connected by end；And
Metallic film, the metallic film are set on the transition zone, and are fixedly connected with the transition zone, the metal
Multiple nano-pores are evenly distributed on film.
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| CN201821200722.1U CN208636211U (en) | 2018-07-27 | 2018-07-27 | A kind of fibre optical sensor and its sensor-based system based on nanogold hole array |
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| CN201821200722.1U CN208636211U (en) | 2018-07-27 | 2018-07-27 | A kind of fibre optical sensor and its sensor-based system based on nanogold hole array |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112014332A (en) * | 2020-09-02 | 2020-12-01 | 广东工业大学 | Surface plasma resonance optical fiber sensor and detection method |
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2018
- 2018-07-27 CN CN201821200722.1U patent/CN208636211U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112014332A (en) * | 2020-09-02 | 2020-12-01 | 广东工业大学 | Surface plasma resonance optical fiber sensor and detection method |
| CN112014332B (en) * | 2020-09-02 | 2022-10-21 | 广东工业大学 | Surface plasma resonance optical fiber sensor and detection method |
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Legal Events
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220906 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 2nd Floor, Building 8, TEDA Service Outsourcing Industrial Park, No. 19 Xinhuan West Road, Economic and Technological Development Zone, Binhai New Area, Tianjin 300000 (Tianjin Binhai Service Outsourcing Industry Co., Ltd. Trusteeship No. 2892) Patentee before: QIANSE (TIANJIN) NEW MATERIAL TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |