CN208623968U - A kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device - Google Patents
A kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device Download PDFInfo
- Publication number
- CN208623968U CN208623968U CN201821123071.0U CN201821123071U CN208623968U CN 208623968 U CN208623968 U CN 208623968U CN 201821123071 U CN201821123071 U CN 201821123071U CN 208623968 U CN208623968 U CN 208623968U
- Authority
- CN
- China
- Prior art keywords
- vacuum chamber
- racetrack
- ion source
- cover
- radio frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229920002449 FKM Polymers 0.000 claims description 10
- 238000000605 extraction Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 239000010453 quartz Substances 0.000 description 9
- 239000012671 ceramic insulating material Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
The utility model discloses a kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source devices, it include exterior vacuum chamber and the radio-frequency ion source cover board being sealingly mounted in exterior vacuum chamber, racetrack cover is sealed and installed in outer internal vacuum chamber, it is antenna vacuum chamber between racetrack cover and exterior vacuum chamber, it is plasma vacuum room inside racetrack cover, Faraday shield cylinder is equipped in plasma vacuum chamber interior, antenna is wrapped in outside racetrack cover, antenna vacuum chamber is connected to plasma vacuum room with pipeline by valve, the bottom of exterior vacuum chamber is fixed on counter flange by lower flange.It is twice that conventional radio frequency ion source draws area that the utility model, which improves about 0.14 square metre of area of plasma extraction using the volume that racetrack structure can largely increase plasma discharge chamber, to realize that single radio frequency ion source is just able to satisfy larger area line and draws demand.
Description
Technical field
The utility model relates to radio-frequency ion source technical fields more particularly to a kind of dual-vacuum chamber racetrack external antenna to penetrate
Frequency ion source device.
Background technique
Ion source is to make neutral atom or molecular ionization, and therefrom draw the device of ion beam current.Radio-frequency ion source passes through
Radio-frequency power is inductively couple in plasma by antenna, according to antenna in the placement location of ion source, is divided into external antenna
Type and built-in antenna type two types.External antenna type radio frequency-ion source structure structure for built-in antenna type is more multiple
It is miscellaneous, but efficiency is higher than built-in antenna type, and the electric discharge starting of external antenna type arc chamber is easier to.But outside most domestic
A day line style radio-frequency ion source is set there are coil exposeds the poor insulativity in atmospheric environment, is difficult to run on higher-wattage.And it deposits
The shortcomings that being easily broken when the insulating cylinder inside and outside differential pressure that quartz or ceramics are made into vacuumizes greatly.Country's external antenna type at present
Radio-frequency ion source is all made of smaller (diameter is less than 0.3 meter) the circular plasma generator of diameter, and line is drawn area and is less than
0.07 square metre, more radio-frequency ion sources, the more matchings of radio-frequency ion source number are needed on the device for needing larger line to draw
It is more difficult with debugging.External antenna type radio-frequency ion source need to be improved to eliminate these disadvantages.
Utility model content
The utility model aim is exactly in order to make up the defect of prior art, to provide a kind of external day of dual-vacuum chamber racetrack
Line radio frequency-ion source device.
The utility model is achieved through the following technical solutions:
A kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device includes exterior vacuum chamber and is sealingly mounted at
Radio-frequency ion source cover board in exterior vacuum chamber is sealed and installed with racetrack cover in outer internal vacuum chamber, racetrack cover and outer
It is antenna vacuum chamber between vacuum chamber, is plasma vacuum room inside racetrack cover, is set in plasma vacuum chamber interior
There is Faraday shield cylinder, antenna is wrapped in outside racetrack cover, by valve and pipeline by antenna vacuum chamber and plasma
The bottom of vacuum chamber, exterior vacuum chamber is fixed on counter flange by lower flange.
The racetrack cover is quartzy cover.
The radio-frequency ion source cover board is to be fixed on outer vacuum by viton seal ring one and M6 hexagon socket head cap screw one
On room.
The racetrack cover is vacuum-packed by real two realization of viton seal ring of upper and lower two end faces.
The lower flange is fixed on counter flange by viton seal ring three and M6 hexagon socket head cap screw two.
Radio-frequency ion source is able to achieve double vacuum structures, and the antenna of radio-frequency ion source may be in vacuum environment, quartzy glass
Glass or ceramic insulating material are inside and outside all in vacuum environment, can largely increase plasma using racetrack structure
Body draws area.
It is real by passing through quartz glass or ceramic insulating material and fluorubber sealing structure in stainless steel exterior vacuum chamber
Existing double vacuum structures.
The antenna of radio-frequency ion source may be in vacuum environment, thus the insulating properties for effectively improving antenna make radio frequency from
Component can be run on higher power.
Inside and outside quartz glass or ceramic insulating material it is small all in inside and outside differential pressure in vacuum environment so that quartz glass or
Person's ceramic insulating material is not allowed easily rupturable.
The volume that racetrack structure can largely increase plasma discharge chamber improves plasma and draws area,
Lead surface having a size of radius 224mm, the racetrack structure of straightway 390mm draw about 0.14 square metre of area be conventional radio frequency from
Component draws twice of area, to realize that single radio frequency ion source is just able to satisfy larger area line and draws demand.
Body supports play the role of using 304 stainless steel structures in entire radio-frequency ion source exterior vacuum chamber.Inner vacuum vessel by
Racetrack quartz cover and the viton seal ring of upper and lower two end faces realize vacuum sealing.By valve by two vacuum chamber (days
Line vacuum room and plasma vacuum room) connection, valve is opened when work, and two vacuum chambers are vacuumized.Due to plasma
It needs to will affect vacuum degree into hydrogen or deuterium in the body vacuum chamber course of work, therefore reaches certain vacuum degree and close later
Valve.It is independent of each other so that antenna vacuum chamber and plasma vacuum room form two independent vacuum environments.Antenna is in true
Improve the insulation performance of antenna in Altitude, while quartz cover both sides are all that vacuum environment pressure difference is almost the same will not be because of pressure difference
The excessive phenomenon for causing quartz cover broken.
The utility model has the advantages that: the utility model radio frequency-ion source antenna is in vacuum environment and improves antenna
Insulation performance, at the same quartz cover both sides be all vacuum environment pressure difference it is almost the same will not because caused by pressure difference is excessive quartz cover it is broken
Phenomenon.Plasma is improved using the volume that racetrack structure can largely increase plasma discharge chamber and draws area
About 0.14 square metre is that conventional radio frequency ion source is drawn twice of area, so that it is larger to realize that single radio frequency ion source is just able to satisfy
Area line draws demand.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the partial enlarged view of Fig. 1.
Specific embodiment
As shown in Figure 1, 2, a kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device, includes exterior vacuum chamber 4
And it is sealingly mounted at the radio-frequency ion source cover board 2 in exterior vacuum chamber 4, racetrack cover is installed in 4 inner sealing of exterior vacuum chamber
Body 6 is antenna vacuum chamber 10 between racetrack cover 6 and exterior vacuum chamber 4, is plasma vacuum room inside racetrack cover 6
11, Faraday shield cylinder 14 is equipped with inside plasma vacuum room 11, antenna 5 is wrapped in outside racetrack cover 6, passes through valve
Antenna vacuum chamber 10 is connected to by door 1 with pipeline with plasma vacuum room 11, and the bottom of exterior vacuum chamber 4 is fixed by lower flange 8
On counter flange 9.
The racetrack cover 6 is quartzy cover.
The radio-frequency ion source cover board 2 is outside being fixed on by viton seal ring 1 and M6 hexagon socket head cap screw 1
On vacuum chamber 4.
The racetrack cover 6 is to realize that vacuum is close by the viton seal ring real 27,12 of upper and lower two end faces
Envelope.
The lower flange 8 is to be fixed to counter flange 9 by viton seal ring 3 15 and M6 hexagon socket head cap screw 2 16
On.
Valve 1 is opened when work to vacuumize antenna vacuum chamber 10 and plasma vacuum room 11, waits a day line vacuum
Valve 1 is closed when reaching the vacuum degree of needs in room 10.Antenna 5 is wrapped on quartz cover 6, since Antenna Operation is in vacuum environment
In, so that the insulating properties for effectively improving antenna runs radio-frequency ion source on higher power.Due to using double true
Hollow structure, it is small all in inside and outside differential pressure in vacuum environment inside and outside quartz cover so that quartz cover do not allow it is easily rupturable.
Claims (5)
1. a kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device, it is characterised in that: include exterior vacuum chamber and
The radio-frequency ion source cover board being sealingly mounted in exterior vacuum chamber is sealed and installed with racetrack cover, runway in outer internal vacuum chamber
It is antenna vacuum chamber between type cover and exterior vacuum chamber, is plasma vacuum room inside racetrack cover, it is true in plasma
Faraday shield cylinder is equipped with inside empty room, antenna is wrapped in outside racetrack cover, by valve and pipeline by antenna vacuum chamber
It is connected to plasma vacuum room, the bottom of exterior vacuum chamber is fixed on counter flange by lower flange.
2. a kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device according to claim 1, it is characterised in that:
The racetrack cover is quartzy cover.
3. a kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device according to claim 1, it is characterised in that:
The radio-frequency ion source cover board is fixed in exterior vacuum chamber by viton seal ring one and M6 hexagon socket head cap screw one.
4. a kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device according to claim 1, it is characterised in that:
The racetrack cover is vacuum-packed by real two realization of viton seal ring of upper and lower two end faces.
5. a kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device according to claim 1, it is characterised in that:
The lower flange is fixed on counter flange by viton seal ring three and M6 hexagon socket head cap screw two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821123071.0U CN208623968U (en) | 2018-07-16 | 2018-07-16 | A kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821123071.0U CN208623968U (en) | 2018-07-16 | 2018-07-16 | A kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208623968U true CN208623968U (en) | 2019-03-19 |
Family
ID=65705706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821123071.0U Expired - Fee Related CN208623968U (en) | 2018-07-16 | 2018-07-16 | A kind of dual-vacuum chamber racetrack external antenna radio frequency-ion source device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208623968U (en) |
-
2018
- 2018-07-16 CN CN201821123071.0U patent/CN208623968U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190319 |